As wafer circuit width shrinks down to less than ten nanometers in recent years,stringent quality control in the wafer manufacturing process is increasingly *** to the coupling of neighboring cluster tools and coordin...
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As wafer circuit width shrinks down to less than ten nanometers in recent years,stringent quality control in the wafer manufacturing process is increasingly *** to the coupling of neighboring cluster tools and coordination of multiple robots in a multi-cluster tool,wafer production scheduling becomes rather *** a wafer is processed,due to high-temperature chemical reactions in a chamber,the robot should be controlled to take it out of the processing chamber at the right *** order to ensure the uniformity of integrated circuits on wafers,it is highly desirable to make the differences in wafer post-processing time among the individual tools in a multicluster tool as small as *** achieve this goal,for the first time,this work aims to find an optimal schedule for a dual-arm multi-cluster tool to regulate the wafer post-processing *** do so,we propose polynomial-time algorithms to find an optimal schedule,which can achieve the highest throughput,and minimize the total post-processing time of the processing *** propose a linear program model and another algorithm to balance the differences in the post-processing time between any pair of adjacent cluster *** industrial examples are given to illustrate the application and effectiveness of the proposed method.
By replacing the exponential decay function in the circular Airy beam (CAB) with a super-Gaussian function, we propose a novel abruptly autofocusing beam, the circular super-Gaussian Airy beam (CSGAB). Similar to CAB,...
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Knowledge distillation has demonstrated significant potential in addressing the challenge of unsupervised anomaly detection (AD). The representation discrepancy of anomalies in the teacher–student (T-S) model pr...
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To reduce the acquisition cost of aerodynamic heating data for high-speed aircraft by leveraging diverse data sources, this paper proposes a multi-source data fusion method based on sparse sampling and multi-fidelity ...
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Computational creativity modeling, including concept combination, enables us to foster deeper abilities of Artificial Intelligence (Al) agents. All hough concept combination lias been addressed in a lot of computation...
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Deploying the Internet of Things (IoT) in the transfer of enormous medical data often promotes challenges with the security, confidentiality, and privacy of the user’s sensitive data. In addition, the access control ...
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This paper introduces the African Bison Optimization(ABO)algorithm,which is based on biological *** is inspired by the survival behaviors of the African bison,including foraging,bathing,jousting,mating,and *** foragin...
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This paper introduces the African Bison Optimization(ABO)algorithm,which is based on biological *** is inspired by the survival behaviors of the African bison,including foraging,bathing,jousting,mating,and *** foraging behavior prompts the bison to seek a richer food source for *** bison find a food source,they stick around for a while by bathing *** jousting behavior makes bison stand out in the population,then the winner gets the chance to produce offspring in the mating *** eliminating behavior causes the old or injured bison to be weeded out from the herd,thus maintaining the excellent *** above behaviors are translated into ABO by mathematical *** assess the reliability and performance of ABO,it is evaluated on a diverse set of 23 benchmark functions and applied to solve five practical engineering problems with *** findings from the simulation demonstrate that ABO exhibits superior and more competitive performance by effectively managing the trade-off between exploration and exploitation when compared with the other nine popular metaheuristics algorithms.
Genetic programming hyperheuristic (GPHH) has recently become a promising methodology for large-scale dynamic path planning (LDPP) since it can produce reusable heuristics rather than disposable solutions. However, in...
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In Internet of Things(loT),data sharing among different devices can improve manufacture efficiency and reduce workload,and yet make the network systems be more vulnerable to various intrusion *** has been realistic de...
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In Internet of Things(loT),data sharing among different devices can improve manufacture efficiency and reduce workload,and yet make the network systems be more vulnerable to various intrusion *** has been realistic demand to develop an efficient intrusion detection algorithm for connected *** of existing intrusion detection methods are trained in a centralized manner and are incapable to identify new unlabeled attack *** this paper,a distributed federated intrusion detection method is proposed,utilizing the information contained in the labeled data as the prior knowledge to discover new unlabeled attack ***,the blockchain technique is introduced in the federated learning process for the consensus of the entire *** results are provided to show that our approach can identify the malicious entities,while outperforming the existing methods in discovering new intrusion attack types.
A new repeated upsetting-extrusion (RUE) process was proposed to improve the microstructure and the mechanical properties of Mg alloys. The effects of deformation temperature on the microstructure and microhardness of...
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A new repeated upsetting-extrusion (RUE) process was proposed to improve the microstructure and the mechanical properties of Mg alloys. The effects of deformation temperature on the microstructure and microhardness of RUEed AQ80 Mg alloy were studied. The results showed that Mg alloy is subjected to sufficient corner shear deformation, upsetting deformation, and extrusion deformation, resulting in a large and uniformly distributed effective strain after RUE deformation. The microstructure is refined to an average grain size of 2.1 μm by the continuous dynamic recrystallization (CDRX) mechanism at 250 °C. As the temperature increases to 300 °C, the discontinuous dynamic recrystallization (DDRX) mechanism is activated and the average grain size is refined to 1.6 µm by the combined effect of CDRX and DDRX. In comparison to their parent grains, the orientations of the CDRXed grains show a clearly preferred orientation, but those of the DDRXed grains are completely different. At 350 °C, {10-12} extension twins appear in the microstructure, and the twinning-induced recrystallization (TDRX) mechanism plays an important role in grain refinement. With the two strengthening mechanisms of fine-grained strengthening and dislocation strengthening, the microhardness of the 250 °C sample is greatly improved, with an increase of about 35.1% compared to the initial sample.
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