***]A quasi-thermodynamic model of MOVPE growth of Ga xAl yIn 1-x-y N alloys has been proposed with TMGa,TMAl,TMIn and ammonia as *** this model,the effect of decomposition of ammonia has been con- sidered an...
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***]A quasi-thermodynamic model of MOVPE growth of Ga xAl yIn 1-x-y N alloys has been proposed with TMGa,TMAl,TMIn and ammonia as *** this model,the effect of decomposition of ammonia has been con- sidered and the number of moles is used to express the mass conservation constraints of element N,H,Ga,Al and *** is assumed that the alloy is synthesized by the reactions between ammonia and group Ⅲ *** influence of growth conditions on the relationship between Ga xAl yIn 1-x-y N lattice matched to GaN and input group Ⅲ metalorganic compounds has been *** all the aluminum and gallium reaching the growing surface are incorporated in the *** order to enhance the incorporation of indium into Ga xAl yIn 1-x-y N,lower growth temperature and higher input Ⅴ/Ⅲ ratio should be used and the decomposed fraction of ammonia should be reduced.
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