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IEEE Transactions on computer-Aided Design of Integrated Circuits and Systems 2012年第4期31卷 453-471页

作者： Jie Zhang Albert Lin Nishant Patil Hai Wei Lan Wei H.-S. Philip Wong Subhasish Mitra Department of Electrical Engineering University of Stanford Stanford CA USA Microsystems Technology Laboratories Massachusetts Institute of Technology Cambridge MA USA Department of Electrical Engineering and the Department of Computer Science University of Stanford Stanford CA USA

Carbon nanotube field-effect transistors (CNFETs) are excellent candidates for building highly energy-efficient electronic systems of the future. Fundamental limitations inherent to carbon nanotubes (CNTs) pose major obstacles to the realization of robust CNFET digital very large-scale integration (VLSI): 1) it is nearly impossible to guarantee perfect alignment and positioning of all CNTs despite near-perfect CNT alignment achieved in recent years; 2) CNTs can be metallic or semiconducting depending on chirality; and 3) CNFET circuits can suffer from large performance variations, reduced yield, and increased susceptibility to noise. Today's CNT process improvements alone are inadequate to overcome these challenges. This paper presents an overview of: 1) imperfections and variations inherent to CNTs; 2) design and processing techniques, together with a probabilistic analysis framework, for robust CNFET digital VLSI circuits immune to inherent CNT imperfections and variations; and 3) recent experimental demonstration of CNFET digital circuits that are immune to CNT imperfections. Significant advances in design tools can enable robust and scalable CNFET circuits that overcome the challenges of the CNFET technology while retaining its energy-efficiency benefits.

关键词： CNTFETs Logic gates Very large scale integration Delay Optimization Integrated circuit modeling

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Development of Nanostructured Antireflection Coatings for EO/IR Sensor and Solar Cell Applications

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Materials sciences and Applications 2012年第9期3卷 633-639页

作者： Ashok K. Sood Adam W. Sood Roger E. Welser Gopal G. Pethuraja Yash R. Puri Xing Yan David J. Poxson Jaehee Cho E. Fred Schubert Nibir K. Dhar Dennis L. Polla Pradeep Haldar Jennifer L. Harvey College of Nanoscale Science and Engineering Albany USA Department of Electrical and Computer Systems Engineering and Physics Rensselaer Polytechnic Institute Troy USA Magnolia Solar Inc. Albany USA Microsystems Technology Office of the Defense Advanced Research Projects Agency Arlington USA New York State Energy Research and Development Authority Albany USA.

Electro-optical/infrared (EO/IR) sensors and photovoltaic power sources are being developed for a variety of defense and commercial applications. One of the critical technologies that will enhance both EO/IR sensor and photovoltaic module performance is the development of high quality nanostructure-based antireflection coatings. In this paper, we review our work on advanced antireflection structures that have been designed by using a genetic algorithm and fabricated by using oblique angle deposition. The antireflection coatings are designed for the wavelength range of 250 nm to 2500 nm and an incidence angle between 00 and 400. These nanostructured antireflection coatings are shown to enhance the optical transmission through transparent windows over a wide band of interest and minimize broadband reflection losses to less than one percent, a substantial improvement over conventional thin-film antireflection coating technologies.

关键词： Antireflection Coating Nanostructured Layer Oblique Angle Deposition Silicon Dioxide Broadband Omni-Directional

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Corrigendum to “Enteric neurons from postnatal Fgf2 knockout mice differ in neurite outgrowth responses” [Auton Neurosci 170 (1–2) 56–61]

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Autonomic Neuroscience: Basic and Clinical 2013年第1期174卷 66-66页

作者： Hagl, C.I. Wink, E. Heumüller-Klug, S. Weiss, C. Wessel, L. Gretz, N. Schäfer, K.H. Clinic of Pediatric Surgery Medical Faculty Mannheim University of Heidelberg Theodor-Kutzer-Ufer 1-3 68167 Mannheim Germany Institute for Medical Statistics Medical Faculty Mannheim University of Heidelberg Ludolf-Krehl-Straße 13-17 68167 Mannheim Germany Medical Research Center Medical Faculty Mannheim University of Heidelberg Theodor-Kutzer-Ufer 1-3 68167 Mannheim Germany University of Applied Sciences Life Science Department of Computer Sciences and Microsystems Technology Amerikastrasse 1 66482 Zweibrücken Germany

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A Wireless Trigger for Synchronization of Wearable Sensors to External Systems during Recording of Human Gait

A Wireless Trigger for Synchronization of Wearable Sensors t...

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Annual International Conference of the IEEE Engineering in Medicine and Biology Society

作者： Patrick Kugler Heiko Schlarb Joerg Blinn Antoni Picard Bjoern Eskofier P. Kugler and B. Eskofier are with the Digital Sports Group Pattern Recognition Lab Computer Science Department Friedrich-Alexander University of Erlangen-Nuremberg Erlangen Germany H. Schlarb is with the adidas innovation team (a.i.t.) adidas AG Herzogenaurach Germany. J. Blinn and A. Picard are with the Department of Computer Sciences and Microsystems Technology University of Applied Sciences Kaiserslautern Zweibruecken Germany.

ISBN: (纸本)9781424441198

Mobile gait analysis focuses on the automatic extraction of gait parameters from wearable sensor data. However, development of algorithms for this task requires kinematic data with accurate and highly synchronous ground truth. In this paper we present a wireless trigger system which allows reliable synchronization of wearable sensors to external systems providing ground truth. To demonstrate the applicability of the system for mobile gait analysis, a Shimmer wireless sensor node with inertial sensors was mounted at the heel of a running shoe and synchronized with an external VICON motion capturing system using the wireless trigger system. Inertial sensor data were recorded during walking and running with the shoe, while kinematic and kinetic ground truth was acquired from the synchronized VICON system. Evaluation of delay and jitter of the system showed a mean delay of 2 ms and low jitter of 20 us. Recording was highly synchronous and the collected kinematics had a correlation of up to 0.99. In the future the proposed system will allow the creation of a database of inertial data from human gait with accurate ground truth synchronization.

关键词： Trigger for Synchronization VICON the creation of a database

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The best material for the function: Seamless on-wafer integration of GaN and Si devices

The best material for the function: Seamless on-wafer integr...

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2011 International Conference on Compound Semiconductor Manufacturing technology, CS MANTECH 2011

作者： Lee, Hyung-Seok Ryu, Kevin Chung, Jinwook Palacios, Tomás Department of Electrical Engineering and Computer Science Microsystems Technology Laboratories Massachusetts Institute of Technology 77 Massachusetts Ave. Cambridge MA 02139 United States

ISBN: (纸本)1893580172

The recent demonstration of the seamless on-wafer integration of GaN electronics and CMOS Si devices enables the combination of the excellent high voltage and high frequency properties of GaN transistors with the unsurpassed circuit complexity and scaling of Si technology. This paper describes our recent results to expand this heterogeneous integration from the initial 1x1 cm2 demonstration to full 4" wafers that integrate hybrid power, mixed signal and digital circuits.

关键词： III-V semiconductors

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Physical Characterization of Microelectronic Polymeric Thin Films

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MRS Online Proceedings Library 2011年第1期227卷 167-176页

作者： Stephen D. Senturia Susan C. Noe Jeffrey Y. Pan Microsystems Technology Laboratories Department of Electrical Engineering and Computer Science Cambridge USA

The measurement of the mechanical properties and adhesion of polymeric thin films and coatings poses a number of technical problems. Elastic and viscoelastic properties, residual stress, adhesion, the effects of extended cure, and the effects of adsorbed moisture and process reagents are all critical. A particular challenge is to develop measurement methods which can be used with actual samples, preferably non-destructively. This paper examines a number of methods which have been developed to make these measurements, with emphasis on methods which are sensitive enough to look at the effects of process variation and the effects of moisture exposure. Suspended-membrane methods for measuring elastic and viscoelastic properties, residual stress, and adhesion are combined with optical methods for determining index of refraction and birefringence to yield a family of techniques for performing physical characterization. Recent results on the effects of extended cure and moisture uptake on elastic properties, residual stress, and optical properties will be presented.

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Characterization of the Piezoelectric Response of Aluminum Nitride Grown by dc Magnetron Sputtering for Applications in Thin-Film Resonators

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MRS Online Proceedings Library 2011年第1期444卷 215-219页

作者： Rajan S. Naik Joseph J. Lutsky Rafael Reif Charles G. Sodini Department of Materials Science and Engineering Microsystems Technology Laboratories Massachusetts Institute of Technology Cambridge USA Department of Electrical Engineering and Computer Science Microsystems Technology Laboratories Massachusetts Institute of Technology Cambridge USA

Aluminum nitride is a promising material for use in thin-film bulk acoustic wave resonators for applications in RF bandpass filters. This paper discusses the requirements needed for a dc magnetron sputtering system to grow piezoelectrically active films with x-ray diffraction rocking curves of 3.3° on silicon substrates, 5° on aluminum substrates and oxygen concentrations of l at.%. For applications in integrated resonators, a materials characterization is insufficient in predicting the subsequent device performance. A simple acoustic device structure which allows a quick measurement of the device performance is used to extract maximum effective coupling coefficients keff2 of 0.009% at 3.4GHz and 0.002% at 2.4GHz for two different films with rocking curves of 5.7° and 9.0° respectively. This parameter extraction technique may be used to make relative comparisons between films grown under different deposition conditions.

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Competence research: Teaching embedded micro/nano systems

Competence research: Teaching embedded micro/nano systems

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2011 6th Workshop on Embedded Systems Education, WESE 2011

作者： Jaschke, Steffen Schubert, Sigrid Schäfer, André Brück, Rainer Kleinert, Bruno Schmidt, Harald Fey, Dietmar Didactics of Informatics and E-Learning University of Siegen Germany Institute of Microsystems Technology University of Siegen Germany Department of Computer Science 3 University of Erlangen-Nürnberg Germany

ISBN: (纸本)9781450310468

In this paper, we present the development and first empirical refinement of a normative competence structure model for higher education in embedded micro systems and prospective embedded nanosystems. This kind of competence model is necessary to progress from a subjective and content oriented design of courses to traceable and outcome-oriented courses. In addition, we show a flexible alternative for teaching embedded systems in cost-intensive courses by building a FPGA laboratory offering remote access. Furthermore, we sketch out a possible way to overcome and teach fault-prone nanodevices in a Bottom-Up approach. Copyright 2011 ACM.

关键词： Teaching

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A normative competence structure model for "Embedded micro- and nanosystems" development 11

A normative competence structure model for "Embedded micro- ...

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Proceedings of the 16th annual joint conference on Innovation and technology in computer science education

作者： Schäfer, André Brück, Rainer Jaschke, Steffen Schubert, Sigrid Fey, Dietmar Kleinert, Bruno Schmidt, Harald Institute of Microsystems Technology University of Siegen Germany Didactics of Informatics and E-Learning University of Siegen Germany Department of Computer Science 3 University of Erlangen-Nürnberg Germany

ISBN: (纸本)9781450308878

In our poster, we present the research project "Competence development with embedded micro- and nanosystems (KOMINA)" promoted by the German Research Foundation and its first step, the development of a normative competence structure model. As a result, we clustered the derived competencies in the following dimensions: (C1) Competencies as preconditions (Basis), (C2) development competencies of embedded micro- and nanosystems (EMNS), (C3) competencies for multi-level development of EMNS and (C4) non-cognitive competencies. While we chose a purely thematic division for braking down C1 and C2 to sub dimensions, we recommend dividing C3 into solution approaches. We exemplify the deduction from a sub dimension to a concrete task of a practical course. © 2011 Authors.

关键词： Nanosystems

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The First Neural Probe Integrated with Light Source (Blue Laser Diode) for Optical Stimulation and Electrical Recording

The First Neural Probe Integrated with Light Source (Blue La...

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Annual International Conference of the IEEE Engineering in Medicine and Biology Society

作者： HyungDal Park Hyun-Joon Shin Il-Joo Cho Eui-sung Yoon Jun-Kyo Francis Suh Maesoon Im Euisik Yoon Yong-Jun Kim Jinseok Kim Center for Bionics of Korea Institute of Science and Technology Center for Bio-Microsystems of Korea Institute of Science and Technology Center for Wireless Integrated Microsystems Department of Electrical Engineering and Computer Science University of Michigan School of Mechanical Engineering Yonsei University

ISBN: (纸本)9781424441211

In this paper, we report a neural probe which can selectively stimulate target neurons optically through Si wet etched mirror surface and record extracellular neural signals in iridium oxide tetrodes. Consequently, the proposed approach provides to improve directional problem and achieve at least 150μm gap distance between stimulation and recording sites by wet etched mirror surface in V-groove. Also, we developed light source, blue laser diode (OSRAM Blue Laser DiodePL 450), integration through simple jig for one-touch butt-coupling. Furthermore, optical power and impedance of iridium oxide tetrodes were measured as 200μW on 5mW from LD and 206.5kΩ at 1kHz and we demonstrated insertion test of probe in 0.5% agarose-gel successfully. We have successfully transmitted a light of 450nm to optical fiber through the integrated LD using by butt-coupling method.

关键词： mirror surface Laser light, blue IRIDIUM OXIDES tetrodes LIGHT SOURCES lethal dose diodes Optical Fibers

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