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Optical and EUV Nanolithography XXXVI 2023

作者： Hong, Suk-Koo Choi, Young Joo Kim, Eunseol Je, Sang Hyun Kim, Jun Soo Nam, Jaewoo Park, Su Min Material Development Team Semiconductor R&D Center Samsung Electronics Samsungjeonjaro 1-1 Gyeonggi-do Hwaseong-si Korea Republic of

ISBN: (纸本)9781510660953

Strong challenge on EUV photoresist includes overcoming the stochastic effect caused by the lack of photons. At the different dose range, the relationship of LCdU and dose moves differently. This 'breaking point' in the relationship of LCdU and dose is measured at different pitches with photoresists and masks with different uniformity. Smaller pitch patterning requires more dose, whereas photoresist and mask does not affect the 'breaking point.' Combining these speculations show the limitation of the EUV at the low dose process, which is critical for high volume manufacturing. © 2023 SPIE.

关键词： Photoresists

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Fracture Characterisation Methods and Application of Unconventional Oil and Gas reservoirs in reservoir Numerical Simulation

Fracture Characterisation Methods and Application of Unconve...

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2023 SPE/IATMI Asia Pacific Oil and Gas Conference and Exhibition, APOG 2023

作者： Li, Qiaoyun Wu, Shuhong Cao, Zijian Wang, Baohua Li, Hua Jia, Han RIPED PetroChina China Artificial Intelligence Technology R&D Center for Exploration and Development CNPC China

ISBN: (纸本)9781613999813

It's necessary to solve the problem of fine characterization and efficient simulation of three types of fractures, i.e. natural fractures, artificial fractures and complex fracture network, for the development optimization design and scheme adjustment of unconventional oil and gas reservoirs. This paper describes a set of efficient and practical fracture characterization techniques for reservoir numerical model, which integrates various numerical simulation methods of fractures in different scales, including single-medium equivalent model, LGr model, double-medium model, MINC model, non-structural discrete fracture model and embedded discrete fracture model. For different reservoir types and different fracture dimensions, different models are adopted to depict the spatial distribution and fluid flow characteristics of fracture-matrix, matrix-matrix and fracture-fracture. The application in a shale gas shows that the set of fracture characterization methods can accurately describe the shape, geometric characteristics and spatial position of natural fractures, artificial fractures and fracture network. The methods also can simulate the fluid flow characteristics in multi-scale fracture network efficiently, and accurately predict the productivity of fracture network. Copyright 2023, Society of Petroleum Engineers.

关键词： Natural fractures

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Ongoing Evolution of drAM Scaling via Third dimension -Vertically Stacked drAM

Ongoing Evolution of DRAM Scaling via Third Dimension -Verti...

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2023 IEEE Symposium on VLSI technology and Circuits, VLSI technology and Circuits 2023

作者： Han, J.W. Park, S.H. Jeong, M.Y. Lee, K.S. Kim, K.N. Kim, H.J. Shin, J.C. Park, S.M. Shin, S.H. Park, S.W. Lee, K.S. Lee, J.H. Kim, S.H. Kim, B.C. Jung, M.H. Yoon, I.Y. Kim, H. Jang, S.U. Park, K.J. Kim, Y.K. Kim, I.G. Oh, J.H. Han, S.Y. Kim, B.S. Kuh, B.J. Park, J.M. Dram Technology Development Hwaseong Korea Republic of Next Generation Process Development Samsung R&d Center Hwaseong Korea Republic of

ISBN: (纸本)9784863488069

For the past decades, the density of drAM has been remarkably increased by making access transistors and capacitors smaller in size per unit area. However, shrinking devices far beyond the 10 nm process node increasingly poses process and reliability challenges. As Flash technology made a pivotal and successful innovation via 3d NANd, drAM technology may also adopt vertical stacking memory cells. Vertically stacked drAM (VS-drAM) continues to increase bit density on a die by increasing the number of layers along with reducing the size of the transistor. In this paper, the opportunities and challenges of VS-drAM are discussed. © 2023 JSAP.

关键词： dynamic random access storage

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Effect of cooling scheme and coating of drills on hole quality in drilling of Inconel 718

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Procedia CIrP 2024年 123卷 137-142页

作者： Jinming Zhou Stefan Frejd Kateryna Slipchenko Andrii Hrechuk rachid M’Saoubi Division of Production and Materials Engineering Lund University Lund Sweden Seco Tools AB R&D Material and Technology Development Fagersta Sweden

Challenges in drilling nickel-based superalloys, such as Inconel 718 (IN718), are multifaceted. High requirement of hole surface quality in drilling such alloy must deal with extreme material properties and complex process condition in drilling operation. This paper presents an experimental investigation on the effect of PVd coated solid carbide drills under different internal cooling schemes on hole quality in drilling IN 718 alloy. Three types of solid carbide drills were used in the series of drilling experiments, including PVd coated and uncoated drills, and different design in the number of internal cooling channels, two channels and four channels. The objective of the investigation is to assess the effect of coating and efficiency of internal cooling on surface quality in drilling IN718 alloy. Surface quality on drilled holes in terms of roughness, burr formation, subsurface deformation and strain hardening has also been measured and analyzed on the machined specimen. The roughness and burr size on drilled holes demonstrated little differences among the three types of testing drills. Surface roughness was severely deteriorated by the chip trapped in the hole leaving scratch and smears on the surface. Nevertheless, the scheme of internal cooling channels and PVd coating exhibited noticeable influence on quality of drilled hole surface.

关键词： drill Superalloy Surface quality PVd coating Cooling Burr

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Spherical modification of tungsten powder by particle composite system

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rare Metals 2022年第6期41卷 1972-1976页

作者： Cong-Cong Wang Cheng-Chang Jia Peng Gao Guo-Sheng Gai Yu-Fen Yang School of Materials Science and Engineering University of Science and Technology BeijingBeijing 100083China Powder Technology R&D Group Department of Material Science and EngineeringTsinghua UniversityBeijing 100084China

Owing to contradiction between increasing demand of spherical tungsten powder and limitation of traditional manufacturing technology,a novel preparation method was developed to sphericize the polygonal tungsten powder by means of modification of particle composite *** powder particles were modified by par-ticle composite system,and detailed characterization by scanning electron microscopy(SEM)was *** size distribution and function mechanism were analyzed,and the internal relationship between average diameter and processing time was *** results show that the spherical tungsten powder with an average diameter of 6.41μm is obtained from polyhedral tungsten powder with an average diameter of 7.50μ*** spherical effect could be achieved(sharp edge angles of particles are rounded off and reshaped)when the processing time is over 30 *** relationship between average diameter(d)and pro-cessing time can be described by the exponential decay model,which provides a good interpretation for the process of *** relationship between them can be expressed by the equation d=1.87406exp(-x/8.92718)+*** proposed method could readily enable large-scale production of spherical tungsten powder.

关键词： Tungsten powder Modification Average diameter Powder metallurgy

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development of high contrast EUV photoresist for narrow pitch C/H patterning 41

Development of high contrast EUV photoresist for narrow pitc...

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Advances in Patterning materials and Processes XLI 2024

作者： Moon, Yonghoon do, Sungan Kim, Hana Kwon, Seungchul Park, Hoyoon Kang, Cheol Lee, Jae-Jun Ahn, Chanjae Androsov, dmitry Kim, Minsang Hong, Suk-Koo Material Development Team Semiconductor R&d Center Samsung Electronics Samsungjeonjaro 1-1 Gyeonggi-do Hwaseong-si Korea Republic of Material Research Center Samsung Advanced Institute of Technology Samsung Electronics Samsung-ro 130 Yeongtong-gu Gyeonggi-do Suwon-si Korea Republic of

ISBN: (纸本)9781510672208

The organic non-chemically amplified resist (non-CAr) materials have been developed for fine pitch contact hole patterning process to remove the acid blur of conventional chemically amplified resist (CAr) system, but non-CAr materials usually show lower contrast and sensitivity compared to conventional CAr materials, so additional improvements are needed for practical application. In this study, we developed new platforms of EUV PTd resist materials to overcome these limitations and enable fine pitch C/H patterning. The main target of our study is to reduce acid blur and to maintain chemical contrast compared to conventional CAr system by 1) finding better EUV-active structures, or 2) simultaneously generating polarity switching and molecular weight (M.W.) change, or 3) maximizing the M.W. change through the depolymerization. Those new resist materials have confirmed showing equivalent or higher contrast compared to conventional CAr, and also having good resolution in EUV C/H patterning evaluation. © COPYrIGHT SPIE. downloading of the abstract is permitted for personal use only.

关键词： Photoresists

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Enhancing Internet Connectivity in remote Areas of Malaysia using direct-to-device Satellite technology 10

Enhancing Internet Connectivity in Remote Areas of Malaysia ...

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10th IEEE Asia-Pacific Conference on Applied Electromagnetics, APACE 2024

作者： Hassan, Siti Maisurah Binti Mohd Marzuki, Azah Syafiah Binti Mohd roslee, Mardeni Bin COE for Intelligent Network Research & Innovation Development TM R&D Sdn. Bhd. Cyberjaya Malaysia COE for Intelligent Network Research & Innovation Development TM R&D Cyberjaya Cyberjaya Malaysia Centre for Wireless Technology COE for Intelligent Network Multimedia University Cyberjaya Malaysia

ISBN: (纸本)9798350364163

The internet connectivity gap in Malaysia remains a challenge, especially in rural and remote areas with difficult terrain. This paper explores the feasibility of direct-to-device (d2d) satellite technology as a solution to extend coverage in these underserved regions. An overview of d2d technology is provided, discussing key technological approaches related to spectrum use and standards. The capabilities of d2d technology in meeting Malaysia's specific requirements are analyzed. Supported by government initiatives and advancements in the industry, d2d satellite services could become a key driver in achieving 100% internet coverage in Malaysia's populated areas. © 2024 IEEE.

关键词： Satellite communication systems

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dolomitization Model of Pelletoid of Arab C Formation in Southern Arabian Gulf 84

Dolomitization Model of Pelletoid of Arab C Formation in Sou...

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84th EAGE Annual Conference and Exhibition

作者： Li, F. Ye, Y. Li, L. Wan, Y. Research Institute of Petroleum Exploration and Development Petrochina China CNPC Engineering Technology R&D Company Limited China

ISBN: (纸本)9781713884156

dolomitization is the main geological process that turn pelletoid into dolomites. How does dolomitization convert pelletoid into dolomites? Why do dolomites have different structures and crystals? This paper mainly answers these two questions. Based on core, cast thin sections, physical property and mercury intrusion, the Pelletoid types are first determined. Secondly, the diagenesis of the Pelletoid is comprehensively recognized, including the diagenetic types, diagenetic environment and diagenetic product. Finally, the dolomitization model of Pelletoid is established. There are four types dolomite in Arab C formation in BH oilfield. The Arab C Formation was in a tidal flat environment, in which facies include supratidal, intertidal and subtidal. different facies have different water energy, lithology, exposure probability and time, as a result, the diagenesis such as gypsification, dolomitization, dissolution and cementation in different area vary greatly. That’s why there are four type of dolomite even the primitive particles are the same pelletoids. The pelletoids were mainly in the intertidal facies, subtidal facies with relatively high energy could also developed. Intertidal facies was easy to exposure, and gypsification and dolomitization was intense in penecontemporaneous stage. due to the environment difference, response to sea level fluctuation and exposure time, the diagenesis, especially the extent of dolomitazition is different. As a result, the dolomite has different character in structure and crystal. © (2023) by the European Association of Geoscientists & Engineers (EAGE). All rights reserved.

关键词： dolomite

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Analysis of Indium-Silver Alloy Thermal Interface material reliability and Coverage degradation Mechanisms 26

Analysis of Indium-Silver Alloy Thermal Interface Material R...

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26th Electronics Packaging technology Conference, EPTC 2024

作者： Kong, MinJae Park, dongHyeon ree, Won Koo, YoungJun Bae, JoHyun Jeong, YeonKi Sohn, EunSook ryu, dongSu Park, dongJoo Park, Kyungrok Advanced Process & Material Project Global R&D center Amkor Technology Korea Inc. 150 Songdomirae-ro Yeonsu-gu Incheon21991 Korea Republic of

ISBN: (纸本)9798331522001

Thermal management of microprocessor chips has emerged as a critical issue to ensure high-power operation, especially in high-performance computing (HPC) applications such as artificial intelligence (AI). To effectively transfer the heat generated from the chip junction to the heat spreader or heat sink, the development of thermal interface materials (TIMs) with high thermal conductivity and the processes for applying them are very active in the electronics packaging industry. In general, polymer-based TIMs have been widely developed and used for their mechanical properties and process workability. However, due to the limitations of polymers, the thermal conductivity required for HPC applications cannot be satisfied. Indium (In) has been widely selected for high power consumption devices as a high dielectric constant (k) TIM due to its high thermal conductivity. However, the low liquidus point of In can be problematic for flip chip lidded ball grid array (FCLBGA) applications since indium may be re-melted during ball attachment reflow, which can reduce TIM coverage [3]. In this paper, indium-silver (InAg)-based alloys were evaluated to develop high thermal conductivity TIM solutions that can be applied to large body FCBGA devices and examines the reliability of indium-silver alloy TIMs under thermal cycling conditions. By varying the silver content, we investigated its impact on mechanical stability and TIM coverage degradation. Indium alloy with higher silver content showed reduced package warpage and fewer voids, as observed through Shadow moiré and SAT inspection. In contrast, Indium alloys with lower silver content exhibited more significant structural deformation and void formation Our findings suggest that increasing silver content in indium alloys enhances the TIM coverage and mechanical stability with better thermal performance. © 2024 IEEE.

关键词： Indium alloys

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development of Python-Based Applications for Virtual Instrument Control Using PyQt5, PyVISA, and SCPI Protocol 2

Development of Python-Based Applications for Virtual Instrum...

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2nd International Conference on Emerging Trends in Information technology and Engineering, ic-ETITE 2024

作者： rao, Abhishek Singh Sai, deepak Mahajan, Anita Taterao Singh, Vaibhav Pratap Neiwal, rahul Pasupuleti, Haribabu Sudarsan, S.d. Group Bengaluru India Ministry of Electronics and Information Technology R&d in It Group Delhi India Centre for Development of Advanced Computing Bangalore Bengaluru India

ISBN: (纸本)9798350328202

This work aims to create desktop applications to enable virtual access and control to prominent lab equipment like signal generators, oscilloscopes, spectrum analyzers, etc. The developed applications utilize PyQt5 and PyVISA Python libraries, enabling the creation of Graphical User Interfaces (GUIs) and virtual instrument communication. The applications support USB and Ethernet connection between the PC and the instruments. We demonstrate Python-enabled applications to remotely access a Vector Signal Generator, an Oscilloscope and in conjugation, also use an OEM's Spectrum Analyzer PC application to complete a framework for remote signal generation, analysis, and acquisition which can be useful in various research and testing scenarios in the modern hybrid work culture. © 2024 IEEE.

关键词： Spectrum analyzers

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