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Simultaneous enhancement of sensitivity, resonant frequency, and overload capability of piezoresistive accelerometers by heavily-doped fillet structures on sensing beams

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IEEE Sensors Journal 2025年第11期25卷 19138-19146页

作者： Xia, Yong Wang, Tao Lv, Yang Han, Xiangguang Yu, Mingzhi Tan, Renjie Huang, Mimi Jia, Chen Zhao, Libo Sun, Lin Yang, Ping Lu, Dejiang Xi'an Jiaotong University School of Mechanical Engineering State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies Xi'an710049 China Ningbo CRRC Times Transducer Technology Co. LTD Department of Basic Research and Development Ningbo315021 China Research Institute for Intelligent Sensing Technology and System School of Instrument Science and Technology State Key Laboratory for Manufacturing Systems Engineering State Industry-Education Integration Center for Medical Innovations International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies Xi'an Jiaotong University Xi'an710049 China Shandong Laboratory of Advanced Materials and green Manufacturing at Yantai Yantai264000 China

High sensitivity, high natural frequency, and high overload capability are desired for accelerometers used in industrial applications, but simultaneously enhancing all is challenging. Here, via designing novel heavily-doped fillet structures, we prove the sensitivity, resonant frequency, and overload capability can be simultaneously enhanced. The enhancements are attributed to regulations of stress concentration and effective sensing regions by the heavily-doped fillets. The sensors with and without fillets are designed, fabricated, packaged, and tested. The results show a sensitivity of 0.31±0.02 mV/g@5V, a natural frequency of 37.87±2.09 kHz, and an overload of 10040.17±531.76 g for sensors with 10-μm fillets, which are superior to 0.27±0.01 mV/g@5V, 34.13±0.90 kHz, and 7368.55±843.92 g for those no-fillet counterparts. Additionally, the developed sensor further exhibited feasibility in air-bearing vibration monitoring. The proposed design is envisioned to give insights into the novel designs of high-performance stress-based sensors, including accelerometers, pressure sensors, and strain gauges. © 2001-2012 IEEE.

关键词： Strain gages

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Graphene photodetectors integrated with silicon and perovskite quantum dots

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Microsystems & Nanoengineering 2024年第3期10卷 21-33页

作者： Kashif Abbas Peirui Ji Naveed Ullah Shareen Shafique Ze Zhang Muhammad Faizan Ameer Shenghan Qin Shuming Yang State Key Laboratory for Manufacturing Systems Engineering Xi’an Jiaotong UniversityXi’an 710049China Department of Microelectronic Science and Engineering Laboratory of Clean Energy Storage and ConversionSchool of Physical Science and TechnologyNingbo Collaborative Innovation Center of Nonlinear Calamity System of Ocean and AtmosphereNingbo UniversityNingbo 315211China

Photodetectors(PDs)play a crucial role in imaging,sensing,communication systems,***(Gr),a leading two-dimensional material,has demonstrated significant potential for photodetection in recent ***,its relatively weak interaction with light poses challenges for practical *** integration of silicon(Si)and perovskite quantum dots(PQDs)has opened new avenues for Gr in the realm of next-generation *** review provides a comprehensive investigation of Gr/Si Schottky junction PDs and Gr/PQD hybrid PDs as well as their *** operating principles,design,fabrication,optimization strategies,and typical applications of these devices are studied and *** these discussions,we aim to illuminate the current challenges and offer insights into future directions in this rapidly evolving field.

关键词： quantum discussions summarized

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Highly sensitive flexible heat flux sensor based on a microhole array for ultralow to high temperatures

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Microsystems & Nanoengineering 2023年第5期9卷 345-356页

作者： Le Li Bian Tian Zhongkai Zhang Meng Shi Jiangjiang Liu Zhaojun Liu Jiaming Lei Shuimin Li Qijing Lin Libo Zhao Zhuangde Jiang School of Mechanical Engineering Xi’an Jiaotong University710049 Xi’anChina State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and SystemXi’an Jiaotong UniversityXi’an 710049China Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing Yantai 265503China

With the growing demand for thermal management of electronic devices,cooling of high-precision instruments,and biological cryopreservation,heat flux measurement of complex surfaces and at ultralow temperatures has become highly ***,current heat flux sensors(HFSs)are commonly used in high-temperature scenarios and have problems when applied in low-temperature conditions,such as low sensitivity and *** this study,we developed a flexible and highly sensitive HFS that can operate at ultralow to high temperatures,ranging from−196°C to 273°*** sensitivities of HFSs with thicknesses of 0.2 mm and 0.3 mm,which are efficiently manufactured by the screen-printing method,reach 11.21μV/(W/m2)and 13.43μV/(W/m2),*** experimental results show that there is a less than 3%resistance change from bending to ***,the HFS can measure heat flux in both exothermic and absorptive cases and can measure heat flux up to 25 kW/***,we demonstrate the application of the HFS to the measurement of minuscule heat flux,such as heat dissipation of human skin and cold *** technology is expected to be used in heat flux measurements at ultralow temperatures or on complex surfaces,which has great importance in the superconductor and cryobiology field.

关键词： high stretching superconductor

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Combining permissioned blockchain and Bayesian best-worst method for transparent supplier selection in supply chain management

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Science China(Technological Sciences) 2024年第8期67卷 2579-2593页

作者： LIU JiaJun ZHANG Jie LENG JieWu Shanghai Engineering Research Center of Industrial Big Data and Intelligent System Institute of Artificial IntelligenceDonghua UniversityShanghai 201620China State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment Guangdong University of TechnologyGuangzhou 510006China

Supplier selection is an important business activity in order to realize the purchasing function in supply chain *** supplier selection process includes four stages,i.e.,bidding inviting,bidding,group decision-making,and results disclosure,involving the participation of manufacturing service demanders(MSDs),manufacturing service suppliers(MSSs),and ***,all the participants have raised concerns about the increased transparency in supplier ***,this study proposes a transparent supplier selection method by considering the engagement of *** this method,the Bayesian best-worst method(Bayesian BWM)is used to aggregate decision-makers'preferences into the overall optimal weights of the alternative MSSs,and the MSS with the largest weight is considered the suitable MSS for ***,blockchain is introduced to record the decision-making process information about supplier selection through a customized smart contract,where MSSs act as supervisors to supervise the decision-making process through the distributed consensus mechanism rather than directly participate in the decision-making ***,a case study of supplier selection in purchasing vibration acceleration sensors is *** result shows that the proposed method can support MSDs in selecting suitable MSS from alternative MSSs by aggregating decision-makers'preferences,and blockchain can provide credible information about the supplier selection process for MSSs,MSDs,and *** this way,the transparency of supplier selection is enhanced.

关键词： blockchain supplier selection supply chain transparency Bayesian BWM group decision-making

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Construction of mesoporous silica-implanted tungsten oxides for selective acetone gas sensing

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Chinese Chemical Letters 2024年第11期35卷 492-498页

作者： Jichun Li Zhengren Wang Yu Deng Hongxiu Yu Yonghui Deng Xiaowei Cheng Kaiping Yuan Department of Chemistry Shanghai Stomatological Hospital&School of StomatologyState Key Laboratory of Molecular Engineering of PolymersShanghai Key Laboratory of Molecular Catalysis and Innovative MaterialsiCHEMFudan UniversityShanghai 200433China Frontier Institute of Chip and System State Key Laboratory of ASIC and SystemFudan UniversityShanghai 200433China State Key Lab of Transducer Technology Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 200050China

As a key biomarker for noninvasive diagnosis of diabetes,the selective detection of trace acetone in exhaled gas using a portable and low-cost device remains a great *** metal oxide(SMO)based gas sensors have drawn signification attention due to their potential in miniaturization,user-friendliness,high cost-effectiveness and selective real-time detection for noninvasive clinical ***,we propose a one-pot solvent evaporation induced tricomponent co-assembly strategy to design a novel ordered mesoporous SMO of silica-implanted WO_(3)(Si O_(2)/WO_(3))as sensing materials for trace acetone *** controlled co-assembly of silicon and tungsten precursors and amphiphilic diblock copolymer poly(ethylene oxide)-block-polystyrene(PEO-b-PS),and the subsequent thermal treatment enable the local lattice disorder of WO_(3)induced by the amorphous silica and the formation of ordered mesoporous Si O_(2)/WO_(3)hybrid walls with a unique metastableε-phase WO_(3)*** obtained mesoporous SiO_(2)/WO_(3)composites possess highly crystalline framework with large uniform pore size(12.0-13.3 nm),high surface area(99-113 m^(2)/g)and pore volume(0.17-0.23 cm^(3)/g).Typically,the asfabricated gas sensor based on mesoporous 2.5%Si O_(2)/WO_(3)exhibits rapid response/recovery rate(5/17 s),superior sensitivity(R_(air)/R_(gas)=105 for 50 ppm acetone),as well as high selectivity towards *** limit of detection is as low as 0.25 ppm,which is considerably lower than the thresh value of acetone concentration(>1.1 ppm)in the exhaled breath of diabetic patients,demonstrating its great prospect in real-time monitoring in diabetes ***,the mesoporous 2.5%Si O_(2)/WO_(3)sensor is integrated into a wireless sensing module connected to a smart phone,providing a convenient real-time detection of acetone.

关键词： Mesoporous materials ε-Tungsten oxide Silica-implanted Acetone sensing Real-time detection

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Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams

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Microsystems & Nanoengineering 2023年第1期9卷 91-102页

作者： Mingzhi Yu Libo Zhao Shanshan Chen Xiangguang Han Chen Jia Yong Xia Xiaozhang Wang Yonglu Wang Ping Yang Dejiang Lu Zhuangde Jiang State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXi’an Jiaotong University710049Xi’anChina Xi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and System Xi’an Jiaotong University710049Xi’anChina Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing 265503YantaiChina

With the increasing demand for multidirectional vibration measurements,traditional triaxial accelerometers cannot achieve vibration measurements with high sensitivity,high natural frequency,and low cross-sensitivity ***,for piezoresistive accelerometers,achieving pure axial deformation of the piezoresistive beam can greatly improve performance,but it requires the piezoresistive beam to be located in a specific position,which inevitably makes the design more complex and limits the performance ***,a monolithically integrated triaxial high-performance accelerometer with pure axial stress piezoresistive beams was designed,fabricated,and *** controlling synchronous displacements at both piezoresistive beam ends,the pure axial stress states of the piezoresistive beams could be easily achieved with position independence without tedious *** measurement unit for the z-axis acceleration was innovatively designed as an interlocking proof mass structure to ensure a full Wheatstone bridge for sensitivity *** pure axial stress state of the piezoresistive beams and low cross-sensitivity of all three units were verified by the finite element method(FEM).The triaxial accelerometer was fabricated and *** showing extremely high sensitivities(x axis:2.43 mV/g/5 V;y axis:2.44 mv/g/5 V;z axis:2.41 mV/g/5 V(without amplification by signal conditioning circuit))and high natural frequencies(x/y axes:11.4 kHz;z-axis:13.2 kHz)were *** approach of this paper makes it simple to design and obtain high-performance piezoresistive accelerometers.

关键词： axial proof independence

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Broadband absorption performance of 3D-printed polyetheretherketone-based electromagnetic wave-absorbing composites

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Chinese Journal of Aeronautics 2024年第8期37卷 547-558页

作者： Lin BAI Nan CHANG Meiying ZHAO Chi HOU Yi CAO Dichen LI School of Aeronautics Northwestern Polytechnical UniversityXi’an 710072China Chengdu Aircraft Design and Research Institute Chengdu 610091China Xi’an Key Laboratory of Advanced Structure Design and Application of Aircraft Northwestern Polytechnical UniversityXi’an 710072China State Key Laboratory for Manufacturing System Engineering Xi’an Jiaotong UniversityXi’an 710054China

The rapid development of additive manufacturing technology has offered a new avenue for designing and fabricating high wave-absorbing meta *** this study,the mechanical properties and broadband absorption performance of Poly-Ether-Ether-Ketone(PEEK)–based electromagnetic wave–absorbing composite materials was *** high-performance polymer PEEK was used as the matrix,and the materials with electromagnetic wave loss,such as reduced graphene oxide,Carbonyl Iron(CI),and Flake CI(FCI),were used as *** on the theory of impedance matching,a wave-absorbing structure with a gradual impedance gradient was designed and *** test results showed that at the 2.0–18.0 GHz frequency band,the coverage rate of the effective absorption bandwidth was up to 72.0%,the average optimal reflectivity was–18.09 dB,and the wide-angle absorption range was 0°–30°.The advantages of additive manufacturing technology in designing and fabricating wave-absorbing structures are presented,demonstrating that the technology is an effective method for creating broadband absorbing structures.

关键词： Absorption performance Additive manufacturing Electromagnetic absorption PEEK composite materials Gradual structure Broadband absorption

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Regularized automatic frequency response function acquisition of a milling robot operating in a high-dimensional workspace

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Science China(Technological Sciences) 2024年第6期67卷 1783-1797页

作者： LUO WenLong TANG XiaoWei MA Tao GUO QiuShuang XU YanYan YUAN Xing ZHANG Lei MAO XinYong School of Mechanical Science and Engineering Huazhong University of Science and TechnologyWuhan430074China State Key Laboratory of Smart Manufacturing for Special Vehicles and Transmission System Baotou014030China Wuhan Heavy Duty Machine Tool Group Corporation Wuhan430205China

Because robotic milling has become an important means for machining significant large parts,obtaining the structural frequency response function(FRF)of a milling robot is an important basis for machining process ***,because of its articulated serial structure,a milling robot has an enormous number of operating postures,and its dynamics are affected by the motion *** accurately obtain the FRF in the operating state of a milling robot,this paper proposes a method based on the structural modification *** the traditional excitation method,the proposed method uses robot joint motion excitation instead of hammering excitation to realize *** address the problem of the lack of information brought by motion excitation,which leads to inaccurate FRF amplitudes,this paper derives the milling robot regularization theory based on the sensitivity of structural modification,establishes the modal regularization factor,and calibrates the FRF *** to the commonly used manual hammering experiments,the proposed method has high accuracy and reliability when the milling robot is in different *** the measurement can be performed directly and automatically in the operation state,and the problem of inaccurate amplitudes is solved,the proposed method provides a basis for optimizing the machining posture of a milling robot and improving machining efficiency.

关键词： milling robot structural dynamics frequency response function automatic identification modal regularization factor high-dimensional workspace

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Design and Performance Analysis of HMDV Dynamic Inertial Suspension Based on Active Disturbance Rejection Control

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Computer Modeling in engineering & Sciences 2024年第8期140卷 1485-1506页

作者： Xiaofeng Yang Wei Wang Yujie Shen Changning Liu Tianyi Zhang School of Automotive and Traffic Engineering Jiangsu UniversityZhenjiang212013China Automotive Engineering Research Institute Jiangsu UniversityZhenjiang212013China Chongqing Key Laboratory of Urban Rail Transit System Integration and Control Chongqing400074China State Key Laboratory of Advanced Design and Manufacturing Technology for Vehicle Hunan universityChangsha410082China

This paper addresses the impact of vertical vibration negative effects,unbalanced radial forces generated by the static eccentricity of the hub motor,and road excitation on the suspension performance of Hub Motor Driven Vehicle(HMDV).A dynamic inertial suspension based on Active Disturbance Rejection Control(ADRC)is proposed,combining the vertical dynamic characteristics of dynamic inertial suspension with the features of ADRC,which distinguishes between internal and external disturbances and arranges the transition ***,a simulation model of the static eccentricity of the hub motor is established to simulate the unbalanced radial electromagnetic force generated under static eccentricity.A quarter-vehicle model of an HMDV with a controllable dynamic inertial suspension is then ***,the passive suspension model is studied under different grades of road excitation,and the impact mechanism of suspension performance at speeds of 0–20 m/s is ***,the three main components within the ADRC controller are designed for the second-order controlled system,and optimization algorithms are used to optimize its internal ***,the performance of the traditional passive suspension,the PID-based controllable dynamic inertial suspension,and the ADRC-based controllable dynamic inertial suspension are analyzed under different road *** results show that,under sinusoidal road input,the ADRC-based controllable dynamic inertial suspension exhibits a 52.3%reduction in the low-frequency resonance peak in the vehicle body acceleration gain diagram compared to the traditional passive suspension,with significant performance optimization in the high-frequency *** random road input,the ADRC-based controllable dynamic inertial suspension achieves a 29.53%reduction in the root mean square value of vehicle body acceleration and a 14.87%reduction in dynamic tire *** indicates that the designed controllable dynamic inertia

关键词： HMDV static eccentricity ADRC dynamic inertial suspension road excitation

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Optimal Design of the Modular Joint Drive Train for Enhancing Cobot Load Capacity and Dynamic Performance

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Chinese Journal of Mechanical engineering 2024年第3期37卷 26-40页

作者： Peng Li Zhenguo Nie Zihao Li Xinjun Liu Department of Mechanical Engineering Tsinghua UniversityBeijing 100084China State Key Laboratory of Tribology in Advanced Equipment Tsinghua UniversityBeijing 100084China Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control Tsinghua UniversityBeijing 100084China

Automation advancements prompts the extensive integration of collaborative robot(cobot)across a range of *** to the commonly used design approach of increasing the payload-to-weight ratio of cobot to enhance load capacity,equal attention should be paid to the dynamic response characteristics of cobot during the design process to make the cobot more *** this paper,a new method for designing the drive train parameters of cobot is ***,based on the analysis of factors influencing the load capacity and dynamic response characteristics,design criteria for both aspects are established for cobot with all optimization design criteria normalized within the design ***,with the cobot in the horizontal pose,the motor design scheme is discretized and it takes the joint motor diameter and gearbox speed ratio as optimization design ***,all the discrete values of the optimization objectives are obtained through the enumeration method and the Pareto front is used to select the optimal solution through multi-objective *** on the cobot design method proposed in this paper,a six-axis cobot is designed and compared with the commercial *** result shows that the load capacity of the designed cobot in this paper reaches 8.4 kg,surpassing the 5 kg load capacity commercial cobot which is used as a *** minimum resonance frequency of the joints is 42.70 Hz.

关键词： Multi-objective optimization Modular joint drive train design Load capacity Dynamic response performance

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