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A modular approach for simulation-based optimization of MEMS

MICROELECTRONICS JOURNAL 2002年第1-2期33卷 29-38页

作者： Schneider, P Schneider, A Schwarz, P Fraunhofer Inst Integrated Circuits Design Automat Div EAS D-01069 Dresden Germany

The importance of MEMS optimization concerning performance, power consumption, and reliability is increasing. A variety of specialized tools is available in the MEMS design flow. FEM tools (ANSYS, CFD-ACE +) are widely used on component level. System level simulations are carried out using simplified models and simulators like Saber or ELDO. There is a lack of simulator-independent optimization support. Only a few simulators offer optimization capabilities. Our approach aims at a flexible combination of simulators and optimization algorithms by partitioning the optimization cycle into simulation, error calculation, optimization and model generation. This new method is translated into a modular optimization system named Moscito implemented in Java. Several optimization algorithms are available: methods without derivatives, methods using derivatives and stochastic approaches. Interfaces to simulators like ANSYS, Saber, MATLAB are implemented. Thus the optimization problem can be handled on different levels of model abstraction (FEM, ordinary differential equations, generalized networks, block diagrams, etc.). A graphical user interface supports control and visualization of the optimization. The modules of the optimization system are able to communicate via the internet to allow a distributed, web-based optimization. (C) 2002 Elsevier Science Ltd. All rights reserved.

关键词： optimization microsystems heterogeneous systems MEMS modular optimization system distributed optimization via internet multi-level simulation finite element method system simulation

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A modular approach for simulation-based optimization of MEMS

A modular approach for simulation-based optimization of MEMS

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Conference on Design, Modeling, and Simulation in Microelectronics

作者： Schneider, P Schneider, A Schwarz, P Fraunhofer Inst Integrated Circuits Design Automat Div EAS D-01069 Dresden Germany

关键词： optimization microsystems heterogeneous systems MEMS modular optimization system distributed optimization via internet multi-level simulation finite element method system simulation

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A modular approach for simulation-based optimization of MEMS

A modular approach for simulation-based optimization of MEMS

引用

Conference on Design, Modeling, and Simulation in Microelectronics

作者： Schneider, P Huck, E Reitz, S Parodat, S Schneider, A Schwarz, P Fraunhofer Inst Integrated Circuits Dept EAS Dresden D-01069 Dresden Germany

ISBN: (纸本)0819439002

The importance of MEMS optimization concerning performance, power consumption, and reliability increases. In the MEMS design flow a variety of specialized tools is available. For simulation on component level FEM tools (e.g. ANSYS, CFDACE+) are widely used. Simulations on system level are carried out with simplified models using simulators like Saber, ELDO or Spice. A few simulators offer tool-specific optimization capabilities but there is a lack of simulator independent support of MEMS optimization. Our approach aims at a flexible combination of simulators and optimization algorithms by partitioning the optimization cycle. This new method is translated into a modular optimization system implemented in JAVA. The main parts (modules) are: Simulation: System behavior is calculated with the actual design parameters. This computation can be a simple evaluation of equations of a complex simulation with a FEM tool or a system simulator, respectively. Error calculation: Simulation results and the specified system behavior are used to calculate the error value (the design objective function) in the actual optimization step. optimization: The error value is used to compute the new vector of design parameters. Model instantiation: The new parameter values are used to modify the generic model for a new simulation run. The implemented optimization algorithms are: methods without derivatives (e.g. Nelder-Mead-Simplex), methods using derivatives (e.g. Conjugate Gradient or Quasi-Newton) and stochastic approaches (e.g. Simulated Annealing). Interfaces to the simulators ANSYS, ELDO, Saber, and SPICE are implemented. Thus the optimization task can be solved on different levels of model abstraction (FEM, ordinary differential equations, generalized networks,...). A graphical user interface (GUI) supports control and visualization of the optimization progress. The modules of the optimization system may communicate via the internet (web-based optimization, distributed optimization). T

关键词： optimization micro system heterogeneous systems MEMS modular optimization system distributed optimization via internet multi-level simulation FEM system simulation

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