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Fabrication process analysis for nano-positioning stage based on silicon bulk micromachining

Guangxue Jingmi Gongcheng/Optics and Precision Engineering 2008年第4期16卷 636-641页

作者： Wang, Jia-Chou Rong, Wei-Bin Li, Xin-Xin Sun, Li-Ning Robotics Institute Harbin Institute of Technology Harbin 150001 China State Key Laboratory of Transducer Technology Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 200050 China

In order to realize the miniaturized nano-positioning stage, a novel 2-DOF Single Crystal Silicon (SCS) nano-positioning micro x-y stage with the function of displacement detection was successfully developed using silicon bulk machining. The fabrication process of the nano-positioning stage with high aspect ratio and big dimension was presented. The effects of Deep Reactive Ion Etching (DRIE) and the backside protecting under the etching silicon on the structure were analyzed. Some factors causing nano-position stage failure were identified, and several advices were provided for avoiding these failures. Moreover, an effective fabricating technique was proposed to fabricate a vertical sidewall piezoresistor in plane in this nano-positioning stage. By adjusting DRIE parameters, a backside window with high aspect ratio and big dimension for releasing the structure was etched and electrostatics comb structure of 2.5 μm wide and 50 μm thickness was successfully released. Experimental results show the nano-positioning stata with high aspect ratio has excellent performance in integrating displacement detection.

关键词： Micromachining

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Development of a multi-DOF exoskeleton based machine for injured fingers

Development of a multi-DOF exoskeleton based machine for inj...

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2008 IEEE/RSJ International Conference on Intelligent Robots and systems

作者： Yili Fu Peng Wang Shuguo Wang State Key Laboratory of Robotics and System Harbin Institute of Technology Hardin CO USA Headmasters office Harbin Institute of Technology Hardin CO USA

ISBN: (纸本)9781424420575

In order to offer a method for the rehabilitation of injured fingers and a means of quantitative detection and evaluation, an exoskeleton based continuous passive motion (CPM) machine is presented in this paper. Corresponding to each finger of human hand, the CPM machine has 4 degrees of freedom (DOF) driven by two DC motors. The joint force and position sensors are all integrated into the machine. The device can be easily attached and also be adjusted to fit different hand sizes. During the injured fingerpsilas flexion and extension motion the machine can always exert perpendicular forces on the finger phalanges, meanwhile it can achieve the precise control of scope, force and speed of the moving fingers. In order to control the CPM machine, we have also designed an embedded control system based on S3C2410 (a kind of 32-bit RISC microprocessor). The whole system is open-ended for new functions and applications. The function modularization method provides a new thinking of design for the control system.

关键词： Fingers Joints Continuous phase modulation Sensors Force Gears Control systems

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Design of a Hybrid-type Electrostatically Driven Microgripper Integrated Vacuum Tool

Design of a Hybrid-type Electrostatically Driven Microgrippe...

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中国微米纳米技术学会第十届学术年会暨第一届国际会议(1st International Conference of the Chinese Society of Micro/Nano technology)

作者： Lining Sun Tao Chen Liguo Chen Xinxi Li State Key Laboratory of Robotics and System Robotics InstituteHarbin Institute of TechnologyHarbin 150080CHINA State Key Lab of Transducer TechnologyShanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghai 200050CHINA

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Robust RBPF for mobile robot using panoramic vision

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通讯和计算机（中英文版） 2008年第1期5卷 16-21页

作者： CAI Ze-su SUN Li-ning HUANG Qing-cheng PIAO Song-hao LI Mao-hai School of Computer Science and Technology Harbin Institute of Technology Harbin 150001 China State Key Laboratory of Advanced Robot and System Harbin Institute of Technology Harbin 150001 China

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Single Neuron Adaptive PID Control of the Silicon-based Integrated Micro Nano-Positioning XY-Stage

Single Neuron Adaptive PID Control of the Silicon-based Inte...

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中国微米纳米技术学会第十届学术年会暨第一届国际会议(1st International Conference of the Chinese Society of Micro/Nano technology)

作者： Wang Jiachou Rong Weibin Sun Lining Li Xinxin State Key Laboratory of Robotics and System Harbin Institute of TechnologyHarbinHeilongjiang ProvinceChina State Key Laboratory of Transducer TechnologyShanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghaiChina

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Mobile Robot Path Tracking in Unknown Dynamic Environment

Mobile Robot Path Tracking in Unknown Dynamic Environment

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IEEE Conference on robotics, Automation and Mechatronics

作者： Du Zhi Jiang Wang Zhong Min State key laboratory of robotics and system Harbin Institute of Technology Harbin China Department of Mechanical Engineering Tianjin University of Technology and Education Tianjin China

The paper proposes a cooperative system of fuzzy neural networks (FNN) and fuzzy logic control (FLC). And this system is used to on-line path tracking of a mobile robot in unknown dynamic environment, instead of the commonly used FLC to research on this problem. Firstly, the application of FNN based on the kinematics models of mobile robot is described in detail, moreover, it uses an improved back propagation (BP) algorithm to complete the network learning and training. Secondly, it utilizes FLC to fulfill the real-time avoiding obstacles. The simulation results show that the proposed cooperative system is effective and robust, meanwhile possesses better abilities of path tracking and real-time avoiding obstacles in unknown dynamic environment.

关键词： Mobile robots Fuzzy neural networks Fuzzy control Kinematics Cooperative systems Control systems Path planning Intelligent robots Feedback control Neural networks

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Research on rough set theory and applications in China

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Lecture Notes in Computer Science

作者： Wang, Guoyin Zhang, Qinghua Huang, Houkuan Ye, Dongyi Hu, Qinghua Hu, Xuegang Shi, Zhongzhi Li, Yongli Shang, Lin An, Liping Sai, Ying Chen, Shanben Liang, Jiye Qin, keyun Zeng, Huanglin Xie, Keming Miao, Duoqian Min, Fan Wu, Zhaocong Wu, Weizhi Dai, Jianhua Institute of Computer Science and Technology Chongqing University of Posts and Telecommunications Chongqing 400065 China School of Information Science and Technology Southwest Jiaotong University Chengdu 610031 China School of Computer and Information Technology Beijing Jiaotong University Beijing 100044 China College of Math. and Computer Fuzhou University Fuzhou 350002 China Harbin Institute of Technology PO Box 458 Harbin 150006 China School of Computer and Information Hefei University of Technology Hefei 230009 China Institute of Computing Technology Chinese Academy of Sciences Beijing 100080 China Lanzhou University No.222 Tianshui South Rd. Lanzhou 730000 China State Key Laboratory for Novel Software Technology Nanjing University Nanjing 210093 China Management Science and Engineering Department Business School Nankai University Tianjin 300071 China Shandong University of Finance No.40 Shun-geng Road Jinan 250014 China Welding Engineering Institute Shanghai Jiaotong University Shanghai 200030 China School of Computer and Information Technology Shanxi University Taiyuan 030006 China Intelligent Control Development Center Southwest Jiaotong University Chengdu 610031 China Artificial Intelligence of Key Laboratory Sichuan University of Science and Engineering Zigong 643000 China Department of Automation College of Information Engineering Taiyuan University of Technology Taiyuan 030024 China 4800 CaoAn Highway Shanghai 201804 China School of Computer Science and Technology University of Electronic Science and Technology of China Chengdu 610054 China School of Remote Sensing Information Engineering Wuhan University Wuhan 430079 China Institute for Information and System Sciences Faculty of Science Xi'an Jiaotong University Xi'an 710049 China Information College Zhejiang Ocean University Zhejiang 316004 China Institute of Artificial Intelligence Zhejiang University Hangzhou 310027 China

ISBN: (纸本)3540850635

This article gives a capsule view of research on rough set theory and applications ongoing at universities and laboratories in China. Included in this capsule view of rough set research is a brief description of the following things: Chinese research groups on rough set with their URLs for web pages, names of principal researchers (supervisors), numbers of graduate students, and topics being investigated. Statistical summaries showing the growth in the research on rough set theory and application in China are included. In addition, an introduction summarizing the research interests of Chinese researchers is included in this article. The contribution of this article is a complete overview of the principal research directions in rough set theory and its applications in China. © 2008 Springer-Verlag Berlin Heidelberg.

关键词： Rough set theory

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Plasticity characteristics of beta titanium alloy obtained using depth-sensing nano-indentation test

Plasticity characteristics of beta titanium alloy obtained u...

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作者： Wang, Xiaoteng Fang, Hongyuan Yoshida, Fusahito State Key Laboratory of Welding Science and Technology Harbin Institute of Technology Harbin 150001 China Department of Mechanical System Engineering Hiroshima University Higashi-Hiroshima739-8527 Japan

In this study, depth sensing nano-indentation test was carried out to investigate the plastic/viscoplastic behavior of beta titanium alloy. The indentation experiment results showed that both hardening and softening effect existed in indentation process and the residual penetration depth was deeper when the nominal indentation strain rate increased. That is opposite to the room temperature tension test results, which showed a strain rate hardening behavior. FEM simulation combined with viscoplastic model was carried out to simulate the indentation procedure. FEM results showed that the pile-up pattern changed with the consideration of the nominal indentation strain rate effect. Atom force microscope (AFM) observation gave a same result of pile-up patterns.

关键词： Titanium alloys

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A new novel virtual simulation system for robot-assisted orthopedic surgery

A new novel virtual simulation system for robot-assisted ort...

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IEEE International Conference on robotics and Biomimetics

作者： Fengfeng Zhang Zhijiang Du Lining Sun Zhiheng Jia State Key Laboratory of Robotics and Mechatronics Harbin Institute of Technology Harbin Heilongjiang China

ISBN: (纸本)9781424417612;9781424417582;1424417619

With the current availability of advanced robotics and virtual reality technology, Surgical simulation has become one of the most promising areas in modern medicine. The paper proposes a novel desktop virtual surgical simulation system capable of not only surgical training but also operative planning, surgery rehearsal and telesurgery, which is mainly used on the robot-assisted orthopedic surgery system, HIT-RAOS. The paper fist introduces the hardware system of HIT-RAOS, then highlights the process of building the virtual environment. In the course of this process, firstly, Pro/E, Javd3D and VRML are chosen to built the virtual simulation models of each robot consisting of the surgery system, secondly, a novel and reliable finite element method is used to built the biomechanical human model of the leg, and accordingly the force-distance curve diagram is created through this model, then the virtual orthopedic surgery simulation system is gotten through integrating the robot models and the biomechanical model. Lastly, a teleoperation system for the surgery simulation is built to test the availability and real-time of this virtual surgery simulation system.

关键词： Robots Orthopedic surgery Medical simulation Medical robotics Legged locomotion Virtual reality Hardware Virtual environment Finite element methods Humans

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Locomotion modeling and simulation of the biped robot with heterogeneous legs

Locomotion modeling and simulation of the biped robot with h...

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2007 2nd IEEE Conference on Industrial Electronics and Applications, ICIEA 2007

作者： Fu, Li Xu, Xinhe Department of Auto-control Shenyang Institute of Aeronautical Engineering Shenyang 110004 China Institute of Artificial Intelligence and Robotics Northeastern University Shenyang 110004 China State Key Laboratory for Intelligence Technology and System Tsinghua University Beijing 100084 China

ISBN: (纸本)1424407370

This paper proposed a methodology for kinematic and dynamic modeling of biped robot with Heterogeneous legs (BRHL). Based on design characteristics in the knee joint used in intelligent prosthesis leg, i.e., multi-axes mechanics with closed loop chain and reluctant coordinates, we use Routh method to develop dynamic model of BRHL and evaluate the relationship between force and moment, giving an algorithm of Routh equation for forward and reverse solution as well as constrain equations. This methodology establishes the basis for locomotion, control and perception of BRHL. In addition, the model thus developed is proven to be robust and the human motion process is well simulated in ADAMS software. © 2007 IEEE.

关键词： Robotic arms

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