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Precise Motion control of Wafer Stages via Adaptive Neural Network and Fractional-Order Super-Twisting Algorithm

IFAC-PapersOnLine 2020年第2期53卷 8315-8320页

作者： Zhian Kuang Liting Sun Huijun Gao Masayoshi Tomizuka Research Institute of Intelligent Control and Systems Harbin Institute of Technology Harbin 150001 P.R. China Mechanical Control System Lab Mechanical Engineering Department University of California Berkeley CA 94720 USA

To obtain precise motion control of wafer stages, an adaptive neural network and fractional-order super-twisting control strategy is proposed. Based on sliding mode control (SMC), the proposed controller aims to address two challenges in SMC: 1) reducing the chattering phenomenon, and 2) attenuating the influence of model uncertainties and disturbances. For the first challenge, a fractional-order terminal sliding mode surface and a super-twisting algorithm are integrated into the SMC design. To attenuate uncertainties and disturbances, an add-on control structure based on the radial basis function (RBF) neural network is introduced. Stability analysis of the closed-loop control system is provided. Finally, experiments on a wafer stage testbed system are conducted, which proves that the proposed controller can robustly improve the tracking performance in the presence of uncertainties and disturbances compared to conventional and previous controllers.

关键词： Precision control Sliding-mode control Neural Networks Fractional-order Linear Motors Stability Analysis Uncertainty

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Deciphering dissolved organic matter by Fourier transform ion cyclotron resonance mass spectrometry (FT-ICR MS): from bulk to fractions and individuals

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Carbon research 2022年第1期1卷 1-22页

作者： Qi, Yulin Xie, Qiaorong Wang, Jun-Jian He, Ding Bao, Hongyan Fu, Qing-Long Su, Sihui Sheng, Ming Li, Si-Liang Volmer, Dietrich A. Wu, Fengchang Jiang, Guibin Liu, Cong-Qiang Fu, Pingqing Institute of Surface-Earth System Science School of Earth System Science Tianjin University Tianjin China Tianjin Key Laboratory of Earth Critical Zone Science and Sustainable Development in Bohai Rim Tianjin University Tianjin China Haihe Laboratory of Sustainable Chemical Transformations Tianjin China State Environmental Protection Key Laboratory of Integrated Surface Water-Groundwater Pollution Control School of Environmental Science and Engineering Southern University of Science and Technology Shenzhen China The Hong Kong University of Science and Technology Hong Kong State Key Laboratory of Marine Environmental Science College of Ocean and Earth Sciences Xiamen University Xiamen China School of Environmental Studies China University of Geosciences Wuhan China Department of Chemistry Humboldt-Universität zu Berlin Berlin Germany State Key Laboratory of Environmental Criteria and Risk Assessment Chinese Research Academy of Environmental Sciences Beijing China State Key Laboratory of Environmental Chemistry and Ecotoxicology Research Center for Eco-Environmental Sciences Chinese Academy of Sciences Beijing China

Exploring the source, transformation pathways, and the fate of natural organic matter (NOM) is critical to understanding the regional/global carbon cycle and carbon budget. The dissolved fraction of NOM, i.e., dissolved organic matter (DOM), is a complex mixture resulting from the transformation of plant, animal and microbial matter and plays a crucial role in many biogeochemical processes at the land-ocean-atmosphere interfaces. The advance of Fourier transform ion cyclotron resonance mass spectrometer (FT-ICR MS) makes the detailed characterization of DOM at the molecular level possible. On the other hand, elucidation of complex DOM sample also presents significant analytical challenges, and these challenges also act as a driving force for the instrumentation and methodology development on FT-ICR MS. This review article has been written to aid those working in biogeochemistry, environmental and atmospheric chemistry, and related areas which investigate elemental cycles and DOM transformations. First, the fundamental theory, historical perspective, and recent advances in the field have been introduced. The detailed molecular characterization of environmental and geological samples continues to present significant analytical challenges, and it also has become a driving force for the development of the instrumentation and experimental methods. These achievements in DOM analysis have had an impact upon the fields of environmental science, geochemistry, and analytical chemistry. Next, varieties of applications of FT-ICR MS have also been described, followed by our view of the future of this technique in earth science research. We believe that this review covers the essential pairing of FT-ICR MS and collectively offers environmental and geochemical scientists a substantial resource for their research. Graphical abstract: [Figure not available: see fulltext.]. © 2022, The Author(s).

关键词： Budget control

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Design,modeling and experiments of broadband tristable galloping piezoelectric energy harvester

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Acta Mechanica Sinica 2020年第3期36卷 592-605页

作者： Junlei Wang Linfeng Geng Shengxi Zhou Zhien Zhang Zhihui Lai Daniil Yurchenko Engineering Research Center of Energy Saving Technology and Equipment of Thermal Energy System Ministry of EducationZhengzhou 450000China School of Aeronautics Northwestern Polytechnical UniversityXi'an 710072China William G.Lowrie Department of Chemical and Biomolecular Engineering The Ohio State UniversityColumbusOH 43210USA Guangdong Provincial Key Laboratory of Micro/Nano Optomechatronics Engineering College of Mechatronics and Control EngineeringShenzhen UniversityShenzhen 518060China Institute of Mechanical Process&Energy EngineeringHeriot-Watt UniversityEdinburgh EH 144ASUK

Galloping based piezoelectric energy harvester is a kind of micro-environmental energy harvesting device based on flowinduced vibrations.A novel tristable galloping-based piezoelectric energy harvester is constructed by introducing a nonlinear magnetic force on the traditional galloping-based piezoelectric energy *** on Euler-Bernoulli beam theory and Kirchhoff’s law,the corresponding aero-electromechanical model is proposed and validated by a series of wind tunnel *** parametric study is performed to analyse the response of the tristable galloping-based piezoelectric energy *** results show that comparing with the galloping-based piezoelectric energy harvester,the mechanism of the tristable galloping-based piezoelectric energy harvester is more *** the increase of a wind speed,the vibration of the bluff body passes through three branches:intra-well oscillations,chaotic oscillations,and inter-well *** threshold wind speed of the presented harvester for efficiently harvesting energy is 1.0 m/s,which is decreased by 33% compared with the galloping-based piezoelectric energy *** maximum output power of the presented harvester is 0.73 mW at 7.0 m/s wind speed,which is increased by 35.3%.Compared with the traditional galloping-based piezoelectric energy harvester,the presented tristable galloping-based piezoelectric energy harvester has a better energy harvesting performance from flow-induced vibrations.

关键词： Energy harvesting Galloping Tristable Flow induced vibrations

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NccFlow: Unsupervised learning of optical flow with non-occlusion from geometry

arXiv

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arXiv 2021年

作者： Wang, Guangming Ren, Shuaiqi Wang, Hesheng The Key Laboratory of System Control and Information Processing of Ministry of Education Department of Automation Institute of Medical Robotics Shanghai Jiao Tong University Shanghai200240 China The Key Laboratory of Marine Intelligent Equipment and System of Ministry of Education Shanghai Engineering Research Center of Intelligent Control and Management Shanghai Jiao Tong University Shanghai200240 China

Optical flow estimation is a fundamental problem of computer vision and has many applications in the fields of robot learning and autonomous driving. This paper reveals novel geometric laws of optical flow based on the insight and detailed definition of non-occlusion. Then, two novel loss functions are proposed for the unsupervised learning of optical flow based on the geometric laws of non-occlusion. Specifically, after the occlusion part of the images are masked, the flowing process of pixels is carefully considered and geometric constraints are conducted based on the geometric laws of optical flow. First, neighboring pixels in the first frame will not intersect during the pixel displacement to the second frame. Secondly, when the cluster containing adjacent four pixels in the first frame moves to the second frame, no other pixels will flow into the quadrilateral formed by them. According to the two geometrical constraints, the optical flow non-intersection loss and the optical flow non-blocking loss in the non-occlusion regions are proposed. Two loss functions punish the irregular and inexact optical flows in the non-occlusion regions. The experiments on datasets demonstrated that the proposed unsupervised losses of optical flow based on the geometric laws in non-occlusion regions make the estimated optical flow more refined in detail, and improve the performance of unsupervised learning of optical flow. In addition, the experiments training on synthetic data and evaluating on real data show that the generalization ability of optical flow network is improved by our proposed unsupervised approach. Copyright © 2021, The Authors. All rights reserved.

关键词： Computer vision

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Society 5.0: Metaverse Facilitated Human-centric “5H” Services Across Cyber-Physical-Social Spaces

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IFAC-PapersOnLine 2024年第3期58卷 159-164页

作者： Xiao Wang Jun Huang QingHua Ni Zhe Wan HuaDan Xue Larry Stapleton Fei-Yue Wang Engineering Research Center of Autonomous Unmanned System Technology Ministry of Education Anhui University Hefei 230601 China Macau University of Science and Technology Macau 999078 China Beijing Normal University Beijing 100875 China Department of Radiology Peking Union Medical College Hospital Shuaifuyuan Beijing 100730 Dongcheng District China Brownsbarn Thomastown Co. Kilkenny Ireland R95D8P2 Qingdao Academy of Intelligent Industries Qingdao 266109 China State Key Laboratory for Management and Control of Complex Systems Institute of Automation Chinese Academy of Sciences Beijing 100190 China

Cyber-Physical-Social systems bridge the gap between social resource organization and distribution, and give birth to Society 5.0, which represents a transformative vision aimed at realizing the human-centric paradigm for more efficient and effective sustainable development. In this paper, we discuss the decentralized paradigm in fostering human needs-driven smart services, in line with Maslow’s hierarchy of needs theory. Societies 5.0 is committed to optimizing the use of natural, artificial, and social resources by enhancing democratic participation and ensuring that decision-making processes are more transparent, reliable, and aligned with the needs of the populace in sustainable ways. Moreover, our discussion extends to how Society 5.0’s principles correlate with the United Nations Sustainable Development Goals (SDGs), providing a framework that supports health, education, and poverty reduction, among other targets. This approach also aligns with the Human Development Index (HDI), reinforcing the notion that technological progress in Society 5.0 does not overshadow but rather complements and enhances human values, paving a synergistic path towards sustainable development that is both advanced and fundamentally human-centric.

关键词： Cyber-Physical-Social systems Society 5.0 Human-Centric Services Socio-technical synergistic sustainable development

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Large potential of strengthening the land carbon sink in China through anthropogenic interventions

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Science Bulletin 2024年第16期69卷 2622-2631页

作者： Xu Yue Hao Zhou Yang Cao Hong Liao Xiaofei Lu Zhen Yu Wenping Yuan Zhu Liu Yadong Lei Stephen Sitch Jürgen Knauer Huijun Wang Jiangsu Key Laboratory of Atmospheric Environment Monitoring and Pollution Control Jiangsu Collaborative Innovation Center of Atmospheric Environment and Equipment TechnologySchool of Environmental Science and EngineeringNanjing University of Information Science&Technology(NUIST)Nanjing 210044China College of Meteorology and Oceanography National University of Defense TechnologyChangsha 410073China Jiangsu Nanjing Environmental Monitoring Center Nanjing 210013China Key Laboratory of Agrometeorology of Jiangsu Province Institute of EcologySchool of Applied MeteorologyNUISTNanjing 210044China Institute of Carbon Neutrality Sino-French Institute for Earth System ScienceCollege of Urban and Environmental SciencesPeking UniversityBeijing 100871China Department of Earth System Science Tsinghua UniversityBeijing 100084China State Key Laboratory of Severe Weather and Key Laboratory of Atmospheric Chemistry of CMA Chinese Academy of Meteorological SciencesBeijing 100081China College of Life and Environmental Sciences University of ExeterExeter EX44RJUK Hawkesbury Institute for the Environment Western Sydney UniversityPenrith 2751Australia Key Laboratory of Meteorological Disaster Ministry of EducationJoint International Research Laboratory of Climate and Environment ChangeCollaborative Innovation Center on Forecast and Evaluation of Meteorological DisastersNUISTNanjing 210044China

The terrestrial ecosystem in China mitigates 21%-45%of the national contemporary fossil fuel CO_(2) emissions every *** and strengthening the land carbon sink is essential for reaching China’s target of carbon ***,this sink is subject to large uncertainties due to the joint impacts of climate change,air pollution,and human ***,we explore the potential of strengthening land carbon sink in China through anthropogenic interventions,including forestation,ozone reduction,and litter removal,taking advantage of a well-validated dynamic vegetation model and meteorological forcings from 16 climate *** anthropogenic interventions,considering Shared Socioeconomic Pathways(SSP)scenarios,the land sink is projected to be 0.26-0.56 Pg C a^(-1) at 2060,to which climate change contributes 0.06-0.13 Pg C a^(-1) and CO_(2) fertilization contributes 0.08-0.44 Pg C a^(-1) with the stronger effects for higher emission *** anthropogenic interventions,under a close-to-neutral emission scenario(SSP1-2.6),the land sink becomes 0.47-0.57 Pg C a^(-1) at 2060,including the contributions of 0.12 Pg C a^(-1) by conservative forestation,0.07 Pg C a^(-1) by ozone pollution control,and 0.06-0.16 Pg C a^(-1) by 20%litter removal over planted *** sink can mitigate 90%-110% of the residue anthropogenic carbon emissions in 2060,providing a solid foundation for the carbon neutrality in China.

关键词： Carbon sink Forestation Ozone Litter removal

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Mechanism of contact electrification-induced microscale breakdown between separating electrodes

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Physical Review Applied 2025年第5期23卷 054059-054059页

作者： Jiandong Chen Yangyang Fu Department of Electrical Engineering Tsinghua University Beijing 100084 China State Key Laboratory of Power System Operation and Control Department of Electrical Engineering Tsinghua University Beijing 100084 China Sichuan Energy Internet Research Institute Tsinghua University Sichuan 610213 China

Since the 1990s, there has been a debate on whether the contact electrification (CE)-induced discharge mode is continuous or intermittent, and the understanding of the relationship between the electrode potential and Paschen’s curve remains controversial. In the present work, we demonstrate CE-induced microscale breakdown between two separating metal electrodes without an external voltage source and successfully reveal that continuous and intermittent discharge modes can both be realized by adjusting the electrode separation velocity. The CE-induced initial charge, electrode separation velocity, and breakdown time delay are identified as key factors, and their combined effects explicitly determine the breakdown mode. Further, it is found that in continuous breakdown mode with a sufficiently high initial charge, the electrode potential versus gap distance exactly follows the modified Paschen’s curve, which incorporates the field emission regime. This discovery suggests that a microscale breakdown curve can be determined based on a single characterization of the separating electrode potential without the need to perform redundant repeated experiments. The results of this study elucidate microscale breakdown physics with moving electrodes and inform better control and optimization of microelectromechanical devices for applications including energy harvesters, microsensors, and detectors.

关键词： Electromechanical devices

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On Nash-Stackelberg-Nash Games under Decision-Dependent Uncertainties: Model and Equilibrium

arXiv

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arXiv 2022年

作者： Zhang, Yunfan Liu, Feng Wang, Zhaojian Chen, Yue Feng, Shuanglei Wu, Qiuwei Hou, Yunhe State Key Laboratory of Power Systems Department of Electrical Engineering Tsinghua University Beijing China MOE Key Laboratory of System Control and Information Processing Department of Automation Shanghai Jiao Tong University Shanghai China Department of Mechanical and Automation Engineering The Chinese University of Hong Kong Hong Kong Hong Kong Renewable Energy Research Center China Electric Power Research Institute Beijing China Center for Electric Power and Energy Department of Electrical Engineering Technical University of Denmark Kgs. Lyngby Denmark Shenzhen Institute of Research and Innovation The University of Hong Kong Hong Kong

In this paper, we discuss a class of two-stage hierarchical games with multiple leaders and followers, which is called Nash-Stackelberg-Nash (N-S-N) games. Particularly, we consider N-S-N games under decision-dependent uncertainties (DDUs). DDUs refer to the uncertainties that are affected by the strategies of decision-makers and have been rarely addressed in game equilibrium analysis. In this paper, we first formulate the N-S-N games with DDUs of complete ignorance, where the interactions between the players and DDUs are characterized by uncertainty sets that depend parametrically on the players’ strategies. Then, a rigorous definition for the equilibrium of the game is established by consolidating generalized Nash equilibrium and Pareto-Nash equilibrium. Afterward, we prove the existence of the equilibrium of N-S-N games under DDUs by applying Kakutani’s fixed-point theorem. Finally, an illustrative example is provided to show the impact of DDUs on the equilibrium of N-S-N games. Copyright © 2022, The Authors. All rights reserved.

关键词： Game theory

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Biocompatible chitosan/polyethylene glycol/multi-walled carbon nanotube composite scaffolds for neural tissue engineering

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Journal of Zhejiang University-Science B(Biomedicine & Biotechnology) 2022年第1期23卷 58-73页

作者： Shengbo SANG Rong CHENG Yanyan CAO Yayun YAN Zhizhong SHEN Yajing ZHAO Yanqing HAN Shanxi Key Laboratory of Micro Nano Sensors&Artificial Intelligence Perception College of Information and ComputerTaiyuan University of TechnologyTaiyuan030024China Key Lab of Advanced Transducers and Intelligent Control System of the Ministry of Education Taiyuan University of TechnologyTaiyuan030024China College of Information Science and Engineering Hebei North UniversityZhangjiakou075000China Shanxi Six-Dimensional Artificial Intelligence Biomedical Research Institute Taiyuan030031China Department of Neurology Shanxi Provincial Cardiovascular HospitalTaiyuan030024China

Carbon nanotube(CNT)composite materials are very attractive for use in neural tissue engineering and biosensor *** scaffolds are excellent mimics of extracellular matrix due to their hydrophilicity,viscosity,and *** can also impart conductivity to other insulating materials improve mechanical stability guide neuronal cell behavior and trigger axon *** performance of chitosan(CS)/polyethylene glycol(PEG)composite scaffolds could be optimized by introducing multi-walled CNTs(MWCNTs).CS/PEG/CNT composite scaffolds with CNT content of 1%,3%,and 5%(1%=0.01 g/mL)were prepared by *** physical and chemical properties and biocompatibility were *** electron microscopy(SEM)showed that the composite scaffolds had a highly connected porous *** electron microscope(TEM)and Raman spectroscopy proved that the CNTs were well dispersed in the CS/PEG matrix and combined with the CS/PEG nanofiber *** enhanced the elastic modulus of the *** porosity of the scaffolds ranged from 83%to 96%.They reached a stable water swelling state within 24 h,and swelling decreased with increasing MWCNT *** electrical conductivity and cell adhesion rate of the scaffolds increased with increasing MWCNT *** showed that rat pheochromocytoma(PC12)cells grown in the scaffolds had characteristics similar to nerve *** measured changes in the expression of nerve cell markers by quantitative real-time polymerase chain reaction(qRT-PCR),and found that PC12 cells cultured in the scaffolds expressed growth-associated protein 43(GAP43),nerve growth factor receptor(NGFR),and class IIIβ-tubulin(TUBB3)*** research showed that the prepared CS/PEG/CNT scaffold has good biocompatibility and can be further applied to neural tissue engineering research.

关键词： Multi-walled carbon nanotube(MWCNT) Cell-scaffold PC12 cells Biocompatibility

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Estimation of Reduced Greenhouse Gas Emission from Municipal Solid Waste Incineration with Electricity Recovery in Prefecture- and County-Level Cities of China

SSRN

引用

SSRN 2022年

作者： Zhao, Qing Tang, Weihao Han, Mengjie Cui, Wenjing Zhu, Lei Xie, Huaijun Li, Wei Wu, Fengchang National-Regional Joint Engineering Research Center for Soil Pollution Control and Remediation in South China Guangdong Key Laboratory of Integrated Agro-environmental Pollution Control and Management Institute of Eco-environmental and Soil Sciences Guangdong Academy of Sciences Guangzhou510650 China Key Laboratory of Pollution Ecology and Environmental Engineering Institute of Applied Ecology Chinese Academy of Sciences Shenyang110016 China Department of Earth System Science Ministry of Education Key Laboratory for Earth System Modeling Institute for Global Change Studies Tsinghua University Beijing100084 China Institute for Carbon Neutrality Tsinghua University Beijing100084 China Dalian Key Laboratory on Chemicals Risk Control and Pollution Prevention Technology School of Environmental Science and Technology Dalian University of Technology Linggong Road 2 Dalian116024 China State Key Laboratory of Environmental Criteria and Risk Assessment Chinese Research Academy of Environmental Sciences Beijing100012 China

Municipal solid waste (MSW) without proper managements could be a significant source of greenhouse gas (GHG) emissions. MSW incineration with electricity recovery (MSW-IER) is recognized as a sustainable way to utilize waste, but its effectiveness on reducing GHG emissions at the city scale in China remain unclear due to limited data of MSW compositions. In this study, MSW compositions in 297 cities of China from 2002 to 2017 were predicted using a random forest model trained by a combination of socio-economic, climate and spatiotemporal factors. Spatiotemporal and climatic factors (such as economic development level, precipitation) accounted for 6.5%-20.7% and 20.1%-37.6% to total contributions on MSW composition, respectively. The GHG emissions from MSW-IER in each Chinese city were further calculated based on the predicted MSW compositions. The plastic is the main GHG emission source, accounting for over 91% of the total emission during 2002-2017. Compared to baseline (landfill) emission, the GHG emission reduction from MSW-IER was 12.5 × 107 kg CO2-eq in 2002 and 415 × 107 kg CO2-eq in 2017, with an average annual growth rate of 26.3%. The results provide basic data for estimating GHG emission in MSW management in China. © 2022, The Authors. All rights reserved.

关键词： Municipal solid waste

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