检索结果-内蒙古大学图书馆

A novel SOI pressure sensor for high temperature application

Journal of Semiconductors 2015年第1期36卷 120-124页

作者：李赛男梁庭王伟洪应平郑庭丽熊继军 Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China) Ministry of Education Ministry of Education and Science Technology on Electronic Test & Measurement Laboratory. Department of Electronic Science and technology North University of China

The silicon on insulator（SOI） high temperature pressure sensor is a novel pressure sensor with highperformance and high-quality. A structure of a SOI high-temperature pressure sensor is presented in this *** key factors including doping concentration and power are analyzed. The process of the sensor is designed with the critical process parameters set appropriately. The test result at room temperature and high temperature shows that nonlinear error below is 0.1%, and hysteresis is less than 0.5%. High temperature measuring results show that the sensor can be used for from room temperature to 350℃ in harsh environments. It offers a reference for the development of high temperature piezoresistive pressure sensors.

关键词： SOI high temperature pressure sensor doping concentration power

来源：评论

学校读者我要写书评

暂无评论

Design and measurement of a piezoresistive ultrasonic sensor based on MEMS

引用

Journal of Semiconductors 2013年第7期34卷 116-122页

作者：于佳琪何常德宛克敬廉德钦薛晨阳张文栋 Key Laboratory of Instrumentation Science&Dynamic Measurement Ministry of EducationNorth University of China Key Laboratory of Science and Technology on Electronic Test & Measurement North University of China

A kind of piezoresistive ultrasonic sensor based on MEMS is proposed,which is composed of a membrane and two side beams.A simplified mathematical model has been established to analyze the mechanical properties of the *** the basis of the theoretical analysis,the structural size and layout location of the piezoresistors are determined by simulation *** boron-implanted piezoresistors located on membrane and side beams form a Wheatstone bridge to detect acoustic *** membrane-beam microstructure is fabricated integrally by MEMS manufacturing ***,this paper presents the experimental characterization of the ultrasonic sensor,validating the theoretical model used and the simulated *** sensitivity reaches -116.2 dB（0 dB reference = 1 V/μbar,31 kHz）,resonant frequency is 39.6 kHz,direction angle is 55°.

关键词： MEMS piezoresistive ultrasonic sensor ANSYS membrane-beams

来源：评论

学校读者我要写书评

暂无评论

An integrated MEMS piezoresistive tri-axis accelerometer

引用

Journal of Semiconductors 2013年第10期34卷 76-82页

作者：张永平何常德于佳琪杜春晖张娟婷丑修建张文栋 Key Laboratory of Instrumentation&Science Dynamic Measurement Ministry of EducationNorth University of China Key Laboratory of Science Technology on Electronic Test&Measurement North University of China

An integrated MEMS accelerometer has been designed and fabricated. The device, which is based on the piezoresistive effect, accomplishes the detection of three components of acceleration by using piezoresistors to compose three Wheatstone bridges that are sensitive to the only given orientation. The fabrication of the accelerometer is described, and the theory behind its operation developed. Experimental results on sensitivity, crossaxis-coupling degree, and linearity are presented. The sensitivity of X, Y and Z were 5.49 mV/g, 5.12 mV/g and 4.82 mV/g, respectively; the nonlinearity of X, Y and Z were 0.01%, 0.04% and 0.01%, respectively; the crossaxis-coupling factor of X axis to Y axis and Z axis are 0.119% and 2.26%; the cross-axis-coupling factor of Y axis to X axis and Z axis are 0.157% and 4.12%; the cross-axis-coupling factor of Z axis to X axis and Y axis are 0.511% and 0.938%. The measured performance indexes attain accurate vector-detection in practical applications, and even at a navigation level. In conclusion, the accelerometer is a highly integrated sensor.

关键词： accelerometer integration piezoresistive tri-axis MEMS

来源：评论

学校读者我要写书评

暂无评论

Analysis of Second-order Radial Mode Dips in Race-track Optical Ring Resonator Based on SOI Rib Waveguide

Analysis of Second-order Radial Mode Dips in Race-track Opti...

引用

8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

作者： Wei Liping Xue Chenyang Zang Junbin Cui Danfeng Wang Yonghua Zhang Wendong Science and Technology on Electronic Test & Measurement Laboratory North University of China

ISBN: (纸本)9781467363525;9781467363518

In this paper, detailed design and analysis of a polarization mode splitting resonator based on silicon-on-insulator rib waveguide is presented. By analyzing the mode birefringence in the ultra-small rib waveguide, the directional coupler is introduced to the micro-ring resonator to realize the splitting of the quasi-TE and quasi-TM polarization modes from the same output port in specific wavelength range. It is demonstrated that after splitting the quasi-TM polarization mode, the Q value of the quasi-TE polarization mode is 23000 +/- 1000, about twice of that without splitting the quasi-TM polarization mode. This novel characteristic of race-track ring resonators is quite promising in many applications of optical components, such as the electro-optical modulators.

关键词： rib waveguide race-track directional coupler polarization splitting

来源：评论

学校读者我要写书评

暂无评论

Coupled resonator-induced transparency on a three-ring resonator

引用

Chinese Physics B 2018年第7期27卷 371-375页

作者： Xinquan Jiao Haobo Yu Miao Yu Chenyang Xue Yongfeng Ren Science and Technology on Electronic Test and Measurement Laboratory North University of ChinaTaiyuan 030051China Key Laboratory of Instrumentation Science ＆ Dynamic Measurement（Ministry of Education） North University of ChinaTaiyuan 030051China

The coupled resonator-induced transparency （CRIT） phenomenon, which is analogous to electromagnetically induced transparency in atomic systems, can occur in an original integrated optical resonator system due to the coherent interference of the coupled optical resonators. The system was composed of three ring resonators on silicon, each with the same cavity size, and the optical coupling to the input and output ports was achieved using grating with a power coupling efficiency of 36%. A CRIT resonance whose spectrum shows a narrow transparency peak with a low group velocity was demonstrated. The quality factor of the ring resonator can attain a value up to 6x 104, and the harmonic wavelength can be controlled by adjusting the temperature. The through and drop transmission spectra of the resonator are reconciled well with each other and also consistent well with the theoretical analysis.

关键词： coupled resonator-induced transparency three-ring resonator coupling efficiency transmission spectra quality factor

来源：评论

学校读者我要写书评

暂无评论

A Bionic Fish Cilia Median-Low Frequency Three-Dimensional Piezoresistive MEMS Vector Hydrophone

引用

Nano-Micro Letters 2014年第2期6卷 136-142页

作者： Guo-jun Hang Zhen Li Shu-juan Wu Chen-yang Xue Shi-e Yang Wen-dong Zhang School of Marine Science and Technology Northwestern Polytechnical University Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of EducationNorth University of China Key Laboratory of Science and Technology on Electronic Test & Measurement North University of China

A bionic fish cilia median-low frequency three-dimensional MEMS vector hydrophone is reported in this paper. The piezoresistive reasonable position was obtained through finite element analysis by ANSYS and the structure was formed by MEMS processes including lithography, ion implantation, PECVD and etching,etc. The standing wave barrel results show that the lowest sensitivity of the hydrophone is-200 d B and reach up to-160 d B(in which the voltage amplification factor is 300). It has a good frequency response characteristics in 25 Hz ～ 1500 Hz band. Directivity tests displayed that the hydrophone has a good "8"-shaped directivity,in which the resolution is not less than 30 d B, and asymmetry of the maximum axial sensitivity value is less than 1.2 d B.

关键词： MEMS vector hydrophone Bionic ANSYS Median-low frequency

来源：评论

学校读者我要写书评

暂无评论

measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology

引用

Journal of Zhejiang University-science C(Computers and electronics) 2013年第4期14卷 258-263页

作者： Ji-jun XIONG Shi-jun ZHENG Ying-ping HONG Jun LI Ying-lin WANG Wei WANG Qiu-lin TAN Key Laboratory of Instrumentation Science & Dynamic Measurement North University of China MOE Science and Technology on Electronic Test & Measurement Laboratory North University of China The Second Research Institute of China Electronics Technology Group Corporation

High temperature co-fired ceramics(HTCCs) have wide applications with stable mechanical properties,but they have not yet been used to fabricate *** introducing the wireless telemetric sensor system and ceramic structure embedding a pressure-deformable cavity,the designed sensors made from HTCC materials(zirconia and 96% alumina) are fabricated,and their capacities for the pressure measurement are tested using a wireless interrogation *** the fabricated sensor,a study is conducted to measure the atmospheric pressure in a sealed *** experimental sensitivity of the device is 2 Hz/Pa of zirconia and 1.08 Hz/Pa of alumina below 0.5 MPa with a readout distance of 2.5 *** described sensor technology can be applied for monitoring of atmospheric pressure to evaluate important component parameters in harsh environments.

关键词： High temperature co-fired ceramic (HTCC) Wireless Micro-electro-mechanical systems (MEMS)

来源：评论

学校读者我要写书评

暂无评论

Design of Ultraviolet Molecular Doppler Lidar for Wind measurement at Altitudes of 0.1–20 km

引用

Current Optics and Photonics 2025年第2期9卷 108-119页

作者： Shen, Fahua Shu, Zhifeng Dong, Jihui Yang, Liangliang Zhu, Chengyun Xu, Hua Jiangsu Province Intelligent Optoelectronic Devices and Measurement-Control Engineering Research Center Department of Physics and Electronic Engineering Yancheng Teachers University Jiangsu Yancheng224007 China School of Atmospheric Physics Nanjing University of Information Science & Technology Nanjing210044 China Beijing Huairou Laboratory Beijing101400 China Lidar and Devices Laboratory Southwest Institute of Technical Physics Chengdu610041 China

Since aerosols are rare above the boundary layer, Mie Doppler lidar can generally only detect lowaltitude wind speed. Therefore, for wind-field detection at altitudes of 0.1–20 km a molecular Doppler lidar technology, using a fixed air-gap dual Fabry-Perot etalon as the frequency discriminator and a tunable ultra-violet (UV) laser as the emission source, is proposed. The Rayleigh-Brillouin scattering spectrum of atmospheric molecules is described by a three-Gaussian model, and the parameters of the dual Fabry-Perot etalon are optimized. Simulation results show that in the absence of dust and clouds, the inversion deviation of radial wind speed is less than 0.08 m/s within the radial-wind-speed dynamic range of ±10 m/s at 100 m of altitude;The deviation is less than 0.1 m/s within the radial-wind-speed dynamic range of ±50 m/s above 1.2 km of altitude. By using a 355-nm ultraviolet laser with a pulse energy of 400 mJ and repetition frequency of 50 Hz, and a telescope with a 300-mm aperture, vertical resolution of 26 m @ 0.06–10km and 78 m @ 10–20 km, and temporal resolution of 1 min, the system has an allday radial-wind-speed measurement error of less than 1.8 m/s between 0.1 to 20 km of altitude, and a radial-wind-speed error less than 0.54 m/s at 10 km of altitude. © 2025 Current Optics and Photonics.

关键词： Fabry-Perot interferometers

来源：评论

学校读者我要写书评

暂无评论

A novel algorithmic method for piezoresistance calculation

引用

Journal of Semiconductors 2014年第5期35卷 60-63页

作者：洪应平梁庭葛冰儿王伟郑庭丽李赛男熊继军 Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China) Ministry of Education Ministry of Education and Science Technology on Electronic Test & Measurement Laboratory Department of ElectronicScience and technology North University of China

A novel algorithmic method, based on the different stress distribution on the surface of thin film in an SOI microstructure, is put forward to calculate the value of the silicon piezoresistance on the sensitive film. In the proposed method, we take the Ritz method as an initial theoretical model to calculate the rate of piezoresistance ΔR/R through an integral （the closed area Ω where the surface piezoresistance of the film lies as the integral area and the product of stress σ and piezoresistive coefficient π as the integral object） and compare the theoretical values with the experimental results. Compared with the traditional method, this novel calculation method is more accurate when applied to calculating the value of the silicon piezoresistance on the sensitive film of an SOI pieoresistive pressure sensor.

关键词： piezoresistance integral piezoresistive pressure sensor accuracy

来源：评论

学校读者我要写书评

暂无评论

Plasmonically induced reflection in metal-insulator-metal waveguides with two silver baffles coupled square ring resonator

引用

Chinese Physics B 2017年第12期26卷 312-316页

作者：张志东马连俊高飞张彦军唐军曹慧亮张斌珍王继成闫树斌薛晨阳 Science and Technology on Electronic Test & Measurement Laboratory North University of China School of Instrument and Electronics North University of China Xianyang Office Xi'an Military Representative Bureau PLAGF School of Science Jiangsu Provincial Research Center of Light Industrial Optoelectronic Engineering and TechnologyJiangnan University Science and Technology on Electronic Test & Measurement Laboratory North University of China

A plasmonic waveguide coupled system that is composed of a square ring cavity and a metal-insulator-metal （MIM） waveguide with two silver baffles is proposed. The transmission and reflection properties of the proposed plasmonic system are investigated numerically using the finite element method. The normalized Hz field distributions are calculated to analyze the transmission mode in the plasmonic system. The extreme destructive interference between light mode and dark mode causes plasmonically induced reflection （PIR） window in the transmission spectrum. The PIR window is fitted using the coupled mode theory. The analytical result agrees with the simulation result approximately. In addition, the PIR window can be controlled by adjusting structural parameters and filling different dielectric into the MIM waveguide and the square ring cavity. The results provide a new approach to designing plasmonic devices.

关键词： surface plasmon polaritons plasmonically induced reflection metal-insulator-metal finite element method

来源：评论

学校读者我要写书评

暂无评论

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

请选择保存的检索档案：

请选择收藏分类：

通借通还

建议与咨询 留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

请选择保存的检索档案： 新增检索档案 确定 取消

请选择收藏分类： 新增自定义分类 确定 取消

通借通还

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

请选择保存的检索档案：

请选择收藏分类：