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Mechanical and thermophysical properties of silicon nitride thin films at high temperatures using in-situ MEMS temperature sensors

Mechanical and thermophysical properties of silicon nitride ...

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Proceedings of the 1998 MRS Fall Meeting - Symposium AA,Materials Science of Microelectromechanical Systems (MEMS)

作者： Nieva, Patricia Tada, Haruna Zavracky, Paul Adams', George Miaoulis, Loannis Wong, Peter Microfabrication Laboratory Department of Electrical and Computer Engineering Northeastern University Thermal Analysis of Materials Processing Laboratory College of Engineering Tufts University

The optimization of microelectronic devices and Microelectromechanical Systems (MEMS) technology depends on the knowledge of the mechanical and thermophysical properties of the thin film materials used to fabricate them. The thickness, stoichiometry, structure and thermal history can affect the properties of thin films causing their mechanical and thermophysical properties to diverge from bulk values. Moreover, it is known that the mechanical and thermophysical properties of thin films vary considerably at different temperatures. Bulk properties of semiconductors have been characterized over a wide range of temperatures;however there is limited information on thin film properties of silicon-based compounds such as silicon nitride, specially at high temperatures. In our work, MEMS devices designed to record the localized maximum temperature during high temperature thermal processes, which we call Breaking T-MEMS, will be presented as a way to determine some of the mechanical properties (Young's modulus and fracture strength) and thermophysical properties (coefficient of thermal expansion) of silicon-rich nitride thin films at high temperatures. The Breaking T-MEMS device consists of a thin film bridge suspended over a substrate. During testing, the devices are thermally loaded in tension by heating the sample. The low coefficient of thermal expansion of the film relative to that of the substrate causes the thin film bridge to break at a specific temperature. Through a combination of indirect experimental measurements, analytical expressions, numerical and statistical analysis, and if the experiments are conducted using at least two different substrates of known temperature-dependent coefficients of thermal expansion, some of the material properties of the film can be calculated from the breaking temperatures of various devices. The two candidate materials for the substrate are silicon and aluminum oxide (sapphire).

关键词： Semiconducting films

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Multi-modal medical volumes fusion by surface matching

Multi-modal medical volumes fusion by surface matching

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5th International Symposium on Signal processing and Its Applications, ISSPA 1999

作者： Eldeib, Ayman M. Yamany, Sameh M. Farag, Aly Computer Vision and Image Processing Laboratory University of Louisville Department of Electrical Engineering Louisville KY 40292 United States

ISBN: (纸本)1864354518

Presents a fast, six degrees of freedom, registration technique to accurately locate the position and orientation of medical volumes (e.g. CT, MRI) with respect to each other for the same patient. The technique uses surface registration and maximization of mutual information. We have developed a novel technique for surface registration which produces highly accurate results when registering two different volumes of the same individual generated from the same modality, such as preoperative MR and intraoperative MR volumes. In case surface registration is not able to accurately register the different volumes, the result is enhanced by multi-modal volume registration. The gain of this combination is to have an accurate alignment and to reduce time needed for registration. For the multi-modal volume registration, the maximization of mutual information (MI) as a matching criterion is used based on genetic algorithms (GA) as a search engine. Our results demonstrate that our registration technique allows for fast, accurate, robust and completely automatic registration of multimodality medical volumes. © 1999 IEEE.

关键词： Genetic algorithms

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Analysis of stochastic gradient identification of Hermite polynomial systems with memory

Analysis of stochastic gradient identification of Hermite po...

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5th International Symposium on Signal processing and Its Applications, ISSPA 1999

作者： Celka, P. Bershad, N.J. Vesin, J.M. Department of Electrical Engineering Signal Processing Laboratory Swiss Federal Institute of Technology Lausanne 1015 Switzerland Department of Electrical and Computer Engineering School of Engineering University of California Imine CA 92697 United States

ISBN: (纸本)1864354518

This paper presents analytical and Monte Carlo results for a stochastic gradient adaptive scheme which identifies an orthogonal polynomial-type nonlinear system with memory. The analysis includes recursions for the mean and fluctuation behavior of the adaptive parameters as well computation of the mean-square error increase due to the adaptation process. © 1999 IEEE.

关键词： Mean square error

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Round-off error free fixed-point design of polynomial FIR predictors 33

Round-off error free fixed-point design of polynomial FIR pr...

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33rd Asilomar Conference on Signals, Systems, and computers, ACSSC 1999

作者： Tanskanen, J.M.A. Dimitrov, V.S. Institute of Intelligent Power Electronics Department of Electrical and Communications Engineering Helsinki University of Technology Espoo Finland Laboratory of Signal Processing and Computer Technology Department of Electrical and Communications Engineering Helsinki University of Technology Espoo Finland

ISBN: (纸本)0780357000

We present a novel method for designing polynomial FIR predictors for fixed-point environments. Our method yields filters that perform exact prediction of polynomial signals even with short coefficient word lengths. Under ordinary coefficient truncation or rounding, the prediction capability degrades, or may be totally lost. With the proposed method, the filters are designed so that the predictive properties are exactly preserved in fixed-point implementations. The proposed filter design method is based on integer programming (IP) and can be directly applied to any fixed-point FIR design specifications which can be formulated in a form of linear constraints on the filter coefficients. © 1999 IEEE.

关键词： Polynomials

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Underground imaging based on edge-preserving regularization

Underground imaging based on edge-preserving regularization

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1999 International Conference on Information Intelligence and Systems, ICIIS 1999

作者： Feng, Haihua Castanon, David A. Karl, W. Clem Multi-Dimensional Signal Processing Laboratory Department of Electrical and Computer Engineering Boston University 8 Saint Mary's Street BostonMA02215 United States

ISBN: (纸本)0769504469

Develops approaches for imaging weak-contrast buried objects using data from a ground penetrating radar array. An approximate physical model relating the collected data to the underground objects is developed. This model uses ray optics to represent the air/soil interface, and a Born approximation to model the weak contrast backscattering from buried objects. In order to address both modeling errors and ill-posedness, the proposed image reconstruction algorithms use regularization based on a total variation norm with orientation preference. The algorithms are tested on data generated by nonlinear finite difference time domain electromagnetic simulations. © 1999 IEEE.

关键词： Electromagnetic simulation

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Sprite generation and coding of multiview image sequences

Sprite generation and coding of multiview image sequences

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International Conference on Image Analysis and processing

作者： N. Grammalidis D. Beletsiotis M.G. Strintzis Department of Electrical and Computer Engineering Information Processing Laboratory University of Thessaloniki Thessaloniki Greece

An algorithm to generate background sprite images from multiview image sequences is presented. A dynamic programming algorithm, using a multiview matching cost as well as pure geometrical constraints, is used to provide an estimate of the disparity field and to identify occluded areas. By combining motion, disparity and occlusion information, a sprite image corresponding to the first (main) view at the first time instant is generated. Image pixels from other views that are occluded in the main view are added to the sprite. The sprite coding method defined by MPEG-4 is extended for multiview image sequences, based on the generated sprite. Experimental results are presented, demonstrating the performance of the proposed technique and comparing it with methods using sprite generation from monoscopic sequences.

关键词： Sprites (computer) Image coding Image sequences electrical capacitance tomography Layout Read only memory Image segmentation Cameras MPEG 4 Standard Information processing

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Spatiotemporal segmentation and tracking of objects for visualization of videoconference image sequences

Spatiotemporal segmentation and tracking of objects for visu...

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IEEE International Conference on Multimedia Computing and Systems (ICMCS)

作者： I. Kompatsiaris M.G. Strintzis Information Processing Laboratory Electrical and Computer Engineering Department Aristotle University of Thessaloniki Thessaloniki Greece

A procedure is described for the segmentation, content-based coding and visualization of videoconference image sequences. First, image sequence analysis is used to estimate the shape and motion parameters of the person facing the camera. The foreground object is segmented in a number of subobjects, in order to identify the facial region. For this purpose, we propose the novel procedure of K-Means with connectivity constraint algorithm as a general segmentation algorithm combining several types of information including intensity, motion and compactness. In this algorithm, the use of spatiotemporal regions is introduced since a number of frames is analyzed simultaneously and as a result the same region is present in consequent frames. Based on this information, a 3D ellipsoid is adapted to the person's face using an efficient and robust algorithm. The rigid 3D motion is estimated next using a least median of squares approach. Finally a VRML file is created containing all the above estimated information; this file may be viewed by using any VRML 2.0 compliant browser.

关键词： Spatiotemporal phenomena Image segmentation Motion estimation Image coding Visualization Videoconference Image sequences Image sequence analysis Shape Motion analysis

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Spatiotemporal segmentation and tracking of objects in image sequences

Spatiotemporal segmentation and tracking of objects in image...

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IEEE International Conference on Image processing

作者： J. Kompatsiaris M.G. Strintzis Information Processing Laboratory Electrical and Computer Engineering Department Aristotle University of Thessaloniki Thessaloniki Greece

In this paper a procedure is described for the segmentation of image sequences. For this purpose, we propose the novel procedure of K-Means with connectivity constraint algorithm as a general segmentation algorithm combining several types of information including intensity, motion and compactness. The algorithm is extended so as to separate and track objects appearing in consequent frames of an image sequence. In this algorithm, the use of spatiotemporal regions is introduced since a number of frames is analyzed simultaneously and as a result the same region is present in consequent frames. Experimental results demonstrate the usage and performance of the algorithm.

关键词： Spatiotemporal phenomena Image segmentation Image sequences Clustering algorithms Standards development Layout Information processing Laboratories Video coding MPEG 4 Standard

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Free-form surface registration using surface signatures

Free-form surface registration using surface signatures

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International Conference on computer Vision (ICCV)

作者： S.M. Yamany A.A. Farag Computer Vision and Image Processing Laboratory Electrical Engineering Department University of Louisville Louisville KY USA

The paper introduces a new free-form surface representation scheme for the purpose of fast and accurate registration and matching. Accurate registration of surfaces is a common task in computer vision. The proposed representation scheme captures the surface curvature information seen from certain points and produces images called surface signatures at these points. Matching signatures of different surfaces enables the recovery of the transformation parameters between these surfaces. We propose to use template matching to compare the signature images. To enable partial matching, another criterion, the overlap ratio, is used. This representation scheme can be used as a global representation of the surface as well as a local one and performs near real time registration. We show that the signature representation can be used to match objects in 3D scenes in the presence of clutter and occlusion. Applications presented include free-form object matching, multimodal medical volume registration and dental teeth reconstruction from intra-oral images.

关键词： Shape computer vision Surface reconstruction Application software Biomedical imaging Image processing Layout Dentistry Teeth Image reconstruction

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Multi-modal medical volumes fusion by surface matching

Multi-modal medical volumes fusion by surface matching

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International Symposium on Signal processing and Its Applications (ISSPA)

作者： A.M. Eldeib S.M. Yamany A. Farag Computer Vision and Image Processing Laboratory Department of Electrical Engineering University of Louisville Louisville KY USA

关键词： Biomedical imaging Medical diagnostic imaging Computed tomography Mutual information Magnetic resonance imaging Data mining Magnetic resonance Genetic algorithms Shape computer vision

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