垂直腔面发射激光器因其具有低阈值、低功耗、可实现高速调制等优势,广泛地应用于光通信和光互连等领域。寄生电容是影响激光器的调制带宽的主要因素之一。本文通过采用低k值的苯并环丁烯(BCB)平整技术有效地降低了垂直腔面发射激光器的寄生电容。详细研究了BCB平整技术的最优工艺参数,为未来高速垂直腔面发射激光器的制造技术提供参考。低k值BCB平整垂直腔面发射激光器在7μm氧化孔径下3 d B小信号调制带宽可达15.2 GHz。
The maximum power conversion efficiencies of the top-emitting,oxide-confined,two-dimensional integrated 2×2 and4×4 vertical-cavity surface-emitting laser(VCSEL) arrays with the oxide-apertures of 6 μm,16 ...
详细信息
The maximum power conversion efficiencies of the top-emitting,oxide-confined,two-dimensional integrated 2×2 and4×4 vertical-cavity surface-emitting laser(VCSEL) arrays with the oxide-apertures of 6 μm,16 μm,19 μm,26 μm,29 μm,36 μm,39 μm,and 46 urn are fabricated and characterized,*** maximum power conversion efficiencies increase rapidly with the augment of oxide-aperture at the beginning and then decrease slowly.A maximum value of27.91%at an oxide-aperture of 18.6 μm is achieved by *** experimental data are well consistent with the simulation results,which are analyzed by utilizing an empirical model.
暂无评论