Research on the control strategy of SEM based micro/nano tele-operation system

作     者：Zhou, Jie Rong, Weibin Xu, Jinpeng Sun, Lining 

作者机构：State Key laboratory Robotics and System Harbin Institute of Technology Harbin150080 China School of Electrical and Control Engineering Heilongjiang University of Science and Technology Harbin150022 China 

出 版 物：《Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument》 (Yi Qi Yi Biao Xue Bao)

年 卷 期：2014年第35卷第11期

页      面：2448-2457页

核心收录：

学科分类：0711[理学-系统科学] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0811[工学-控制科学与工程] 081102[工学-检测技术与自动化装置] 

基　　金：国家教育部长江学者与创新团队发展计划 国家教育部新世纪优秀人才支持计划 哈尔滨工业大学机器人技术与系统国家重点实验室基金 

主　　题：Sliding mode control 

摘      要：In order to improve the tele-presence and stability of a scanning electron microscopy (SEM) based micro/nano tele-operation system, a sliding mode based impedance control scheme was proposed. Such a scheme features that impedance control strategy was applied to master to fulfill compliant control and sliding mode based impedance control strategy was adopted to slave to solve the parameter uncertainty problem. Tracking differentiator technology was integrated to the master/slave control strategy to obtain the derivative control signal of the micro/nano teleoperation system. Under the circumstance of low band and large gain of force feedback (105), the stability condition of micro/nano teleoperation system was derived from Liewellyn criterion. The good robustness and accurate force tele-presence of the proposed sliding mode control approach were verified by simulation and experimental results. The maximum displacement error is less than 0.5 μm during the location tracking process. The operator can precisely perceive 1 μN contact force from the slave. ©, 2014, Science Press. All right reserved.