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IEEE International Conference on Group IV Photonics

作者： Kai Xu Maoliang Wei Kunhao Lei Boshu Sun Yiting Yun Junying Li Lan Li Hongtao Lin College of Information Science and Electronic Engineering State Key Laboratory of Modern Optical Instrumentation Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province Zhejiang University Hangzhou China School of Engineering Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province Westlake University Hangzhou China

A "zero-change" platform for monolithic back-end-of-line integration of phase-change materials (PCM) in silicon photonics was proposed and high performance nonvolatile PCM/Si heterogeneous integrated devices... 详细信息

ISBN: (数字)9798350394047

ISBN: (纸本)9798350394054

关键词： Phase change materials Performance evaluation Chalcogenides Optical losses Power demand Nonvolatile memory Memory management

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Visible Chalcogenide Metadevices

Visible Chalcogenide Metadevices

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Progress in Electromagnetic Research Symposium (PIERS)

作者： Hao dai Yilin Shi Jieren Song Lan Li Hongtao Lin State Key Laboratory of Modern Optical Instrumentation Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province College of Information Science and Electronic Engineering Zhejiang University Hangzhou China Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of Engineering Westlake University Hangzhou China

ISBN: (数字)9798350375909

ISBN: (纸本)9798350375916

With the evolution of the consumer electronics field, applications such as smart wearable devices, autonomous driving, AR/VR, and smartphones are setting forth more requirements for optical components, emphasizing the necessity for enhanced multifunctionality, miniaturization, and cost-efficiency. Metasurfaces composed of subwavelength nanostructures have introduced a revolutionary approach to address these requirements, undergoing significant theoretical and applied research over the past decade. However, metasurface technology still encounters challenges in optical wavelength extension, reconfigurability, and optical nonlinearities. In comparison to widely utilized metasurface materials such as HfO 2 for ultraviolet, Si 3 N 4 , TiO 2 , GaN for visible, and aSi for near-infrared to mid-infrared, chalcogenide materials exhibit high refractive and transparency at broad optical frequencies. Additionally, chalcogenide materials hold the potential for phase change and nonlinear characteristics, rendering them ideal materials for multifunctional metasurface devices. In this study, we present the inaugural demonstration of chalcogenide metasurface in visible. We designed and fabricated foundational optical devices like metalens and vortex beam, and conducted comprehensive tests to characterize the optical performance of these devices, laying the groundwork for the expansion of chalcogenide visible metasurfaces.

关键词： Chalcogenides Performance evaluation Optical device fabrication Optical vortices Metasurfaces Nonlinear optical devices Solids

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Passive devices at 2 μm wavelength on 200 mm CMOS-compatible silicon photonics platform [Invited]

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Chinese Optics Letters 2021年第7期19卷 22-26页

作者： Hui Ma Haotian Yang Bo Tang Maoliang Wei Junying Li Jianghong Wu Peng Zhang Chunlei Sun Lan Li Hongtao Lin State Key Laboratory of Modern Optical Instrumentation College of Information Science and Electronic EngineeringZhejiang UniversityHangzhou 310007China Institute of Microelectronics Chinese Academic SocietyBeijing 100029China Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of EngineeringWestlake UniversityHangzhou 310007China Institute of Advanced Technology Westlake Institute for Advanced StudyHangzhou 310023China

As a promising spectral window for optical communication and sensing, it is of great significance to realize on-chip devices at the 2 μm *** development of the 2 μm silicon photonic platform mainly depends on the performance of passive *** this work, the passive devices were fabricated in the silicon photonic multi-project wafer *** designed micro-ring resonator with a 0.6 μm wide silicon ridge waveguide based on a 220 nm silicon-on-insulator platform achieves a high intrinsic quality factor of 3.0 × *** propagation loss is calculated as 1.62 d B/*** addition,the waveguide crossing, multimode interferometer, and Mach–Zehnder interferometer were demonstrated at 2 μm with good performances.

关键词： silicon photonics integrated photonics grating coupler multimode interferometer waveguide crossing

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On-Chip Silicon Electro-Optical Modulator with Ultra-high Extinction Ratio for distributed Optical Fiber Sensing 28

On-Chip Silicon Electro-Optical Modulator with Ultra-high Ex...

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28th International Conference on Optical Fiber Sensors, OFS 2023

作者： Shu, Xiaoqian Cheng, Zhuo Ma, Lingmei Chen, Bigeng Li, Caiyun Sun, Chunlei Wei, Maoliang Yu, Shaoliang Li, Lan Lin, Hongtao Rao, Yunjiang Research Center for Optical Fiber Sensing Zhejiang Lab Hangzhou311100 China Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of Engineering Westlake University Hangzhou310024 China College of Information Science and Electronic Engineering Zhejiang University Hangzhou310027 China Research Center for Intelligent Optoelectronic Computing Zhejiang Lab Hangzhou311100 China Key Lab of Optical Fiber Sensing & Communications University of Electronic Science and Technology of China Chengdu611731 China

ISBN: (纸本)9781957171302

An ultra-high Extinction Ratio of 60-dB on-chip electro-optical modulator based on silicon serially-coupled micro-ring structure is reported and successfully applied in a fiber-optic distributed acoustic sensing system for the first time, achieving pico-strain level sensitivity. © Optica Publishing Group 2023, © 2023 The Author(s)

关键词： Silicon

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Fully-Printed Flexible Indium-Tin-Oxide Thin-Film Transistors and Logic Circuits

Fully-Printed Flexible Indium-Tin-Oxide Thin-Film Transistor...

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International Flexible Electronics Technology Conference (IFETC)

作者： Kun Liang Huihui Ren Bowen Zhu Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of Engineering Westlake University Hangzhou China Institute of Advanced Technology Westlake Institute for Advanced Study Hangzhou China

fabrication of metal oxide thin-film transistors (MO TFTs) using the inkjet printing process has attracted great interest in low-cost and large-area electronic devices. However, to develop fully-printed flexible MO TFTs with superior electrical performance remains challenging. In this study, we achieve fully-printed flexible indium-tin-oxide (ITO) TFTs and logic inverters on bendable glass and ultrathin polyimide (PI) film substrates with outstanding electrical performance and excellent stability. This cost-effective and reliable strategy enables the printed MO-TFTs for applications in flexible and wearable electronics.

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Pulsed polarized vortex beam enabled by metafiber lasers

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PhotoniX 2024年第1期5卷 110-120页

作者： Chenxi Zhang Lei Zhang He Zhang Bo Fu Jiyong Wang Min Qiu Key Laboratory of Precision Opto-Mechatronics Technology of Education Ministry School of Instrumentation and Optoelectronic EngineeringBeihang UniversityBeijing 100191China Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of EngineeringWestlake University18 Shilongshan RoadHangzhou 310024Zhejiang ProvinceChina Institute of Advanced Technology Westlake Institute for Advanced Study18 Shilongshan RoadHangzhou 310024Zhejiang ProvinceChina QianYuan National Laboratory Hangzhou 310000China Key Laboratory of Big Data-Based Precision Medicine Ministry of Industry and Information Technology School of Engineering MedicineBeihang UniversityBeijing 100191China Ministry of Education Engineering Research Center of Smart Microsensors and Microsystems School of Electronics and InformationHangzhou Dianzi UniversityHangzhou 310018China Westlake Institute for Optoelectronics FuyangHangzhou 311421China

Pulsed polarized vortex beams,a special form of structured light,are generated by tailoring the light beam spatiotemporally and witness the growing application demands in nonlinear optics such as ultrafast laser processing and surface plasma ***,existing techniques for generating polarized vortex beams suffer from either low compactness due to the use of bulky components or limited controlment of pulse ***,an all-fiber technique combining plasmonic metafibers with mode conversion method is harnessed to generate high-performance pulsed polarized vortex *** metafibers are utilized as saturable absorbers to produce Q-switched pulses with micro-second duration,while the offset splicing method is employed to partially convert the fundamental transverse mode(LP_(01))to higher-order mode(LP_(11)).Eventually,a polarized vortex beams laser is achieved at the telecom band with a repetition frequency of 116.0 *** impact of geometrical parameters including period of metafibers and offset of splicing on the spatiotemporal properties of pulsed polarized vortex beams is systematically *** findings could pave the way for design,control and generation of all-fiber pulsed polarized vortex beams,and also offer insights into the development of other types of structured laser sources.

关键词： Metafiber Q-switched pulse Polarized vortex beam

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Flexible Integrated Photonic devices and Applications

Flexible Integrated Photonic Devices and Applications

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Conference on Lasers and Electro-Optics (CLEO)

作者： Yingchun Wu Renjie Tang Ye Luo Jianghong Wu Jialing Jian Kangjian Bao Zongxi Li Chunlei Sun Hongtao Lin Lan Li Zhejiang University Hangzhou China Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of Engineering Westlake University Hangzhou China College of Information Science and Electronic Engineering Zhejiang University Hangzhou China

This paper covers our recent progress in flexible integrated photonics devices based on cascaded microcavities for high spatial resolution, quasi-distributed strain and temperature sensing, and integration possibility... 详细信息

ISBN: (纸本)9798350369311

关键词： Temperature sensors Spectroscopy microcavities System-on-chip Sensors Spatial resolution Quantum cascade lasers Laser applications Photonics Strain

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Tunable narrow-band single-channel add-drop integrated optical filter with ultrawide FSR

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PhotoniX 2022年第1期3卷 312-323页

作者： Chunlei Sun Yuexin Yin Zequn Chen Yuting Ye Ye Luo Hui Ma Lichun Wang Maoliang Wei Jialing Jian Renjie Tang Hao dai Jianghong Wu Junying Li daming Zhang Hongtao Lin Lan Li Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of EngineeringWestlake UniversityHangzhou 310024China Institute of Advanced Technology Westlake Institute for Advanced StudyHangzhou 310024China State Key Laboratory of Integrated Optoelectronics College of Electronic Science and EngineeringJilin University2699 Qianjin StreetChangchun 130012China Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province College of Information Science and Electronic EngineeringZhejiang UniversityHangzhou 310027China School of Microelectronics Zhejiang UniversityHangzhou 310027China.

Free-spectral-range(FSR)-free optical filters have always been a critical challenge for photonic integrated circuits.A high-performance FSR-free filter is highly desired for communication,spectroscopy,and sensing *** significant progress in integrated optical filters,the FSR-free filter with a tunable narrow-band,high out-of-band rejection,and large fabrication tolerance has rarely been *** this paper,we propose an exact and robust design method for add-drop filters(AdFs)with an FSR-free operation capability,a sub-nanometer optical bandwidth,and a high out-of-band rejection(OBR)*** achieved filter has a 3-dB bandwidth of<0.5 nm and an OBR ratio of 21.5 dB within a large waveband of 220 nm,which to the best of our knowledge,is the largest-FSR AdF demonstrated on a silicon photonic *** filter exhibits large tunability of 12.3 nm with a heating efficiency of 97 pm/mW and maintains the FSR-free feature in the whole tuning *** addition,we fabri-cated a series of AdFs with different periods,which all showed reliable and excellent performances.

关键词： Integrated devices Silicon photonics Optical filters FSR-free filters Tunable filters

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First demonstration of 2.5d Out-of-Plane-Based Hybrid Stacked Super-Bionic Compound Eye CMOS Chip with Broadband (300–1600 nm) and Wide-Angle (170°) Photodetection

First Demonstration of 2.5D Out-of-Plane-Based Hybrid Stacke...

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International Electron devices Meeting (IEdM)

作者： Yunfei Xie Xiaochen Wang Jing He Yongliang Xie Zhi-Xiang Zhang Hao Ning Jiangming Lin Srikrishna Chanakya Bodepudi Jiye Li Zongwen Li Qianqian Zhang Yance Chen Zijian Pan Yuan Ma Youshui He Yue dai Jian Chai Muhammad Abid Anwar Bin Yu Liaoyong Wen Yang Xu State Key Laboratory of Silicon and Advanced Semiconductor Materials College of Integrated Circuits ZJU-HIC Zhejiang University Hangzhou China Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of Engineering Westlake University Hangzhou China

ISBN: (数字)9798350365429

ISBN: (纸本)9798350365436

We propose a hybrid stacked CMOS bionic chip. The surface employs a fabrication process involving binary-pore anodic aluminum oxide (AAO) templates and integrates monolayer graphene (Gr) to mimic the compound eyes, thereby enhancing detection capabilities in the ultraviolet and visible ranges. Utilizing a 2.5d out-of-plane architecture, it achieves a wide-angle detection effect (170°) equivalent to curved surfaces while enhancing absorption in the 1550 nm communication band to nearly 100%. Additionally, through-silicon via (TSV) technology is integrated for wafer-level fabrication, and a CMOS 0.18-μm integrated readout circuit is developed, achieving the super-bionic compound eye chip based on hybrid stacked integration. This work not only enables wide-angle detection in planar chips, incorporating the features of traditional curved structures, while extending the detection spectra of silicon-based chips, suitable for wafer-level production. This advancement not only reduces costs but also significantly improves compatibility with existing CMOS processes, paving the way for cutting-edge chip integrating broadband and wide-angle detection technology.

关键词： fabrication Absorption Graphene Metasurfaces Broadband communication Frequency measurement Compounds Surface treatment Bars Biomedical imaging

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Inverse design of an integrated-nanophotonics optical neural network

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Science Bulletin 2020年第14期65卷 1177-1183,M0004页

作者： Yurui Qu Huanzheng Zhu Yichen Shen Jin Zhang Chenning Tao Pintu Ghosh Min Qiu Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of EngineeringWestlake UniversityHangzhou 310024China Institute of Advanced Technology Westlake Institute for Advanced StudyHangzhou 310024China State Key Laboratory of Modern Optical Instrumentation College of Optical Science and EngineeringZhejiang UniversityHangzhou 310027China Department of Physics Massachusetts Institute of TechnologyCambridgeMA 02139USA Electrical and Computer Engineering University of CaliforniaSan DiegoCA 92093USA

Artificial neural networks have dramatically improved the performance of many machine-learning applications such as image recognition and natural language processing. However, the electronic hardware implementations of the above-mentioned tasks are facing performance ceiling because Moore’s Law is slowing down. In this article, we propose an optical neural network architecture based on optical scattering units to implement deep learning tasks with fast speed, low power consumption and small *** optical scattering units allow light to scatter back and forward within a small region and can be optimized through an inverse design method. The optical scattering units can implement high-precision stochastic matrix multiplication with mean squared error < 10-4 and a mere 4*4 um2 ***, an optical neural network framework based on optical scattering units is constructed by introducing "Kernel Matrix", which can achieve 97.1% accuracy on the classic image classification dataset MNIST.

关键词： Optical neural networks deep learning Inverse design Integrated nanophotonics Silicon photonics

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