A modular approach for simulation-based optimization of MEMS

作     者：Schneider, P Schneider, A Schwarz, P 

作者机构：Fraunhofer Inst Integrated Circuits Design Automat Div EAS D-01069 Dresden Germany 

出 版 物：《MICROELECTRONICS JOURNAL》 (微电子学杂志)

年 卷 期：2002年第33卷第1-2期

页      面：29-38页

核心收录：

学科分类：0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

主　　题：optimization microsystems heterogeneous systems MEMS modular optimization system distributed optimization via Internet multi-level simulation finite element method system simulation 

摘      要：The importance of MEMS optimization concerning performance, power consumption, and reliability is increasing. A variety of specialized tools is available in the MEMS design flow. FEM tools (ANSYS, CFD-ACE +) are widely used on component level. System level simulations are carried out using simplified models and simulators like Saber or ELDO. There is a lack of simulator-independent optimization support. Only a few simulators offer optimization capabilities. Our approach aims at a flexible combination of simulators and optimization algorithms by partitioning the optimization cycle into simulation, error calculation, optimization and model generation. This new method is translated into a modular optimization system named Moscito implemented in Java. Several optimization algorithms are available: methods without derivatives, methods using derivatives and stochastic approaches. Interfaces to simulators like ANSYS, Saber, MATLAB are implemented. Thus the optimization problem can be handled on different levels of model abstraction (FEM, ordinary differential equations, generalized networks, block diagrams, etc.). A graphical user interface supports control and visualization of the optimization. The modules of the optimization system are able to communicate via the Internet to allow a distributed, web-based optimization. (C) 2002 Elsevier Science Ltd. All rights reserved.