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22nd International Conference on Solid-state Sensors, Actuators and Microsystems, Transducers 2023

作者： Wang, Changhao Chen, Jianlin Wang, Nan Gu, Yuandong Shanghai University School Of Microelectronics Shanghai China State Key Laboratory Of Transducer Technology Shanghai China Shanghai Key Laboratory Of Chips And Systems For Intelligent Connected Vehicle Shanghai China

ISBN: (纸本)9784886864352

In this paper, we firstly report a 2 degree-of-freedom (DoF) MEMS mirror driven by 1-DoF piezoelectric actuators utilizing internal resonance (IR) phenomenon. By adjusting the stiffness ratio between the outer and inner torsion springs, the frequency ratio between the slow and fast scanning mode can be independently tuned to be 1:2. Through theoretical analysis, it is proved that the fast scanning mode can be driven by the slow scanning frequency mode through the nonlinear interaction under IR. Thanks to the IR actuation, both slow and fast scanning modes can achieve a large rotation angle and a wide operation bandwidth and the mirror area can be effectively enlarged by two times. © 2023 IEEJ.

关键词： Internal resonance MEMS mirror Piezoelectric transducers

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Over 200 times current enhancement via buckling triboelectric nanogenerator at ultra-low speed for monitoring the swelling of lithium ion batteries

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Science Bulletin 2025年第2期70卷 148-152页

作者： Maoyi Zhang Chaosheng Hu Tongtong Zhang Chris R.Bowen Rui Li YongAn Huang Yewang Su Zhong Lin Wang Ya Yang Beijing Key Laboratory of Micro-Nano Energy and Sensor Center for High-Entropy Energy and SystemsBeijing Institute of Nanoenergy and NanosystemsChinese Academy of SciencesBeijing 101400China State Key Laboratory of Nonlinear Mechanics Institute of MechanicsChinese Academy of SciencesBeijing 100190China School of Engineering Science University of Chinese Academy of SciencesBeijing 100049China School of Nanoscience and Technology University of Chinese Academy of SciencesBeijing 100049China Department of Mechanical Engineering University of BathBath BA27AKUK State Key Laboratory of Structural Analysis for Industrial Equipment Dalian University of TechnologyDalian 116024China State Key Laboratory of Intelligent Manufacturing Equipment and Technology Huazhong University of Science and TechnologyWuhan 430074China School of Material Science and Engineering Georgia Institute of TechnologyAtlantaGA 30332-0245USA

Sensors deployed within the Internet of Things(Io T)require a stable and continuous electrical energy supply[1].The traditional approach to provide an energy supply relies primarily on battery power,which has specific shortcomings;these include integration difficulties,the need for frequent charging or replacement,and environmental pollution associated with battery production and *** solve the challenge of delivering an energy supply to sensors,researchers have designed self-powered sensors or have produced power for sensors by scavenging mechanical energy from the surrounding *** generators[2],piezoelectric generators[3]and triboelectric nanogenerators(TENGs)[4,5]are common approaches to scavenge mechanical *** have been widely used in the development of self-powered sensors and the supply of electrical energy to sensors due to their high performance,low cost,and wide range of potential materials[6].

关键词： battery buckling swelling

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Mode-Matched Bulk Acoustic Wave Disk Gyroscope Utilizing Pseudo-Extensional Mode

Mode-Matched Bulk Acoustic Wave Disk Gyroscope Utilizing Pse...

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2023 IEEE International Ultrasonics Symposium, IUS 2023

作者： Wang, Congchen Chen, Jianlin Wang, Nan Gu, Yuandong Shanghai University School of Microelectronics Shanghai China State Key Laboratory of Transducer Technology Shanghai China Shanghai Key Laboratory of Chips and Systems for Intelligent Connected Vehicle Shanghai China

ISBN: (纸本)9798350346459

In this paper, a mode-matched BAW (bulk acoustic wave) gyroscope operating in the pseudo-extensional mode is firstly proposed utilizing a resonator structure as a combination of a ring and a disk resonator. The pseudo-extended mode is realized by coupling the orthogonal wineglass modes of ring and disk resonators in the anti-phase motion, i.e. the adjacent ring and disk alternatively expand and contract. The anisoelasticity of single crystal silicon (SCS) can be compensated by optimizing the coupling strength between ring and disk resonators, showing the minimum frequency mismatch as small as 13 ppm. The proposed resonator is decoupled from the substrate by a folded beam design with a low anchor loss as a result of a high QAnchor 8.7×107. Compared with the n=3 wineglass mode, the proposed design operated in the pseudo-extended mode has a higher resonant frequency as 1.34 MHz and an angular gain as 0.52. © 2023 IEEE.

关键词： Gyroscopes

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A High-Symmetry Cobweb-Like Disk Ring Gyroscope Utilizing Rhomboid Spoke 2

A High-Symmetry Cobweb-Like Disk Ring Gyroscope Utilizing Rh...

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2nd International Conference on Optical Imaging and Measurement, ICOIM 2023

作者： Xu, Yang Chen, Jianlin Wang, Shinan Wang, Nan Gu, Yuandong Shanghai University School of Microelectronics Shanghai China State Key Laboratory of Transducer Technology Shanghai China Shanghai Key Laboratory of Chips and Systems for Intelligent Connected Vehicle Shanghai China

ISBN: (纸本)9798350358636

This paper reports a new type of MEMS disk ring gyroscope (DRG) consisting of 16-sided cobweb-like out-ring, 32-sided cobweb-like inner-rings and rhomboid spokes made by single crystal (100) silicon. Thanks to the linear structure design, the cobweb-like DRG is less sensitive to the fabrication imperfectness. The minimum frequency mismatch can be decrease to as small as 20 ppm(Δf/f) through optimizing the spoke width and rhomboid angle. The proposed gyroscope has 200k Q-factor and is insensitive to fabrication errors, which is promising in industrial applications. © 2023 IEEE.

关键词： Gyroscopes

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Development of a double-side ordered membrane electrode assembly based on titanium nitride nanoarrays

Industrial Chemistry & Materials

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Industrial Chemistry & Materials 2024年第4期2卷 622-633页

作者： Lingfeng Xuan Deqing Mei Caiying Zhou Wenze Mao Yancheng Wang State Key Lab of Fluid Power and Mechatronic Systems School of Mechanical EngineeringZhejiang UniversityHangzhou 310027China Zhejiang Province Key Laboratory of Advanced Manufacturing Technology School of Mechanical EngineeringZhejiang UniversityHangzhou 310027China

The membrane electrode assembly(MEA)plays a crucial role in the functionality of proton exchange membrane fuel cells(PEMFCs).The channels present within the catalyst layer of MEAs exhibit a disordered configuration,which consequently give rise to low efficiency in mass *** order to enhance the mass transfer performance and the corrosion resistance of the catalyst layer,this paper developed a double-side ordered MEA based on TiN nanorod *** synthesized TiN nanorod arrays on the ITO surface by a seed-assisted hydrothermal reaction and nitriding treatment,and coated the catalyst uniformly on the TiN support by ultrasonic *** the double-side ordered MEA was fabricated by transfer printing,and achieved a peak power of 678.30 mW cm^(-2) with a cathode platinum loading of 0.2 mg cm^(-2) at 80℃ and anode saturated *** 200 hours of accelerated stress test(AST)at 90℃ and 30/30%relative humidity,the peak performance only dropped by 4.8%.These results provide substantial evidence for the effectiveness of our developed double-side ordered MEA which can mitigate catalyst polarization ***,this study reveals the immense potential of the TiN nanorod array-based double-side ordered MEA in advancing the development of efficient and stable MEAs.

关键词： PEMFC Preparation of MEA Ordered MEA TiN nanorod array Catalyst carrier

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Gait Planning and Motion Control Based on Vrep Simulation for Quadruped Robot 5

Gait Planning and Motion Control Based on Vrep Simulation fo...

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5th World Robot Conference Symposium on Advanced Robotics and Automation, WRC SARA 2023

作者： Zhou, Linqi Chen, Zhihua Liu, Jun Liu, Zhi Chen, Yumeng Zhang, Liting Nanchang Hangkong University Key Laboratory of Jiangxi Province for Image Processing and Pattern Recognition Moe Key Lab of Nondestructive Testing Technology Nanchang330063 China Beijing Institute of Technology State Key Laboratory of Intelligent Control and Decision of Complex Systems School of Automation Beijing100081 China

ISBN: (纸本)9798350307320

Gait planning of quadruped robots plays an important role in achieving less walking, including dynamic and static gait. In this article, a static and dynamic gait control method based on center of gravity stability margin is proposed. Firstly, the robot model and kinematics modeling are introduced. Secondly, the robot's foot static and dynamic gait were planned and the foot trajectory was designed. Finally, two types of gait of the robot were simulated using Vrep simulation software, and the differences in stability and speed between the coordinated gait with speed and stability in the static and dynamic gait of a 12 degree of freedom robot were analyzed, verifying the effectiveness of the gait control method proposed in this paper. © 2023 IEEE.

关键词： Robot programming

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Ultrasensitive SERF atomic magnetometer with a miniaturized hybrid vapor cell

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Microsystems & Nanoengineering 2024年第4期10卷 367-376页

作者： Yintao Ma Yao Chen Mingzhi Yu Yanbin Wang Shun Lu Ju Guo Guoxi Luo Libo Zhao Ping Yang Qijing Lin Zhuangde Jiang State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and SystemsXi’an Jiaotong UniversityXi’an 710049China School of Mechanical Engineering Xi’an Jiaotong UniversityXi’an 710049China School of Instrument Science and Technology Xi’an Jiaotong UniversityXi’an 710049China Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing YantaiYantai 265503China

The chip-scale hybrid optical pumping spin-exchange relaxation-free(SERF)atomic magnetometer with a single-beam arrangement has prominent applications in biomagnetic measurements because of its outstanding features,including ultrahigh sensitivity,an enhanced signal-to-noise ratio,homogeneous spin polarization and a much simpler optical configuration than other *** this work,a miniaturized single-beam hybrid optical pumping SERF atomic magnetometer based on a microfabricated atomic vapor cell is *** the optically thin Cs atoms are spinpolarized,the dense Rb atoms determine the experimental *** enhanced signal strength and narrowed resonance linewidth are experimentally proven,which shows the superiority of the proposed magnetometer *** using a differential detection scheme,we effectively suppress optical noise with an approximate five-fold ***,the cell temperature markedly affects the performance of the *** systematically investigate the effects of temperature on the magnetometer *** theoretical basis for these effects is explained in *** developed miniaturized magnetometer has an optimal magnetic sensitivity of 20 fT/Hz^(1/2).The presented work provides a foundation for the chip-scale integration of ultrahighly sensitive quantum magnetometers that can be used for forward-looking magnetocardiography(MCG)and magnetoencephalography(MEG)applications.

关键词： pumping polarization magnetometer

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A platform for integrated spectrometers based on solution-processable semiconductors

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Light(Science & Applications) 2023年第9期12卷 1739-1748页

作者： Yanhao Li Xiong Jiang Yimu Chen Yuhan Wang Yunkai Wu De Yu Kaiyang Wang Sai Bai Shumin Xiao Qinghai Song Ministry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System Guangdong Provincial Key Laboratory of Semiconductor Optoelectronic Materials and Intelligent Photonic SystemsHarbin Institute of Technology(Shenzhen)ShenzhenGuangdong 518055China Institute of Fundamental and Frontier Sciences University of Electronic Science and Technology of ChinaChengduSichuan 611731China Collaborative Innovation Center of Extreme Optics Shanxi UniversityTaiyuanShan`xi 030006China

Acquiring real-time spectral information in point-of-care diagnosis,internet-of-thing,and other lab-on-chip applications require spectrometers with hetero-integration capability and miniaturized *** to conventional semiconductors integrated by heteroepitaxy,solution-processable semiconductors provide a much-flexible integration platform due to their solution-processability,and,therefore,more suitable for the multi-material integrated ***,solution-processable semiconductors are usually incompatible with the micro-fabrication *** work proposes a facile and universal platform to fabricate integrated spectrometers with semiconductor substitutability by unprecedently involving the conjugated mode of the bound states in the continuum(conjugated-BIC)***,exploiting the conjugated-BIC photonics,which remains unexplored in conventional lasing studies,renders the broadband photodiodes with ultra-narrowband detection ability,detection wavelength tunability,and on-chip integration ability while ensuring the device *** based on these ultra-narrowband photodiode arrays exhibit high spectral resolution and wide/tunable spectral *** fabrication processes are compatible with solution-processable semiconductors photodiodes like perovskites and quantum dots,which can be potentially extended to conventional *** from the spectrometers directly constitute the incident spectra without being computation-intensive,latency-sensitive,and *** an example,the integrated spectrometers based on perovskite photodiodes are capable of realizing narrowband/broadband light reconstruction and in-situ hyperspectral imaging.

关键词： semiconductors process integration

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state estimation for delayed switched positive systems: delayed radius approach

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Science China(Information Sciences) 2024年第8期67卷 190-205页

作者： Weizhong CHEN Zhongyang FEI Xudong ZHAO Zheng-Guang WU School of Electronics and Information Xi'an Polytechnic University Research Institute of Intelligent Control and Systems Harbin Institute of Technology Key Laboratory of Intelligent Control and Optimization for Industrial Equipment of Ministry of Education Dalian University of Technology School of Control Science and Engineering Dalian University of Technology State Key Laboratory of Industrial Control Technology Institute of Cyber-Systems and ControlZhejiang University

In this paper, an interval estimation scheme is developed for delayed switched positive systems（DSPS） with mode-dependent average dwell time switching. A lossless zonotopic estimation approach is proposed for the delayed intersection zonotope with the positive generator matrix. First, considering the existence of asynchronism between the system mode and the correction matrix mode, the mismatched intersection zonotope is constructed for DSPS to verify the consistency between the system model and ***, by utilizing the introduced radius definitions, the ?∞performance is addressed to optimize the size of delayed intersection zonotopes. Subsequently, we present a joint-design approach of switching signals and the mode-dependent correction matrix by constructing positive generator matrix-based delayed radius functions. Furthermore, guaranteed nonnegative state bounds are derived for the considered DSPS based on the proposed lossless zonotopic estimation criteria. Finally, detailed simulations are conducted to validate the feasibility and superiority of the developed methods.

关键词： delayed switched positive systems interval estimation asynchronous correction matrix zonotopes mode-dependent average dwell time

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Additive manufacturing of high-quality tritium breeding pebbles using ceramic precursors

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Journal of the European Ceramic Society 2024年第7期44卷 4719-4730页

作者： Su, Fang Li, Yuzeng Xing, Huanhuan Liu, Yu Liu, Zhiyuan Liu, Changyong Jiang, Cho-Pei Chen, Zhangwei Additive Manufacturing Institute Shenzhen University Shenzhen518060 China Guangdong Key Laboratory of Electromagnetic Control and Intelligent Robotics Shenzhen University Shenzhen518060 China College of Mechanical & Electrical Engineering National Taipei University of Technology Taipei10608 Taiwan State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University Xi'an710049 China

In this study, the fabrication of advanced lithium orthosilicate (Li4SiO4) ceramic tritium breeding pebbles through photopolymerization using ceramic precursors (i.e., SiO2 and Li2CO3) is reported for the first time. The pebbles exhibit excellent mechanical and physical properties. Through optimization of manufacturing parameters and a geometrical correction model to compensate printing deviations, the printing accuracy of the pebbles was enhanced. The resulting pebbles had a diameter of approximately 1 mm, a sphericity of 1.01, a uniformly distributed pore structure, a phase purity > 95%, and a satisfying relative density reaching 91.39%. The average crush load 25.7 ± 0.3 N, surpassed that achieved by previously reported methods. Furthermore, the thermal conductivity was enhanced compared to that of solid-phase synthesized Li4SiO4 powder, facilitating the tritium release process for fusion applications. This study may serve as a guidance for designing appropriate ceramic breeders, providing a cost-effective approach applicable to produce other high-precision ceramic components with complex compositions. © 2024 Elsevier Ltd

关键词： Lithium compounds

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