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science Bulletin 2024年第10期69卷 1427-1436页

作者：屈恒泽张胜利曹江吴振华柴扬李卫胜李连忠任文才王欣然曾海波 MIIT Key Laboratory of Advanced Display Materials and Devices College of Material Science and EngineeringNanjing University of Science and TechnologyNanjing 210094China School of Electronic and Optical Engineering Nanjing University of Science and TechnologyNanjing 210094China Key Laboratory of Microelectronics Device and Integrated Technology Institute of Microelectronics of Chinese Academy of SciencesBeijing 100029China Department of Applied Physics The Hong Kong Polytechnic UniversityHong Kong 999077China National Laboratory of Solid State Microstructures School of Electronic Science and Engineering and Collaborative Innovation Center of Advanced MicrostructuresNanjing UniversityNanjing 210023China Department of Mechanical Engineering The University of Hong KongHong Kong 999077China Shenyang National Laboratory for Materials Science Institute of Metal ResearchChinese Academy of SciencesShenyang 110016China School of Integrated Circuits Nanjing UniversitySuzhou 215163China Suzhou Laboratory Suzhou 215009China

Developing low-power FETs holds significant importance in advancing logic circuits,especially as the feature size of MOSFETs approaches sub-10 ***,this has been restricted by the thermionic limitation of SS,which is limited to 60 mV per decade at room ***,we proposed a strategy that utilizes 2D semiconductors with an isolated-band feature as channels to realize subthermionic SS in *** high-throughput calculations,we established a guiding principle that combines the atomic structure and orbital interaction to identify their sub-thermionic transport *** guides us to screen 192 candidates from the 2D material database comprising 1608 ***,the physical relationship between the sub-thermionic transport performances and electronic structures is further revealed,which enables us to predict 15 systems with promising device performances for low-power applications with supply voltage below 0.5 *** work opens a new way for the low-power electronics based on 2D materials and would inspire extensive interests in the experimental exploration of intrinsic steep-slope MOSFETs.

关键词： 2D materials Electronic band structures Transport properties Steep-slope transistors DFT-NEGF calculations

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Cu/Cu_(2)O nanoparticles co-regulated carbon catalyst for alkaline Al-air batteries

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Chinese Chemical Letters 2021年第8期32卷 2427-2432页

作者： Jing Tian Depei Liu Jingsha Li Dan Sun Hongtao Liu Haiyan Wang Yougen Tang Hunan Provincial Key Laboratory of Chemical Power Sources College of Chemistry and Chemical EngineeringCentral South UniversityChangsha 410083China Eco-materials and Renewable Energy Research Center(ERERC) National Laboratory of Solid State MicrostructuresCollaborative Innovation Center of Advanced MicrostructuresSchool of PhysicsNanjing UniversityNanjing 210093China Institute of Materials Science and Devices Suzhou University of Science and TechnologySuzhou 215011China Key Laboratory of Preparation and Application of Environmental Friendly Materials of Ministry of Education Jilin Normal UniversityChangchun 130103

Developing high-efficiency,inexpensive,and steady non-precious metal oxygen reduction reaction(ORR) catalysts to displace Pt-based catalysts is significant for commercial applications of Al-air ***,we have prepared the Cu/Cu_(2)O-NC catalyst with excellent ORR performance and high stability,due to the synergistic effect of Cu and Cu_(2)O *** half-wave potential(0.8 V) and the limiting-current density(5.20 mA/cm^(2)) of the Cu/Cu_(2)O-NC are very close to those of the 20% Pt/C catalyst(0.82 V,5.10 mA/cm^(2)).Besides,it exhibits excellent performance with a maximal power density of 250 mW/cm^(2) and a stable continuous discharge for more than 90 h in the Al-air battery test The promoting effects of Cu_(2)O towards Cu-based ORR catalysts are illustrated as follows:(ⅰ) Cu_(2)O is the major ORR active site by the redox of Cu(Ⅱ)/Cu(Ⅰ),which provides excellent ORR activities;(ⅱ) Cu can stabilize the location of Cu_(2)O by assisting the electron transfer to Cu(Ⅱ)/Cu(Ⅰ) redox,which is conducive to the high stability of the *** work provides a useful strategy for enhancing the ORR performance of Cu-based catalysts.

关键词： Cu/Cu_(2)O Oxygen reduction reaction Al-air battery Stability Synergistic effect

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Technological Evolution of Image Sensing Designed by Nanostructured materials

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ACS materials LETTERS 2023年第4期5卷 1027-1060页

作者： Iqbal, Muhammad Aamir Malik, Maria Le, Top Khac Anwar, Nadia Bakhsh, Sunila Shahid, Wajeehah Shahid, Samiah Irfan, Shaheen Al-Bahrani, Mohammed Morsy, Kareem Do, Huy-Binh Ponnusamy, Vinoth Kumar Pham, Phuong V. School of Materials Science and Engineering Zhejiang University Hangzhou 310027 China Centre of Excellence in Solid State Physics University of the Punjab Lahore 54590 Pakistan Faculty of Materials Science and Technology University of Science Ho Chi Minh City 700000 Vietnam Vietnam National University Ho Chi Minh City 700000 Vietnam School of Materials Science and Engineering Tsinghua University Shaw Technical Science Building Haidian District Beijing 100084 China Department of Physics The University of Lahore Lahore 54000 Pakistan Department of Physics Balochistan University of Information Technology Engineering and Management Sciences Quetta 08770 Pakistan Institute of Molecular Biology and Biotechnology The University of Lahore Lahore 54000 Pakistan Chemical Engineering and Petroleum Industries Department Al-Mustaqbal University College Babylon 51001 Iraq Biology Department College of Science King Khalid University Abha 61421 Saudi Arabia Faculty of Applied Science Ho Chi Minh City University of Technology and Education Thu Duc City 700000 Vietnam Department of Medicinal and Applied Chemistry Kaohsiung Medical University (KMU) Kaohsiung City 807 Taiwan Research Center for Precision Environmental Medicine Kaohsiung Medical University (KMU) Kaohsiung City 807 Taiwan Department of Medical Research Kaohsiung Medical University Hospital (KMUH) Kaohsiung City 807 Taiwan Department of Chemistry National Sun Yat-sen University Kaohsiung 804 Taiwan Department of Physics College of Science National Sun Yat-Sen University Kaohsiung 80424 Taiwan

Imaging sensing holds a remarkable place in modern electronics and optoelectronics for the complementary metal-oxide-semiconductor integration of high-speed optical communications and photodetection with the merits of high-speed operation, cost-effectiveness, and noncomplex fabrication. The optimum quality of image sensing relies on noise, sensitivity, power consumption, voltage operation, and speed imaging to access and compete with the state-of-the-art image sensing devices in the industry. Many studies have been conducted to address these issues;however, performance has not yet been optimized and solutions are still in the works. In this review, we briefly provide information on recent advances in image sensing using nanostructured emerging materials through nanofabrication integration including the technology evolution on traditional and modern technology platforms, general mechanisms, classification, and actual applications as well as existing limitations. Finally, new challenges and perspectives for the future trends of image sensing and their possible solutions are also discussed.

关键词： Absorption Color Infrared light Quantum dots Sensors

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Two-dimensional materials for future information technology: status and prospects

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science China(Information sciences) 2024年第6期67卷 1-147页

作者： Hao QIU Zhihao YU Tiange ZHAO Qi ZHANG Mingsheng XU Peifeng LI Taotao LI Wenzhong BAO Yang CHAI Shula CHEN Yiqi CHEN Hui-Ming CHENG Daoxin DAI Zengfeng DI Zhuo DONG Xidong DUAN Yuhan FENG Yu FU Jingshu GUO Pengwen GUO Yue HAO Jun HE Xiao HE Jingyi HU Weida HU Zehua HU Xinyue HUANG Ziyang HUANG Ali IMRAN Ziqiang KONG Jia LI Qian LI Weisheng LI Lei LIAO Bilu LIU Can LIU Chunsen LIU Guanyu LIU Kaihui LIU Liwei LIU Sheng LIU Yuan LIU Donglin LU Likuan MA Feng MIAO Zhenhua NI Jing NING Anlian PAN Tian-Ling REN Haowen SHU Litao SUN Yue SUN Quanyang TAO Zi-Ao TIAN Dong WANG Hao WANG Haomin WANG Jialong WANG Junyong WANG Wenhui WANG Xingjun WANG Yeliang WANG Yuwei WANG Zhenyu WANG Yao WE... Department of Applied Physics The Hong Kong Polytechnic University Key Laboratory for Micro-Nano Physics and Technology of Hunan Province College of Materials Science and EngineeringHunan University College of Integrated Circuits Zhejiang University Shenzhen Geim Graphene Center Shenzhen Key Laboratory of Layered Materials for Value-Added ApplicationsTsinghua-Berkeley Shenzhen Institute & Institute of Materials ResearchTsinghua Shenzhen International Graduate SchoolTsinghua University State Key Laboratory of Extreme Photonics and Instrumentation College of Optical Science and EngineeringInternational Research Center for Advanced PhotonicsZijingang CampusZhejiang University National Key Laboratory of Materials for Integrated Circuits Shanghai Institute of Microsystem and Information TechnologyChinese Academy of Sciences CAS Key Laboratory of Nanophotonic Materials and Devices & Key Laboratory of Nanodevices and Applications i-LabSuzhou Institute of Nano-Tech and Nano-Bionics (SINANO)Chinese Academy of Sciences College of Chemistry and Chemical Engineering Hunan University Key Laboratory of Quantum State Construction and Manipulation (Ministry of Education) Department of PhysicsRenmin University of China School of Integrated Circuits Beijing National Research Center for Information Science and Technology (BNRist)Tsinghua University School of Electronic Science and Engineering Nanjing University The State Key Discipline Laboratory of Wide Band Gap Semiconductor Technology Shaanxi Joint Key Laboratory of GrapheneSchool of MicroelectronicsXidian University Key Laboratory of Artificial Micro- and Nano-Structures of Ministry of Education School of Physics and TechnologyWuhan University School of Integrated Circuits Huazhong University of Science and Technology Center for Nanochemistry (CNC) Beijing Science and Engineering Center for NanocarbonsBeijing National Laboratory for Molecular SciencesCollege of Chemistry and Molecular EngineeringPeking University State Key Laboratory for Artificial Microstruct

Over the past 70 years, the semiconductor industry has undergone transformative changes,largely driven by the miniaturization of devices and the integration of innovative structures and materials. Two-dimensional(2D) materials like transition metal dichalcogenides(TMDs) and graphene are pivotal in overcoming the limitations of silicon-based technologies, offering innovative approaches in transistor design and functionality, enabling atomic-thin channel transistors and monolithic 3D integration. We review the important progress in the application of 2D materials in future information technology, focusing in particular on microelectronics and optoelectronics. We comprehensively summarize the key advancements across material production, characterization metrology, electronic devices, optoelectronic devices, and heterogeneous integration on silicon. A strategic roadmap and key challenges for the transition of 2D materials from basic research to industrial development are outlined. To facilitate such a transition, key technologies and tools dedicated to 2D materials must be developed to meet industrial standards, and the employment of AI in material growth, characterizations, and circuit design will be essential. It is time for academia to actively engage with industry to drive the next 10 years of 2D material research.

关键词： two-dimensional (2D) materials information technology production technology standardization of characterization microelectronic devices optoelectronic devices multi-functional integration

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Machine Learning-Assisted Low-Dimensional Electrocatalysts Design for Hydrogen Evolution Reaction

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Nano-Micro Letters 2023年第12期15卷 161-187页

作者： Jin Li Naiteng Wu Jian Zhang Hong‑Hui Wu Kunming Pan Yingxue Wang Guilong Liu Xianming Liu Zhenpeng Yao Qiaobao Zhang College of Chemistry and Chemical Engineering and Henan Key Laboratory of Function‑Oriented Porous MaterialsLuoyang Normal UniversityLuoyang 471934People’s Republic of China New Energy Technology Engineering Lab of Jiangsu Province College of ScienceNanjing University of Posts and Telecommunications(NUPT)Nanjing 210023People’s Republic of China School of Materials Science and Engineering University of Science and Technology BeijingBeijing 100083People’s Republic of China Department of Chemistry University of Nebraska-LincolnLincolnNE 8588USA Henan Key Laboratory of High‑Temperature Structural and Functional Materials National Joint Engineering Research Center for Abrasion Control and Molding of Metal MaterialsHenan University of Science and TechnologyLuoyang 471003People’s Republic of China National Engineering Laboratory for Risk Perception and Prevention Beijing 100041People’s Republic of China Center of Hydrogen Science Shanghai Jiao Tong UniversityShanghai 200000People’s Republic of China State Key Laboratory of Metal Matrix Composites School of Materials Science and EngineeringShanghai Jiao Tong UniversityShanghai 200000People’s Republic of China State Key Laboratory of Physical Chemistry of Solid Surfaces College of MaterialsXiamen UniversityXiamen 361005People’s Republic of China

Efficient electrocatalysts are crucial for hydrogen generation from electrolyzing ***,the conventional"trial and error"method for producing advanced electrocatalysts is not only cost-ineffective but also time-consuming and ***,the advancement of machine learning brings new opportunities for electrocatalysts discovery and *** analyzing experimental and theoretical data,machine learning can effectively predict their hydrogen evolution reaction(HER)*** review summarizes recent developments in machine learning for low-dimensional electrocatalysts,including zero-dimension nanoparticles and nanoclusters,one-dimensional nanotubes and nanowires,two-dimensional nanosheets,as well as other *** particular,the effects of descriptors and algorithms on screening low-dimensional electrocatalysts and investigating their HER performance are ***,the future directions and perspectives for machine learning in electrocatalysis are discussed,emphasizing the potential for machine learning to accelerate electrocatalyst discovery,optimize their performance,and provide new insights into electrocatalytic ***,this work offers an in-depth understanding of the current state of machine learning in electrocatalysis and its potential for future research.

关键词： Machine learning Hydrogen evolution reaction Low-dimensional electrocatalyst Descriptor Algorithm

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Progress and perspective of high strain NBT-based lead-free piezoceramics and multilayer actuators

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Journal of Materiomics 2021年第3期7卷 508-544页

作者： Pengyuan Fan Kai Liu Weigang Ma Hua Tan Qi Zhang Ling Zhang Changrong Zhou David Salamon Shan-Tao Zhang Yangjun Zhang Bo Nan Haibo Zhang School of Materials Science and Engineering State Key Laboratory of Material Processing and Die&Mould TechnologyHuazhong University of Science and TechnologyWuhan430074PR China School of Materials Science and Engineering University of New South WalesSydney2052Australia School of Mechanical and Electrical Engineering Shihezi UniversityShiheziChina College of Materials Science and Engineering Guilin University of Electronic TechnologyGuilin541004PR China Central European Institute of Technology(CEITEC)Brno University of Technology Czech Republic National Laboratory of Solid State Microstructures Department of Materials Science and EngineeringCollege of Engineering and Applied ScienceCollaborative Innovation Center of Advanced MicrostructuresNanjing UniversityNanjing210093China State Key Laboratory of Automotive Safety and Energy School of Vehicle and MobilityTsinghua UniversityBeijing100084PR China Guangdong HUST Industrial Technology Research Institute Dongguan523808PR China

In this review,the evolution of high strain Na_(0.5)Bi_(0.5)TiO_(3)-based lead-free piezoceramics and their multilayer actuators has been ***,in terms of Na_(0.5)Bi_(0.5)TiO_(3)-based ceramic materials,the origin of high strain,the typical chemical modification methods of obtaining large strain and extrinsic factors affecting the large strain are *** it briefly summarizes the problems existing in Na_(0.5)Bi_(0.5)TiO_(3)-based ceramics for multilayer actuator *** to optimize strain performance by means of microstructure control and phase structure design are also ***,in terms of multilayer actuator,we describe its characteristics,applications and preparation process systematically,as well as the recent development of Na_(0.5)Bi_(0.5)TiO_(3)-based multilayer *** last,perspectives on directions of following work and promising fields for the applications of the materials and their devices are presented.

关键词： Lead-free piezoceramics Bismuth sodium titanate Electric-field-induced strain Multilayer actuators

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介于二维和三维晶体间的超薄晶态材料的X射线衍射及对称性研究

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science Bulletin 2023年第9期68卷 887-891,M0003页

作者：马恒瑞蒋巧荣南子昂李根贾艳艳宁若昕吉家葆曹振明吕林喆李慧齐戴升林海昕谢兆雄 State Key Laboratory of Physical Chemistry of Solid Surfaces Collaborative Innovation Center of Chemistry for Energy Materialsand Department of ChemistryCollege of Chemistry and Chemical EngineeringXiamen UniversityXiamen 361005China Key Laboratory for Advanced Materials and Feringa Nobel Prize Scientist Joint Research Center Institute of Fine ChemicalsSchool of Chemistry&Molecular EngineeringEast China University of Science and TechnologyShanghai 200237China Department of Chemistry and Applied Biosciences Laboratory of Physical ChemistryETH ZürichZürich CH-8093Switzerland Innovation Laboratory for Sciences and Technologies of Energy Materials of Fujian Province(IKKEM) Xiamen 361005China

为了深入理解超薄晶态材料的结构和对称性的独特性,本文在充分考虑超薄晶态材料堆积自由度的情况下,从数学和晶体学角度对介于二维与三维之间的超薄纳米晶体的对称性和X射线衍射进行了探讨.认为超薄纳米晶体的对称性需要用数学层群(laye... 详细信息

为了深入理解超薄晶态材料的结构和对称性的独特性,本文在充分考虑超薄晶态材料堆积自由度的情况下,从数学和晶体学角度对介于二维与三维之间的超薄纳米晶体的对称性和X射线衍射进行了探讨.认为超薄纳米晶体的对称性需要用数学层群(layer group)来描述;另外,由于其层堆叠方向上不具有周期性结构,超薄纳米晶体可能产生特异衍射特征.为了验证这一观点,研究了三类在层堆叠方向不具有周期性的典型超薄纳米晶体的X射线衍射,从实验上观察到了超薄纳米晶体与其体相三维晶体粉末X射线衍射的不同;针对基于三维晶体的X射线衍射模拟软件不再适用于超薄纳米晶体的情况,发展了超薄纳米晶体的全结构X射线衍射分析方法,很好地模拟了超薄纳米晶粉末X射线衍射图.该研究对超薄纳米晶态材料的结构及对称性提出了新见解,将有益于推动相关材料的构效关系研究和新功能开发.

关键词：纳米晶体周期性结构 X射线衍射纳米晶粉末模拟软件对称性自由度

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Advanced strategies for combinational immunotherapy of cancer based on polymeric nanomedicines

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BMEMat(BioMedical engineering materials) 2024年第2期2卷 7-33页

作者： Kaisheng You Qi Wang Mohamed Syazwan Osman Dongpyo Kim Qian Li Chao Feng Lei Wang Kuikun Yang School of Life Science and Technology School of Chemistry and Chemical EngineeringHarbin Institute of TechnologyHarbinChina State Key Laboratory for Organic Electronics and Information Display&Institute of Advanced Materials Nanjing University of Posts&TelecommunicationsNanjingChina EMZI-UiTM Nanoparticles Colloids&Interface Industrial Research Laboratory(NANO-CORE) Centre for Chemical Engineering StudiesUniversiti Teknologi MARACawangan Pulau PinangMalaysia Department of Chemical Engineering Center for Intelligent Microprocess of Pharmaceutical Synthesis(CIMPS)Pohang University of Science and Technology(POSTECH)PohangRepublic of Korea Department of Neurology The Second Affiliated Hospital of Harbin Medical UniversityHarbinChina College of Marine Life Science Ocean University of ChinaQingdaoChina

Although immunotherapy has revolutionized cancer therapy by providing efficient tumor growth suppression,long-term protection from recurrence as well as minimized side effects,the low response rate significantly limits the clinical application of immunotherapy in board types of solid *** order to improve the therapeutic efficacy,conventional therapies including radiotherapy,chemotherapy,phototherapy and chemodynamic therapy are employed to combine with immunotherapy to elicit stronger antitumor immune *** nanomedicines are frequently utilized in synergistic immunotherapy and other therapies owing to their tunable physiochemical properties,high drug loading capacity,ease of modification and low *** elaborate design and tailored properties,polymer nanomedicines can significantly enhance antitumor efficacy by enhancing tumor specificity,priming immune cells and amplifying immune responses in ***,until now,there is no review solely dedicated to the comprehensive development of polymer-based platforms for combinational immunotherapy of ***,this paper summarizes latest advances in the design,fabrication and application of polymer nanomedicines in combinational immunotherapy and traditional antitumor strategies including radiotherapy,chemotherapy,photothermal therapy,photodynamic therapy and other *** outlook on the trajectory and potential challenges of polymer nanomedicines in bridging the gap between immunotherapy and conventional therapies is also discussed.

关键词： drug delivery immunotherapy polymer nanomedicine synergistic therapy

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Self-biased magnetoelectric switching at room temperature in three-phase ferroelectric-antiferromagnetic-ferrimagnetic nanocomposites (vol 4, pg 333, 2021)

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NATURE electronics 2021年第6期4卷 448-448页

作者： Wu, Rui Zhang, Di Maity, Tuhin Lu, Ping Yang, Jie Gao, Xingyao Zhao, Shishun Wei, Xiucheng Zeng, Hao Kursumovic, Ahmed Tian, Guang Li, Weiwei Yun, Chao Wang, Yongqiang Ren, Zengyao Zhou, Ziyao Liu, Ming Zhang, Kelvin H. L. Jia, Quanxi Yang, Jinbo Wang, Haiyan MacManus-Driscoll, Judith L. Department of Materials Science & Metallurgy University of Cambridge Cambridge UK Materials Engineering Purdue University West Lafayette IN USA Sandia National Laboratories Albuquerque NM USA State Key Laboratory for Artificial Microstructure and Mesoscopic Physics School of Physics Peking University Beijing People’s Republic of China Electronic Materials Research Laboratory Key Laboratory of the Ministry of Education & International Center for Dielectric Research Xi’an Jiaotong University Xi’an People’s Republic of China Department of Physics University at Buffalo—the State University of New York Buffalo NY USA Materials Science and Technology Division Los Alamos National Laboratory Los Alamos NM USA School of Materials Science and Engineering University of Science and Technology Beijing Beijing People’s Republic of China State Key Laboratory of Physical Chemistry of Solid Surfaces College of Chemistry and Chemical Engineering Xiamen University Xiamen People’s Republic of China Department of Materials Design and Innovation University at Buffalo—the State University of New York Buffalo NY USA

Magnetoelectric systems could be used to develop magnetoelectric random access memory and microsensor devices. One promising system is the two-phase 3-1-type multiferroic nanocomposite in which a one-dimensional magnetic column is embedded in a three-dimensional ferroelectric matrix. However, it suffers from a number of limitations including unwanted leakage currents and the need for biasing with a magnetic field. Here we show that the addition of an antiferromagnet to a 3-1-type multiferroic nanocomposite can lead to a large, self-biased magnetoelectric effect at room temperature. Our three-phase system is composed of a ferroelectric Na0.5Bi0.5TiO3matrix in which ferrimagnetic NiFe2O4nanocolumns coated with antiferromagnetic p-type NiO are embedded. This system, which is self-assembled, exhibits a magnetoelectric coefficient of up to 1.38 × 10–9s m–1, which is large enough to switch the magnetic anisotropy from the easy axis (Keff= 0.91 × 104J m–3) to the easy plane (Keff= –1.65 × 104J m–3).

关键词： Nanocomposites

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Mechanism of defect evolution in H^(+)and He^(+)implanted InP

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Chinese Physics B 2021年第8期30卷 70-74页

作者： Ren-Jie Liu Jia-Jie Lin N Daghbouj Jia-Liang Sun Tian-Gui You Peng Gao Nie-Feng Sun Min Liao Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education School of Materials Science and EngineeringXiangtan UniversityXiangtan 411105China Hunan Provincial Key Laboratory of Thin Film Materials and Devices School of Materials Science and EngineeringXiangtan UniversityXiangtan 411105China State Key Laboratory of Functional Materials for Informatics Shanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghai 200050China China Nanhu Academy of Electronics and Information Technology Jiaxing 314000China Department of Control Engineering Faculty of Electrical EngineeringCzech Technical University in PragueTechnick´a 216000 Prague 6Czechia Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijing 100049China Science and Technology on Power Sources Laboratory Tianjin Institute of Power SourcesTianjin 300384China The 13th Research Institute CETCShijiazhuang 050051China

The defect evolution in InP with the 75 keV H^(+)and 115 keV He^(+)implantation at room temperature after subsequent annealing has been investigated in *** the same ion implantation fluence,the He^(+)implantation caused much broader damage distribution accompanied by much higher out-of-plane strain with respect to the H^(+)implanted *** annealing,the H^(+)implanted InP did not show any blistering or exfoliation on the surface even at the high fluence and the H2 molecules were stored in the heterogeneously oriented platelet ***,the He molecules were stored into the large bubbles which relaxed toward the free surface,creating blisters at the high fluence.

关键词： ion implantation defect evolution ion-slicing damaged band

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