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Beyond Performance of Learning Control Subject to Uncertainties and Noise: A Frequency-Domain Approach Applied to Wafer Stages

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IEEE/CAA Journal of Automatica Sinica 2025年第1期12卷 198-214页

作者： Fazhi Song Ning Cui Shuaiqi Chen Kai Zhang Yang Liu Xinkai Chen Jiubin Tan IEEE the Center of Ultra-precision Optoelectronic Instrument Engineering Harbin Institute of Technology the Key Laboratory of Ultra-Precision Intelligent Instrumentation Ministry of Industry and Information Technology the State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment Guangdong University of Technology the Center of Ultraprecision Optoelectronic Instrument Engineering Harbin Institute of Technology the Key Laboratory of UltraPrecision Intelligent Instrumentation Ministry of Industry and Information Technology the Department of Electronic and Information Systems Shibaura Institute of Technology

The increasingly stringent performance requirement in integrated circuit manufacturing, characterized by smaller feature sizes and higher productivity, necessitates the wafer stage executing a extreme motion with the accuracy in terms of nanometers. This demanding requirement witnesses a widespread application of iterative learning control(ILC), given the repetitive nature of wafer scanning. ILC enables substantial performance improvement by using past measurement data in combination with the system model knowledge. However, challenges arise in cases where the data is contaminated by the stochastic noise, or when the system model exhibits significant uncertainties, constraining the achievable performance. In response to this issue, an extended state observer(ESO) based adaptive ILC approach is proposed in the frequency *** being model-based, it utilizes only a rough system model and then compensates for the resulting model uncertainties using an ESO, thereby achieving high robustness against uncertainties with minimal modeling effort. Additionally, an adaptive learning law is developed to mitigate the limited performance in the presence of stochastic noise, yielding high convergence accuracy yet without compromising convergence speed. Simulation and experimental comparisons with existing model-based and data-driven inversion-based ILC validate the effectiveness as well as the superiority of the proposed method.

关键词： Extended state observer learning control model uncertainties motion control stochastic noise

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A Braille Reading system Based on Electrotactile Display With Flexible Electrode Array

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IEEE/CAA Journal of Automatica Sinica 2022年第4期9卷 735-737页

作者： Ziliang Zhou Yicheng Yang Honghai Liu IEEE the State Key Laboratory of Mechanical System and Vibration Shanghai Jiao Tong University the State Key Laboratory of Robotics and Systems Harbin Institute of Technology Shenzhen

Dear editor,Due to visual impairment and lack of social attention,the reading problem of the blind has not been well *** existing Braille reading devices still have many problems and are not accepted by the *** paper developed a portable Braille reading system based on electrotactile display *** proposed system is composed of a six-channel electrotactile stimulator,a flexible electrode array for Braille display and a graphical user interface(GUI)for monitoring and *** on the flexibility of the system,two Braille reading strategies have been designed:spatial mode and sequential *** system was preliminary tested by six sighted *** results showed that subjects were able to recognize Braille characters with more than 80%accuracy within less than 10 seconds for the initial *** to existing Braille reading systems,this system is portable,wearable and flexible in control.

关键词： portable editor Bra

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General closed-form inverse kinematics for arbitrary three-joint subproblems based on the product of exponential model

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Frontiers of Mechanical Engineering 2022年第2期17卷 85-101页

作者： Tao SONG Bo PAN Guojun NIU Jiawen YAN Yili FU State Key Laboratory of Robotics and System Harbin Institute of TechnologyHarbin 150001China School of Mechanical Engineering and Automation Zhejiang Sci-Tech UniversityHangzhou 310018China

The inverse kinematics problems of robots are usually decomposed into several Paden–Kahan subproblems based on the product of exponential model. However, the simple combination of subproblems cannot solve all the inverse kinematics problems, and there is no common approach to solve arbitrary three-joint subproblems in an arbitrary postural relationship. The novel algebraic geometric (NAG) methods that obtain the general closed-form inverse kinematics for all types of three-joint subproblems are presented in this paper. The geometric and algebraic constraints are used as the conditions precedent to solve the inverse kinematics of three-joint subproblems. The NAG methods can be applied in the inverse kinematics of three-joint subproblems in an arbitrary postural relationship. The inverse kinematics simulations of all three-joint subproblems are implemented, and simulation results indicating that the inverse solutions are consistent with the given joint angles validate the general closed-form inverse kinematics. Huaque III minimally invasive surgical robot is used as the experimental platform for the simulation, and a master–slave tracking experiment is conducted to verify the NAG methods. The simulation result shows the inverse solutions and six sets given joint angles are consistent. Additionally, the mean and maximum of the master–slave tracking experiment for the closed-form solution are 0.1486 and 0.4777 mm, respectively, while the mean and maximum of the master–slave tracking experiment for the compensation method are 0.3188 and 0.6394 mm, respectively. The experiments results demonstrate that the closed-form solution is superior to the compensation method. The results verify the proposed general closed-form inverse kinematics based on the NAG methods.

关键词： inverse kinematics Paden-Kahan subproblems three-joint subproblems product of exponential closed-form solution

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Joining SiO_(2)based ceramics:recent progress and perspectives

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Journal of Materials Science & technology 2022年第13期108卷 110-124页

作者： Haohan Wang Jinghuang Lin Junlei Qi Jian Cao State Key Laboratory of Advanced Welding and Joining Harbin Institute of TechnologyHarbin 150001China

Nowadays,SiO_(2)based material is one of the widest used materials in optical,microelectromechanical system,aerospace and some other *** practical application,SiO_(2)based materials are required to be joined with themselves or other heterogeneous materials to assemble products with various *** the joining quality directly affects the mechanical performances and functional properties of assembled *** many researchers studied different joining technologies,explored the microstructure of joining interface and tested after-joining properties,a review that summarizes the recent cutting-edge researches and development tendency of joining technologies for SiO_(2)based ceramics is still ***,according to different applications and requirements,this review summarizes the widely used joining technologies and discusses corresponding joining mechanisms,current research progress and suitable *** to the wide applications in specific industry,laser welding,anodic bonding and wafer bonding are discussed in ***,brazing,the widest used method in SiO_(2)joining,has been elaborated deeply in its wetting mechanism,residual stress control,interfacial microstructure and mechanical performance *** the end,this review proposed the future development trends of SiO_(2)ceramics joining,aiming at offering a full-view of potential improvements in SiO_(2)ceramic joining technologies.

关键词： SiO_(2)joining current research progress brazing future development trend

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Releasing the residual stress of C_(f)/SiC-GH3536 joint by designing an Ag-Cu-Ti+Sc_(2)(WO_(4))_(3) composite filler metal

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Journal of Materials Science & technology 2022年第13期108卷 102-109页

作者： P.Wang X.Liu H.Wang J.Cao J.Qi J.Feng State Key Laboratory of Advanced Welding and Joining Harbin Institute of TechnologyHarbin 150001China

Due to native character of thermal expansion coefficient(CTE)mismatch between C_(f)/SiC and GH3536,achieving high strength joint was a huge challenge for C_(f)/SiC-GH3536 ***,a composite filler metal of Ag-Cu-Ti+Sc_(2)(WO_(4))_(3) was developed to join C_(f)/SiC and *** work introduced Sc_(2)(WO_(4))_(3) to Ag-Cu-Ti system as a negative thermal expansion(NTE)reinforcing phase to release joint residual ***_(2)(WO_(4))_(3) was evenly distributed in the brazing seam and reacted with Ti to form Ti_(3)O_(5) reaction *** results of finite element analysis showed that the residual stress of the joints was effectively released by introducing Sc_(2)(WO_(4))_(3) reinforcing phase,and the mises stress was decreased from447 to 401 *** maximum shear strength of the C_(f)/SiC-GH3536 joint brazed with Ag-Cu-Ti+6 vol%Sc_(2)(WO_(4))_(3) filler alloys was 64 MPa,which was about 2.6 times higher than that of Ag-Cu-Ti *** results of this study provide a promising strategy for the introduction of new Sc_(2)(WO_(4))_(3) reinforcing phase in Ag-Cu-Ti system,and improve the reliability and feasibility of composite brazing alloy in brazing filed.

关键词： Negative thermal expansion Brazing Residual stress Composite brazing alloy CTE

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The hydrodynamics of self-rolling locomotion driven by the flexible pectoral fins of 3-D bionic dolphin

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Journal of Ocean Engineering and Science 2022年第1期7卷 29-40页

作者： Zhihan Li Dan Xia Xufeng Zhou Jiabo Cao Weishan Chen Xingsong Wang School of Mechanical Engineering Southeast UniversityNanjing 211189China State Key Laboratory of Robotics and System Harbin Institute of TechnologyHarbin 150080China

The novel autonomous rolling performance is realized by the pair of pectoral fins of a three-dimensional(3-D)bionic dolphin in this paper numerically.3-D Navier-Stokes equations are employed to simulate the viscous fluid around the bionic *** effect of self-rolling manoeuvrability is ex-plored using the dynamic mesh technology and user-defined function(UDF).By varying the parameter ratios,the interaction of flexible pectoral fins is divided into two motion modes,amplitude differential and frequency differential *** the primary driving source,the differential motion of a pair of pec-toral fins can effectively provide the rolling torque,and the trajectory of the entire rolling process is approximately the clockwise *** results demonstrate that the rolling angular velocity and driving torque in the steady state can be improved by increasing parameter ratios,and the rolling efficiency can reach the maximum under the optimal parameter ***,different parameter ratios do not af-fect the rolling radius of the self-rolling *** evolution process around the pair of pectoral fins is shown by the flow structures in self-rolling swimming,reasonably revealing that self-rolling locomotion is produced by the pressure and wake vortices surrounding the pair of pectoral fins,and the wake struc-tures depend primarily on the variation of parameter *** properly turns out that the application of the pair of pectoral fins can realize the self-rolling performance through parameter differential modes.

关键词： Self-rolling dolphin Parameter differential mode Numerical simulation Hydrodynamic performance Flow structures

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Probabilistic movement primitive based motion learning for a lower limb exoskeleton with black-box optimization

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Frontiers of Information technology & Electronic Engineering 2023年第1期24卷 104-116页

作者： Jiaqi WANG Yongzhuo GAO Dongmei WU Wei DONG State Key Laboratory of Robotics and Systems Harbin Institute of TechnologyHarbin 150001China

As a wearable robot,an exoskeleton provides a direct transfer of mechanical power to assist or augment the wearer’s movement with an anthropomorphic *** an exoskeleton is used to facilitate the wearer’s movement,a motion generation process often plays an important role in high-level *** of the main challenges in this area is to generate in real time a reference trajectory that is parallel with human intention and can adapt to different *** this paper,we first describe a novel motion modeling method based on probabilistic movement primitive(ProMP)for a lower limb exoskeleton,which is a new and powerful representative tool for generating motion *** adapt the trajectory to different situations when the exoskeleton is used by different wearers,we propose a novel motion learning scheme based on black-box optimization(BBO)PIBB combined with *** motion model is first learned by ProMP offline,which can generate reference trajectories for use by exoskeleton controllers *** is adopted to learn and update the model for online trajectory generation,which provides the capability of adaptation of the system and eliminates the effects of *** and experiments involving six subjects using the lower limb exoskeleton HEXO demonstrate the effectiveness of the proposed methods.

关键词： Lower limb exoskeleton Human-robot interaction Motion learning Trajectory generation Movement primitive Black-box optimization

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基于磁驱动正交悬臂探针的三维原子力显微镜技术开发

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Engineering 2023年第5期24卷 84-93,I0002页

作者： Hao Zhang Junyuan Geng Haibo Gao Weibin Rong Hui Xie The State Key Laboratory of Robotics and Systems Harbin Institute of TechnologyHarbin 150080China

本文介绍了一种基于磁驱动正交悬臂探针(magnetically driven-orthogonal cantilever probes,MDOCP)的三维原子力显微镜(three-dimensional atomic force microscopy,3D-AFM)表征方法,该方法采用两个独立的三自由度纳米扫描器,能够实现探针沿可控矢量角度跟踪扫描样品表面。该3D-AFM系统还配备了高精度旋转台,可实现360°全向成像。定制的MD-OCP包含水平悬臂、垂直悬臂和磁球三部分,其中磁球可在磁场中机械驱动OCP实现激振。垂直悬臂具有一个突出的尖端,可检测深槽和具有悬垂/凹边特征的结构。首先,对MD-OCP的设计、模拟、制造和性能分析进行了描述;其次,详细介绍了探针振幅补偿和360°旋转原点定位的方法。通过使用标准AFM阶梯光栅进行对比实验,验证了所提出方法对于陡峭侧壁和拐角处细节的表征能力,其中采用了三维地形重建方法将图像整合。通过对具有微梳结构的微机电系统(MEMS)器件进行3D表征,进一步证实了所提出基于MD-OCP的3D-AFM技术的有效性。最后,该技术被用于确定微阵列芯片的关键尺寸(critical dimensions,CD)。实验结果表明,所提出的方法可以高精度地获取三维结构的CD信息,相比于难以获得侧壁信息的二维技术,在三维微纳制造检测领域具有更好的潜力。

关键词：图像整合微阵列芯片机械驱动阶梯光栅旋转台磁驱动三维结构

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Design and manufacturing of micro/nanorobots

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International Journal of Extreme Manufacturing 2024年第6期6卷 169-202页

作者： Junmin Liu Rencheng Zhuang Dekai Zhou Xiaocong Chang Longqiu Li State Key Laboratory of Robotics and System Harbin Institute of TechnologyHarbinPeople's Republic of China Key Laboratory of Micro-systems and Micro-structures Manufacturing HarbinPeople's Republic of China Zhengzhou Research Institute of Harbin Institute of Technology ZhengzhouPeople's Republic of China

Micro/nanorobots(MNRs)capable of performing tasks at the micro-and nanoscale hold great promise for applications in cutting-edge fields such as biomedical engineering,environmental engineering,and *** cope with the intricate and dynamic environments encountered in practical applications,the development of high performance MNRs is *** have evolved from single-material,single-function,and simple structure to multi-material,multi-function,and complex ***,the design and manufacturing of high performance MNRs with complex multi-material three-dimensional structures at the micro-and nanoscale pose significant challenges that cannot be addressed by conventional serial design strategies and single-process manufacturing *** material-interface-structure-function/performance coupled design methods and the additive/formative/subtractive composite manufacturing methods offer the opportunity to design and manufacture MNRs with multimaterials and complex structures under multi-factor coupling,thus paving the way for the development of high performance *** this paper,we take the three core capabilities of MNRs—mobility,controllability,and load capability—as the focal point,emphasizing the coupled design methods oriented towards their function/performance and the composite manufacturing methods for their functional *** limitations of current investigation are also discussed,and our envisioned future directions for design and manufacture of MNRs are *** hope that this review will provide a framework template for the design and manufacture of high performance MNRs,serving as a roadmap for researchers interested in this area.

关键词： micro/nanorobots functional structure design manufacturing

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A Trajectory Planning Framework for Experimental Module Manipulator On-Orbit Servicing

A Trajectory Planning Framework for Experimental Module Mani...

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2023 IEEE International Conference on robotics and Biomimetics, ROBIO 2023

作者： Ma, Boyu Cao, Baoshi Liu, Yang Xie, Yuteng Yang, Xiaohang Wang, Wei Hu, Handong Zhou, Xiaokai Ji, Yiming Wang, Zhengpu Li, Mengfei Sun, Haoran Sun, Wandong Xie, Zongwu Harbin Institute of Technology State Key Laboratory of Robotics and System Harbin150080 China Northeast Agricultural University School of Resources and Environment Harbin150030 China

ISBN: (纸本)9798350325706

This article proposes a novel trajectory planning framework for the Experimental Module Manipulator (EMM) on-orbit servicing (OOS). For a start, the simulation system of the EMM based on Open Inventor is developed, and the trajectory planning technical route of the EMM for OOS missions is illustrated, including two main phases: large-scale transfer and small-scale approach. Before trajectory planning, the Gilbert-Johnson-Keerthi convex bounding boxes of the CSS and the EMM are modeled. Moreover, we present a Cartesian-space collision-free planning scheme. For the different task requirements in the above two phases, two corresponding collision-free trajectory planning schemes in joint space are proposed. Finally, simulations of the EMM supporting an astronaut extra-vehicular activity verify the effectiveness of our trajectory planning framework and all of the schemes presented in this article. © 2023 IEEE.

关键词： Experimental Module Manipulator (EMM) extra-vehicular activity (EVA) on-orbit servicing (OOS) Trajectory planning

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