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2012 MRS Fall Meeting

作者： Kiyohara, Shuji Matta, Shohei Ishikawa, Ippei Tanoue, Hideto Takikawa, Hirofumi Taguchi, Yoshio Sugiyama, Yoshinari Omata, Yukiko Kurashima, Yuichi Electric and Control System Engineering Course Faculty of Advanced Engineering Maizuru National College of Technology 234 Aza Shiroya Maizuru Kyoto 625-8511 Japan Department of Electrical and Electronic Information Engineering Toyohashi University of Technology 1-1 Hibarigaoka Tenpaku Toyohashi Aichi 441-8580 Japan Application and Technical Section Elionix Inc. 3-7-6 Motoyokoyama Hachioji Tokyo 192-0063 Japan Research Center for Ubiquitous MEMS and Micro Engineering AIST 1-2-1 Namiki Tsukuba Ibaraki 305-8564 Japan

ISBN: (纸本)9781632661043

As an application to the nanoemitter, we investigated the nanofabrication of diamond-like carbon (DLC)-dot arrays by room-temperature curing imprint-liftoff (RTCIL) method using aluminum mask. The DLC film which has excellent properties similar to diamond properties was used as the patterning material. A polished glass like carbon (GC) was used as a mold material. The polysiloxane in the state of sticky liquid at room temperature and stable in air exhibits a negative-exposure characteristics. Therefore, the polysiloxane was used as electron beam (EB) resist and oxide mask material in EB lithography, and also used as RTC-imprint resist material. An aluminum was used as oxide metal mask material of liftoff. We have fabricated the GC mold of dot arrays with 5 μm-square and 500 nm-height. We carried out the RTCIL process using the GC mold under the following optimum imprint conditions: 0.5 MPa-imprinting pressure and 5 min- holding time. Aluminum film on the imprinted polysiloxane was prepared by vacuum evaporation method and its thickness is 20 nm. Finally, the polysiloxane patterns were removed with acetone and aluminum mask patterns were fabricated. We found that the maximum etching selectivity of aluminum film against DLC film was as high as 35, which was obtained under an ion energy of 400 eV. Then we processed the patterned aluminum on DLC film with an ECR oxygen ion shower. We fabricated DLC-dot arrays with 5 μm-square and 400 nm-height with an aspect ratio of 0.08. © 2013 Materials Research Society.

关键词： Carbon

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Estimation, Intervention and Interaction of Multi-agent systems

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Acta Automatica Sinica 2013年第11期39卷 1796-1804页

作者： Jiang-Ping HU Zhi-Xin LIU Jin-Huan WANG Lin WANG Xiao-Ming HU School of Automation Engineering University of Electronic Science and Technology of China Chengdu 611731 China Key Laboratory of Systems and Control Academy of Mathematics and Systems Science Chinese Academy of Sciences Beijing 100190 China School of Sciences Hebei University of Technology Tianjin 300401 China Department of Automation Shanghai Jiao Tong University Shanghai 200240 China Department of Mathematics Royal Institute of Technology (KTH) Stockholm 10044 Sweden

In this paper we provide a brief survey on recent research on multi-agent systems. We focus on results in three areas of the research, namely, estimation and filtering, intervention by external means, and interactive ... 详细信息

关键词： Distributed estimation cooperative filter soft control state-topology coevolution nonlinear consensus control

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Fabrication of Micro-OLEDs by Room-temperature Curing Nanocontact-print Lithography Using DLC Molds

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MRS Online Proceedings Library (OPL) 2013年第1期1511卷 mrsf12-1511-ee05-03-mrsf12-1511-ee05-03页

作者： Ippei Ishikawa Keisuke Sakurai Shuji Kiyohara Taisuke Okuno Hideto Tanoue Yoshiyuki Suda Hirofumi Takikawa Yoshio Taguchi Yoshinari Sugiyama Yukiko Omata Electric and Control System Engineering Course Faculty of Advanced Engineering Maizuru National College of Technology 234 Shiroya Maizuru Kyoto 625-8511 Japan Department of Electrical and Electronic Information Engineering Toyohashi University of Technology 1-1 Hibarigaoka Tenpaku Toyohashi Aichi 441-8580 Japan Application and Technical Section ELIONIX INC. 3-7-6 Motoyokoyama Hachioji Tokyo 192-0063 Japan

The microfabrication technologiesfor organic light-emitting devices (OLEDs) are essential to the fabrication of the next generation of light-emitting devices. The micro-OLEDs fabricated by room-temperature curing nanoimprint lithography (RTC-NIL) using diamond molds have been investigated. However, light emissions from 10 μm-square-dot OLEDs fabricated by the RTC-NIL method have not been uniform. Therefore, we proposed the fabrication of micro-OLEDs by room-temperature curing nanocontact-print lithography (RTC-NCL) using the diamond-like carbon (DLC) mold. The DLC molds used in RTC-NCL were fabricated by an electron cyclotron resonance (ECR) oxygen ion shower with polysiloxane oxide mask in electron beam (EB) lithography technology. The mold patterns are square and rectangle dots which has 10 µm-width, 10 µm-width and50 µm-length, respectively. The height of the patterns is 500 nm. The DLC molds were used to form the insulating layer of polysiloxane in RTC-NCL. We carried out the RTC-NCL process using the DLC mold under the following optimum conditions: 0.1 MPa-pressure for coating DLC mold with polysiloxane film, 2.1 MPa-pressure for transferring polysiloxane from DLC mold pattern to indium tin oxide (ITO) glass substrate. We deposited N, N'-Diphenyl -N, N'-di (m-tolyl)benzidine (TPD) [40 nm-thickness] as hole transport layer / Tris(8-quinolinolato)aluminum (Alq3) [40 nm-thickness] as electron transport layer / Al [200 nm-thickness] as cathode on ITO glass substrateas anode in this order. We succeeded in formation of the insulating layer with square and rectangle dots which has 10 µm-width,10 µm-width and 50 µm-length, and operation of micro-OLEDs by RTC-NIL using DLC molds.

关键词： ion-beam processing microstructure diamond

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H_∞ filtering with Diagonal Interacting Multiple Model Algorithm for Maneuvering Target Tracking

H_∞ filtering with Diagonal Interacting Multiple Model Algo...

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American control Conference

作者： X. Fu Y. Jia J. Du J. Zhang W. Li X. Liu Seventh Research Division and the Department of Systems and Control Beihang University (BUAA) Beijing Key Laboratory of Intelligent Telecommunication Software and Multimedia School of Computer Science and Technology Beijing University of Posts and Telecommunication school of Electronic and Information Engineering Beihang University (BUAA) Department of Automatic Beijing Information and Science of University

ISBN: (纸本)9781479901777

This paper is devoted to the problem of state estimate of discrete-time stochastic systems with Markov jump parameters. A robust algorithm-diagonal interacting multiple model algorithm based on H_∞ filtering (DIMMH) is presented for maneuvering target tracking when measurement noise is of unknown statistics. Extensive Monte Carlo simulations show the effectiveness and superiority of the proposed algorithm.

关键词： Maneuvering Target Tracking Markov jump parameters effectiveness Target tracking maneuvering target State estimation Filtration tracking Noise measurement Diagonal Monte Carlo technique

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Dosimetry of Typical electronic Article Surveillance Device with Multi-Guards

Dosimetry of Typical Electronic Article Surveillance Device ...

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第七届电磁辐射与健康国际研讨会

作者： Mai Lu Shoogo Ueno Mikael Persson Key Lab of Opt-Electronic Technology and Intelligent Control of Ministry of Education Lanzhou Jiaotong University Lanzhou 730070 P.R.China Department of Applied Quantum Physics Graduate School of Engineering Kyushu University Fukuoka 812-8581 Japan Department of Signals and Systems Chalmers University of Technology SE-412 96 Gothenburg Sweden

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Impacts of subsidy policies on vaccination decisions in contact networks

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Physical Review E 2013年第1期88卷 012813-012813页

作者： Hai-Feng Zhang Zhi-Xi Wu Xiao-Ke Xu Michael Small Lin Wang Bing-Hong Wang School of Mathematical Science Anhui University Hefei 230039 China Department of Electronic and Information Engineering Hong Kong Polytechnic University Hung Hom Kowloon Hong Kong China Institute of Computational Physics and Complex Systems Lanzhou University Lanzhou 730000 China College of Information and Communication Engineering Dalian Nationalities University Dalian 116605 China School of Mathematics and Statistics University of Western Australia Crawley Australia Adaptive Networks and Control Laboratory Department of Electronic Engineering Fudan University Shanghai 200433 China Department of Modern Physics University of Science and Technology of China Hefei 230026 China

To motivate more people to participate in vaccination campaigns, various subsidy policies are often supplied by government and the health sectors. However, these external incentives may also alter the vaccination decisions of the broader public, and hence the choice of incentive needs to be carefully considered. Since human behavior and the networking-constrained interactions among individuals significantly impact the evolution of an epidemic, here we consider the voluntary vaccination on human contact networks. To this end, two categories of typical subsidy policies are considered: (1) under the free subsidy policy, the total amount of subsidy is distributed to a certain fraction of individual and who are vaccinated without personal cost, and (2) under the partial-offset subsidy policy, each vaccinated person is offset by a certain amount of subsidy. A vaccination decision model based on evolutionary game theory is established to study the effects of these different subsidy policies on disease control. Simulations suggest that, because the partial-offset subsidy policy encourages more people to take vaccination, its performance is significantly better than that of the free subsidy policy. However, an interesting phenomenon emerges in the partial-offset scenario: with limited amount of total subsidy, a moderate subsidy rate for each vaccinated individual can guarantee the group-optimal vaccination, leading to the maximal social benefits, while such an optimal phenomenon is not evident for the free subsidy scenario.

关键词： Impacts policies decisions Prophylactic vaccination subsidy Contact networks Policies

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Fabrication of DLC-Based Micro-Gear Patterns by Room-Temperature Curing Nanoimprint Lithography Using Glass-Like Carbon Molds

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MRS Online Proceedings Library (OPL) 2013年第1期1511卷 mrsf12-1511-ee05-01-mrsf12-1511-ee05-01页

作者： Shuji Kiyohara Tomu Ikegaki Chigaya Ito Ippei Ishikawa Hideto Tanoue Hirofumi Takikawa Yoshio Taguchi Yoshinari Sugiyama Yukiko Omata Yuichi Kurashima Electric and Control System Engineering Course Faculty of Advanced Engineering Maizuru National College of Technology 234 Aza Shiroya Maizuru Kyoto 625-8511 Japan Department of Electrical and Electronic Information Engineering Toyohashi University of Technology 1-1 Hibarigaoka Tenpaku Toyohashi Aichi 441-8580 Japan Application and Technical Section ELIONIX INC. 3-7-6 Motoyokoyama Hachioji Tokyo 192-0063 Japan Research Center for Ubiquitous MEMS and Micro Engineering AIST 1-2-1 Namiki Tsukuba Ibaraki 305-8564 Japan

The fabrication of diamond-like carbon (DLC) micro-gear by room temperature curing nanoimprint lithography (RTC-NIL) using glass-like carbon (GC) molds as applications to the DLC-based medical MEMS (Micro electronic Mechanical systems) was investigated. The DLC film which has excellent properties similar to chemical vapor deposited (CVD) diamond films was used as the patterning material. We propose GC as mold material because GC has higher etching selectivity than a diamond film. The etching selectivity of polysiloxane film against a GC substrate is about 5 times as high as that of a diamond film. Therefore we fabricated the GC molds that have micro-gear patterns with 30 µm-tip diameter and 500 nm-tooth thickness. We carried out the RTC-NIL process using the GC micro-gear molds under the following optimum conditions. 1 min-time from spin-coating to imprint: t1, 0.5 MPa-imprinting pressure: P and 5 min-holding time: t2, and then the imprinted polysiloxane pattern on DLC film was processed with an electron cyclotron resonance (ECR) oxygen ion shower. However, we were not able to fabricate micro-gear patterns in high accuracy because of a remaining residual layer on the DLC film. Therefore we propose the removing process for the residual layer with trifluoromethane (CHF3) ion shower under the optimum conditions of 300 eV-ion energy and 4 min-etching time. As a result, we succeeded to fabricate concave DLC-based micro-gear patterns in high accuracy which has 30 µm-tip diameter and 1 µm-depth.

关键词： diamond ion-beam processing microelectro-mechanical (MEMS)

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Nanofabrication of DLC-dot Arrays by Room-temperature Curing Imprint-liftoff Method

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MRS Online Proceedings Library (OPL) 2013年第1期1511卷 mrsf12-1511-ee05-02-mrsf12-1511-ee05-02页

作者： Shuji Kiyohara Shohei Matta Ippei Ishikawa Hideto Tanoue Hirofumi Takikawa Yoshio Taguchi Yoshinari Sugiyama Yukiko Omata Yuichi Kurashima Electric and Control System Engineering Course Faculty of Advanced Engineering Maizuru National College of Technology 234 Aza Shiroya Maizuru Kyoto 625-8511 Japan Department of Electrical and Electronic Information Engineering Toyohashi University of Technology 1-1 Hibarigaoka Tenpaku Toyohashi Aichi 441-8580 Japan Application and Technical Section ELIONIX INC. 3-7-6 Motoyokoyama Hachioji Tokyo 192-0063 Japan Research Center for Ubiquitous MEMS and Micro Engineering AIST 1-2-1 Namiki Tsukuba Ibaraki 305-8564 Japan

As an application to the nanoemitter, we investigated the nanofabrication of diamond-like carbon (DLC)-dot arrays by room-temperature curing imprint-liftoff (RTCIL) method using aluminum mask. The DLC film which has excellent properties similar to diamond properties was used as the patterning material. A polished glass like carbon (GC) was used as a mold material. The polysiloxane in the state of sticky liquid at room temperature and stable in air exhibits a negative-exposure characteristics. Therefore, the polysiloxane was used as electron beam (EB) resist and oxide mask material in EB lithography, and also used as RTC-imprint resist material. An aluminum was used as oxide metal mask material of liftoff. We have fabricated the GC mold of dot arrays with 5 µm-square and 500 nm-height. We carried out the RTCIL process using the GC mold under the following optimum imprint conditions: 0.5 MPa-imprinting pressure and 5 min- holding time. Aluminum film on the imprinted polysiloxane was prepared by vacuum evaporation method and its thickness is 20 nm. Finally, the polysiloxane patterns were removed with acetone and aluminum mask patterns were fabricated. We found that the maximum etching selectivity of aluminum film against DLC film was as high as 35, which was obtained under an ion energy of 400 eV. Then we processed the patterned aluminum on DLC film with an ECR oxygen ion shower. We fabricated DLC-dot arrays with 5 µm-square and 400 nm-height with an aspect ratio of 0.08.

关键词： diamond ion-beam processing microstructure

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Realizability of n-port resistive networks with 2n terminals

Realizability of n-port resistive networks with 2n terminals

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Asian control Conference

作者： Michael Z. Q. Chen Chanying Li Kai Wang Zhiqiang Zuo Minghui Yin Guanrong Chen Department of Mechanical Engineering University of Hong Kong Hong Kong China School of Automation Nanjing University of Science and Technology Nanjing China Academy of Mathematics and Systems Science Chinese Academy of Sciences Beijing China Tianjin Key Laboratory of Process Measurement and Control School of Electrical Engineering and Automation Tianjin University Tianjin China Department of Electronic Engineering City University of Hong Kong Hong Kong China

In this paper, we consider the realizability problem of n-port resistive networks containing 2n terminals. A necessary and sufficient condition for any real symmetric matrix to be realizable as the admittance of an n-port resistive network containing 2n terminals is obtained. The condition is based on the existence of a parameter matrix. We then focus on a three-port resistive network containing six terminals. A necessary and sufficient condition is derived for any real symmetric matrix to be realizable as the admittance of a three-port resistive network containing six terminals and at most five positive elements, whose topological structure is properly restricted.

关键词： Symmetric matrices Ports (Computers) Admittance Educational institutions Resistors Joining processes Passive networks

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PHD filter for multi-target tracking by variational Bayesian approximation

PHD filter for multi-target tracking by variational Bayesian...

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IEEE Annual Conference on Decision and control

作者： Wenling Li Yingmin Jia Junping Du Jun Zhang Seventh Research Division and the Department of Systems and Control Beihang University (BUAA) Beijing 100191 China Beijing Key Laboratory of Intelligent Telecommunications Software and Multimedia School of Computer Science and Technology Beijing University of Posts and Telecommunications Beijing 100876 China School of Electronic and Information Engineering Beihang University (BUAA) Beijing 100191 China

ISBN: (纸本)9781467357159

In this paper, we address the problem of multitarget tracking with unknown measurement noise variance parameters by the probability hypothesis density (PHD) filter. Based on the concept of conjugate prior distributions for noise statistics, the inverse-Gamma distributions are employed to describe the dynamics of the noise variance parameters and a novel implementation to the PHD recursion is developed by representing the predicted and the posterior intensities as mixtures of Gaussian-inverse-Gamma terms. As the target state and the noise variance parameters are coupled in the likelihood functions, the variational Bayesian approximation approach is applied so that the posterior is derived in the same form as the prior and the resulting algorithm is recursive. A numerical example is provided to illustrate the effectiveness of the proposed filter.

关键词： Nickel

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