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Stress controlled shallow trench isolation technology to suppress the novel anti-isotropic impurity diffusion for 45nm-node high-performance CMOSFETs

Stress controlled shallow trench isolation technology to sup...

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Symposium on VLSI technology

作者： K. Ota T. Yokoyama H. Kawasaki M. Moriya T. Kanai S. Takahashi T. Sanuki E. Hasumi T. Komoguchi Y. Sogo Y. Takasu K. Eda A. Oishi K. Kasai K. Ohno M. Iwai M. Saito F. Matsuoka N. Nagashima T. Noguchi Y. Okamoto Semiconductor Technology Development Group Semiconductor Solutions Network Company Sony Corporation Kanagawa Japan SoC Research & Development Center Semiconductor Company Toshiba Corporation Semiconductor Company Kanagawa Japan System LSI Division Toshiba Corporation Semiconductor Company Kanagawa Japan

The most suitable STI filling process has been developed for 45nm-node SoC platform. We found that the stress induced anti-isotropic impurity diffusion, which causes the Vth lowering. This novel phenomenon has been controlled by optimizing the SOD/HDP-CVD hybrid STI filling structure. At the same time, 20% drive current improvements of nFET and pFET have been obtained.

关键词： Stress control Isolation technology Impurities CMOSFETs Very large scale integration Paper technology

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High density and fully compatible embedded DRAM cell with 45nm CMOS technology (CMOS6)

High density and fully compatible embedded DRAM cell with 45...

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Symposium on VLSI technology

作者： T. Sanuki Y. Sogo A. Oishi Y. Okayama R. Hasumi Y. Morimasa T. Kinoshita T. Komoda H. Tanaka K. Hiyama T. Komoguchi T. Matsumoto K. Oota T. Yokoyama K. Fukasaku R. Katsumata M. Kido M. Tamura Y. Takegawa H. Yoshimura K. Kasai K. Ohno M. Saito H. Aochi M. Iwai N. Nagashima F. Matsuoka Y. Okamoto T. Noguchi System LSI division Semiconductor Company Toshiba Corporation Semiconductor Company Yokohama Japan Semiconductor Technology Development Group Semiconductor Solutions Network Company Sony Corporation Yokohama Japan SoC Research & Development Center Semiconductor Company Toshiba Corporation Semiconductor Company Yokohama Japan

For the first time, a deep trench based embedded DRAM cell for 45nm node system on a chip (SoC) applications is presented. We achieve both high data retention time and full compatibility with logic process, while scaling eDRAM cell down to 0.069/spl mu/m/sup 2/ size. In order to compensate the loss of capacitance in aggressively scaled deep trench, high enhancement of storage node capacitance up to 60% is achieved by introducing the bottle etching process with LOCOS collar structure and the high-k node dielectric material (Al/sub 2/O/sub 3/). Hybrid STI structure is applied for void free gap filling, and high improvement of retention time is obtained by reduction of induced stress. Ultra shallow buried strap (USBS) structure without silicide block process realizes the integration without any extra process after deep trench formation and extremely low strap resistance. No degradation of retention characteristics is observed by introducing Ni silicide on the top of storage node junction. Disposable sidewall spacer and flash lamp anneal, which are key technologies of logic transistor, are also applied to eDRAM cell successfully. In addition, high functional test yield up to 61 % has been obtained for 256Kb ADM.

关键词： CMOS technology Random access memory Capacitance Material storage Silicides system-on-a-chip CMOS logic circuits Dielectric losses Etching High K dielectric materials

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Integration and optimization of embedded-sige, compressive and tensile stressed liner films, and stress memorization in advanced SOI CMOS technologies

Integration and optimization of embedded-sige, compressive a...

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International Electron Devices Meeting (IEDM)

作者： L.T. Su J. Pellerin S.F. Huang M. Khare D. Schepis K. Rim S. Liming A. Waite T. Sato S. Panda H. Nii W. Lee J. Holt D. Fried D. Chidambarrao H. Chen N. Kepler M. Raab D. Greenlaw R. Stephan P. Hubler H. Ruelke O. Herzog H.-J. Engelmann M. Schaller H. Salz B. Trui M. Trentsch C. Reichel P. Press R. Otterbach A. Neu M. Lenski G. Koerner J. Klais P. Javorka J. Hohage K. Hempel A. Hellmich M. Gerhardt K. Frohberg T. Feudel H. Bierstedt J. Hontschel T. Kammler A. Wei M. Horstmann IBM Systems & Technology Group System and Technology Group AMD Corporation IBM Semiconductor Research and Development Center (SRDC) NY Toshiba America Electronic Components Inc. AMD Saxony LLC & Co. KG Dresden Germany AMD Saxony LLC & Co. Dresden

An optimized 4-way stress integration on partially-depleted SOI (PD-SOI) CMOS is presented. An embedded-SiGe process and a compressive-stressed liner film are used to induce compressive strain in the PMOS (PMOS "stressors"). A stress memorization process and a tensile-stressed liner film are used to induce tensile strain in the NMOS (NMOS "stressors"). With optimization, the different stress techniques are highly compatible and additive to each other, improving PMOS and NMOS saturation drive current by 53% and 32%, respectively. This improvement results in 40% higher product speed. To demonstrate the extendibility for future transistor nodes the stress improvements were increased further resulting in record PMOS performance of IDSAT=860muA/mum at 200nA IOFF (self-heating corrected) and 1V. The stress techniques are proven in AMD's 90nm manufacturing processes, and have been scaled for use in 65nm manufacturing

关键词： Tensile stress CMOS technology Compressive stress MOS devices Manufacturing processes Silicon germanium Germanium silicon alloys Semiconductor films Tensile strain Etching

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Global Interoperability Trial for Next-Generation Photonic IP Network -GMPLS/OUNI Protocols and Applications -

Global Interoperability Trial for Next-Generation Photonic I...

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Asia-Pacific Conference on Communications

作者： D. Shimazaki E. Oki I. Nishioka S. Kano A. Nagata M. Nanba K. Morita M. Tanabe K. Kusama P. Linwong T. Hirai K. Okazaki NTT Network Service Systems Laboratories NTT Corporation Musashino Tokyo Japan System Platforms Research Laboratories NEC Corporation Limited Italy Photonics Networking Laboratories Fujitsu Laboratories Limited Japan Network Products Division Furukawa Electric Company Limited Japan Information Technology Research & Development Center Mitsubishi Electric Corporation Limited Japan Systems Development Laboratory Hitachi and Limited Japan Faculty of Science and Technology Keio University Japan

We confirm three GMPLS technologies: GMPLS/MPLS inter-working, OUNI, and the multi-CoS recovery mechanism, using the MPLS/GMPLS multi-region network connected between PIL site in Japan and ISOCORE site in USA. The combination provides wideband video data transmission service and auto route selection according to content data volume

关键词： Next generation networking IP networks Protocols Photonics Multiprotocol label switching Testing Laboratories Internet Telecommunication traffic Optical fiber networks

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Achieving high performance to support multicast traffic in a parallel packet switch with space division multiplexing expansion

Achieving high performance to support multicast traffic in a...

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International Conference on High Performance Computing in the Asia-Pacific Region

作者： Ximing Hu Yusong Lin Ming Lei Binqiang Wang National Digital Switching System Engineering and Technological Research and Development Center Zhengzhou Henan China Telecommunication Engineering Institute Air Force Engineering University Xi'an Shaanxi China Institute of Command Automation People''s Liberation Army University of Science and Technology Nanjing Jiangsu China

A parallel packet switch (PPS) is a switch in which the memories run slower than the line rate. Till now, most of theoretical researches on PPS simply rely on increasing the speedup of switch-layers to emulate a "First-come First-serve" output queued (FCFS-OQ) switch. However, when the input traffic is multicast pattern, the speedup requirement of a N-port PPS will increase to 2radicN + 1. Clearly, the resulting explosive increase of speedup makes these traditional PPS schemes impractical for any meaningful N. In this paper, we propose to use a completely new and practical multicast architecture for PPS to efficiently support multicast traffic rather than simply increasing speedup as multicast schemes of PPS before. We call the resulting multicast PPS as a PPS with space division multiplexing expansion (SDME PPS). Then, we prove that when loaded with multicast traffic, a bufferless SDME PPS with speedup 2 can emulate a FCFS-OQ switch within a small relative queuing delay bound. Furthermore, we show that a highly practical SDME PPS can be designed by allowing small fixed-size coordination buffers in both demultiplexers and multiplexers. We determine the size of small buffers and show that the resulting buffered SDME PPS can emulate a FCFS-OQ switch within a slightly larger delay bound

关键词： Packet switching Traffic control Optical buffering Multiplexing Neural networks Telecommunication switching Telecommunication traffic Space technology Optical switches Optical packet switching

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Collaborative Filtering by Mining Association Rules from User Access Sequences

Collaborative Filtering by Mining Association Rules from Use...

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International Workshop on Challenges in Web Information Retrieval and Integration (WIRI)

作者： Mei-Ling Shyu C. Haruechaiyasak Shu-Ching Chen Na Zhao Department of Electrical and Computer Engineering University of Miami Coral Gables FL USA Information Research and Development Division National Electronics and Computer Technology Center Pathum Thani Thailand Distributed Multimedia Information System Laboratory School of Computer Science Florida International University Miami FL USA

Recent research in mining user access patterns for predicting Web page requests focuses only on consecutive sequential Web page accesses, i.e., pages which are accessed by following the hyperlinks. In this paper, we propose a new method for mining user access patterns that allows the prediction of multiple non-consecutive Web pages, i.e., any pages within the Web site. Our approach consists of two major steps. First, the shortest path algorithm in graph theory is applied to find the distances between Web pages. In order to capture user access behavior on the Web, the distances are derived from user access sequences, as opposed to static structural hyperlinks. We refer to these distances as minimum reaching distance (MRD) information. The association rule mining (ARM) technique is then applied to form a set of predictive rules which are further refined and pruned by using the MRD information. The proposed approach is applied as a collaborative filtering technique to recommend Web pages within a Web site. Experimental results demonstrate that our approach improves performance over the existing Markov model approach in terms of precision and recall, and also has a better potential of reducing the user access time on the Web

关键词： Collaboration Data mining Association rules Web pages Predictive models Information filtering Information filters Web server research and development Distributed computing

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Iron Disilicide （β-FeSi2） Thin Film Formed by Sputtering on Stainless Steel Substrate for Solar Cell Application

Iron Disilicide （β-FeSi2） Thin Film Formed by Sputtering ...

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第十五届国际光伏科学与工程大会

作者： Zhengxin Liu Masato Osamura Teruhisa Ootsuka Yasuhiro Fukuzawa Naotaka Otogawa Yasuhiko Nakayama Hisao Tanoue Yunosuke Makita Technology Development Department System Engineers' Co. Ltd. AIST Tsukuba West 16-1 Onogawa Tsukuba Ibaraki 305-8569 Japan National Institute of Advanced Industrial Science and Technology Research Center for Photovoltaic Technology Development Department System Engineers' Co. Ltd. AIST Tsukuba West 16-1 Onogawa Tsukuba Ibaraki 305-8569 Japan Technology Development Department System Engineers' Co. Ltd. AIST Tsukuba West 16-1 Onogawa Tsukuba Ibaraki 305-8569 Japan Kankyo Semiconductors Co. Ltd. AIST Tsukuba West 16-1 Onogawa Tsukuba Ibaraki 305-8569 Japan Kankyo Semiconductors Co. Ltd. AIST Tsukuba West 16-1 Onogawa Tsukuba Ibaraki 305-8569 Japan Kankyo Semiconductors Co. Ltd. AIST Tsukuba West 16-1 Onogawa Tsukuba Ibaraki 305-8569 Japan National Institute of Advanced Industrial Science and Technology(AIST) AIST Tsukuba Central 2 1-1-1 Umezono Tsukuba Ibaraki 305-8568 Japan National Institute of Advanced Industrial Science and Technology(AIST) AIST Tsukuba Central 2 1-1-1 Umezono Tsukuba Ibaraki 305-8568 Japan

In order to realize low cost and high conversion efficiency β-FeSi thin film solar cells, we formed β-FeSi films on stainless steel （SUS） substrate. Polycrystalline β-FeSi films grew on SUS substrate at low substrate temperature between 400 and 500°C. It was found that a FeSi template layer was essential to improve the adhesive ability to the substrate and film quality. C-V measurement was applied to measure the conduction type and carrier concentration. All the films showed n-type conductivity even though they were unitentionally doped. The electron concentration was about 1.0～3.0×l0 cm without the FeSi template and 5.0～7.0×l0cm on a FeSi template. These results demonstrate the possibility of using these films for solar cell applications.

关键词： Iron disilicide 尾-FeSi2 Stainless steel substrate Fe3Si template layer Sputtering Solar cell

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A nonlinear model-based control system for distillation columns using rigorous simulator

A nonlinear model-based control system for distillation colu...

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2004 IFAC Workshop on Adaptation and Learning in Control and Signal Processing, ALCOSP 2004 and IFAC Workshop on Periodic Control systems, PSYCO 2004

作者： Yumoto, Takamasa Ohtani, Tetsuya Ohmori, Hiromitsu Engineering and Development Div. Omega Simulation Co. Ltd. Advanced Solutions Research Center Yokogawa Electric Corporation Department of System Design Engineering Keio University Japan

In this paper we provide a novel model-based control system for nonlinear process for the purpose of minimizing an objective function, followed by similar research areas such as dynamic optimization and model predictive control. Their target processes have large nonlinearity, multi manipulated variables and multi control variables. We then provide our control system scheme and an optimization algorithm. We also illustrate the results obtained from application of a depropanizer distillation column using a rigorous plant-wide dynamic simulator. Copyright © 2004 IFAC.

关键词： Distillation columns

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Analysis of Traffic Parameter Estimation and Its Impacts on Wireless Channel

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Journal of Harbin Institute of technology(New Series) 2004年第2期11卷 156-159页

作者：徐玉滨沙学军强蔚 Communication Research Center Harbin Institute of Technology Harbin 150001 China Communication Research Center Harbin Institute of Technology Harbin 150001 Chinaide band or broadband access was paid much attention with the development of radio transmission technique. The wireless access control procedure play an important role in this type of system and efficiency of control algorithm has a great impact on throughput of channel resource. Based on wide band network control model and the characteristics of radio channel this paper proposed a channel traffic estimation method and then performed a dynamic parameter control procedure and give detail analysis on estimation error and its impact on channel throughput and delay performance. Computation and simulation of system performance show a positive solntion on system design.

Wide band or broadband access was paid much attention with the development of radio transmission technique. The wireless access control procedure play an important role in this type of system and efficiency of control algorithm has a great impact on throughput of channel resource. Based on wide band network control model and the characteristics of radio channel, this paper proposed a channel traffic estimation method and then performed a dynamic parameter control procedure and give detail analysis on estimation error and its impact on channel throughput and delay performance. Computation and simulation of system performance show a positive solntion on system design.

关键词： wireless access MAC protocol delay channel throughput parameter estimation

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A nonlinear model-based control system for distillation columns using rigorous simulator

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IFAC Proceedings Volumes 2004年第12期37卷 627-631页

作者： Takamasa Yumoto Tetsuya Ohtani Hiromitsu Ohmori Engineering & Development Div. Omega Simulation Co. Ltd. Advanced Solutions Research Center Yokogawa Electric Corporation Department of System Design Engineering Keio University

关键词： Computer-aided control systems design Computer simulation Distillation columns Dynamic models Model-based control Nonlinear models Process control Process simulators

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