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Electrical levels of defect investigation of Zr O2 thin film by spectroscopic ellipsometry

Journal of Vacuum Science and Technology B: microelectronics and Nanometer Structures 2009年第3期27卷 1030-1034页

作者： Chen, Y.R. Zhou, P. Li, J. Chen, L.Y. Department of Optical Science and Engineering Fudan University Shanghai 200433 China School of Microelectronics ASIC and System State Key Laboratory Fudan University Shanghai 200433 China

The electrical levels of defects of high- k dielectric Zr O2 films deposited with different oxygen fluxes have been investigated using x-ray diffraction, x-ray photoelectron spectroscopy, and spectroscopic ellipsometry. Various defects with the formation of interstitial oxygen and oxygen vacancies existed in monoclinic Zr O2 films. The optical properties of the films are strongly influenced by configuration changes in defects. Parameters were extracted from spectroscopic ellipsometry raw data by Lorentz oscillator model fitting that indicate the probabilities and transition energies for different charged oxygen interstitial and vacancy defects. These correspond to the electron affinity energies calculated by density functional theory and assigned to electrons trapped at different charged defects from the bottom of the conduction band. A nondestructive and noncontact solution is suggested for detecting the defect states and energy level of high- k film. © 2009 American Vacuum Society.

关键词： Spectroscopic ellipsometry

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Memory Effect of Metal-Oxide-Silicon Capacitors with Self-Assembly Double-Layer Au Nanocrystals Embedded in Atomic-Layer-Deposited HfO2 Dielectric

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Chinese Physics Letters 2009年第10期26卷 200-202页

作者：黄玥苟鸿雁孙清清丁士进张卫张世理 State Key Laboratory of ASIC and System School of Microelectronics Fudan University Shanghai 200433 School of Information and Communication KTH Royal Institute of Technology Electrum 229 SE-164 40 Kista Sweden

We report the chemical self-assembly growth of Au nanocrystals on atomic-layer-deposited HfO2 films aminosilanized by （3-Aminopropyl）-trimethoxysilane aforehand for memory applications. The resulting Au nanocrystals show a density of about 4 × 10^11 cm^-2 and a diameter range of 5-8nm. The metal-oxide-silicon capacitor with double-layer Au nanocrystals embedded in HfO2 dielectric exhibits a large C - V hysteresis window of 11.9 V for ±11 V gate voltage sweeps at 1MHz, a flat-band voltage shift of 1.5 V after the electrical stress under 7 V for 1ms, a leakage current density of 2.9 × 10^-8 A/cm^-2 at 9 V and room temperature. Compared to single-layer Au nanocrystals, the double-layer Au nanocrystals increase the hysteresis window significantly, and the underlying mechanism is thus discussed.

关键词： Electronics and devices Semiconductors Surfaces interfaces and thin films Nanoscale science and low-D systems

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Layer-by-layer assembly of poly(p-xylyleneviologen)-DNA multilayers and their electrochemical properties

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Materials Science and Engineering C 2009年第3期29卷 925-929页

作者： Chen, Guo-Ping Wang, Xu Liu, Ai-Rong Qian, Dong-Jin State Key Laboratory ASIC and System School of Microelectronics 220 Handan Road Shanghai 200433 China Department of Chemistry Fudan University 220 Handan Road Shanghai 200433 China

Multilayers of poly(p-xylyleneviologen) (PXV) and calf thymus DNA were constructed on the gold surface by layer-by-layer (LBL) method. The assembly process was examined by quartz crystal microbalance (QCM) measurements. According to the frequency change, the average mass increase was estimated to be about 97 and 110ng/cm2 for each assembly of PXV and DNA layer, respectively. Cyclic voltammograms of the multilayer modified gold electrodes showed a couple of redox peaks, the potentials of which were closely dependent on the layer numbers and nature of the outmost layer. The alternatively assembled DNA layers could hinder formation of π-complex dimer of viologen groups due to the strong interlayer electrostatic interaction. The charge transfer process was discussed by the chronocoulometry method. The assembled PXV-DNA multilayers showed high long-term stability at ambient conditions and in electrolyte solution. © 2008 Elsevier B.V. All rights reserved.

关键词： Multilayers

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A robust digital phase discriminator in one-bit quantized software-defined receivers

A robust digital phase discriminator in one-bit quantized so...

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5th International Conference on Wireless Communications, Networking and Mobile Computing, WiCOM 2009

作者： Jin, Zhao Jianqiu, Zhang Jianjun, Yin State Key Laboratory of ASIC and System Department of E. E. Fudan University Shanghai China

ISBN: (纸本)9781424436934

This paper presents a novel phase discriminator called robust digital phase discriminator (RDPD) for the one-bit analog-to-digital conversion (ADC) software-defined receivers. Different from existing digital phase discriminator (DPD), the proposed RDPD estimates carrier phases of I and Q separately and then fuses the estimation results to achieve higher accuracy and better noise robust characteristic than DPD. Analysis and simulation results indicate that the proposed RDPD outperforms conventional arctangent phase discriminator (APD) and DPD in estimation accuracy wherever in high or low SNR cases. ©2009 IEEE.

关键词： Analog to digital conversion

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Duplication of nanoimprint templates by a novel SU-8/SiO 2/PMMA trilayer technique

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Journal of Vacuum Science and Technology B: microelectronics and Nanometer Structures 2009年第1期27卷 19-22页

作者： Wan, Jing Shu, Zhen Deng, Shao-Ren Xie, Shen-Qi Lu, Bing-Rui Liu, Ran Chen, Yifang Qu, Xin-Ping Department of Microelectronics State Key Laboratory of ASIC and Systems Fudan University Shanghai 200433 China Rutherford Appleton Laboratory Chilton Didcot Oxon OX11 0QX United Kingdom

In this work, a trilayer technique used in the nanoimprint lithography process to replicate the templates is developed. The SU-8/SiO 2/PMMA trilayer was used. The photosensitive epoxy (SU8 resist) which has a low glass transition temperature was used as the imprint layer. Polymethylmethacrylate (PMMA) was used as the transfer layer. A SiO2 layer is placed between the SU8 and PMMA to act as a protective layer due to its strong resistance to oxygen reactive ion etching. By optimizing imprint and etching processes, master templates with minimum feature size of 150 nm and period of 300 nm can be successfully duplicated. © 2009 American Vacuum Society.

关键词： Reactive ion etching

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A flexible architecture for multi-standard LDPC decoders

A flexible architecture for multi-standard LDPC decoders

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International Conference on asic

作者： Shuangqu Huang Bo Xiang Bei Huang Yun Chen Xiaoyang Zeng State Key Laboratory of ASIC and System Department of Microelectronics Fudan University Shanghai China Key Laboratory of ASIC and System Department of Microelectronics Fudan University Shanghai China

Since low-density parity-check codes have near-capacity decoding performance and very high decoding throughput, they have been employed as FEC coding scheme in many transmission standards for wireless communication, such as IEEE 802.22n, IEEE 802.16e, DVB-S2, and DTMB. This trend triggers the need for so-called multi-standard LDPC decoders. In this paper, a flexible architecture that supports multiple code rates, variable block sizes and is code independent for block-LDPC codes is proposed, based on rearranged TPMP algorithm,. By implementing a dynamically reconfigurable RPPU, our proposed architecture can be configured into row update or column update mode by time-division multiplexing. Consequently, the decoder achieves a high area and power efficiency. To verify our proposed architecture, a novel LDPC decoder which supports IEEE802.16e standard has been implemented. The results on a 0.18 um CMOS process show that the decoder occupies an area of approximately 13.7 mm 2 and runs correctly at an maximum operating frequency of 110 MHz, resulting in 98 Mbps decoding throughput.

关键词： Parity check codes Decoding Throughput Code standards Application specific integrated circuits Communication standards Wireless communication Digital video broadcasting Forward error correction microelectronics

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Retention-failure mechanism of TaN/CuxO/Cu resistive memory with good data retention capability

Retention-failure mechanism of TaN/CuxO/Cu resistive memory ...

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作者： Wan, H.J. Zhou, P. Ye, L. Lin, Y.Y. Wu, J.G. Wu, H. Chi, M.H. State Key Laboratory of ASIC and System Department of Microelectronics Fudan University Shanghai 200433 China Memory Technology Development Center Semiconductor Manufacturing International Corp. Shanghai 201203 China

Data retention characteristics and a failure mechanism of TaN/Cu xO/Cu resistive memory device are investigated by a temperature-accelerated test method. Data retention capability at 85 °C is sufficiently longer than 10 years by using two different methods: simple extrapolation and Arrhenius equation. The high resistance state fails to low resistance state and low resistance state fails to high resistance state at the elevated temperature. It is attributed that different retention-failure mechanisms are responsible for high resistance state and low resistance state, respectively. A filament/charge trapped combined model is presented to clarify the retention-failure mechanism. © 2009 American Vacuum Society.

关键词： Tantalum compounds

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A cost efficient LDPC decoder for DVB-S2

A cost efficient LDPC decoder for DVB-S2

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International Conference on asic

作者： Yan Ying Dan Bo Shuangqu Huang Bo Xiang Yun Chen Xiaoyang Zeng State Key Laboratory of ASIC and System Department of Microelectronics Fudan University Shanghai China

Based on the min-sum algorithm, this paper proposes an LDPC decoder integrating the TDMP schedule, which could achieve low complexity as well as good performance. The LDPC decoder is for DVB-S2, which includes 11 kinds of code rates with a block size of 64800. Based on SMIC 0.13 ¿m standard CMOS process, the LDPC decoder has an estimation area of 14 mm 2 , a throughput of 135 Mbps with a frequency of 105 MHz and maximum iteration number of 30,which shows advantage over previous DVB-S2 LDPC decoders.

关键词： Costs Parity check codes Digital video broadcasting Application specific integrated circuits Satellite broadcasting microelectronics Forward error correction Iterative decoding Frequency estimation Throughput

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A low-power 4K point FFT processor for CMMB OFDM receiver system

A low-power 4K point FFT processor for CMMB OFDM receiver sy...

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International Conference on asic

作者： Simeng Li Hao Xiao Yun Chen Xiaoyang Zeng State Key Laboratory of ASIC and System Department of Microelectronics Fudan University Shanghai China

This paper presents a 4096-point FFT processor for CMMB receiver system, in which dual-path pipelined shared memory architecture is employed. With a data reordering for receiver, an elaborate memory configuration scheme, single-port SRAM can be adopted without degrading throughput rate, with small area and lower power dissipation. In addition, the Signal-to-Quantization Noise Ratio (SQNR) of a 4 K-point fixed-point FFT can achieve 48.7 B with the wordlength of 12 bit.

关键词： OFDM Digital multimedia broadcasting Multimedia systems Multimedia communication Digital video broadcasting Throughput Application specific integrated circuits microelectronics Energy consumption Signal processing algorithms

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Low-complexity joint synchronization of symbol timing and carrier frequency for CMMB system

Low-complexity joint synchronization of symbol timing and ca...

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IEEE International Symposium on Intelligent Signal Processing and Communication systems (ISPACS)

作者： Nan Shao Yun Chen Huxiong Xu Simeng Li Xiaoyang Zeng State Key Laboratory of ASIC and System Department of Microelectronics Fudan University Shanghai China

In the lately released Chinese mobile multimedia broadcasting standard CMMB, cyclic-prefix based OFDM technique has been adopted. Traditional timing synchronization for this system requires a correlator to correlate the last Ng samples of the received OFDM symbol with their copies ahead, and at least N (the length of OFDM symbol) data and Ng correlation results have to be stored for implementation, which results in large consumption of memory. In this paper, a low complexity scheme for the joint synchronization of symbol timing and fractional carrier frequency is proposed. This scheme extremely lowers the hardware cost, especially the memory consumption. Simulation results show that the performance of this algorithm can also meet the need of the system well over both AWGN and typical CMMB multipath channel.

关键词： Frequency synchronization Timing OFDM AWGN Digital multimedia broadcasting Multimedia communication Correlators Hardware Costs Multipath channels

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