检索结果-内蒙古大学图书馆

Fabrication process analysis for nano-positioning stage based on silicon bulk micromachining

Guangxue Jingmi Gongcheng/Optics and Precision Engineering 2008年第4期16卷 636-641页

作者： Wang, Jia-Chou Rong, Wei-Bin Li, Xin-Xin Sun, Li-Ning Robotics Institute Harbin Institute of Technology Harbin 150001 China State Key Laboratory of Transducer Technology Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 200050 China

In order to realize the miniaturized nano-positioning stage, a novel 2-DOF Single Crystal Silicon (SCS) nano-positioning micro x-y stage with the function of displacement detection was successfully developed using silicon bulk machining. The fabrication process of the nano-positioning stage with high aspect ratio and big dimension was presented. The effects of Deep Reactive Ion Etching (DRIE) and the backside protecting under the etching silicon on the structure were analyzed. Some factors causing nano-position stage failure were identified, and several advices were provided for avoiding these failures. Moreover, an effective fabricating technique was proposed to fabricate a vertical sidewall piezoresistor in plane in this nano-positioning stage. By adjusting DRIE parameters, a backside window with high aspect ratio and big dimension for releasing the structure was etched and electrostatics comb structure of 2.5 μm wide and 50 μm thickness was successfully released. Experimental results show the nano-positioning stata with high aspect ratio has excellent performance in integrating displacement detection.

关键词： Micromachining

来源：评论

学校读者我要写书评

暂无评论

Garbage grab bucket controller based on input shaping and PD feedback control

Garbage grab bucket controller based on input shaping and PD...

引用

IEEE International Conference on Automation and Logistics

作者： Shijie Dai Gang Ren Lei Zhao Weiguo Ren State Key Laboratory of Robotics and System (HIT) Harbin Institute of Technology Harbin China Research Institute of Robotics and Automation Hebei University of Technology Tianjin China

ISBN: (纸本)9781424425020

A control strategy that combines input shaping with PD feedback control is presented in this paper. Input shaping was used to cancel the swing of the bucket, and feedback was used to detect and eliminate the position error of the trolley. Simulation of the bucket dynamics was carried on to evaluate the performance of the controller.

关键词： Cranes Pd control Feedback control Vibrations Robustness Switches Driver circuits

来源：评论

学校读者我要写书评

暂无评论

A silicon integrated micro nano-positioning XY-stage for nano-manipulation

引用

Journal of Micromechanics and Microengineering 2008年第12期18卷 125004 (9p-125004 (9p页

作者： Sun, Lining Wang, Jiachou Rong, Weibin Li, Xinxin Bao, Haifei State Key Laboratory of Robotics and System Harbin Institute of Technology Harbin 150001 Heilongjiang Province China State Key Laboratory of Transducer Technology Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 20050 China

An integrated micro XY-stage with a 2 × 2 mm2 movable table is designed and fabricated for application in nanometer-scale operation and nanometric positioning precision. The device integrates the functions of both actuating and sensing in a monolithic chip and is mainly composed of a silicon-based XY-stage, comb-drive actuator and a displacement sensor, which are developed by using double-sided bulk-micromachining technology. The high-aspect-ratio comb-driven XY-stage is achieved by deep reactive ion etching (DRIE) on both sides of the wafer. The displacement sensor is formed on four vertical sidewall surface piezoresistors with a full Wheatstone bridge circuit, where a novel fabrication process of a vertical sidewall surface piezoresistor is proposed. Comprehensive design and analysis of the comb actuator, the piezoresistive displacement sensor and the XY-stage are given in full detail, and the experimental results verify the design and fabrication of the device. The final realization of the device shows that the sensitivity of the fabricated piezoresistive sensors is better than 1.17 mV νm-1 without amplification, and the linearity is better than 0.814%. Under 28.5 V driving voltage, a 10 νm single-axis displacement is measured without crosstalk and the resonant frequency is measured at 983 Hz in air. © 2008 IOP Publishing Ltd.

关键词： Natural frequencies

来源：评论

学校读者我要写书评

暂无评论

Effects of Nitrate Concentration in Main Anoxic Zone on Denitrifying Dephosphatation

引用

Journal of Donghua University 2009年第4期000卷

作者： YIN Jun WANG Xiao-ling ZHU Gui-bing YE Long WU Xiang-hui School of Municipal and Environmental Engineering Harbin Institute of Technology Harbin 150090 China School of Municipal and Environmental Engineering Harbin Institute of Technology Harbin 150090 China School of Municipal and Environmental Engineering Jilin Architectural and Civil Engineering Institute Changchun 130021 China State Key Laboratory of Environmental Aquatic Chemistry Research Center for Eco-Environmental Sciences Chinese Academy of Sciences Beijing 100085 China School of Municipal and Environmental Engineering Jilin Architectural and Civil Engineering Institute Changchun 130021 China

The effects of nitrate conocentration in the main anoxic zone on denitrifying clephosphatation capability were conducted based on modified University of Cape Town (MUCT) process. Meanwhile the relation between optimal nitrate concentration (Nopt) and influent C/N ratio was evaluated, in which the influeat chemical oxygen demand (COD) concentration was stabilized at (290±10)mg/L, the influent total phosphorus (TP) concentration was stabilized at (7.0±0.5)mg/L. The results indicated that: (1) the nitrate concentration in the main anoxic zone had an effect on denitrifying dephosphatation capability, and the average percentages of anoxic phosphorus uptake in total phosphorus uptake (1/2) incased with nitrate concentration increasing,i.e., increasing from 62.1% at 2.0 mg/L to63.7%, 65.6%,68.1%, and 72.3% at 2.2, 2.4, 2.6 and 2.8 mg/L,respectively; (2) the Nopt as fumction of influent C/N ratio could be calculated by the equation: y = 0.67X2 -7.79X + 22.21; the maxinum of anaxi phosphorus uptake in total phosphorus uptake (η()) as function of the Noptcold be calculated by the equation, y =0.77-0.33e-(x/1.52). The Nopt was the important control parameter that must be optimized for operation of conventional biological mutrient removal activated sludge (BnRAS) system.

关键词： MUCT process denitri fying dephosphatation nitrate concentration anoxic phosphorus uptake

来源：评论

学校读者我要写书评

暂无评论

Electrostatically driven microgripper integrated piezoresistive force sensor

Electrostatically driven microgripper integrated piezoresist...

引用

Design, Test, Integration and Packaging of MEMS/MOEMS

作者： Tao Chen Liguo Chen Lining Sun Xinxin Li State Key Laboratory of Robotics and System Robotics Institute Harbin Institute of Technology Harbin China State Key Lab ofTransducer Technology Shanghai Institute ofMicrosystem and Information Technology Chinese Academy and Sciences Shanghai China

This paper presents the design, fabrication, and application of an electrostatically driven microgripper integrated piezoresistive force sensor. The microgripper is designed to manipulate two microobjects at the same time with force sensing ability. Surface and bulk micromachining technology is employed to fabricate the microgripper from single crystal silicon wafer. The end effector of the gripper is a four arms structure, two fixed cantilever beams integrated with piezoresistive sensor are designed to sensing the gripping force, and an electrostatically driven microactuator is designed to provide the force to operate the other two movable arms. In this way, the four fingers structure enables the gripper to grasp two samples with different sizes at the same time. Experimental results show that it can successfully provide force sensing and play a main role in preventing damage of microparts in micromanipulation and microassembly tasks.

关键词： Grippers Piezoresistance Force sensors Arm Fabrication Micromachining Silicon End effectors Structural beams Microactuators

来源：评论

学校读者我要写书评

暂无评论

Development of a multi-DOF exoskeleton based machine for injured fingers

Development of a multi-DOF exoskeleton based machine for inj...

引用

2008 IEEE/RSJ International Conference on Intelligent Robots and systems

作者： Yili Fu Peng Wang Shuguo Wang State Key Laboratory of Robotics and System Harbin Institute of Technology Hardin CO USA Headmasters office Harbin Institute of Technology Hardin CO USA

ISBN: (纸本)9781424420575

In order to offer a method for the rehabilitation of injured fingers and a means of quantitative detection and evaluation, an exoskeleton based continuous passive motion (CPM) machine is presented in this paper. Corresponding to each finger of human hand, the CPM machine has 4 degrees of freedom (DOF) driven by two DC motors. The joint force and position sensors are all integrated into the machine. The device can be easily attached and also be adjusted to fit different hand sizes. During the injured fingerpsilas flexion and extension motion the machine can always exert perpendicular forces on the finger phalanges, meanwhile it can achieve the precise control of scope, force and speed of the moving fingers. In order to control the CPM machine, we have also designed an embedded control system based on S3C2410 (a kind of 32-bit RISC microprocessor). The whole system is open-ended for new functions and applications. The function modularization method provides a new thinking of design for the control system.

关键词： Fingers Joints Continuous phase modulation Sensors Force Gears Control systems

来源：评论

学校读者我要写书评

暂无评论

Impacts of relative velocity distribution between two colliding atoms on laser-induced collisional energy transfer

引用

Zhongguo Jiguang/Chinese Journal of Lasers 2008年第SUPPL.期35卷 77-80页

作者： Zhang, Hongying Chen, Deying Lu, Zhenzhong Xia, Yuanqin Fan, Rongwei State Key Laboratory of Tunable Laser Technology Institute of Opto-Electronics Harbin Institute of Technology Harbin 150001 China

The distribution function of relative velocity between two colliding atoms in three-dimensional space is obtained based on Maxwell velocity distribution function under thermal equilibrium condition. Considering this distribution function in the computation of laser-induced collision cross section, one laser-induced collisional energy transfer (LICET) process in Eu-Sr system both in weak and strong field is numerically calculated by integrating the motion equation based on the four-level model, and profiles of laser-induced collision cross section at given temperature are obtained. Impacts of relative velocity distribution on laser-induced collision process are analyzed by comparing the presenting numerical results with the former theoretical research. It is shown that although statistical distribution of relative velocity between two atoms has no impacts on the line shape of LICET spectrum, it has certain impacts on the peak value of collision cross section. The conclusions we came to in this paper are consistent with the theoretical predictions of former investigation, showing the validity of our numerical calculations.

关键词： Energy transfer

来源：评论

学校读者我要写书评

暂无评论

Mobile Robot Path Tracking in Unknown Dynamic Environment

Mobile Robot Path Tracking in Unknown Dynamic Environment

引用

IEEE Conference on robotics, Automation and Mechatronics

作者： Du Zhi Jiang Wang Zhong Min State key laboratory of robotics and system Harbin Institute of Technology Harbin China Department of Mechanical Engineering Tianjin University of Technology and Education Tianjin China

The paper proposes a cooperative system of fuzzy neural networks (FNN) and fuzzy logic control (FLC). And this system is used to on-line path tracking of a mobile robot in unknown dynamic environment, instead of the commonly used FLC to research on this problem. Firstly, the application of FNN based on the kinematics models of mobile robot is described in detail, moreover, it uses an improved back propagation (BP) algorithm to complete the network learning and training. Secondly, it utilizes FLC to fulfill the real-time avoiding obstacles. The simulation results show that the proposed cooperative system is effective and robust, meanwhile possesses better abilities of path tracking and real-time avoiding obstacles in unknown dynamic environment.

关键词： Mobile robots Fuzzy neural networks Fuzzy control Kinematics Cooperative systems Control systems Path planning Intelligent robots Feedback control Neural networks

来源：评论

学校读者我要写书评

暂无评论

Design of a Hybrid-type Electrostatically Driven Microgripper Integrated Vacuum Tool

Design of a Hybrid-type Electrostatically Driven Microgrippe...

引用

中国微米纳米技术学会第十届学术年会暨第一届国际会议(1st International Conference of the Chinese Society of Micro/Nano technology)

作者： Lining Sun Tao Chen Liguo Chen Xinxi Li State Key Laboratory of Robotics and System Robotics InstituteHarbin Institute of TechnologyHarbin 150080CHINA State Key Lab of Transducer TechnologyShanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghai 200050CHINA

来源：评论

学校读者我要写书评

暂无评论

Single Neuron Adaptive PID Control of the Silicon-based Integrated Micro Nano-Positioning XY-Stage

Single Neuron Adaptive PID Control of the Silicon-based Inte...

引用

中国微米纳米技术学会第十届学术年会暨第一届国际会议(1st International Conference of the Chinese Society of Micro/Nano technology)

作者： Wang Jiachou Rong Weibin Sun Lining Li Xinxin State Key Laboratory of Robotics and System Harbin Institute of TechnologyHarbinHeilongjiang ProvinceChina State Key Laboratory of Transducer TechnologyShanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghaiChina

来源：评论

学校读者我要写书评

暂无评论

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

请选择保存的检索档案：

请选择收藏分类：

通借通还

建议与咨询 留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

请选择保存的检索档案： 新增检索档案 确定 取消

请选择收藏分类： 新增自定义分类 确定 取消

通借通还

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

请选择保存的检索档案：

请选择收藏分类：