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检索条件"机构=Systems.Control and Robotics Laboratory Department of Electrical and Computer Engineering"
1158 条 记 录,以下是1051-1060 订阅
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Real-time control of reactive ion etching: identification and disturbance rejection
Real-time control of reactive ion etching: identification an...
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IEEE Conference on Decision and control
作者: B.A. Rashap P.P. Khargonekar J.W. Grizzle M.E. Elta J.S. Freudenberg F.L. Terry Electronics Manufacturing and Control Systems Laboratory Department of Electrical Engineering and Computer Science University of Michigan Ann Arbor MI USA
The main processes involved in the manufacture of integrated circuits are deposition, lithography, etching, and implantation. This paper describes results on identification and real-time control of reactive ion etcher... 详细信息
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Applications of control to Semiconductor Manufacturing: Reactive Ion Etching
Applications of Control to Semiconductor Manufacturing: Reac...
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American control Conference (ACC)
作者: M. Elta H. Etemad J. S. Freudenberg M. D. Giles J. W. Grizzle P. T. Kabamba P. P. Khargonekar S. Lafortune S. M. Meerkov J. R. Moyne B. A. Rashap D. Teneketzis F. L. Terry Solid State Electronics Laboratory Department of Electrical Engineering and Computer Science University of Michigan Ann Arbor MI USA Control Systems Laboratory and Department of Electrical Engineering and Computer Science University of Michigan Ann Arbor MI USA
This paper describes the development of real-time control technology for the improvement of manufacturing characteristics of reactive ion etchers. A general control strategy is presented as well as supporting experime... 详细信息
来源: 评论
Target Detection and Localization from Bearing-Only and Bearing/range Measurements
Target Detection and Localization from Bearing-Only and Bear...
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IEEE Regional Conference on Aerospace control systems
作者: L.G. Weiss S.C.A. Thomopoulos Applied Research Laboratory Pennsylvania State University PA USA Decision and Control Systems Laboratory Department of Electrical and Computer Engineering Pennsylvania State University PA USA
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High Resolution Target Range Estimation in the Presence of Multipath Using JDEF
High Resolution Target Range Estimation in the Presence of M...
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IEEE Regional Conference on Aerospace control systems
作者: M.D. Reger S.C.A. Thomopoulos Applied Research Laboratory Pennsylvania State University University Park PA USA Decision and Control Systems Laboratory Department of Electrical and Computer Engineering Pennsylvania State University University Park PA USA
The Joint Detection/Estimation Filter (JDEF) [1,2] can be utilized to improve the performance of a single Extended Kalmart Filter (EKF) when the problem of estimation involves a large initial variance. In this case th... 详细信息
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High Resolution Multi-Radar Data Fusion Using JDEF
High Resolution Multi-Radar Data Fusion Using JDEF
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IEEE Regional Conference on Aerospace control systems
作者: T.W. Hilands S.C.A. Thomopoulos Applied Research Laboratory Pennsylvania State University University Park PA USA Decision Control Systems Laboratory Department of Electrical and Computer Engineering Pennsylvania State University University Park PA USA
This paper addresses the problem of multi sensor detection and high resolution signal parameter estimation using joint maximum a posteriori detection and high order nonlinear filtering techniques. The model-based fusi... 详细信息
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High Order Filters for Estimation in Non-Gaussian Noise
High Order Filters for Estimation in Non-Gaussian Noise
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American control Conference (ACC)
作者: Stelios C. A. Thomopoulos Thomas W. Hilands Decision and Control Systems Laboratory Department of Electrical and Computer Engineering Pennsylvania State University University Park PA USA Applied Research Laboratory Pennsylvania State University University Park PA USA
In this paper high order vector filter equations are developed for estimation in non-Gaussian noise. The difference between the filters developed here and the standard Kalman filter is that the filter equation contain... 详细信息
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Nonlinear Adaptive Joint Detection/Estimation for Multi-Radar Data Fusion
Nonlinear Adaptive Joint Detection/Estimation for Multi-Rada...
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American control Conference (ACC)
作者: Thomas W. Hilands Stelios C. A. Thomopoulos Applied Research Laboratory Pennsylvania State University University Park PA USA Decision and Control Systems Laboratory Department of Electrical and Computer Engineering Pennsylvania State University University Park PA USA
This paper addresses the problem of multisensor detection and high resolution signal parameter estimation using joint maximum a posteriori detection and high order nonlinear filtering techniques. The model-based fusio... 详细信息
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High Resolution Model Order Selection and Parameter Estimation Using JDEF (Joint Detection/Estimation Filter)
High Resolution Model Order Selection and Parameter Estimati...
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IEEE Regional Conference on Aerospace control systems
作者: S.C.A. Thomopoulos K. Ramaswamy G. Rajagopal T.W. Hilands Decision & Control Systems Laboratory Department of Electrical & Computer Engineering Pennsylvania State University University Park PA USA Applied Research Laboratory Pennsylvania State University University Park PA USA
The problem of model order selection in the presence of parametric uncertainty is considered. A high resolution joint detection/estimation filter is used to detect the correct order of the model and estimate the signa... 详细信息
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Prediction and comparisons of C-band reflectivity profiles from S-band dual polarization measurements
Prediction and comparisons of C-band reflectivity profiles f...
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IEEE International Symposium on Geoscience and Remote Sensing (IGARSS)
作者: H. Direskeneli T.A. Seliga K. Aydin Information and Control Systems Inc. Hampton VA USA Electromagnetics and Remote Sensing Laboratory Department of Electrical Engineering University of Washington Seattle WA USA Communications and Space Scienceences Laboratory Department of Electrical and Computer Engineering Pennslyvania State University University Park PA USA
Apparent reflectivity factors measured by a radar operating at an attenuating wavelength can be adequately predicted by using the reflectivity factors at horizontal and vertical polarizations measured at a non-attenua... 详细信息
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Worst Case Identification of Continuous time systems via Interpolation
Worst Case Identification of Continuous time Systems via Int...
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American control Conference (ACC)
作者: Jie Chen Guoxiang Gu Carl N. Nett Schools of AeroSpace and Electrical Engineering Georgia Institute of Technology Atlanta GA USA Department of Electrical and Computer Engineering Louisiana State University Baton Rouge LA USA Laboratory for Identification and Control of Complex Highly Uncertain Systems(LIC-CHUS) School of Aerosapce Engineering Georgia Institute of Technology Atlanta GA USA
We consider a worse case control oriented identification problem recently studied by several authors. This problem is one of the H∞ identification in the continuous time setting. We give a less conservative formulati... 详细信息
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