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Microsphere-assisted hyperspectral imaging:super-resolution,non-destructive metrology for semiconductor devices

Light(Science & Applications) 2024年第6期13卷 1098-1111页

作者： Jangryul Park Youngsun Choi Soonyang Kwon Youngjun Lee Jiwoong Kim Jae-joon Kim Jihye Lee Jeongho Ahn Hidong Kwak Yusin Yang Taeyong Jo Myungjun Lee Kwangrak Kim Metrology and Inspection Equipment R&D Team Mechatronics ResearchSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department DRAM Process Development TeamSemiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department Semiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea

As semiconductor devices shrink and their manufacturing processes advance,accurately measuring in-cell critical dimensions(Cd)becomes increasingly *** test element group(TEG)measurements are becoming inadequate for representing the fine,repetitive patterns in cell *** non-destructive metrology technologies like optical critical dimension(OCd)are limited due to their large spot diameter of approximately 25μm,which impedes their efficacy for detailed in-cell structural ***,there is a pressing need for small-spot and non-destructive metrology *** address this limitation,we demonstrate a microsphere-assisted hyperspectral imaging(MAHSI)system,specifically designed for small spot optical metrology with *** microsphere-assisted super-resolution imaging,this system achieves an optical resolution of 66 nm within a field of view of 5.6μm×5.6μ*** approach effectively breaks the diffraction limit,significantly enhancing the magnification of the *** MAHSI system incorporating hyperspectral imaging with a wavelength range of 400–790 nm,enables the capture of the reflection spectrum at each camera *** achieved pixel resolution,which is equivalent to the measuring spot size,is 14.4 nm/pixel and the magnification is *** MAHSI system enables measurement of local uniformity in critical areas like corners and edges of drAM cell blocks,areas previously challenging to inspect with conventional OCd *** our knowledge,this approach represents the first global implementation of microsphere-assisted hyperspectral imaging to address the metrology challenges in complex 3d structures of semiconductor devices.

关键词： metrology resolution enable

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First Principle Study of Catalyst's Influence on Self-Inhibition Effect and By-Products Formation of Lean NOx Trap

First Principle Study of Catalyst's Influence on Self-Inhibi...

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2024 Vehicle Powertrain diversification Technology Forum, VPd 2024

作者： Liu, Mingli Liu, Yaodong Qu, Hanshi duan, Jiaquan Zhang, Qiqi Qian, dingchao Wang, Zhenxi He, Zhentao FAW R&D Center Department of Powertrain Development China Department of Powertrain Development China FAW Group China China

Lean NOx trap is a dedicated deNOx catalyst for lean hybrid gasoline engines. Noble metals (usually platinum group metals) play the role of catalytic sites for NOx oxidation and reduction, which have significant impact of the performance of LNT. This work focuses on the influence of noble metal catalysts on self-inhibition effect from the view of competitive adsorption between NO and CO, and investigates the influence of CO self-inhibition effect on the main by-product of LNT: N2O formation. Adsorption configurations for NO, CO and N2O on noble metal clusters supported by γ-Al2O3(100) are confirmed. For detailed investigation, electron structures are analyzed by investigating Bader charge, dOS (density of state), charge density differences and COHP (crystal orbital Hamilton population) of selected *** results show that CO self-inhibition effect is caused by competitive adsorption between CO and NO. The essence of competitive adsorption between CO and NO is that adsorption process of CO and NO on catalytic sites is similar. Excessive adsorption of CO on the catalytic site occupies the catalytic site and limits the NO adsorption and subsequent processes, making NO conversion efficiency decrease. Competitive adsorption between CO and NO will limit NO adsorption and dissociation, thus limiting N2O formation. Meanwhile, stronger adsorption of N2O on catalytic sites will make N2O desorption difficult. © 2025 SAE International.

关键词： Aluminum oxide

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drilling design and Optimization Technology for Ultra deep Wells in Tarim Oilfield:A Case Study of Well Take-1, the deepest Well in Asia 58

Drilling Design and Optimization Technology for Ultra Deep W...

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58th US rock Mechanics / Geomechanics Symposium 2024, ArMA 2024

作者： ChunSheng, Wang ShaoBo, Feng Zhi, Zhang Bo, Zhou XiaoLiang, Wang XiaoGang, Lv JinLong, Liu Bao, Zhou R&D Center for Ultra Deep Complex Reservior Exploration and Development CNPC Korla China

ISBN: (纸本)9798331305086

The Tarim Basin is a Precambrian superimposed composite *** main source rocks are characterized by ultra-deep and ancient *** 2023, based on the dual goals of oil and gas discovery and scientific exploration, Tarim Oilfield proposed the deepest exploration target in China named Take-1, to explore deeper carbonate oil and gas reservoirs under the Fuman Oilfield, with a designed vertical depth of 11,100 *** order to achieve drilling goals safely and efficiently, pioneering work has been done in drilling *** drilling design is based on comprehensive geological engineering *** design of the upper casing reaches the deepest depth in the area, and engineering technical measures are adopted to achieve the drilling of multiple sets of *** force of wellhead tools on ultra-long and overweight casing is simulated and calculated to avoid the casing entering the plastic deformation state during the running *** parameters and vibration effects shall be fully considered during the design of drilling tool assembly to realize safe *** research and field implementation progress show that the key technology of the drilling design of Take-1 can solve the series of drilling difficulties faced and achieve the goal of the 10,000-meter drilling project. Copyright 2024 ArMA, American rock Mechanics Association.

关键词： deep oil well drilling

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Effect of CO_(2)flooding in an oil reservoir with strong bottom-water drive in the Tahe Oilfield,Tarim Basin,Northwest China

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Energy Geoscience 2024年第1期5卷 230-233页

作者： Li Zhang Haiying Liao Maolei Cui R&D Center of Sustainable Development of Continental Sandstone Mature Oilfield Beijing100083China Petroleum Exploration and Production Research Institute SinopecBeijing100083China

The dissolution and diffusion of CO_(2)in oil and water and its displacement mechanism were investigated by laboratory experiment and numerical simulation for Block 9 in the Tahe oilfield,a sandstone oil reservoir with strong bottom-water drive in Tarim Basin,Northwest *** parameters were analyzed as solubility ratio of CO_(2)in oil,gas and water,interfacial tension,in-situ oil viscosity distribution,remaining oil saturation distribution,and oil *** results show that CO_(2)flooding could control water coning and increase oil *** the early stage of the injection process,CO_(2)expanded vertically due to gravity differentiation,and extended laterally under the action of strong bottom water in the intermediate and late *** CO_(2)got enriched and extended at the oil-water interface,forming a high interfacial tension zone,which inhibited the coning of bottom water to some extent.A miscible region with low interfacial tension formed at the gas injection front,which reduced the in-situ oil viscosity by about 50%.The numerical simulation results show that enhanced oil recovery(EOr)is estimated at 5.72%and the oil exchange ratio of CO_(2)is 0.17 t/t.

关键词： Strong bottom-water drive reservoir CO_(2)flooding Enhanced oil recovery Coning of bottom water Tahe oilfield Tarim Basin Northwest China

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New progress and future exploration targets in petroleum geological research of ultra-deep clastic rocks in Kuqa depression,Tarim Basin,NW China

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Petroleum Exploration and development 2025年第1期52卷 79-94页

作者： WANG Qinghua YANG Haijun YANG Wei R&D Center for Ultra-Deep Complex Reservoir Research and Development CNPCKorla 841000China Tarim Oilfield Company PetroChinaKorla 841000China PetroChina Research Institute of Petroleum Exploration&Development Beijing 100083China

Significant exploration progress has been made in ultra-deep clastic rocks in the Kuqa depression,Tarim Basin,over recent years.A new round of comprehensive geological research has formed four new understandings:(1)Establish structural model consisting of multi-detachment composite,multi-stage structural superposition and multi-layer ***-stage structural traps are overlapped vertically,and a series of structural traps are discovered in underlying ultra-deep layers.(2)Five sets of high-quality large-scale source rocks of three types of organic phases are developed in the Triassic and Jurassic systems,and forming a good combination of source-reservoir-cap rocks in ultra-deep layers with three sets of large-scale regional reservoir and cap rocks.(3)The formation of large oil and gas fields is controlled by four factors which are source,reservoir,cap rocks and *** on the spatial configuration relationship of these four factors,a new three-dimensional reservoir formation model for ultra-deep clastic rocks in the Kuqa depression has been established.(4)The next key exploration fields for ultra-deep clastic rocks in the Kuqa depression include conventional and unconventional oil and *** conventional oil and gas fields include the deep multi-layer oil-gas accumulation zone in Kelasu,tight sandstone gas of Jurassic Ahe Formation in the northern structural zone,multi-target layer lithological oil and gas reservoirs in Zhongqiu–dina structural zone,lithologic-stratigraphic and buried hill composite reservoirs in south slope and other favorable *** oil and gas fields include deep coal rock gas of Jurassic Kezilenuer and Yangxia formations,Triassic Tariqike Formation and Middle-Lower Jurassic and Upper Triassic continental shale *** achievements have important reference significance for enriching the theory of ultra-deep clastic rock oil and gas exploration and guiding the future oil and gas exploration deployment.

关键词： Tarim Basin Kuqa depression ultra-deep layers clastic rock multi-layer structural deformation multilayered migration and accumulation new three-dimensional accumulation model

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Construction of Fracturing Knowledge Graph and Fracturing Plan Optimization 13th

Construction of Fracturing Knowledge Graph and Fracturing Pl...

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13th International Field Exploration and development Conference, IFEdC 2023

作者： Lin, Xia Xu, Chao Mi, Lan Liu, Zong-Shang Xiang, Chong Liu, Li-Xia PetroChina Research Institute of Petroleum Exploration and Development Beijing China Artificial Intelligence Technology R&D Center for Exploration and Development CNPC Beijing China

ISBN: (纸本)9789819702718

As an efficient and intelligent means of knowledge organization, knowledge graph has become the core force driving the development of artificial intelligence. Hydraulic fracturing is an important measure for increasing production and injection in oil and gas fields, with complex design processes and numerous influencing factors. In order to achieve rapid and accurate optimization of fracturing plan, this paper proposes a method for optimizing fracturing plan based on knowledge graph. By combing the system of fracturing domain knowledge, fracturing knowledge graph is constructed. Extracting characteristic parameters describing the geological engineering double sweet spot in multiple dimensions and multiple scales, and showing the characteristic parameter-related entities, relationships, and attributes as vectors via graph embedding technique. Integrate expert knowledge with artificial intelligence to build a fracturing effect prediction model and optimize the fracturing plan. In this study, more than 500 fracturing oil wells in a tight sandstone block are taken as objects to build a knowledge graph. Based on well test and production test data and historical production, this study predicts the fracturing stimulation effect and optimizes the fracturing engineering parameters. The calculation results indicate that factors such as reservoir thickness, oil saturation, number of fracture clusters, and half length of fractures have a significant impact on the fracturing effect. The coincidence rate between the predicted capacity of production and the actual capacity of production is over 91%, and the efficiency of fracturing plan design is increased by more than 20 times. The research results can provide scientific basis for predicting fracturing effects and optimizing fracturing engineering parameters, greatly improving the efficiency and quality of fracturing design, and improving the success rate of fracturing construction. © The Author(s), under exclusive license to Spr

关键词： Forecasting

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Construction of the proprietary model of metro intelligent customer service based on open source large language model 4

Construction of the proprietary model of metro intelligent c...

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2024 4th International Conference on Intelligent Traffic Systems and Smart City, ITSSC 2024

作者： Lin, Tianzhen Liu, Hengyu Wang, Cui Yang, Huimin R&D Center Qingdao Bonin Fortune Intelligent Transportation Technology Development Co. Ltd. Qingdao266111 China

ISBN: (纸本)9781510686304

The growth of passenger flow in Qingdao Metro has led to the rise of customer service demand. The existing customer service system is constructed based on NLP and knowledge graph, which has the problems of inaccurate understanding of questions, low correlation of answers, and low passenger satisfaction. With the development of large language model technology, customized large language models combined with domain-specific knowledge are increasingly applied to practical application scenarios. After comparing the mainstream open-source large language models, this paper selects Qwen2-7B model as the base model, combines the special knowledge of Qingdao Metro customer service field, generates the Qingdao Metro special customer service model through pre-training and fine-tuning, and develops the Qingdao Metro intelligent customer service agent by means of retrieval-augmented generation and prompt engineering. The evaluation test shows that the score of the model reaches 87 points, which is greater than the 80 points of the Qwen2-7B general model and the 45 points of the existing customer service system. Compared with the original customer service system of Qingdao Metro, the answer accuracy of the model is increased by 38%, and the answer accuracy is increased by 16% compared with the general model. The proprietary large language model of metro intelligent customer service based on open source large language model can effectively solve passenger problems and improve passenger satisfaction. © 2025 SPIE.

关键词： Sales

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Multi-stage decoupling Preconditioning Solution Technology for Large-Scale reservoir Simulation 13th

Multi-stage Decoupling Preconditioning Solution Technology f...

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13th International Field Exploration and development Conference, IFEdC 2023

作者： Li, Ning Research Institute of Petroleum Exploration and Development PetroChina Beijing China Artificial Intelligence Technology R&D Center for Exploration and Development CNPC Beijing100083 China

ISBN: (纸本)9789819702633

In response to the complex seepage mechanism of unconventional oil and gas reservoirs, large-scale volume fracturing of multi-segment and multi-cluster horizontal wells, and differences in oil and gas pressure and saturation properties, which result in uneven distribution of eigenvalues, large value of conditions, and slow solving speed of nonlinear equation matrix, a multi-stage decoupling preconditioning solution technology was carried out on the Jacobian coefficient matrix of the oil and gas numerical discrete equation based on the implicit pressure explicit saturation method (IMPES) processing idea. Multi-grid method (AMG) + block based incomplete LU decomposition method (BILU0) are used to preprocess the Jacobian coefficient matrix in multiple stages, and the block based generalized minimum residual method (BGMrES) is used to solve the preconditioned nonlinear algebraic equations. The calculation result proves that compared with other single processing methods, this method effectively reduces the number of iterations for solving discrete equations while ensuring calculation accuracy, improves calculation speed, and has important application value for rapid formulation and decision-making optimization of oil and gas field development plans. © The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2024.

关键词： Nonlinear equations

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Ontology Construction Technology of Knowledge Graph in Oil and Gas Exploration and development 13th

Ontology Construction Technology of Knowledge Graph in Oil a...

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13th International Field Exploration and development Conference, IFEdC 2023

作者： Li, Ning ren, Liang Liu, Zong-Shang ren, Shu-Hang Xiang, Chong Wu, Bo-Yu Cai, Xuan Research Institute of Petroleum Exploration and Development PetroChina Beijing China Artificial Intelligence Technology R&D Center for Exploration and Development CNPC Beijing100083 China

ISBN: (纸本)9789819702718

With the gradual application of knowledge atlas technology in oil and gas exploration and development fields such as intelligent evaluation of oil and gas reservoir and intelligent identification of oil and gas reservoir through logging, the application of knowledge Atlas in oil and gas industry has attracted more and more attention. In view of the problem of knowledge expression and application in E&P sector field, a professional word bank of E&P was established based on web crawler technology, a feature corpus of E&P field was established by extracting E&P sector related achievement documents and literature data, and the principle of E&P knowledge graph ontology construction was formulated and the construction process was defined. The multistage classification system of oil and gas exploration and development knowledge atlas ontology is described and constructed from multiple dimensions such as sector, object and feature, and the knowledge atlas ontology model of oil and gas exploration and development sector domain is formed, which lays a foundation for the in-depth application of knowledge atlas technology in petroleum exploration and development. © The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2024.

关键词： Ontology

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Overcoming complex near-surface conditions for improved seismic imaging in Tarim Basin, China

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Leading Edge 2025年第3期44卷 206-213页

作者： Zhao, ruirui Zheng, duoming Yang, Shanshan Zuo, Anxin Chen, Yangyang Zhu, Xianhuai Xu, Ken Gray, Sam PetroChina Tarim Oilfield Company Research Institute of Exploration and Development Xinjiang Korla China CNPC R&D Center for Ultra-Deep Complex Reservoir Exploration and Development Xinjiang Korla China Engineering Research Center for Ultra-Deep Complex Reservoir Exploration and Development Xinjiang China Forland Geophysical Services HoustonTX United States Viridien CalgaryAB Canada

Seismic imaging in the Tarim Basin, China, presents significant challenges due to complex near-surface conditions, including desert environments, foothills, and loess mountains. These challenges are comparable to those found in regions such as the Arabian Peninsula, North Africa, the Andes Mountains, and other complex terrains worldwide. recent advancements in seismic imaging aimed at overcoming these obstacles include: (1) advanced constrained near-surface tomography, which has significantly enhanced the robustness of near-surface velocity-depth model estimation, leading to improved resolution of deep reservoir images;(2) a recent ultra-long-offset (greater than 15 km) experiment in the foreland basin of the Tarim Oilfield, demonstrating that more accurate and deeper near-surface velocity models can be generated on land using turning-ray tomography;(3) finite-frequency wavepath tomography, which has been proven through field data examples to be a robust alternative to traditional full-waveform inversion for land seismic data;and (4) integrated tomography, which combines diving waves and reflected seismic data to develop a comprehensive velocity model from shallow to deep sections for anisotropic prestack depth migration from topography. These technologies, developed for and applied to the Tarim Basin, can be applied, with modifications, to other land basins around the world. © 2025 by The Society of Exploration Geophysicists.

关键词： Watersheds

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