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38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025

作者： Li, Xiaoru Cheng, Chunlong Yang, Jingwen Zhang, Guoxiang Lu, Zihan Yan, Xuefei Luo, Huahuang Meng, Zekai Ke, Qingqing Sun Yat-sen University School of Microelectronics Science and Technology Zhuhai519082 China Sun Yat-sen University Zhuhai Key Laboratory of Micro-Nano Sensing Technology and Intelligent Detection Zhuhai519082 China

ISBN: (纸本)9798331508890

The paper presents an in-situ Surface Acoustic Wave (SAW) / Bulk Acoustic Wave (BAW) sensor based on P(VDF-TrFE), which is directly integrated onto a metal surface. Characterization results confirm that the P(VDF-TrFE) film is well-suited for fabricating SAW/BAW sensors. The sensor excites multiple BAW modes, enabling temperature sensing with a maximum temperature coefficient of frequency (TCF) of 738 ppm/°C in BAW mode 3, which is six times higher than the reported in-situ BAW devices. In SAW mode 1, the TCF reaches 745 ppm/°C, almost eight times greater than the previous in-situ SAW devices. Moreover, the SAW mode 1 exhibits good linearity across a large strain measurement range of 7000 μϵ, with a sensitivity of 146 Hz/μϵ, surpassing the strain range of the reported in-situ SAW devices by nearly fourfold. Overall, the developed in-situ SAW/BAW sensor features outstanding performance in both temperature and strain sensing, which demonstrates the significant potential for multifunctional and multimodal sensing applications in structural health monitoring (SHM). © 2025 IEEE.

关键词： Acoustic waves

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Photocatalytic synergistic biofilms enhance tetracycline degradation and conversion

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Environmental Science and Ecotechnology 2023年第2期14卷 97-105页

作者： Chuanbao Xiao Jilin Yuan Linyang Li Nianbing Zhong Dengjie Zhong Quanhua Xie Haixing Chang Yunlan Xu Xuefeng He Min Li Intelligent Fiber Sensing Technology of Chongqing Municipal Engineering Research Center of Institutions of Higher Education Chongqing Key Laboratory of Modem Photoelectric Detection Technology and InstrumentChongqing Key Laboratory of Fiber Optic Sensor and PhotodetectorChongqing University of TechnologyChongqing400054China School of Chemistry and Chemical Engineering Chongqing University of TechnologyChongqing400054China

Tetracyclines are refractory pollutants that cause persistent harm to the environment and human ***,it is urgently necessary to develop methods to promote the efficient degradation and conversion of tetracyclines in *** report proposes a photobiocatalytic synergistic system involving the coupling of GeO_(2)/Zn-doped phosphotungstic acid hydrate/TiO_(2)(GeO_(2)/Zn-HPW/TiO_(2))-loaded photocatalytic optical hollow fibers(POHFs)and an algalebacterial *** GeO_(2)/Zn-HPW/TiO_(2) photocatalyst exhibits a broad absorption edge extending to 1000 nm,as well as high-efficiency photoelectric conversion and electron transfer,which allow the GeO_(2)/Zn-HPW/TiO_(2)-coated POHFs to provide high light intensity to promote biofilm *** resulting high photocatalytic activity rapidly and stably reduces the toxicity and increases the biodegradability of tetracycline-containing *** biofilm enriched with Salinarimonas,Coelastrella sp.,and Rhizobium,maintains its activity for the rapid photocatalytic degradation and biotransformation of intermediates to generate the O_(2) required for ***,the synergistic photocatalytic biofilm system developed herein provides an effective and efficient approach for the rapid degradation and conversion of water containing high concentrations of tetracycline.

关键词： Optical hollow fiber GeO_(2)/Zn-doped phosphotungstic acid hydrate/TiO_(2) Algalebacterial biofilm Synergy Tetracycline

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A Novel Monolithic Integration of Light-emitting HEMT with InGaN Quantum Well Insertion Performing as Optoelectronic Devices 21

A Novel Monolithic Integration of Light-emitting HEMT with I...

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21st China International Forum on Solid State Lighting and 10th International Forum on Wide Bandgap Semiconductors, SSLCHINA: IFWS 2024

作者： Zhu, Jijun Yang, Hanlin Wang, Haoyu Hu, Yangyang Yin, Luqiao Zhang, Jianhua Ren, Kailin School of Microelectronics Shanghai University Shanghai200444 China Shanghai Collaborative Innovation Center of Intelligent Sensing Chip Technology Shanghai University Shanghai200444 China Shanghai Key Laboratory of Chips and Systems for Intelligent Connected Vehicle Shanghai University Shanghai200444 China Shanghai Aerospace Control Technology Institute Shanghai201109 China

ISBN: (纸本)9798331541149

Visible light communication (VLC) technology based on GaN light emitting diode (LED) has been widely studied because of its wide bandwidth and high reliability. However, low integration is one of the main factors limiting the development of VLC technology at present. This study reports a novel GaN-based light emitting diode-high electron mobility transistor (LED-HEMT) monolithically integrated device. The light efficiency is improved not only by adding InGaN quantum well layer at the AlGaN/GaN interface, but also thin Ni/Au layer is used as a substitute for the traditional indium tin oxide (ITO) layer to realize the current expansion function, so that the device has faster switching speed and reliable light modulation ability. The influence of gate-source voltage (VGS) and applied drain voltage (VDD) on the control capability of LED-HEMT was studied. The integrated LED-HEMT exhibited output current can reach 309 mA/mm when the HEMT was modulated with VDD = 14 V and VGS = 2 V, which driving capability is better to previous Si-based MOSFETs, demonstrating good output performance. The peak of the emission spectrum is at 445 nm when IDS = 15 mA. This work offers a novel approach to the monolithic integration of LED-HEMT and provides reference for the application of Micro-LED in the fields of visible light communication and optoelectronic detection. ©2024 IEEE.

关键词： Gallium nitride

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A new approach of initial localization for planetary lander with the Bag of Visual Words model

A new approach of initial localization for planetary lander ...

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2024 International Conference on Remote sensing, Mapping, and Geographic Information Systems, RSMG 2024

作者： Feng, Yaxuan Xu, Xiong Xie, Huan Feng, Yongjiu Ye, Zhen Wang, Chao Tong, Xiaohua College of Surveying and Geo-informatics Tongji University Shanghai China Shanghai Key Laboratory for Planetary Mapping and Remote Sensing for Deep Space Exploration Shanghai China Shanghai Institute of Intelligent Science and Technology Shanghai China

ISBN: (纸本)9781510685826

Precise localization of a planetary lander during descent phase is crucial for ensuring a safe landing. Terrain Relative Navigation (TRN) is a critical technology for achieving precise localization in hazardous terrains. Initial localization which aligns the descent image from lander camera with the reference map, is essential for TRN to generate precise localization results. This paper introduces a novel initial localization method utilizing the Bag of Visual Words (BoVW) model to pinpoint the descent image on the global map. This method enhances localization efficiency by narrowing the search range for image-map matching. This approach was validated with both synthesized and actual descent image data from the Mars 2020 mission. © 2024 SPIE.

关键词： Planetary landers

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Multifunctional and Multi-frequency Acoustic Metasurface Based on Reconfigurable Slitted Round Tubes

Multifunctional and Multi-frequency Acoustic Metasurface Bas...

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Progress in Electromagnetic Research Symposium (PIERS)

作者： S. Y. Peng A. L. Song Y. X. Xiang Shanghai Key Laboratory of Intelligent Sensing and Detection Technology School of Mechanical and Power Engineering East China University of Science and Technology Shanghai China

ISBN: (数字)9798350375909

ISBN: (纸本)9798350375916

In recent years, acoustic metasurfaces have been proved to be suitable materials for controlling sound propagation and have unique engineering applications in acoustic field. However, the traditional acoustic metasurface designs usually focus on a single unit structure, which usually achieve the control of sound waves at a single frequency. In addition, it is a great challenge for metasurfaces to change the unit sequence when achieving different functionalities. In order to solve these problems, an acoustic metasurface composed of rotatable slitted round tubes is designed in this paper, which can realize same functionality or multiple functionalities at multiple tunable frequencies at the same time. The basic principle of this acoustic metasurface is based on a coding unit of multiple rotatable slitted round tubes with different characteristic frequencies. Based on the digital coding theory, we can realize the interconversion of logical units "0" and "1" by mechanically adjusting the rotation angle of the slitted round tube, so as to realize the control of the focus position and the realization of the sound beam splitting. Numerical simulation results show that the proposed coding unit can precisely control the focus positions and realize beam splitting at different frequencies by changing the rotational angle of the slitted round tubes. The proposed acoustic metasurface has the advantages of adjustable focus, precise control, multi-beam control and multi-frequency adjustment. Our work has great potential for applications in multifunctional compact acoustic devices and is likely to be used in devices requiring multi-beam control and other functional devices with special dispersion requirements.

关键词： Time-frequency analysis Acoustic devices Metasurfaces Frequency conversion Acoustics Encoding Regulation

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An Omnidirectional EMAT Employing Spiral Coil and Annular Magnets for Enhanced Generation of A0 Mode Lamb Wave

An Omnidirectional EMAT Employing Spiral Coil and Annular Ma...

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Sensor technology and Control (ISSTC), International Symposium on

作者： Xinfeng Guo Junjie Lin Zheng Hu Yanxun Xiang Shanghai Key Laboratory of Intelligent Sensing and Detection Technology East China University of Science and Technology Shanghai China

As a typical noncontact ultrasonic testing method, electromagnetic ultrasonic guided wave testing has received extensive attention in recent years. However, the low energy efficiency and signal-to-noise ratio is especially obvious in omnidirectional electromagnetic acoustic transducers. To solve this problem for noncontact guided wave positioning detction, this article proposes an omnidirectional electromagnetic acoustic transducer (EMAT) for enhanced generation of A0 mode ultrasonic Lamb waves with pure mode in non-ferromagnetic plates. The proposed EMAT consists of a spiral coil and a group of annular magnets. The annular magnets build a special kind of periodic permanent magnets (PPM). The radius difference between the adjacent annular magnets is set to half the wavelength of the desire wave mode to maximize the excitation efficiency. In 2D axisymmetric FE simulations, the distribution of the bias magnetic fields and eddy currents was analyzed, and the mode of the generated guided waves was determined. In experiments, the omnidirectional EMATs were fabricated to verify the performance of generating omnidirectional A0 mode Lamb waves. The results prove the performance of the omnidirectional EMATs for effective generation of pure antisymmetric mode Lamb waves at specific frequency.

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Monolithically Integrated Temperature Sensor Based on p-GaN/AlGaN/GaN Heterostructure 21

Monolithically Integrated Temperature Sensor Based on p-GaN/...

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21st China International Forum on Solid State Lighting and 10th International Forum on Wide Bandgap Semiconductors, SSLCHINA: IFWS 2024

作者： Liu, Qingxin Ren, Kailin Yin, Luqiao Zhang, Jianhua School of Microelectronics Shanghai University Shanghai200444 China Shanghai Key Laboratory of Chips and Systems for Intelligent Connected Vehicle Shanghai University Shanghai200444 China Shanghai Collaborative Innovation Center of Intelligent Sensing Chip Technology Shanghai University Shanghai200444 China Shanghai University Shanghai200444 China

ISBN: (纸本)9798331541149

A monolithically integrated temperature sensor circuit based on a p-GaN/AlGaN/GaN heterojunction is proposed. The sensor comprises two parts: the first part is a temperature-sensitive voltage source formed by a two-dimensional electron gas (2DEG) resistor and a schottky barrier diode (SBD) in series, and the second part is a resistor-transistor logic (RTL) inverter formed by a 2DEG resistor and a p-GaN high electron mobility transistor (HEMT) in series. The output voltage of the temperature-sensitive voltage source is connected to the gate of the p-GaN HEMT in the second part, providing the gate voltage. According to data obtained from TCAD simulation results, the output voltage of the temperature-sensitive voltage source exhibits positive temperature dependence. The output voltage of the RTL inverter exhibits a negative temperature dependence. When the temperature sensor is properly biased, the voltage division between the SBD and the 2DEG resistor in the temperature-sensitive voltage source reallocates as the temperature rises, causing the gate voltage of the connected RTL inverter to increase. This increasement enhances the temperature-induced variation in the RTL inverter's output voltage, increasing the sensitivity of the temperature sensing circuit from 4 mV/K with a fixed gate voltage to 14 mV/K. This simulation demonstrates a compact monolithic integration sensor for monitoring the on-chip temperature of GaN power integrated circuits for protection and control. ©2024 IEEE.

关键词： III-V semiconductors

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Design of A Rayleigh wave EMAT by using Racetrack Coil and Periodic Permanent Magnets

Design of A Rayleigh wave EMAT by using Racetrack Coil and P...

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Sensor technology and Control (ISSTC), International Symposium on

作者： Xinfeng Guo Junjie Lin Zheng Hu Yanxun Xiang Shanghai Key Laboratory of Intelligent Sensing and Detection Technology East China University of Science and Technology Shanghai China

Rayleigh waves are widely used for the detection and characterization of defects nearby the surface in the modern industries. Electromagnetic acoustic transducers (EMATs) have received extensive attention because of the lack of physical coupling. However, the main drawback of the inefficiency in generating and receiving ultrasonic waves restricts the extension and application of Rayleigh wave EMAT. This article proposes a type of Rayleigh wave electromagnetic acoustic transducer, which is consisted of a racetrack coil and a group of periodic permanent magnet array with a special configuration. The configuration of PPMs in the proposed EMAT is different from that in the common sheared-horizontal wave EMATs. The magnet units are magnetization along the width direction. The racetrack coil generates eddy current, and the periodic permanent magnet array provides bias static magnetic fields. The directions of generated Lorentz forces depend on the relative position between the magnet units and the conductors. The center frequency of the generated guided waves depends on the distance between the adjacent magnet units. In 2D FE simulations, different models were established, and the generation efficiencies for Rayleigh wave of vertical and horizontal Lorentz forces were compared. In the experiments, the guided wave EMAT, generating both horizontal and vertical Lorentz forces, was fabricated and used in the experiment system. The results prove the performance of the proposed EMAT for the effective generation Rayleigh waves.

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Compressed sensing for Full Matrix Capture Data Based on Optimal Reconstruction Algorithm

Compressed Sensing for Full Matrix Capture Data Based on Opt...

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6th International Conference on intelligent Computing and Signal Processing (ICSP)

作者： Zhiyuan Zhao Da Teng Lishuai Liu Yanxun Xiang Shanghai Key Laboratory of Intelligent Sensing and Detection Technology East China University of Science and Technology Shanghai China

Ultrasonic phased array total focusing method (TFM) attracts much interest because of high image resolution and large dynamic range. However, the data acquisition method relied on by TFM is full matrix capture (FMC), which generates huge data and brings great pressure. In this paper, the feasibility of compressed sensing (CS) in the reconstruction of ultrasonic FMC data is investigated. Firstly, four greedy algorithms are used to compress and reconstruct the ultrasonic signal, and the optimal algorithm is selected according to the reconstruction accuracy and the influence of sampling rate is considered. Secondly, the optimal algorithm is applied to the reconstruction of undersampled FMC data, and TFM is performed based on reconstructed FMC data. The simulation results demonstrate that excellent reconstruction can be obtained using measurement points less than the Nyquist sampling limitation required, the spatial resolution of TFM imaging of FMC data reconstructed with CS remained unchanged. Finally, experimental verification is carried out. Although the experimental results are not as ideal as the simulation results, FMC data can still be accurately recovered with a small number of measurements and the identification of defects by TFM is guaranteed.

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All laser direct writing process for temperature sensor based on graphene and silver

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Frontiers of Optoelectronics 2024年第1期17卷 45-55页

作者： Qi Li Ruijie Bai Lianbo Guo Yang Gao Shanghai Key Laboratory of Intelligent Sensing and Detection Technology School of Mechanical and Power EngineeringEast China University of Science and TechnologyShanghai 200237China North Automatic Control Technology Institute Taiyuan 030006China Wuhan National Laboratory for Optoelectronics Huazhong University of Science&TechnologyWuhan 430074China

A highly sensitive temperature sensing array is prepared by all laser direct writing(LDW)method,using laser induced silver(LIS)as electrodes and laser induced graphene(LIG)as temperature sensing layer.A finite element analysis(FEA)photothermal model incorporating a phase transition mechanism is developed to investigate the relationship between laser parameters and LIG properties,providing guidance for laser processing parameters selection with laser power of 1–5 W and laser scanning speed(greater than 50 mm/s).The deviation of simulation and experimental data for widths and thickness of LIG are less than 5%and 9%,*** electrical properties and temperature responsiveness of LIG are also *** changing the laser process parameters,the thickness of the LIG ablation grooves can be in the range of 30–120μm and the resistivity of LIG can be regulated within the range of 0.031–67.2Ω・*** percentage temperature coefficient of resistance(TCR)is calculated as−0.58%/°***,the FEA photothermal model is studied through experiments and simulations data regarding LIS,and the average deviation between experiment and simulation is less than 5%.The LIS sensing samples have a thickness of about 14μm,an electrical resistivity of 0.0001–100Ω・m is insensitive to temperature and pressure ***,for a LIS-LIG based temperature sensing array,a correction factor is introduced to compensate for the LIG temperature sensing being disturbed by pressure stimuli,the temperature measurement difference is decreased from 11.2 to 2.6°C,indicating good accuracy for temperature measurement.

关键词： Laser direct writing Temperature sensor Finite element analysis Laser induced graphene Laser induced silver

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