A 16 Channel High-Voltage Driver with 14 Bit Resolution for Driving Piezoelectric Actuators

作     者：Pierco, Ramses Torfs, Guy Verbrugghe, Jochen Bakeroot, Benoit Bauwelinck, Johan 

作者机构：Univ Ghent INTEC Imec IMinds Dept Informat Technol B-9000 Ghent Belgium Univ Ghent IMEC Ctr Microsyst Technol CMST B-9052 Ghent Belgium 

出 版 物：《IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS I-REGULAR PAPERS》 (IEEE Trans. Circuits Syst. Regul. Pap.)

年 卷 期：2015年第62卷第7期

页      面：1726-1736页

核心收录：

学科分类：0808[工学-电气工程] 08[工学] 

主　　题：High-voltage driver HV-CMOS monotonic by design piezoelectric actuators segmented DAC 

摘      要：A high-voltage, 16 channel driver with a maximum voltage of 72 volt and 14 bit resolution in a high-voltage CMOS (HV-CMOS) process is presented. This design incorporates a 14 bit monotonic by design DAC together with a high-voltage complementary class AB output stage for each channel. All 16 channels are used for driving a piezoelectric actuator within the control loop of a micropositioning system. Since the output voltages are static most of the time, a class AB amplifier is used, implementing voltage feedback to achieve 14 bit accuracy. The output driver consists of a push-pull stage with a built-in output current limitation and high-impedance mode. Also a protection circuit is added which limits the internal current when the output voltage saturates against the high-voltage rail. The 14 bit resolution of each channel is generated with a segmented resistor string DAC which assures monotonic by design behavior by using leapfrogging of the buffers used between segments. A diagonal shuffle layout is used for the resistor strings leading to cancellation of first order process gradients. The dense integration of 16 channels with high peak currents results in crosstalk, countered in this design by using staggered switching and resampling of the output voltages.