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Measuring system for diffusion length of photoactive compound in post-exposure bake process

ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS 1996年第9期79卷 70-77页

作者： Sekiguchi, A Sensu, Y Matsuzawa, T Minami, Y Lithotech Japan Corporation Kawaguchi Japan 332 Received his B.S. degree from Shibaura Institute of Technology in 1982 and joined Japan Chemitech in 1983 where he worked on the development of an electroless Au plating. He joined Sumitomo GCA in 1985 where he was engaged in the development of photoresist application systems and the development of analysis system for photoresist processing. He is currently with Lithotech Japan Corporation. He is a member of the Japan Society of Applied Physics. Graduated from the Aircraft Maintenance Division of Nakanihon Aeronautics in 1985 and joined Sumisho Electronic Systems Inc. the same year. Following the merger of Sumisho Electronic Systems with Sumitomo G.C.A. in 1986 he was transferred to the latter where he worked on the development of an automatic end-point detector as well as analysis systems for development processes and a resist profile simulator. Mr. Sensu has been with Lithotech Japan Corporation since 1993. Received his M.S. degree in Chemical Engineering from Tohoku University in 1975 and joined Central Research Laboratory of Hitachi Ltd. the same year. He received his Ph.D. degree in 1985 from Tohoku University. He was engaged in the development of advanced photolithography processes and simulation technologies. In 1988 he resigned from Hitachi to found Technofront Inc. and then Lithotech Japan Corporation in 1993. Dr. Matsuzawa is a member of the Japan Chemical Society the Japan Society of Applied Physics and IEEE. Received his B.S. degree from Tokyo Denki University in 1979 and then joined Process System Co. There he was involved in field service for GCA Co. USA. He joined Sumitomo GCA Co. in 1983 where he was engaged in the development of photoresist coating and development systems and systems to detect the end-point of photoresist development. He also developed a photoresist development analysis system. He is currently the company executive Lithotech Japan Corporation.

The post-exposure bake (FEB) characteristics of a photoresist can be examined with a method that estimates the diffusion length of a photoactive compound (PAC) in the photoresist FEB process. Diffusion lengths are estimated with development rate measurement equipment using FEB conditions at temperatures of 50 degrees C, 100 degrees C, 110 degrees C, and 120 degrees C. An ultrahigh-resolution i-line photoresist THMR-iP3000 is used in the research. The obtained values are input into 61 photolithography simulator PROLITH/2 to calculate photoresist profiles. Using a 365-nm wavelength, 0.5 NA, and 0.6-coherence factor conditions, resist profiles for a 0.4-mu m line space feature are calculated with varied focus. The simulated results are compared with SEM observations to evaluate the validity of the estimation method;they are found to be substantially consistent with experimental results, thus confirming the validity of the method.

关键词： photoresist development rate diffusion length development parameter focus latitude profile simulation

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Affordability, logistics R&D and fleet systems

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NAVAL ENGINEERS JOURNAL 1996年第3期108卷 199-213页

作者： Schulte, DP Skolnick, A He has supported the development and operation of several naval systems including advanced component selection for Trident II fire control and navigation systems. He served as branch manager of the Surface Ship ASW Combat System Branch which acted as the acquisition engineering agent for the AN/SQQ-89 Surface Ship Anti-Submarine Warfare Weapon System. He was then selected to manage the Module Engineering Department which provided engineering support to numerous naval systems including the AN/BSY-1 Submarine Combat System and the Trident II fire control and navigation system. He then served as the deputy program manager for NAVSEA Progressive Maintenance (2M/ATE). He holds a B.S. degree in Electrical Engineering from Purdue University and currently is pursuing a Maste's degree in Public Environmental Affairs at Indiana University—Purdue University Indianapolis. He served at Applied Physics Laboratory/The Johns Hopkins University in missile development then aboard USS Boston (CAG-1) and played leading roles in several weapon system developments (Regulus Terrier Tartar Talos) inertial navigation (Polaris) deep submergence (DSRV) and advanced ship designs (SES). He later was director Combat System Integration Naval Sea Systems Command and head Combat Projects Naval Ship Engineering Center. He led the Navy's High Energy Lasers and Directed Energy Weapons development efforts. He was vice president advanced technology at Operations Research Inc. and vice president maritime engineering at Defense Group Inc. before starting SSC in 1991. Dr. Skolnick holds a B.S. degree in Mathematics and Economics Queens College an M.A. degree in Mathematics and Philosophy Columbia University an M.S. degree in Electrical/Aeronautical Engineering U.S. Naval Postgraduate School and a Ph.D. in Electrical Engineering and Applied Mathematics from Polytechnic University in New York. He is the author of many published papers on engineering design issues source selection procedures and large-scale complex technology problems

The Fleet continues to require high performance systems that can operate with dependability in the seas' unforgiving environments and under hostile action. Those demands are not new. What has changed is the urgent priority formerly assigned to national defense issues. The arguments for continued superpower military strength are now roiled in politics along with unsettled budgets and uncertain force level projections. Current expectations revolve about indefinite fiscal and operational issues (difficult funding constraints and broadband threats). In the actual event of ''doing more with less,'' a practical response is to apply the creative power available from sound engineering judgement and the crucible of experience to the immediate needs of the Fleet. The attempt to shorten the path between advanced development effort and Fleet use has been tried occasionally in the past, often, without exemplary results. The Sustainable Hardware and Affordable Readiness Practices (SHARP) program, is a generic R&D effort under OpNav sponsorship that has been working steadily on sensible solutions to product engineering problems. Armed today with fast-time, large-scale computation abilities and modern tools for technical problem solving coupled with specialized engineering knowledge, it has been refreshed and is underway satisfying existing Fleet needs. The relationship between fully responsive engineering services and current operational needs is always demanding. The connection between advanced engineering development (6.3 category funds) and immediate Fleet usage brings added complexity and challenge, both technical and organizational. Illustrative examples of affordable engineering solutions to ''retain, revise, replace or retire'' questions are presented within the context of both Fleet realities and budgetary limitations. The discussion covers legacy system support, civil/military considerations and Fleet maintenance issues. It describes the substantial and critical payoffs i

关键词： Warships

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Intelligent alarm method by fuzzy measure and its application to plant abnormality prediction

Intelligent alarm method by fuzzy measure and its applicatio...

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IEEE International Conference on Fuzzy systems (FUZZ-IEEE)

作者： K. Goto Y. Toriyama O. Itoh Software and System Laboratory Fuji Electric Corporate Research and Development Limited Hino Tokyo Japan

Traditional methods for diagnosis/prediction of plant abnormality rely on the acquisition of fragmentary knowledge or rules from experts and the application of the state vectors of plant to portions of the knowledge or rules thus obtained to derive a conclusion. Therefore as the complexity of the plant to be evaluated increases, the degree of uncertainty of knowledge obtained from experts increases and thus the accuracy of evaluation decreases. To solve this problem, this paper proposes an intelligent alarm method which uses a fuzzy integral model based on fuzzy measure that can provide an accurate model of human subjective evaluation mechanism. The intelligent alarm method is unique in that it can quantify the uncertainty of the information to be evaluated and of human being who evaluates. To achieve these objectives, this paper provides a simulation of the expert's overall plant evaluation by using an "interpretation of plant state based on expert knowledge" and a "overall judgement of plant state which amplifies the essence of the state interpretation information". The method was applied to the prediction of abnormality for a drying process of a chemical plant to demonstrate that abnormality prediction by a simulation method is possible, that even for a plant without abnormality the method can provide estimate of the potential of abnormality, and that the method is useful in alleviating the burden of the monitoring and checking work for plant.< >

关键词： Humans Application software Sensor phenomena and characterization Temperature sensors Monitoring Floods Performance evaluation Gas detectors Electric variables measurement research and development

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SVP: scan-line video processor-general purpose video processor

SVP: scan-line video processor-general purpose video process...

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International Symposium on VLSI Technology, systems and Applications

作者： H. Onuma Y. Yaguchi H. Miyaguchi T. Akiyama K. Kajiyama K. Adachi A. Kikuchi T. Kojima T. Narumi Design Center Texas Instruments Japan Limited Inashiki Ibaraki Japan Texas Instrum. Japan Ltd. Ibaraki Japan Advanced Vision System Texas Instrument Japan Limited Minato Tokyo Japan Digital Audio and Video Systems Laboratory Video Systems and applications Group Texas Instruments Tsukuba Research and Development Center Limited Tsukuba Ibaraki Japan

The SVP achieved a fast processing rate exceeding standard DSPs by integrating 1024 PEs (Processing Elements). 50 MHz operation in each PE in the SIMD (Single Instruction Multiple Data) scheme is realized on two stage pipelines in the IG (Instruction Generator) and five stage pipelines in the PE CORE. With the realization of a 20 ns DRAM cycle in each PE and the system clock generated through a PLL, SVP enables full-spec-EDTV2 (the second generation Enhanced Definition Television in Japan).

关键词： Phase locked loops Instruments Pipelines Random access memory Clocks Read only memory TV Signal processing algorithms Reduced instruction set computing Systolic arrays

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PARALLEL AND DISTRIBUTED TLM COMPUTATION WITH SIGNAL-PROCESSING FOR ELECTROMAGNETIC-FIELD MODELING

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INTERNATIONAL JOURNAL OF NUMERICAL MODELLING-ELECTRONIC NETWORKS DEVICES AND FIELDS 1995年第3-4期8卷 169-185页

作者： SO, PPM ESWARAPPA, C HOEFER, WJR NSERC/MPR Teltech Research Chair in RF Engineering Department of Electrical and Computer Engineering University of Victoria Victoria British Columbia V8W 3P6 Canada Poman So received his B.Sc. degree in computer science and physics from the University of Toronto Toronto Onatario Canada in 1985. He obtained his B.A. Sc. and M.A.Sc. degrees in electrical engineering (summa cum laude) from the University of Ottawa Ottawa Ontario Canada in 1987 and 1989 respectively. Mr So was a research engineer in the University of Ottawa from January 1989 to October 1991 his research interests included CAD techniques of microwave circuits and numerical methods for electromagnetic wave modelling. He specialized in the development of electromagnetic engineering CAD software and successfully implemented a number of electromagnetic wave simulators based on the two-dimensional and three-dimensional transmission-line matrix methods. From August 1990 to February 1991 he accompanied Professor W. J. R. Hoefer to Rome Italy and Sophia Antiopolas France. During that time he implemented a parallel version of the 3D-TLM simulator for the CM-2 Connection Machine using C-Star and X Windows Library. He is a research engineer and a Ph.D. student at the University of Victoria Victoria British Columbia Canada. He ported the 2D- and 3D-TLM simulators to DECmpp 1200 massively parallel computer using MPL C and C++. He also combined OSA90/hope a commercially available microwave CAD program with a 2D-TLM simulation module for geometry optimization using the Datapipe technique of OSA90/hope. Recently he has developed a distributed client-server computing technique for the TLM method this technique could accelerate the TLM simulation by more than an order of magnitude. Channabasappa Eswarappa received the M.Tech. degree in electrical engineering from the Indian Institute of Technology Kanpur India in 1983 and Ph. D. degree from the University of Ottawa Canada in 1990. He worked as an Assistant Executive Engineer and later as

This paper describes the implementation of transmission-line matrix (TLM) method algorithms on a massively parallel computer (DECmpp 12000), the technique of distributed computing in the UNIX environment, and the combination of TLM analysis with Prony's method as well as with autoregressive moving average (ARMA) digital signal processing for electromagnetic field modelling. By combining these advanced computation techniques, typical electromagnetic field modelling of microwave structures by TLM analysis can be accelerated by a few orders of magnitude.

关键词： Mathematical models

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Proposal of the intellectual evaluation using fuzzy memory-based reasoning and fuzzy measure

Proposal of the intellectual evaluation using fuzzy memory-b...

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IEEE International Conference on Fuzzy systems (FUZZ-IEEE)

作者： K. Goto Y. Toriyama O. Itoh Software and System Laboratory Fuji Electric Corporate Research and Development Limited Hino Tokyo Japan

The method of "state interpretation by fuzzy memory-based reasoning" and the identification method of "fuzzy measure and scenario integrated evaluation scale" are proposed to construct the intellectual evaluation considering the context. Conventional methods evaluate the object by interpreting the state according to fragmentary knowledge acquired from experts. The interpretation, however, often depends on contexts, that is, other states that exist at the same time. The problem is that the evaluation result has been ambiguous in the usual knowledge representation because the interpretation of the state does not change even if the context changes. The method of interpreting the state by fuzzy memory-based reasoning proposed eliminates the fuzziness by using the bottom up and the top down processing mutually to reorganize the information so that the state suits its strategy, or its context. The method of identifying fuzzy measure proposed clarifies indirect intentions, or nonlinear relation between the state and the strategy based on the appropriate context information, which eliminates the ambiguity included in the state evaluation. Furthermore, these methods are applied to the adjustment of the cooling capability in a vending machine.< >

关键词： Fuzzy reasoning Proposals Humans Cooling Electric variables measurement Decision making Fuzzy control research and development software systems Laboratories

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A method of design and adjustment of fuzzy control rules based on operation know-how

A method of design and adjustment of fuzzy control rules bas...

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IEEE International Conference on Fuzzy systems (FUZZ-IEEE)

作者： O. Itoh H. Migita A. Miyamoto Software and System Laboratory Fuji Electric Corporate Research and Development Limited Hino Tokyo Japan

The major problem in making fuzzy control a reality is designing and adjusting the control rules. In process control, it is impossible to get complete informations for the design because of remaining unexplained characteristic and change of it. So, we developed a design adjustment and evaluation method of the control rules and membership functions based on operator's judgments and process data. This paper reports on the method and its effectiveness.< >

关键词： Design methodology Fuzzy control Process control Control systems Automatic control Fuzzy set theory Chemical industry Data engineering Genetic engineering Design engineering

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Holonic planning and scheduling for a robotic assembly testbed 4

Holonic planning and scheduling for a robotic assembly testb...

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4th International Conference on Computer Integrated Manufacturing and Automation Technology, CIMAT 1994

作者： Gou, Ling Hasegawa, Tetsuo Luh, Peter B. Tamura, Shinsuke Oblak, John M. Department of Electrical and System Engineering University of‘Connecticut StormCT06369-3156 United States System and Software Engineering Laboratory Research and Development Center Toshiba Corporation 60 Yanagi-cho Sei-waiku Kawasaki210 Japan United Technologies Research Center 411 Silver Lane Eart HartfordCT06108 United States

ISBN: (纸本)0818665106

A Holonic Manufacturing system (EMS)is a manufacturing system where key element, such as machines, products, park, etc., have artonomous and cooperative properties. These element are called "holons" a word coined by combining "holos" (the whole) and ‘onu (a particle) following Koestler. In an HMS, each "holos" activities are determined through cooperation with other holons, as opposed to being determined by a centralized mechanism. An EMS could therefore enjoy high agility, which is an important characteristic for future manufacturing systems. Effective cooperation of holons for overall system performance, however, is mostly an open issue. In the paper, the holonic concept is applied to a simple robotic assembly testbed, and cooperation mechanism among holons for planning and schedukng are established, respectively, baaed on an adaptive consistency algorithm and the Lagrangian relaxation technique. It turns out that Lagrangian relazation provides a theoretical,foundation for the cooperation of scheduling activities among holons. The system has been implemented in object-oriented framework, and evaluated based on the computation times for generating assembly plans and scheduler and the quality of schedules under different circumstances. Preliminary testing showed that the system can generate assembly plans and high quality schedules, and respond to dynamic changes. © 1994 IEEE.

关键词： Robotic assembly

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AN OBJECT-ORIENTED ANALYSIS OF A BISDN CONTROL-system WITH A FOCUS ON THE UNI PROTOCOL OBJECT

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INTERNATIONAL JOURNAL OF COMMUNICATION systemS 1994年第2期7卷 113-129页

作者： OUIBRAHIM, H PATTENIER, FJ AT&T NS NL Postbus 18 1270 AA Huizen The Netherlands Hamza Ouibrahim:obtained his B.Sc M.Sc and Ph.D in 1981 1982 and 1986 respectively all in Electrical Engineering from Syracuse University Syracuse New York. In 1986 he joined the Electrical Engineering Department at the Watson School of Engineering at the State University of New York at Binghamton as Assistant Professor. Since 1988 he has been with the Forward Looking Work Department of AT&T-NSNL in the Netherlands where he is project manager responsible for a group of research engineers working on signalling for BISDN networks. He represents AT&T-NSNL in standards bodies such as ITU-TSS and ETSI. He has been involved in European Research projects (Research and development in Advanced Communications in Europe) developing a signalling system for the integrated broadband communications. His current interests include ATM and signalling for broadband networks. He is the author of numerous papers and an IEEE member. Frans Pattenier:finished his study in Electronic Engineering in 1987 in the Netherlands. In 1983 he joined the Dutch Police Communication Service and in 1988 the National Institute for Public Health and Environment Protection. He joined the Forward Looking Work Department of AT&T-NSNL in 1991. In the first five of his career he was involved in hardware development for analogue digital and microprocessor systems for dataacquisition and communication equipment. Later software-development became more important for him (using Pascal C and C+ +) and he is now involved in projects which include aspects such as signalling protocols and call processing. He thinks the real challenge is to complete a project using object-oriented and structured techniques for every phase on every level.

The control system of a BISDN network will undoubtedly be very complex to design, implement and maintain. Its complexity has led researchers to look for ways of breaking down the problem into smaller and manageable parts. This has motivated the use of an object-oriented approach to analyse and comprehend the BISDN control system. This paper thus presents an object-oriented analysis (OOA) of a BISDN control system. This analysis is based on a method introduced by Coad and Yourdon and comprises five steps. All five steps, namely identifying subjects, identifying objects, identifying structures, defining attributes, and defining operations, will be worked out in detail with an emphasis on the user network interface (UNI) signalling protocol object. Four subjects, nine objects, and three structures are identified in the problem space at hand. This structuring offers a framework to analyse in detail the three aspects, data, structure and dynamic behaviour, of the UNI signalling protocol. A parallel between this approach and the well known approach used by the International Telecommunication Union (ITU) for specifying signalling protocols and contained in Recommendation I.130 is drawn. The Coad and Yourdon OOA approach applied to a BISDN control system can be used for the analysis of different aspects of such systems. This paper focuses on the UNI signalling protocol object which leads to a complete specification. Any protocol resulting from such analysis can be claimed to be object-oriented protocol. This approach offers modularity and thus offers a way of structuring the problem space into identifiable objects and data. Full benefits of object orientation can be gained only in the consistent use of object orientation throughout all steps in the development process. The proposed approach allows one to create libraries of generic procedures which can be reused in specific implementations.

关键词： ATM BISDN CCITT RECOMMENDATION I.130 CONTROL system OOA PROTOCOL SIGNALING

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ASYNCHRONOUS TRANSFER MODE (ATM) OPERATION VIA SATELLITE - ISSUES, CHALLENGES AND RESOLUTIONS

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INTERNATIONAL JOURNAL OF SATELLITE COMMUNICATIONS 1994年第3期12卷 211-222页

作者： CHITRE, DM GOKHALE, DS HENDERSON, T LUNSFORD, JL MATHEWS, N COMSAT Laboratories 22300 Comsat Drive Clarksburg MD 20871 USA. Received his B.Sc. from the University of Bombay India an M.A. in mathematics from the University of Cambridge U.K. and a Ph.D. in physics from the University of Maryland. He is currently an Associate Executive Director of the Network Technology Division at COMSAT Laboratories. He has been involved in research and development activities in ISDN VSAT networks data communications and network systems and architectures. Prior to his current positions Dr. Chitre was a Principal Scientist in the Network Technology Division at COMSAT Laboratories. Dr. Chitre joined COMSAT Laboratories in 1980. He has made major contributions to the analysis and architecture of data communication ISDN and BISDN via satellite. Dr. Chitre directs and participates in the international and national standards activities in ISDN BISDN and data communication as they apply to satellite communication. He was Chairman of the Working Group on Protocols and Network Timing Function of the CCIR/CCITT Joint Ad Hoc Group on ISDN-Satellite Matters during 1990–1992. Currently he is the Chairman of the Working Group on New Technologies in the ITU Intersector Coordinating Group (ICG) on Satellite Matters. Dr. Chitre was a programme manager during 1990 and 1991 on a contract from INTELSAT on systems studies on satellite communications systems architectures for ISDN and broadband ISDN systems. Currently he is the technical manager of the DoD Contract on ATM via satellite demonstration and the programme manager for the INTELSAT contract on analysis and top-level specification of INTELSAT ISDN subnetworks and SDH compatible transport network. Department manager for ISDN/Data Communications in the Network Technology Division of COMSAT Laboratories. His responsibilities include managing the implementation of next generation telecommunication systems for fixed and mobile satellite systems. Current projects include the development of a high data rate gateway switch that provides for the

Key issues regarding the operation of the broadband integrated services digital network (BISDN) via satellite are presented herein. The specific issues, challenges, and their resolutions are detailed. In particular, the impact of error characteristics and propagation delay on the operation of BISDN via satellite is discussed. Solutions are presented for removing adverse effects and providing high-quality service to users of BISDN via satellite.

关键词： ATM BISDN

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