We study the influence of ionized impurity scattering on the electron transport in resonant-phonon-assisted terahertz （THz） quantum-cascade lasers （QCLs）. We treat the ionized impurity scattering rates within the ...
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We study the influence of ionized impurity scattering on the electron transport in resonant-phonon-assisted terahertz （THz） quantum-cascade lasers （QCLs）. We treat the ionized impurity scattering rates within the single subband static screening approximation. We find that the ionized impurity scattering supplies an additional current channel across the device,and affects the electrondistribution in different subbands. We conclude that the ionized impurity scattering should be taken into account in the study of the transport properties of resonant-phonon-assisted THz QCLs.
为提高硅晶片双面超精密抛光的抛光速率,在分析双抛工艺过程基础上,采用自制大粒径二氧化硅胶体磨料配制了SIMIT8030-Ⅰ型新型纳米抛光液,在双垫双抛机台上进行抛光实验.抛光液、抛光前后厚度、平坦性能及粗糙度通过SEM、ADE-9520型晶片表面测试仪、AFM进行了表征.结果表明:与进口抛光液Nalco2350相比,SIMIT8030-Ⅰ型抛光液不仅提高抛光速率40%(14μm/h vs 10μm/h);而且表面平坦性TTV和TIR得到改善;表面粗糙度由0.4728nm降至0.2874nm,即提高抛光速率同时显著改善了抛光表面平坦性和粗糙度.
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