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16th Annual Conference and 5th International Conference on Chinese Society of micro-Nano technology, CSMNT 2014

作者： Lei, Yiming Wen, Zhiyu Chen, Li Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology Chongqing University China Microsystem Research Center of Chongqing University Chongqing400030 China

ISBN: (纸本)9783038354628

This paper presents two electromagnetic vibration energy harvesters based on micro-electro-mechanical (MEMS) technology. Two prototypes with different vibration structures were designed and fabricated. The energy harvester includes a permanent magnet attached on vibration structure (resonator) made by Si and a fixed wire-wound coil, with the total volume of 0.9 cm3. Two energy harvesters with different resonator are tested and compared. Experiments show that: in the same acceleration and a load resistance, the resonant frequency of prototype B is approximately 95% of prototype A;The peak-peak voltage and the maximum power of prototype B is 1.6 times and 2.7 times of prototype A respectively. The test results was analyzed simply and it indicated that the electromagnetic energy harvesting with the spring B has better performance;also proved that the potential ability of the non-linear spring could extend the frequency bandwidth and improve output voltage. © (2015) Trans Tech Publications, Switzerland.

关键词： Electromagnetic induction

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Fabrication of aluminum nitride films by reactive pulse DC magnetron sputtering for vibration energy harvester

Fabrication of aluminum nitride films by reactive pulse DC m...

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16th Annual Conference and 5th International Conference on Chinese Society of micro-Nano technology, CSMNT 2014

作者： Shang, Zhengguo Li, Dongling Wang, Shengqiang National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University Chongqing China Microsystem Research Center of Chongqing University Chongqing China

ISBN: (纸本)9783038354628

Aluminum nitride(AlN) film as a piezoelectric material has been used widely, particularly in vibration energy harvester due to its unique and enhanced properties such as high temperature resistance and compatibility with CMOS processes. In this work, AlN film with (002) preferred orientation was prepared on silicon wafers by pulse DC reactive magnetron sputtering(RMS), and the properties such as peak intensity, full width at half maximum (FWHM) and surface morphology were investigated by x-ray diffraction (XRD) and scanning electron microscopy (SEM). The preferred orientation was found to be sensitive to deposition conditions such as gas flow rate, power, bottom electrodes materials and substrates temperature. The results shows that the intensity was 1.1×105 counts, the FWHM was 1.9°when the temperature was 260°C. The film was used to fabricate the vibrated energy harvester successful and the power density reached about 3000uW/cm3 at the vibration frequency under 1g acceleration. © (2015) Trans Tech Publications, Switzerland.

关键词： Magnetron sputtering

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Numerical optimization approach of the gap between the magnet and coil for electromagnetic vibration energy harvesters design

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Key Engineering Materials 2015年 645卷 1214-1222页

作者： Lei, Yiming Wen, Zhiyu Key Laboratory of Fundamental Science on Micro/Nano Device and System Technology Chongqing University China National Center for International Research of Micro/Nano System and New Material Technology Chongqing University China Micro system Research Center of Chongqing University Chongqing China

In the design of the micro electromagnetic vibration harvester, an important goal is maximization of the magnetic flux linkage gradient, which directly determines the induced voltage and output power of the electromagnetic vibration harvester. This paper established a numerical model based on structure of the electromagnetic vibration energy harvester. An analytic expression for the magnetic field of rectangular permanent magnets is used to build up an electromagnetic coupling model. The magnetic field distribution of the rectangular permanent magnet was analyzed. The effects of the gap between the magnet and the coil on the load voltage of the electromagnetic vibration energy harvester were investigated. According to the formula, the magnetic flux linkage and flux gradient were calculated to optimize the geometrical parameter of the magnet and coil. The method and boundary conditions of optimizing the gap between the magnet and coil were presented. The maximum output voltage can be obtained by optimizing the gap between the magnet and the coil. A simple prototype was fabricated and measured to validate the theoretical deducing and the feasibility of method. © 2015 Trans Tech Publications, Switzerland.

关键词： Energy harvesting

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Enrichment efficiency optimization of dielectrophoresis cell chip based on interdigitated microelectrodes array

Enrichment efficiency optimization of dielectrophoresis cell...

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16th Annual Conference and 5th International Conference on Chinese Society of micro-Nano technology, CSMNT 2014

作者： Gu, Wenwen Huang, Jie Department of Electronic and Control Engineering College of Engineering and Technology Southwest University Chongqing400715 China National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology Chongqing University Chongqing400030 China

ISBN: (纸本)9783038354628

At present, the majority dielectrophoresis chip designs optimize their performance by electric simulation and fluid field simulation. The lack of further cells force analysis and movement prediction results in a limited cell dielectrophoresis enrichment efficiency. The HepG2 hepatoma carcinoma cell movement under the action of dielectrophoresis force, fluid force and gravity was analyzed respectively by Comsol Multiphysics software. The preliminary optimization conditions for the cell enrichment were obtained. According to the simulation results, the experiments were carried out to investigate the enrichment effect of the HepG2 hepatoma carcinoma cells. The experiment result demonstrated the enrichment efficiency of HepG2 hepatoma carcinoma cells was reached to 88.89% under the 5 V amplitude and 4 MHz frequency sinusoidal signal excitation. © (2015) Trans Tech Publications, Switzerland.

关键词： Efficiency

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LED induced fluorescence detector integrated in microfluidic cell chip

LED induced fluorescence detector integrated in microfluidic...

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作者： Gu, Wenwen Huang, Jie Tan, Weimin College of Engineering and Technology Southwest University No. 2 Tiansheng Road BeiBei District Chongqing400715 China National Key Laboratory of Fundamental Science of Micro Nano-Device and System Technology Chongqing University No. 174 Shazheng Shapingba Chongqing400044 China

A light-emitting diode (LED) induced fluorescence detector for the microfluidic cell chip has been proposed in this contribution. Compared with the other competitor, the optical path does not require re-calibration after the microfluidic chip has been reloaded and relocated. Last but not the least, the system has a compact size and is more energy efficient. The model selection of the excitation light module, filter sets, aperture and photoelectric detector were analysed. The angle between the exciting light path and fluorescence optical path was optimised to be 135 degrees by experiment. The optimal value of photomultiplier (PMT) working voltage and LED working current were experimentally optimised to be 3.5 V and 200 mA. HepG2 hepatoma carcinoma cells were used to validate the cell counting function of the fluorescence detector. The experimental results showed that the output was peak signals that can be obviously distinguished from background noise;there were eight peak signals with an average value of 0.7 V within 250 s, which agreed with that of fluorescence microscope imaging results. It provides a new technological approach for novel micro total cell analysis system. Copyright © 2015 Inderscience Enterprises Ltd.

关键词： microfluidic chips

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In situ TEM/SEM electronic/mechanical characterization of nano material with MEMS chip

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Journal of Semiconductors 2014年第8期35卷 1-9页

作者：王跃林李铁张啸曾鸿江金钦华 Science and Technology on Micro-System Laboratory Shanghai Institute of Microsystem and Information TechnologyChinese Academy of Sciences

Our investigation of in situ observations on electronic and mechanical properties of nano materials using a scanning electron microscope （SEM） and a transmission electron microscope （TEM） with the help of tradi- tional micro-electro-mechanical system （MEMS） technology has been reviewed. Thanks to the stability, continuity and controllability of the loading force from the electrostatic actuator and the sensitivity of the sensor beam, a MEMS tensile testing chip for accurate tensile testing in the nano scale is obtained. Based on the MEMS chips, the scale effect of Young＇s modulus in silicon has been studied and confirmed directly in a tensile experiment using a transmission electron microscope. Employing the nanomanipulation technology and FIB technology, Cu and SiC nanowires have been integrated into the tensile testing device and their mechanical, electronic properties under different stress have been achieved, simultaneously. All these will aid in better understanding the nano effects and contribute to the designation and application in nano devices.

关键词： MEMS nanoscale tensile in situ TEM/SEM

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Acoustically driven microfluidic devices based on hexagonal phononic crystal structures

Acoustically driven microfluidic devices based on hexagonal ...

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International Conference on Solid State Sensors and Actuators (TRANSDUCERS)

作者： D. Feng D. H. Xu B. Xiong Y. L. Wang University of Chinese Academy of Sciences Beijing CHINA Science and Technology on Micro-system Laboratory Chinese Academy of Science Shanghai CHINA

This paper demonstrates a hexagonal phononic crystal structure based microfluidic device, which is actuated by surface acoustic waves, for centrifugation of micro particles in microliter droplet. In this work, the phononic structure interacts with the acoustic waves, providing reflection, scattering and diffraction, causes asymmetry on the propagation path. Thus, at the interface of the silicon and liquid, the acoustic waves could only be refracted into part of the droplet, and results in acoustic streaming in the droplet. Then, by recirculation, angular momentum will be induced within the sample drop and efficient centrifugation of micro particles could be performed. Advantages of this technique include fast manipulation speed, simple electrode structures, and wide actuating frequency range.

关键词： microfluidics Silicon Surface acoustic waves Scattering Crystals

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Highly precise and efficient cell separation with parylene c micropore arrayed filtration membrane 19

Highly precise and efficient cell separation with parylene c...

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19th International Conference on Miniaturized systems for Chemistry and Life sciences, microTAS 2015

作者： Liu, Y. Wang, W. Wu, W. Li, H. Sun, Y. Institute of Microelectronics Peking University Beijing100871 China National Key Laboratory of Science and Technology on Micro/Nano Fabrication 100871 China Innovation Center for Micro-Nano-Electronics and Integrated System Beijing100871 China No. 1 Hospital of Peking University Beijing100871 China School of Biological Science and Medical Engineering Beihang University Beijing100191 China

ISBN: (纸本)9780979806483

Very large scale micropore array has been recognized as a promising tool for separation and enrichment of rare targeted cells from a large sample volume. A high cell separation performance is strongly dependent on a small interspace between the separation pores (smaller than radius of the cell to avoid non-specific adhesion). Parylene C is a widely-used polymer in the MEMS for flexible thin film device preparation and some Parylene C based filtration devices have been applied for cell separation. This paper demonstrated a highly precise and efficient cell separation at a very high throughput driven only by the gravity with a very large scale (640000 micropores in 11 mm × 11 mm area) Parylene C micropore arrayed filtration membrane of ultra-high porosity. © 15CBMS-0001.

关键词： Cells

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Self-assembled MnO2 nanostructures for electrochemical capacitive energy storage

Self-assembled MnO2 nanostructures for electrochemical capac...

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第七届中国储能与动力电池及其关键材料学术研讨与技术交流会

作者： Yuxin Zhang Ming Huang Fei Li Min Kuang Shi Jin Zhu College of Materials Science and Engineering Chongqing University National Key Laboratory of Fundamental Science of Micro/Nano-Devices and System Technology Chongqing University

We would like to introduce the self-assembly of MnO nanostructures with controllable morphology for electrochemical supercapacitor,including mesoporous MnO nanotubes and their arrays,carbon-MnO coaxial nanotubes,CuO/M... 详细信息

关键词： MnO Self-assembled MnO2 nanostructures for electrochemical capacitive energy storage

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Self-assembled MnO2 nanostructures for electrochemical capacitive energy storage

Self-assembled MnO2 nanostructures for electrochemical capac...

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第二届海峡两岸功能材料科技与产业峰会（2015）

We would like to introduce the self-assembly of Mn O2 nanostructures with controllable morphology for electrochemical supercapacitor,including mesoporous Mn O2 nanotubes and their arrays,carbon-Mn O2 coaxial nanotubes,Cu O/Mn O2,Mn O2/diatomite,Ti O2/Mn O2,Co3O4-Sn O2/Mn O2,Mn O2-Ni foam,Mn O2-CNTs-Ni foam and Mn O2-Co3O4-Ni foam nanostructures[1-11].Noteworthily,it is the first time to synthesize

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