Cu-Zr/ZrN films were grown on Si(111) wafer by magnetron sputtering. The films were characterized with X-ray diffraction (XRD) and scanning electron microscopy (SEM). Its resistivity was studied from application consi...
详细信息
Cu-Zr/ZrN films were grown on Si(111) wafer by magnetron sputtering. The films were characterized with X-ray diffraction (XRD) and scanning electron microscopy (SEM). Its resistivity was studied from application considerations. We conclude that when the film is used as a diffusion barrier, many features, including low contact resistivity, well defined interface and good thermal stability, should be considered in film growth.
Copper film was grown by DC pulsed unbalance magnetron sputtering (UBMS) on ZrN diffusion barrier film, previously deposited by RF reactive magnetron sputtering on Si wafer surface. The Cu films were then characterize...
详细信息
Copper film was grown by DC pulsed unbalance magnetron sputtering (UBMS) on ZrN diffusion barrier film, previously deposited by RF reactive magnetron sputtering on Si wafer surface. The Cu films were then characterized with X-ray diffraction (XRD), Auger electron spectroscopy (AES) and atomic force microscopy (AFM). The results show that UBMS-Cu film effectively restricts Cu diffusion into silicon and improves thermal stability of Cu/ZrN/Si system because of the high compactness of the Cu/ZrN layers.
Cu-Cr alloy films were deposited on different diffusion barrier layers with ion beam auxiliary co-sputtering that combined magnetron sputtering (MS) and ion beam sputtering (IBS). The rolling contact fatigue test was ...
详细信息
Cu-Cr alloy films were deposited on different diffusion barrier layers with ion beam auxiliary co-sputtering that combined magnetron sputtering (MS) and ion beam sputtering (IBS). The rolling contact fatigue test was used to evaluate the adhesion strength. We found that the diffusion barriers could improve the adhesion strength at the interface. When the CrN acted as diffusion barrier the adhesion strength was highest. The Cu-Cr alloy film with high bombarding energy had higher adhesion strength for the reason that the transition zone was wider.
作者：
吴伟仁田玉龙黄翔宇Institute for Pattern Recognition and Artificial Intelligence
State Key Lab. for Image Processing and Intelligent Control Huazhong University of Science and Technology Wuhan 430074 China Deep Space Exploration Research Center
Harbin Institute of Technology Harbin 150001 Chinahe image elements of earth-center and moon-center are obtained by processing the images of earth and moon these image elements in combination with the inertial attitude information and the moon ephemeris are utilized to obtain the probe initial position relative to earth and the Levenberg-Marquardt algorithm is used to determine the accurate probe position relative to earth and the probe orbit relative to earth is estimated by using the extended Kalman filter. The autonomous optical navigation algorithm is validated using the digital simulation.
The image elements of earth-center and moon-center are obtained by processing the images of earthand moon, these image elements in combination with the inertial attitude information and the moon ephemerisare utilized ...
详细信息
The image elements of earth-center and moon-center are obtained by processing the images of earthand moon, these image elements in combination with the inertial attitude information and the moon ephemerisare utilized to obtain the probe initial position relative to earth, and the Levenberg-Marquardt algorithm is usedto determine the accurate probe position relative to earth, and the probe orbit relative to earth is estimated by u-sing the extended Kalman filter. The autonomous optical navigation algorithm is validated using the digital simu-lation.
Using optimization tools such as genetic algorithms to construct a fuzzy expert system (FES) focusing only on its accuracy without considering comprehensibility may result in a system that is not easy to understand or...
详细信息
Using optimization tools such as genetic algorithms to construct a fuzzy expert system (FES) focusing only on its accuracy without considering comprehensibility may result in a system that is not easy to understand or so called a black box model. To exploit the transparency features of FESs for explanation in higher-level knowledge representation, a FES should provide high comprehensibility while preserving its accuracy. The completeness of fuzzy sets and rule structures should also be considered to guarantee that every data point has a response output. This paper proposes some quantitative measures to determine the degree of the accuracy, the comprehensibility, and the completeness of FESs. These quantitative measures are then used as a fitness function for a genetic algorithm in optimally building a FES.
This paper presented H∞ control designs of a complex nonlinear system which can be modeled by a dynamic neural network. Two kinds of new H∞ control design methods are developed. One tries to attenuate both modeling ...
详细信息
Takagi-Sugeno (TS) fuzzy models have been the popular choice for multi-model based nonlinear system identification for controller design. However, the interpretation of the model from a dynamical systems point of view...
详细信息
Takagi-Sugeno (TS) fuzzy models have been the popular choice for multi-model based nonlinear system identification for controller design. However, the interpretation of the model from a dynamical systems point of view is still unclear. In this paper, we investigate the interpretation of the TS fuzzy models in terms of local dynamics of nonlinear systems in state space. The investigation is based on the comparison between the constant-affine recursive i/o equation and constant-affine state space representations. We show that the true local dynamics is not identifiable by TS fuzzy models by analysis and example. For the identification of constant-affine state space models, a subspace identification algorithm is proposed to identify the true local dynamics with zero initial conditions.
With the development of remote sensing technique, onboard data compression has become an urgent need and a lot of study has been directed toward the development of efficient techniques. In this paper, the construction...
详细信息
It is crucial to use contextual information to improve the recognition accuracy of Chinese script in an offline, handwritten Chinese character-recognition system. However, with the increase in the number of candidates...
详细信息
The paper concerns trajectory problems for stationary, platform-mounted or mobile robots interacting with moving external objects. The main contribution consists of a new task oriented model of special motion in mobil...
详细信息
ISBN:
(纸本)0780375084
The paper concerns trajectory problems for stationary, platform-mounted or mobile robots interacting with moving external objects. The main contribution consists of a new task oriented model of special motion in mobile environment and appropriate nonlinear control laws based on geometric methodologies of the nonlinear theory and MEMO system coordination, being an extension of the results on robot spatial motion techniques' and active robotic strategies.
暂无评论