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Fabrication of nanostructured hydrophobic surfaces with laser interference lithography

2013 International Conference on Material Science and Engineering, ICMSE 2013

作者： Yu, Hang Lu, Bing-Rui Li, Hui Li, Jian-Ying Liu, Ran ASIC and System Key Laboratory Department of Microelectronics Fudan University Shanghai 200433 China

ISBN: (纸本)9783037858707

The fabrication of large area nanoscale periodic structures on material surfaces for hydrophobicity engineering has been difficult due to the complex processes. Here we propose a two-step fabrication method for periodic nanostructures by combining laser interference lithography (LIL) and reactive ion etching (RIE). Sub-micron periodic nano-tip patterns are fabricated in the photoresist by LIL, and then transferred into the silicon substrate using RIE. By measuring the contact angle (CA) of a water droplet on the substrate surface, the wettability of the surface with nano-tip structures of various periods is studied. Our experiments show that the nano-tip structures fabricated by the combined LIL and RIE process deliver satisfactory hydrophobic tendencies when the periods fall into the submicron scale. When the period of the structure is small enough, the hydrophilicity of the surface can be altered into hydrophobicity. The hydrophobicity achieved by this method is reusable and sustainable with low cost and no composition alteration comparing to chemical methods. The process developed in this work provides potential applications in biosensingand digital fluidics. © (2013) Trans Tech Publications, Switzerland.

关键词： Hydrophobicity

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Dielectric loss of half-doped manganite La_(0.5)Ca_(0.5)MnO_3

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Chinese Physics B 2013年第8期22卷 637-640页

作者：曹先胜吉高峰罗炳成李峰 School of Mathematics and Physics Changzhou University Department of Microelectronics State Key Laboratory of ASIC and Systems Fudan University Shaanxi Key Laboratory of Condensed Matter Structures and Properties School of Science Northwestern Polytechnical University

The dielectric loss tanfi of half-doped manganite ***3 is investigated using Green＇s function technique. The ***3 is described by the Kondo-lattice model in the double exchange limit, taking into account the Jahn- Teller distortion and the super-exchange interaction between the localized electrons. It is found that the intensity of tans decreases with increasing [e]TI, V, and U. It is also observed that the transition temperature Tp rises as l eJTI and U increase. It is worth noting that Tp remains unchanged and the strength of tans increases with increasing g. The calculated dielectric loss results are explained theoretically, and these behaviors are in qualitative agreement with the experimental results.

关键词： multiferroics dielectric loss Lao.sCao.sMnO3

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Integrated electrochemical sensor based on electrowetting-on-dielectric microfluidic chip

Integrated electrochemical sensor based on electrowetting-on...

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12th IEEE SENSORS 2013 Conference

作者： Chen, Jianfeng Yu, Yuhua Zhou, Jia ASIC and System State Key Lab Department of Microelectronics Fudan University Shanghai China

ISBN: (纸本)9781467346405

In this work, we describe the design and study of a novel electrochemical microsensor integrated with electrowetting-on-dielectric (EWOD) microfluidic chip for automatic, rapid and microscale detection. The microsensor was based on the parallel plate EWOD chip. The pretreatment of microliter analyte including dispensing, transporting, mixing and colleting was realized mainly by EWOD electrodes on the bottom plate. The top plate consists of the ground wires for EWOD microfluidics and an on-chip electrochemical cell with gold three-electrode system. The structure and fabrication process were optimized to improve the reliability and stability of integrated chip. The chip can simultaneously realize multifunctional manipulation and online electrochemical detection for reagent droplets. It shows a wide linear range of 10.0 μM-1.0 mM ferrocenemethanol (FcM). The sensitivity of anodic and cathodic peak current was about 5.47 nA/μM (R2=0.99994) and 5.21 nA/μM (R 2=0.99904), respectively. This work shows a great promise for microliter biosensing based on smart microfluidic unit and integrated electrochemical cell in the future. © 2013 IEEE.

关键词： Microfluidic chips

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Influence of HfAlO composition on memory effects of metal-oxide- semiconductor capacitors with Al2O3/HfAlO/Al 2O3 layers and Pd electrode

Influence of HfAlO composition on memory effects of metal-ox...

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作者： Gou, Hong-Yan Chen, Sun Ding, Shi-Jin Sun, Qing-Qing Lu, Hong-Liang Zhang, David Wei Wang, Peng-Fei State Key Laboratory of ASIC and System School of Microelectronics Fudan University 220 Handan Road Shanghai 200433 China

The different charge trapping materials HfO2, HfAlO and Al 2O3 have been compared electrically in metal-oxide-semiconductor capacitors with fixed Al2O3 tunneling and blocking layers and Pd-electrode. The capacitance-voltage hysteresis window, memory window, and stress-time dependent flat-band voltage shift increase with increasing the relative content of HfO2 in the charge trapping layer under the same measurement conditions. After programming at + 17 V for 0.1 s and erasing at - 17 V for 0.1 s, successively, the resulting memory window increases from 0.4 V to 3.8 V with increasing the content of HfO2 from 0% (Al2O3) to 100% (HfO2). However, the charge retention of the capacitors gradually worsens in the sequence of Al2O3, HfAlO and HfO2, which accords with the leakage characteristics of the capacitors. Our results reveal that HfAlO (A:H = 1:1) is a more promising charge trapping material than HfO2 and Al2O3 for polysilicon-oxide-nitride- oxide-silicon type memory applications. This is attributed to enough charge storage capacity, high thermal stability and medium dielectric constant. © 2012 Elsevier B.V.

关键词： Atomic layer deposition

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Abnormal behaviors of Goos–Hänchenshift in hyperbolic metamaterials madeof aluminum zinc oxide materials

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Photonics Research 2013年第4期1卷 160-163页

作者： Jing Zhao Hao Zhang Xiangchao Zhang Dahai Li Hongliang Lu Min Xu Shanghai Ultra-precision Optical Manufacturing Engineering Center Department of Optical Science and EngineeringFudan UniversityShanghai 200433China State Key Laboratory of ASIC and System Department of MicroelectronicsFudan UniversityShanghai 200433China

In this paper,the Goos–Hänchen shift(GHS)at the interface between air and the aluminum zinc oxide(AZO)/ZnO hyperbolic metamaterial(AZO-HMM)is theoretically *** results herein show that AZO-HMM can enhance the GHS at the interface to a value at 3 orders of the incident wavelength under special conditions,which is much larger than conventional GHS ***,the GHS can be tuned to be negative or positive by changing the incident wavelength or the volume fraction of AZO.

关键词： GHS oxide interface

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Frequency pre-distortion for coherent optical MIMO system over MMF

Frequency pre-distortion for coherent optical MIMO system ov...

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2013 18th OptoElectronics and Communications Conference Held Jointly with 2013 International Conference on Photonics in Switching, OECC/PS 2013

作者： Zhang, Ziran Wang, Yuanquan Li, Rongling Fang, Wuliang Shao, Yufeng Chi, Nan Department of Communication Science and Engineering State Key Laboratory of ASIC and System Fudan University Shanghai 200433 China

ISBN: (纸本)9784885522710

In this paper, based on the prototype of a commercial OM2 multimode fiber product, tap delay lines filter model and mode spatial coupling theory, we establish a complete analytical model for coherent optical multiple-input- multiple-output (MIMO) systems over multimode fiber (MMF) with ring launching and receiving. With this model, we transmitted 10Gb/s QPSK signal with frequency pre-distortion over 2500m MMF and achieved error vector magnitude (EVM) less than 0.07 when OSNR is 24dB. © 2013 IEICE.

关键词： Multimode fibers

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Preparation and characterization of SiCOH film using a new precursor trimethoxy [2-(oxabicyclo [4.1.0] hept-3yl) ethyl] silicane

Preparation and characterization of SiCOH film using a new p...

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2013 Spring International Conference on Material Sciences and Technology, MST-S 2013

作者： Ding, Zi-Jun Ding, Shi-Jin Shen, Ying-Zhong Applied Chemistry Department School of Material Science and Engineering Nanjing University of Aeronautics and Astronautics Nanjing China State Key Laboratory of ASIC and System Department of Microelectronics Fudan University Shanghai China

ISBN: (纸本)9783037857090

The SiCOH film has been prepared by using a new precursor of trimethoxy [2-(7-oxabicyclo[4.1.0]hept-3-yl)ethyl] silane via sol-gel and spin-coating methods. The resulting films were characterized by SEM, TGA, AFM, FTIR, nanomechanical testing, and electrical measurements. The TGA result shows that the SiCOH film has good thermal stability, and no obvious thermal decomposition can be observed before 400° C. After being annealed at 350° C for 2 hours, the resulting SiCOH film exhibits a smooth surface (RMS=0.222nm), and a significant reduction of CHn groups in the film. Further, the film exhibits a novel high k value of 15.6, a leakage current density of 2.72 · 10-6 A/cm2 at 1 MV/cm, and good mechanical properties of Er ~ 12.61 GPa and H~3.80 MPa. © (2013) Trans Tech Publications, Switzerland.

关键词： Film preparation

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The relationship of shock parameters and defibrillation efficiency

The relationship of shock parameters and defibrillation effi...

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World Congress on Medical Physics and Biomedical Engineering

作者： Yang, Shengjun Wang, Jianfei Wang, Cong Wu, Xiaomei Fang, Zuxiang State Key Laboratory of ASIC and System Fudan University Shanghai China Electronic Engineering Department Fudan University Shanghai China

ISBN: (纸本)9783642293047

The electrical shock is the only useful method to terminate the ventricular fibrillation (VF). The low energy defibrillation research is very important. The relationship of the shock parameters and the defibrillation efficiency will be investigated in this study. The mechanism of electrical defibrillation is that most of the myocardium cells can be enforced to depolarize and enter to refractory period at the same time when electrical field of the shock interacts with myocardium. The change of trans-membrane potential depends on the trans-membrane current. The defibrillation voltage is only the method to produce the needed current. The voltage needed to defibrillation lies on the defibrillation impedance. Energy is the product of the voltage and current and more easily influenced by the impedance and the current distribution. The effects of pulse duration to defibrillation threshold need to be considered also. Generally, the change of trans-membrane potential to reach the depolarization ΔEm is constant. Then I × τ (pulse duration) is a constant too. So cell's depolarization depends on the quantities of charge (the product of current and time) injected to the cell. Totally 7 domestic swine had been used for animal trails and more than 300 times VF had been induced. Defibrillation threshold is the lowest dosage of the shock for successful defibrillation. The animal trails show that the charge threshold varies little when the pulse duration is short but it will increase quickly at an certain pulse duration. We think that electric charge Q is the main parameter to determine the defibrillation result. The energy threshold is diverse because it maybe influenced by many reasons. So the energy threshold can be used to evaluate the ways and means of defibrillation, but not suitable to be used as the defibrillation dosage. © 2013 Springer-Verlag.

关键词： Animals

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A reconfigurable routing method for fault-tolerant mesh-based network on chip

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Journal of Information and Computational Science 2013年第1期10卷 157-165页

作者： Liu, Yanhua Ruan, Ying Lai, Zongsheng Sun, Ling Institute of Microelectronics Circuit and System East China Normal University Shanghai 200241 China Jiangsu Provincial Key Lab. of ASIC Design Nantong University Nantong 226019 China State Key Laboratory of Computer Architecture Institute of Computing Technology Chinese Academy of Sciences Beijing 100190 China

As the semiconductor industry advances to nano-technology points, Network on Chip (NoC) components are becoming vulnerable to errors during the system operation. Consequently, fault-tolerant techniques for NoC are needed to achieve high reliability. In this paper, we present a fault-tolerant routing method to tolerate faulty routers in a two-dimension (2D) mesh-based NoC. With this method, the system can have a multi-router fault-tolerant capability and the routing path can be dynamically reconfigured to support different situations caused by faulty routers in NoC. Fault-tolerance capability and system performance of the proposed method are evaluated through analysis and simulations. Theoretical analysis and simulation results show that the proposed method can enhance the reliability of system and offer considerable fault-tolerance capability. © 2013 by Binary Information Press.

关键词： Network-on-chip

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Data fusion of multi model with one sensor

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Sensors and Transducers 2013年第SPEC.ISSUE期22卷 126-132页

作者： Yin, J.J. Zhang, J.Q. State Key Laboratory of ASIC and System Fudan University 825 Zhang Heng Rd. Shanghai 201203 China Department of Electronic Engineering Fudan University 220 Han Dan RD Shanghai 200433 China

In this letter, a novel data fusion method, called the single sensor data fusion filter (SSDFF) was proposed. It differed from the existed multi sensor fusion algorithms. In the proposed SSDFF, a new process model using polynomial predictive filter by expanding the dimension of the state, was firstly constructed. Then the local estimation results based on the original model and the proposed model were fused to get the global estimation. It was shown that the new process model could be presented whether the original state transition density was known exactly or not and the fusion result was better than the local ones. The demonstration results verified the effectiveness of the proposed method. © 2013 by IFSA.

关键词： Kalman filters

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