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6th IIr/IIF International Conference on Magnetic refrigeration at room Temperature, THErMAG 2014

作者： Noguchi, Y. Okamura, T. Miyazaki, Y. Hasegawa, H. Nagashima, K. Hirano, N. Bae, S. Takata, H. Wada, H. Kawanami, T. Department of Energy Sciences Tokyo Institute of Technology Tokyo Japan Cryogenic Systems Maglev Systems Technology Division Railway Technical Research Institute Tokyo Japan Superconductivity Team Electric Power R and D Center Chubu Electric Power Co. Inc. Aichi Japan R and D Division Advanced Technology Development Office Sanden Corporation Gunma Japan R and D Division Functional Material Group Santoku Corporation Hyogo Japan Department of Physics Kyushu University Hukuoka Japan Department of Mechanical Engineering Kobe University Hyogo Japan

ISBN: (纸本)9782362150074

We have constructed a room-temperature magnetic refrigerator, which was designed to provide kW class of cooling capacity at the temperature span of zero. The system uses two sets of ring Halbach-array magnetic circuit with a peak field of 1.5 Tesla, which are sandwiching a disk shaped active magnetic regenerator bed (AMr bed). The disk type AMr bed is divided into 12 sections. Each section is packed with sphere gadolinium (Gd) or Gd alloys (Gd-Y) compounds. Total amount of the magnetocaloric materials packed into one disk type AMr bed is 3.6 kg. The magnets rotate up to 40 rpm. The flow rate of the heat transfer fluid is up to 25 liter per minute. It is demonstrated that the cooling capacity is 1.4 kW at the temperature span of zero, and the maximum temperature span is 21 K under the no heat load condition using Gd and Gd-Y compound. In order to analyze the thermal characteristics of the kW class refrigerator, one-dimensional numerical simulations have been carried out. The simulations use experimentally obtained and predicted magnetocaloric properties of magnetocaloric materials. The one-dimensional simulations can describe the experimental results even in the actual condition of two-dimensional AMr bed shape. It is confirmed from experiment and numerical analysis that layered AMr bed which is packed with multiple materials gives larger maximum temperature span than that which is packed with a single material.

关键词： Numerical analysis

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Chemical Vapor deposition technology of (Ba, Sr)TiO 3 Thin Films for Gbit-Scale dynamic random Access Memories

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MrS Online Proceedings Library 2011年第1期541卷 3-10页

作者： Tsuyoshi Horikawa Masayoshi Tarutani Takaaki Kawahara Mikio Yamamuka Noriko Hirano Takehiko Sato Shigeru Matsuno Teruo Shibano Fusaoki Uchikawa Kouichi Ono Tatsuo Oomori Advanced Technology R&D Center Mitsubishi Electric Corporation Amagasaki Japan Department of Aeronautics and Astronautics Graduate School of Engineering Kyoto University Kyoto Japan

The current status of (Ba, Sr)TiO3 [BST] capacitor technology using a liquid source chemical vapor deposition (CVd) method is reviewed, focusing on the CVd techniques and the physical, electrical and process-integration-related properties of ru/BST/ru capacitors. The use of a new titanium metalorganic (MO) source, titanium bis(tert-butoxy) bis(dipivaloylmethanato) [Ti(tertBuO)2 (dPM)2] dissolved in tetrahydrofuran (THF) turned out to enable highly conformal deposition of BST films with a coverage ratio of ∼ 70 % for a trench with an aspect ratio of ∼ 5. Electrical properties of a 24-nm-thick BST film, deposited on a Pt substrate at a low substrate temperature of 480 °C, were also confirmed to be equivalent SiO2 thickness (teq) of ∼ 0.5 nm and leakage current of ∼ 1 ×10-7 A/cm2 at 1 V. As for the ru/BST/ru capacitors, no deteriorations of ru electrode and BST/ru interface were observed after 750 °C post-annealing experiment, showing good thermal stability of ru as a practical electrode material. Although current leak through ru/BST/ru capacitors slightly increased after the H2 annealing, such degradation in the leakage properties was restored by post-annealing in N2 ambience. Integrated ru/BST/ru capacitors with a 30-nm-thick CVd-BST film were fabricated by 0.5 μm ULSI technology, and low leakage current was confirmed for the stacked capacitors. regarding the reproducibility of BST deposition by the liquid source CVd method, the deviation ratio of ∼ ± 2.3 % in film thickness was obtained for ∼ 100 successive depositions, thickness uniformity across the wafers was ∼ ± 1.1 %. The above results imply the potential applicability of BST capacitor technology using a liquid source CVd method for Gbit-scale drAMs.

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Characterization of Plzt on Platinum Electrodes for High density Fram Application

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MrS Online Proceedings Library 2011年第1期446卷 337-342页

作者： YongSoo Choi Soodoo Choe SeungHyun Kim ChangEun Kim dooYoung Yang Department of Ceramic Engineering YonSei University Seoul Korea Advanced Technology R&D Lab. LG Semicon Co. Ltd. Cheongju-si Korea

A new sol-gel route to obtain PLZT thin film was developed by combining the advantage of 2-methoxyethanol as a solvent and acetylacetone as a chelating agent. The sol maintained the same stable state as that of fresh synthesized sol even after 60 days of aging. The PLZT films spin coated onto a Pt/Ti/SiO2 substrate with 15% Pb excess and 7.5% La added sol showed well developed rosette microstructure of uniform grain sizes(0.3 - 0.5 μm) and gave well behaved ferroelectric properties with the values of Ps, Pr, and Ec of 40 μC/cm2, 15 μ C/cm2, and 20 kV/cm respectively at 5V after 650 °C and above annealing. The degradation in polarization of 2.5% La doped PLZT thin film was found to be less than 20% up to 1012 cycles

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Thermo-Mechanical Stresses in Laminated Polymer Films on Silicon Substrates

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MrS Online Proceedings Library 2011年第1期515卷 147-152页

作者： Jin S. Kim Kyung W. Paik Seung H. Oh Hyun S. Seo Department of Materials Science and Engineering Korea Advanced Institute of Science and Technology Taejon Korea Department of Mechanical Engineering Korea Advanced Institute of Science and Technology 373-1 Taejon Korea LCD R&D Center LG Electronics Inc Anyang-shi Kyunggi-do Korea

Thermo-mechanical stresses in MCM-d substrate are important reliability and fabrication issues. The differences in co of thermal expansion (CTE) between substrate, polymer, and metal leads to complicated stress fields in multilevel interconnect structures. While the majority of reports in the literature have focused on spin-coated polyimides, this paper mainly focuses on laminated polymer dielectrics. This study uses material sets representing typical MCM-d structures to monitor the stress level in the polymer films. The substrate deflection caused by composite stresses during fabrication and thermal cycling test is determined by a curvature measurement technique. A simple analytical model which predicts a stress contribution from each individual layer during MCM-d substrate fabrication is proposed and developed by computer simulation as well. The composite stress or bowing in multilayer structures is due to the summation of each individual layer contribution. From a thermo-mechanical stress viewpoint, Ultem® thermoplastic and the epoxy thermoset adhesive exhibit quite different behaviors. In case of the epoxy thermoset adhesive, the amount of bowing increases as number of layers increases and its behavior can be predicted by an elastic model. However, in the case of the Ultem® thermoplastic adhesive, bow values become stabilized as number of layers increases because of the stress relaxation effect of the thermoplastic adhesive during lamination process above Tg of the Ultem® thermoplastic.

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48.4: Ink Jet Fabrication of Alignment Layers on High-Temperature Polysilicon Liquid Crystal Panels

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SId Symposium digest of Technical Papers 2012年第1期37卷

作者： Kei Hiruma Katsumi Suzuki Osamu Kasuga Atsushi Ito Yuichiro Iwai Hisashi Aruga Masayuki Yazaki Akinori Hashizume Takashi Okusa Hideyuki Nagasawa Manabu Nagasaka Takahiro Usui IJ Industrial Application R&D Department Seiko Epson Corp. Nagano Japan TFT Design&Engineering Department Seiko Epson Corp. Nagano Japan Advanced Factory Design Center Seiko Epson Corp. Nagano Japan Technology Platform Research Center Seiko Epson Corp. Nagano Japan

Inkjet technology was used in a mass production process to form an alignment layer on high-temperature polysilicon TFT liquid crystal panels used in LCd projectors. This is the first-ever inkjet process for forming alignment layers in an LCd manufacturing process. Surface treatment, inkjet ejection, and post-print drying processes were integrated, and process conditions and printing materials were optimized, thereby sharply improving display quality while reducing process environmental impact.

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Charge transport through ultrasmall single and double Josephson junctions coupled to resonant modes of the electromagnetic environment

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Physical review B 2011年第2期83卷 020502(R)-020502(R)页

作者： Yu. A. Pashkin H. Im J. Leppäkangas T. F. Li O. Astafiev A. A. Abdumalikov, Jr. E. Thuneberg J. S. Tsai NEC Green Innovation Research Laboratories Tsukuba Ibaraki 305-8501 Japan RIKEN Advanced Science Institute Tsukuba Ibaraki 305-8501 Japan Department of Semiconductor Science Dongguk University Phil-Dong Seoul 100-715 Korea Institut für Theoretische Festkörperphysik and DFG Center for Functional Nanostructures (CFN) Karlsruhe Institute of Technology D-76128 Karlsruhe Germany Institute of Microelectronics Tsinghua University Beijing 100084 China Department of Physical Sciences University of Oulu FI-90014 Oulu Finland

We have investigated charge transport in ultrasmall superconducting single and double Josephson junctions coupled to resonant modes of the electromagnetic environment. We observe pronounced current peaks in the transport characteristics of both types of devices and attribute them to the process involving simultaneous tunneling of Cooper pairs and photon emission into the resonant modes. The experimental data are well reproduced with the theoretical models.

关键词： JOSEPHSON junctions TUNNELING (Physics) SUPErCONdUCTOrS ELECTrOMAGNETISM PHOTON emission PHYSICS

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Lithium‐Ion Batteries: A Stretchable Polymer–Carbon Nanotube Composite Electrode for Flexible Lithium‐Ion Batteries: Porosity Engineering by Controlled Phase Separation (Adv. Energy Mater. 8/2012)

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advanced Energy Materials 2012年第8期2卷

作者： Hojun Lee Jung‐Keun Yoo Jong‐Hyun Park Jin Ho Kim Kisuk Kang Yeon Sik Jung Department of Materials Science and Engineering Korea Advanced Institute of Science and Technology (KAIST) Daejeon 305‐701 Republic of Korea Material R&D Department LG Display Co. Ltd. 1007 Paju‐si Gyeonggi‐do 413‐811 Republic of Korea Icheon Branch Korea Institute of Ceramic Engineering and Technology Icheon‐si Gyeonggi‐do 467‐843 Republic of Korea Department of Materials Science and Engineering Seoul National University Seoul 151‐742 Republic of Korea

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P-37: Electrophoresis deposition Method to Fabricate CNT-FEd Cathode in Water Base Solution

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SId Symposium digest of Technical Papers 2012年第1期36卷

作者： Chun-Yen Hsiao Te-Fong Chan Shie-Heng Lee Kevin Cheng Yu-An Li Jin-Lung Tsai Jin-Shou Fang Chih-Che Kuo R&D Department TECO Nanotech Co. Ltd. 1560 Chung-Shan road Sec. 1 Kuang-In Taoyuan Hsien Taiwan R.O.C. Division of Advanced Display and Nano Technology TECO Group Research Institute TECO Electric & Machinery Co. Ltd. 4F No. 3 Yuan Chu St. Nan-Kang Taipei Taiwan R.O.C.

A novel process for fabricating field emission display (FEd) devices with pulse dC electrophoresis deposition (EPd) method in water base solution is proposed. Electrophoresis deposition method can be applied to both cathode and anode fabrication process. It is a fast and low cost process that is easily scaling up for large size panel. Mixing MWNT, which is synthesized by arc-discharge, and some “charger” with water, we can get CNT solution for EPd method. Cathode is coated with CNT film by the EPd method and using pulse electric field source. After some simple process of baking process and surface treatment, we can get the CNT-FEd cathode with good emission performance.

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Characterization of a kW class magnetic refrigerator 6

Characterization of a kW class magnetic refrigerator

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6th IIr/IIF International Conference on Magnetic refrigeration at room Temperature, THErMAG 2014

作者： Miyazaki, Y. Hasegawa, H. Nagashima, K. Hirano, N. Bae, S. Takata, H. Okamura, T. Noguchi, Y. Wada, H. Kawanami, T. Cryogenic Systems Maglev Systems Technology Division Railway Technical Research Institute Hikari-cho Kokubunji-shi Tokyo Japan Superconductivity Team Electric Power R and D Center Chubu Electric Power Co. Inc. Ohdaka-cho Midori-ku Nagoya Japan R and D Division Advanced Technology Development Office Sanden Corporation Kotobuki-cho Isesaki-shi Gunma Japan R and D Division Functional Material Group Santoku Corporation Minamifutami Futami-cho Akashi-shi Hyogo Japan Department of Energy Sciences Tokyo Institute of Technology Nakatsuda-cho Midori-ku Yokohama Japan Department of Physics Kyusyu University Hakozaki Higashi-ku Fukuoka Japan Department of Mechanical Engineering Kobe University Rokkodai-cho Nada-ku Kobe Japan

ISBN: (纸本)9782362150074

A prototype magnetic refrigerator has been developed, which consists of fixed active magnetic regenerator (AMr) beds and Halbach arrayed NdFeB magnets with a peak field of 1.5 Tesla rotating over the beds. Each bed was packed with sphere Gd or Gd-Y/Gd-dy compounds. The total amount of magnetcaloric materials are 7.2 kg. The number of rotations is up to 40 min-1 and the volumetric flow rates are up to 25 L/min. The system has a maximum cooling capacity of 1.4 kW at the temperature span of zero, and a maximum temperature span of 21 K with Gd and Gd-dy compounds.

关键词： Packed beds

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Quantum heating of a parametrically modulated oscillator: Spectral signatures

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Physical review A 2011年第5期83卷 052115-052115页

作者： M. I. dykman M. Marthaler V. Peano Department of Physics and Astronomy Michigan State University East Lansing Michigan 48824 USA Institut für Theoretische Festkörperphysik and DFG-Center for Functional Nanostructures (CFN) Karlsruhe Institute of Technology D-76128 Karlsruhe Germany Freiburg Institute for Advanced Studies (FRIAS) Albert-Ludwigs-Universität Freiburg D-79104 Freiburg Germany

We show that the noise spectrum of a parametrically excited nonlinear oscillator can display a fine structure. It emerges from the interplay of the nonequidistance of the oscillator quasienergy levels and quantum heating that accompanies relaxation. The heating leads to a finite-width distribution over the quasienergy, or Floquet states, even for zero temperature of the thermal reservoir coupled to the oscillator. The fine structure is due to transitions from different quasienergy levels, and thus it provides a sensitive tool for studying the distribution. For larger damping, where the fine structure is smeared out, quantum heating can be detected from the characteristic double-peak structure of the spectrum, which results from transitions accompanied by the increase or decrease of the quasienergy.

关键词： ELECTrIC oscillators OSCILLATIONS QUANTUM theory SPECTrUM analysis PHYSICS

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