Manufacturing and integration of micro-electro-mechanical systems (MEMS) devices and integrated circuits (ICs) by wafer bonding often generate problems caused by thermal properties of materials. This paper present...
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Manufacturing and integration of micro-electro-mechanical systems (MEMS) devices and integrated circuits (ICs) by wafer bonding often generate problems caused by thermal properties of materials. This paper presents a low temperature wafer direct bonding process assisted by 02 plasma. Silicon wafers were treated with wet chemical cleaning and subsequently activated by 02 plasma in the etch element of a sputtering system. Then, two wafers were brought into contact in the bonder followed by annealing in N2 atmosphere for several hours. An infrared imaging system was used to detect bonding defects and a razor blade test was carried out to determine surface energy. The bonding yield reaches 90%--95% and the achieved surface energy is 1.76 J/m2 when the bonded wafers are annealed at 350 ~C in N2 atmosphere for 2 h. Void formation was systematically observed and eli-mination methods were proposed. The size and density of voids greatly depend on the annealing temperature. Short O2 plasma treatment for 60 s can alleviate void formation and enhance surface energy. A pulling test reveals that the bonding strength is more than 11.0 MPa. This low temperature wafer direct bonding process provides an efficient and reliable method for 3D integration, system on chip, and MEMS packaging.
A new packet-selection based transmission scheme is proposed on a dual-hop link with buffer aided amplify-and-forward relay, where the relay with a buffer can record the channel information of source-relay hop and sto...
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ISBN:
(纸本)9781479944484
A new packet-selection based transmission scheme is proposed on a dual-hop link with buffer aided amplify-and-forward relay, where the relay with a buffer can record the channel information of source-relay hop and store the received packets. In order to satisfy the constraint of equivalent end-to-end SNR, the relay may pick up a packet in the buffer to transmit, with consideration of the channel statuses of both the source-relay hop and the relay-destination hop. Therefore, by adjusting the packet transmission order in the relay, the outage probability can be decreased in the proposed transmission scheme. Both theoretical analyses and simulation results show that the proposed scheme outperforms traditional ones by a significant margin of 2-4 dB gain in terms of outage probability.
A visualization method to monitor micro metal crack propagation is presented in this *** a real-time non-contact micro crack detection method,it can provide a visualization signal by the enhanced photoluminescence int...
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A visualization method to monitor micro metal crack propagation is presented in this *** a real-time non-contact micro crack detection method,it can provide a visualization signal by the enhanced photoluminescence intensity of quantum dots(QDs)mixed into an epoxy resin film.
A phenomenological thermodynamic theory is applied to investigate the effect of misfit strgin and electric field on the electrocaloric effect of P(VDF-TrFN)/SrTiO3 bilayer thin films. Theoretical results indicate th...
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A phenomenological thermodynamic theory is applied to investigate the effect of misfit strgin and electric field on the electrocaloric effect of P(VDF-TrFN)/SrTiO3 bilayer thin films. Theoretical results indicate that the low electric field results in the decrease of the average polarization with the increase of the relative thickness of SrTi03 layer, and the high electric field has an opposite effect on it. Moreover, the electroealoric effect strongly depends on the electric field. The low electric field and the small field change can lead to a maximum of the electrocaloric effect, meanwhile the high electric field or the large field change results in the opposite trend.
This paper presents an experimental method to investigate the plastic and creep behavior of single crystal silicon (SCS) microstructure at high temperature. The relationship between plastic deformation and structure d...
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Seismic signal is widely used in ground vehicle classification due to its inherent characteristics. But the generalization accuracy of classifier is heavily degraded due to different underlying geologies. To overcome ...
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The Ge doped Sb2Te thin films Ge2Sb2Te5, Ge0.15Sb2Te and Ge0.61Sb2Te) were deposited by magnetron co-sputtering using Ge and Sb2Te targets. Ge doping effect on the phase transition behaviors and thermal conductivity o...
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We report a simple and time-saving hydrothermal approach for the synthesis of singlecrystalline KNbO3 nanowires with tunable widths, starting from KNb3O8 nanobelts, and the ferroelectric properties of individual nanow...
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In this paper, a novel square silicon nanoholes light-trapping structure of solar cells was prepared by improved electroless etching method, which is different from the irregular nanoholes and round nanoholes reported...
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