A mems _-preconcentrator employing a carbon molecular sieve membrane for highly volatile organic compound sampling

作     者：Kuo, Hung-Yang Cheng, Wei-Riu Wu, Tzu-Heng Sheen, Horn-Jiunn Wang, Chih-Chia Lu, Chia-Jung 

作者机构：Department of Chemistry National Taiwan Normal University Taipei11677 Taiwan Institute of Applied Mechanics National Taiwan University Taipei10617 Taiwan Department of Chemical and Materials Engineering Chung Cheng Institute of Technology National Defense University Taoyuan33509 Taiwan Undergraduate Degree Program of System Engineering and Technology National Yang Ming Chiao Tung University Hsinchu30010 Taiwan 

出 版 物：《Chemosensors》 (Chemosensors)

年 卷 期：2021年第9卷第5期

核心收录：

基　　金：Funding: The corresponding authors appreciate the funding support for this project from the Ministry of Science and Technology  Taiwan 

主　　题：Molecular sieves 

摘      要：This paper presents the synthesis and evaluation of a carbon molecular sieve membrane (CMSM) grown inside a MEMS-fabricated μ-preconcentrator for sampling highly volatile organic compounds. An array of µ-pillars measuring 100 µm in diameter and 250 µm in height were fabricated inside a microfluidic channel to increase the attaching surface for the CMSM. The surface area of the CMSM was measured as high as 899 m2/g. A GC peak amplification factor 2 × 104 was demonstrated with gaseous ethyl acetate. Up to 1.4 L of gaseous ethanol at the 100 ppb level could be concentrated without exceeding the capacity of this microchip device. Sharp desorption chromatographic peaks ( © 2021 by the authors. Licensee MDPI, Basel, Switzerland.