This paper presents the design, fabrication and RF-characterization of SP3T, SP4T and SP6T RF-MEMS switches. All devices are fabricated on a thin silicon substrate. The insertion loss of the SP3T is almost constant fr...
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ISBN:
(纸本)9783981266801
This paper presents the design, fabrication and RF-characterization of SP3T, SP4T and SP6T RF-MEMS switches. All devices are fabricated on a thin silicon substrate. The insertion loss of the SP3T is almost constant from 18 - 40 GHz with a value better than -0.5 dB. The SP4T and SP6T show an insertion loss better than -0.9 dB from 18 - 40 GHz. The isolation is better than -17 dB for all switches in almost all switching states from 18- 40GHz. Furthermore, an on-wafer absorbing Although structure, acting as a quasi 50 LI match is shown, exhibiting a return loss of better than -10 dB for frequencies above 20 Ghz.
In this paper we present a high temperature stable, capacitive RF MEMS switch based on a tungsten-titanium alloy. The evaluation of the temperature stability was done by annealing experiments up to 500degC. Due to an ...
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In this paper we present a high temperature stable, capacitive RF MEMS switch based on a tungsten-titanium alloy. The evaluation of the temperature stability was done by annealing experiments up to 500degC. Due to an intrinsic residual stress the switch features a large out of plane deflection. This allows the combination of high open-state isolation with a moderate pull-in voltage and with high restoring forces. Measurements of the high frequency performance in the 20 to 36 GHz range provided good results for insertion loss and isolation.
作者：
DAVIDSON, SAGRIMM, JGBLUMENAU, PMSCHULTZ, KIKACHELMYER, ALSULLIVAN, LJKEICHER, WEHESS, MPRINCE, AMARTIN, MSteven A. Davidson:is a staff member in the Air Defense Systems Group at MIT Lincoln Laboratory where he has worked for the past six years on a variety of active and passive electro-optic sensors and sensor technology. Dr. Davidson received his BA degree in physics from Williams College
and his MS and Ph.D in physics from the University of Colorado Boulder. His doctoral thesis was on theoretical and experimental research he performed at the National Bureau of Standards on the far-infrared rotational spectra and structure of diatomic molecules. After joining the staff of the Laser Radar Measurements Group at MIT Lincoln Laboratory in December 1987 he became involved in many aspects of laser radar including: E-O modulators for laser radar transmitters and receivers subsystem integration of the Firepond imaging laser radar and an analysis of the IR laser radar images from the Firefly I experiment. He served as the scientific advisor to NASA Wallops Flight Facility for the Firefly II experiment. Dr. Davidson was the project engineer for the Brilliant Eyes Proof-of-Principle (BE PoP) Active Tracking Receiver a sensor which included a laser radar that used single photo-electron events (“photon counting”) and a high bandwidth agile passive angle tracking system. The BE PoP sensor made precision range and angle measurements(˜1 meter and ? μrad respectively) of an unenhanced (“skin track”) sub-orbital spacecraft at a range of 725 km. as part of the Firebird IB experiment. Dr. Davidson was also the project engineer for the follow-on Brilliant Eyes Transportable Testbed Phase I and one of the principle architects of the Gatekeeper sensor (the subject of this paper). LCdr. Mary E. Martin:
USN received her BA and MS in physics from New York University. She entered naval service in 1978 and is currently assigned to the space and naval warfare systems command directed energy division SpaWar 332 Strategic FO Sensor Systems. Her previous assignments include service as the electrical repair officer aboardHolland(AS-3
An airborne passive/active surveillance aircraft-based, electro-optic sensorsystem, named Gatekeeper, is being developed for the US Navy Theater Ballistic Missile Defense Program. The sensor is designed to detect the...
An airborne passive/active surveillance aircraft-based, electro-optic sensorsystem, named Gatekeeper, is being developed for the US Navy Theater Ballistic Missile Defense Program. The sensor is designed to detect theater ballistic missiles (TBMs), either in boost or post-boost phase, and make precision three-dimensional measurements of the TBM's post-boost, ballistic trajectory with sufficient state-vector accuracy for handover to naval, air and land based missile defense systems. The sensor includes a dual-band IRST for acquisition, a precision angle tracker (MWIR focal-plane array and high-bandwidth mirror), and a short-pulse, direct detection laser radar. The sensor subsystems are coupled and controlled by a sophisticated multiprocessor computer control system. The system has a highly compressed engagement timeline resulting in a substantial target handling capacity. This paper describes the sensor, its specifications, and performance in terms of the accuracy of the state-vector, and its target handling capability in a realistic engagement scenario.
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