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检索条件"机构=State Key Laboratory of ASIC and System Department of Microelectronics"

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Investigation of Co/TaN bilayer as Cu diffusion barrier

Investigation of Co/TaN bilayer as Cu diffusion barrier

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2010 10th IEEE International Conference on Solid-state and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

作者： Hai-Sheng Lu Shao-Fcng Ding Guo-Ping Ru Yu-Long Jiang Xin-Ping Qu State key lab of ASIC and system Department of microelectronics Fudan University Shanghai 200433 China

ISBN: (纸本)9781424457977

The diffusion barrier properties of Co/TaN bilayer as Cu adhesion layer/diffusion barrier on the Si and low k (k=2.5) substrates were investigated. The barrier was prepared by using ion-beam sputtering technique. The barrier property was investigated by sheet resistance, X-ray diffraction (XRD), and Auger electron spectroscopy (AES) and electrical measurements. No obvious Cu diffusion and agglomeration was observed after annealing at 500℃ for 30 min. Results show that Co/TaN has a good potential as cost effective adhesion/diffusion stack in copper metallization.

关键词： Copper Annealing Silicon Resistance Adhesives X-ray scattering Temperature measurement

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Design and simulation of high-frequency (>100 MHz) ultrasonic phased array transducer

Design and simulation of high-frequency (>100 MHz) ultrasoni...

引用

2010 10th IEEE International Conference on Solid-state and Integrated Circuit Technology

作者： Zhang, Jin-Ying Xu, Wei-Jiang Ji, Xin-Ming Carlier, Julien Nongaillard, Bertrand Huang, Yi-Ping Département d'Opto-Acousto-Electronique CNRS UMR 8520 Université de Valenciennes 59313 Valenciennes France ASIC and System State Key Lab. Department of Microelectronics Fudan University Shanghai 200433 China

ISBN: (纸本)9781424457984

This paper presents a theoretical study on the possible realization of high frequency ultrasonic phased array transducer (f>100 MHz) using MEMS technologies. A silicon based lithium niobate (LiNbO3) single crystal linear array is considered. Finite element method is employed for the simulation optimization design of such device. Continuous wave beam steering, focusing under different array and matching conditions are simulated and the beam performance is analyzed. The inter-element cross-talking and the element electrical impedance are also calculated. ©2010 IEEE.

关键词： Niobium compounds

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Work function modulation for TiN/Ta/TiN metal gate electrode

Work function modulation for TiN/Ta/TiN metal gate electrode

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International Conference on Solid-state and Integrated Circuit Technology

作者： Xiao-Rong Wang Yu-Long Jiang Qi Xie Christophe Detavernier Guo-Ping Ru Xin-Ping Qu Bing-Zong Li State Key Laboratory of ASIC and System Department of Microelectronics Fudan University Shanghai China Department of Solid State Science Ghent University Ghent Belgium

ISBN: (纸本)9781424457977

In this work, the metal gate effective work function (EWF) modulation for the TiN/Ta/TiN/SiO 2 /p-Si(100) structure was investigated. Comparing with TiN/SiO 2 /p-Si(100) structure, after annealing the introduction of Ta can effectively reduce the flat band voltage. It is also revealed that although as the thermal budget increases the flat band voltage obviously shifts toward the negative bias direction, the extracted EWF does not vary too much. An EWF of 4.4 eV is confirmed for TiN/Ta/TiN/SiO 2 /p-Si(100) structure by C-V measurements, which is almost identical to Al/TiN metal gate electrode.

关键词： Tin Annealing Logic gates Electrodes Materials Modulation

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Immunosensor for detecting pulmonary tuberculosis markers in human serum

Immunosensor for detecting pulmonary tuberculosis markers in...

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International Conference on Solid-state and Integrated Circuit Technology

作者： Chun Xu Xiao-sen Chai Shu-lin Zhang Jia Zhou ASIC and System State Key Lab Department of Microelectronics Fudan University Shanghai China State Key Laboratory of Genetic Engineering Fudan University Shanghai China

ISBN: (纸本)9781424457977

A specific and high-sensitive immunosensor for detecting pulmonary tuberculosis (TB) markers in human serum is presented by miniaturizing array of microelectrodes via micro electro-mechanical system (MEMS) for multi-channel electrochemical measurement. The immunosensor is consisted of six Au disk working electrodes, one Au counter electrode and one Ag/AgCl reference electrode. Semi-insulating poly(o-phenylenediamine)(PoPD) film was utilized to co-polymerize and immobilize antigen at the arrayed Au electrodes. The selective recognition of antibody to the corresponding antigen is quantitatively detected by the peak current in the presence of the redox probe, FcCH 2 OH(FcM). Samples with antibody positive and antibody negative can be distinguished.

关键词： Electrodes Immune system Gold Humans Sensitivity Films Arrays

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Highly ordered growth of ZnO nanostructures by combination of nanoimprint lithography and hydrothermal method

Highly ordered growth of ZnO nanostructures by combination o...

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IEEE International Nanoelectronics Conference (INEC)

作者： Shao-Ren Deng Tao Chen Shu-Yi Liu Yi-Fang Chen Ejaz Huq Ran Liu Xin-Ping Qu State Key Lab of ASIC and System Department of Microelectronics Fudan University Shanghai China Rutherford and Appleton Laboratory Didcot Oxfordshire UK

By combining nanoimprint lithography and traditional hydrothermal growth method of ZnO nanorods, vertical and well patterned ZnO nanostructures were successfully fabricated. The imprinted SU-8 resist deep trenches above the ZnO seed layer prohibit the lateral growth of ZnO nanorods. Various patterned vertical ZnO nanostructures like nanorods and nanowalls can be obtained. The improvement of photoluminescence property of ZnO nanorods was observed after removing the SU-8 resist from the substrate by O 2 reactive ion etching (RIE).

关键词： Zinc oxide Nanostructures Nanolithography Resists Etching Photoluminescence Lithography Radio access networks Solvents Gratings

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Influence of nano-embossing on properties of Pb(Zr0.3,Ti0.7)O3 ferroelectric thin film

Influence of nano-embossing on properties of Pb(Zr0.3,Ti0.7)...

引用

IEEE International Nanoelectronics Conference (INEC)

作者： Zhenkui Shen Zhihui Chen Jiangrong Fang Bingrui Lu Zhijun Qiu Anquan Jiang Yifang Chen Xinping Qu Ran Liu State Key Lab of ASIC and System Department of Microelectronics Fudan University Shanghai China Rutherford and Appleton Laboratory Didcot Oxfordshire UK

In this work, we apply nano-embossing technology to fabricate Pb(Zr 0.3 , Ti 0.7 )O3 (PZT) ferroelectric thin film nanostructures and investigate the influence of the patterning process on the material and ferroelectric properties by using SEM, XRD and Precision Ferroelectric Tester. Embossing process has been optimized for embossing depth and pattern profile. It was found that embossing will result in (100) preferred orientation of the PZT thin film. The electrical characteristics of patterned and unpatterned PZT films have been also studied for comparison.

关键词： Embossing Ferroelectric films Ferroelectric materials Temperature Nanostructures Annealing Transistors Switches Radio access networks Scanning electron microscopy

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Design and simulation of a high resolution ultrasonic micro-transducer derived by LiNbO3

Design and simulation of a high resolution ultrasonic micro-...

引用

2010 10th IEEE International Conference on Solid-state and Integrated Circuit Technology

作者： Zhang, Jin-Ying Ji, Xin-Ming Xu, Wei-Jiang Carlier, Julien Nongaillard, Bertrand Huang, Yi-Ping ASIC and System State Key Lab Department of Microelectronics Fudan University Shanghai 200433 China Départment d'Opto-Acoustic-Electronique CNRS UMR 8520 Université de Valenciennes et du Hainaut Cambrésis France

ISBN: (纸本)9781424457984

A 100 MHz high resolution ultrasonic micro-transducer with a focal lens is designed for medical imaging based on monocrystalline lithium niobate (LiNbO3) 36°/Y-cut. Finite element analysis is used to characterize the impulse response of this transducer and the stationary wave propagation. The results show that the focal lens attributes a lot to the directivity and the resolution. The wave derived by LiNbO3 36°/Y-cut element demonstrates a better property compared with ZnO. The energy of transmitted wave at the focus is increased by 16.53% and 314.7% due to LiNbO3 and the matching layers, respectively. ©2010 IEEE.

关键词： Lithium compounds

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Charging characteristics of Sb nanocrystals embedded in copper phthalocyanine films for memory applications

Charging characteristics of Sb nanocrystals embedded in copp...

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2010 10th IEEE International Conference on Solid-state and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

作者： Shi-Jin Ding Yue Huang Dietrich R.T. Zahn State Key Laboratory of ASIC and System Department of Microelectronics Fudan University Shanghai Semiconductor Physics Chemnitz University of Technology Chemnitz 097107 Germany

ISBN: (纸本)9781424457977

The charging characteristics of Sb nanocrystals embedded in organic semiconductor copper phthalocyanine (CuPc) have been studied for the first time. The images from atomic force microscopy show that Sb NCs grown on the surface of CuPc film exhibit a vertical height of 10-15 nm and uniform distribution, which are interspersed with a few bigger ones (~30 nm). Two kinds of capacitancevoltage measurements, frequericy responds and hysteresis loops, of the control sample and the one embedded with Sb NCs indicate the charging and discharging of the Sb NCs.

关键词： copper phthalocyanine antimony charging charge characteristics CHARGING(ACCOUNTTNG) embedding Nanocrystals Uniform distribution

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Tunable Photonic Crystals based on Photoinduced Deformations of Crosslinked Liquid-crystalline Polymers

Tunable Photonic Crystals based on Photoinduced Deformations...

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2010 10th IEEE International Conference on Solid-state and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

作者： Xinming Ji ZongMing Bao Yiping Huang Xin Zhao Yanlei Yu Futao Cheng Wu Wei The State Key Laboratory of ASIC&Systera Department of MicroelectronicsFudan University Shanghai 2 The State Key Laboratory of ASIC&Systera Department of Materials ScienceFudan University Shanghai

ISBN: (纸本)9781424457977

A novel tunable three-dimensional (3D) photonic crystals is demonstrated based on the photoinduced deformation of the azobenzene crosslinked liquidcrystalline polymers(CLCPs). A nanoimprinting approach is utilized to create a robust CLCPs 3D photonic crystal structure. The dynamical modulated performance of the photonic crystals induced by ultraviolet and visible are measured and analyzed. It is shown that the tunable photonic crystals is reversible and stable.

关键词： Films Photonic crystals Radiation effects Liquid crystals Photonics Three dimensional displays Lattices

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Enhanced middle-infrared light transmission through Au/SiOxNy/Au aperture arrays

Enhanced middle-infrared light transmission through Au/SiOxN...

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IEEE International Nanoelectronics Conference (INEC)

作者： Gongli Xiao Xiang Yao Xinming Ji Jia Zhou Zongming Bao Yiping Huang State Key Laboratory of ASIC & System Department of Microelectronics Fudan University Shanghai China Information & Communications College Guilin University of Electronic and Technology Guilin China

The enhanced middle-infrared light transmission through Au/SiO x N y /Au aperture arrays by changing the refractive index and the thickness of a dielectric layer was studied experimentally. The results indicated that the transmission spectrum was highly dependent on the refractive index and the thickness of SiO x N y . We found that the transmission peaks redshifted regularly along with the refractive index from 1.6 to 1.8, owing to the role of surface plasmon polaritons (SPP) coupling in the Au/SiO x N y /Au cascaded structure. Simultaneously, a higher transmission efficiency and narrower transmission peak was obtained in Au/SiO 2.1 N 0.3 /Au cascaded structure with small refractive index (1.6) than in Au/ SiO 0.6 N1/Au cascaded structure with large refractive index (1.8). When the thickness of SiO x N y changes from 0.2 to 0.4 ¿m, the shape of transmission spectrum exhibits a large change. It was found that a higher transmission efficiency and narrower transmission peak was obtained in Au/SiO x N y /Au cascaded structure with a thin dielectric film (0.2 ¿m), with the increase of SiO x N y film's thickness, the transmission peak gradually widened and disappeared finally. This effect is useful in applications of biochemical sensing and tunable integrated plasmonic devices in the middle-infrared region.

关键词： Gold Refractive index Apertures Optical arrays Optical films Dielectrics Couplings Plasmons Shape Biomedical optical imaging

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