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Layer Transfer of Hydrogen-Implanted Silicon Wafers by Thermal-Microwave Co-Activation

MRS Online Proceedings Library (OPL) 2011年第1期913卷 0913-D03-13-0913-D03-13页

作者： Y. Y. Yang C. H. Huang Y. -K. Hsu S. -J. Jeng C. -C. Tai S. Lee H. -W. Chen Q. Gan C. -S. Chu J. -H. Ting 93343003@cc.ncu.edu.twNational Central UniversityDept. of Mechanical Engineering 93343044@cc.ncu.edu.tw National Central University Dept. of Mechanical Engineering Chung-Li N/A N/A Taiwan 92323050@cc.ncu.edu.tw National Central University Dept. of Mechanical Engineering Chung-Li N/A N/A Taiwan shoujiun@*** National Central University Dept. of Mechanical Engineering Chung-Li N/A N/A Taiwan 943209003@cc.ncu.edu.tw National Central University Inst. of Materials Science and Engineering Chung-Li N/A N/A Taiwan shyong@cc.ncu.edu.tw National Central University Dept. of Mechanical Engineering Chung-Li N/A N/A Taiwan edwardchen@itri.org.tw National Central University Dept. of Mechanical Engineering Chung-Li N/A N/A Taiwan

Silicon on insulator (SOI) substrate is a key materials for nano-scaling IC device and the requirement for its crystal structure and quality is really high. Nanothick silicon thin film can be transferred onto a handle wafer from a donation wafer to form a SOI wafer after this process including hydrogen implantation of donation wafer, wafer bonding, and thermal treatment at moderately high temperatures of 400 to 600 degree centigrade. The expansion of the hydrogen molecular evolving from the implanted hydrogen ions interacting with silicon dangling bonds and trapped inside the microcavities located near the ion projected range resulted in exfoliation of the silicon thin film in the final heating step. The hydrogen molecules inside the microcavities tend to expand along the bonded interface rather than radially to form individual blisters. Finally, the fracture failure of ion implanted area parallel to the bonded interface near the projected ion range is formed by the sideway expansion of the cavities due to the diffusion supply of implanted hydrogen excited by thermal energy. Microwave processing can lower the activity energy to speed the chemical reaction so that it leads the format of microcavities occurring at low temperature by directly exciting the implanted hydrogen ions by microwave energy and also results in decreasing the critical dosage for layer splitting. However, microwave irradiation alone at room temperature causes the formation of lots of nucleus sites of micro-voids filled by hydrogen molecule which is immobility in silicon resulting in the issue of uniformity of transferred layer. In this study, the hydrogen implanted silicon substrate was irradiated by microwave at low temperature (200 degree centigrade) rather than microwave alone to co-activate the implanted hydrogen ions in silicon to increase not only kinetic energy but also mobility to successfully achieve a completely transferred layer in a short time.

关键词： ion-implantation Si microwave heating

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Positive effect of Sc and Zr on globular microstructure formation in AA7075 thixoforming feedstock

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AIP Conference Proceedings 2011年第1期1353卷 1039-1044页

作者： Ł. Rogal J. Dutkiewicz L. Lityńska‐Dobrzańska B. Olszowska‐Sobieraj M. Modigell aInstitute of Metallurgy and Materials Science of the Polish Academy of Sciences 30‐059 Krakow 25 Reymonta St. Poland bUniversity of Science and Technology Faculty of Foundry Engineering 30‐059 Kraków 23 Reymonta St. Poland cRWTH Aachen‐Dept. of Mechanical Process Engineering Germany

One of methods of obtaining a fine globular microstructure in a semi‐solid range, necessary for thixoforming process, is modifiers additions. For this purpose 0.5 weight percent of modifying elements–scandium and zirconium–was added to 7075 alloy. The microstructure of such alloy consisted of homogeneously distributed globular grains of solid solution with the following chemical composition: Mg – 1.9%, Al – 91.6%, Cu – 1.0%, Zn – 5.5% (all in wt.%). Quantitative metallographic analysis showed that the average grain size was 23.5 μm, much smaller than in the alloy without additions and 3.08% volume fraction of precipitates in the form of a layer between spherical α(Al) grains. X‐ray phase analysis of the 7075 alloy with Sc and Zr additions confirmed the dominant presence of aluminum solid solution and the intermetallic hexagonal phase MgZn2. Electron diffraction pattern confirmed location of η MgZn2 phase at the grain boundaries. EDS chemical analysis of the η MgZn2 phase showed following content of elements: Mg – 17.2%, Al – 20.4%, Cu – 27.8%, Zn – 34.6%. The larger amount of Cu and Al indicated non‐stoichiometry of the η phase, which can be presented with a formula [Mg(Zn,Al,Cu)2]. Additionally, inside the aluminum solution, small, square‐shaped precipitations enriched with Sc and Zr were observed. Electron diffraction pattern allowed identification of the precipitates as cubic Al3(Sc,Zr) phase. The average hardness of feedstock was 105 HV5. DSC analysis during heating of the alloy enabled the estimation of a solidus line, at temperature of 548° C and a liquidus line at temperature: 656° C. For cooling, the temperatures for solidus and liquidus were 545° C and 636° C respectively. Additionally, the relation of liquid phase as a function of temperature was determined. Measurements of rheological properties in the semi‐solid range, using the Searl system indicated that an increase of a particle size leads to an observable decrease of viscosity during isothermal shear

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Performance of diffusion aluminide coatings applied on alloy CF8C-Plus at 800°C

Performance of diffusion aluminide coatings applied on alloy...

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作者： Kumar, Deepak Dryepondt, Sebastien Zhang, Ying Haynes, J. Allen Pint, Bruce A. Armstrong, Beth L. Shyam, Amit Lara-Curzio, Edgar Materials Science and Technology Division Oak Ridge National Laboratory 1 Bethel Valley Rd. Oak Ridge TN 37831 United States Dept. of Mechanical Engineering Tennessee Technology University P. O. Box 5014 Cookeville TN 38505 United States

High performance cast stainless steel, CF8C-Plus, is a low cost alloy with prospective applications ranging from covers and casings of small and medium size gas turbines to turbocharger housing and manifolds in internal combustion engines. Diffusion aluminide coatings were applied on this alloy as a potential strategy for improved oxidation resistance, particularly in wet air and steam. In this paper the performance of the aluminide coatings evaluated by cyclic oxidation experiments in air containing 10 vol.% H2O at 800°C and conventional tension-compression low-cycle-fatigue tests in air at 800°C with a strain range of 0.5% is presented. The results show that specimens coated by a chemical vapor deposition process provide better oxidation resistance than those coated by an Al-slurry coating process. The application of a coating by pack cementation reduced the fatigue life by 15%.

关键词： Oxidation resistance

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Synchrotron White Beam Topography Studies of Residual Stress in SiC Single Crystal Wafers with Epitaxial Thin Films

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MRS Online Proceedings Library (OPL) 2011年第1期399卷 425-425页

作者： W. Huang Q. Wang M. Dudley F. P. Chiang J. Parsons C. Fazi Dept. of Materials Science and Engineering SUNY at SB Stony Brook NY 11794-2275 Dept. of Mechanical Engineering SUNY at SB Stony Brook NY11794-2300 Oregon Graduate Institute Beaverton Oregon 97006 U.S. Army Research Laboratory 2800 Powder Mill Road Adelphi MD 20783 USA

The residual stress in a 6H-SiC wafer with a 3C-SiC epitaxial overlayer is determined by the technique of Synchrotron white beam x-ray topography (SWBXT). The short wavelength and high energy attributes of synchrotron radiation are exploited to very accurately determine the wafer curvature. Different approaches including absorption edge contour (AEC) mapping, multiple diffraction line (MDL) analysis and diffracted x-ray beam divergence (DXBD) analysis in both transmission and reflection geometry are demonstrated. The residual stress distribution is calculated from the wafer curvature measurement.

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LPE Growth of Atomically Flat Ge Layer on a Mesa Pattern

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MRS Online Proceedings Library (OPL) 2011年第1期788卷 L3.47-L3.47页

作者： Takahiro Maruyama Keiji Matsuda Norikazu Saikawa Shigeya Naritsuka Dept. of Materials Science & Engineering Meijo University Meijo University 21st CENTURY COE program “NANO FACTORY” 1–501 Shiogama-guchi Tempaku-ku Nagoya 468–8502 Japan

Aiming at the growth of step free surface on mesas, we tried to suppress the formation of two-dimensional nucleation on grown surface by decreasing the supersaturation. When the supersaturation was enough small at the growth temperature below 400 °C, flat facets were formed on some mesas after the LPE growth for 30 min. We considered that these facets are formed on mesas with dislocation-free surface, considering the dislocation density of Ge substrate. AFM observation indicated that some triangle hollows with monolayer step in dept. were present on these facets, but that the region among the hollows was atomically flat. It was also found that the amount and the size of the hollows were related to the growth temperature. Our results show the possibility that atomically flat Ge area beyond 100 μm2 will be obtained by the control of the growth condition.

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Effect of jet electrolytic solution on formation of photocatalytic titania film

Effect of jet electrolytic solution on formation of photocat...

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7th International Conference on Advances and Trends in engineering materials and their Applications, AES-ATEMA'2011

作者： Okumiya, M. Wada, H. Yoshida, M. Tsunekawa, Y. Iwamoto, N. Materials Processing Laboratory Toyota Technological Institute Nagoya 468-8511 Japan Bearing Development Department No. 1 Taiho Kogyo Co.Ltd. Toyota 471-8502 Japan Dept. of Mechanical Engineering Shizuoka Institute of Science and Technology Hukuroi 437-8555 Japan Malu Tech Co. Ltd. Nagoya 467-0852 Japan

ISBN: (纸本)9780986650444

The anatase type TiO2 (A-TiO2) shows superior photocatalysis even under the weak light. It is possible to decompose toxic substance with the difficult decomposition (NOX, C2HCl3 etc.) of ppm or ppb level. Since the valence band of A-TiO2 is lower than that of rutile type TiO2 (R-TiO2) by 0.1eV, the A-TiO2 is more oxidizable. A-TiO2 is irreversibly transformed into R-TiO2 in the high temperature. Anodization can form a TiO2 film at high voltage over about 100V and high current density. Since high current density is necessary, the film formation to large area is difficult. It is disadvantageous that it cannot produce an A-TiO 2 film except for Ti substrate. However, the fabrication of a pure A-TiO2 film is possible, since the binder is not used. The electro-plating was carried out, in which an electrolyte jet was applied to improve the deposition rate. The resultant deposition rate of plating with the electrolyte jet is approximately 15 times faster than that of conventional electro-plating. In this study, research results in the jet electro-plating are applied to A-TiO2 film formation to large area Ti substrate. © 2011, Advanced engineering Solutions (Ottawa, Canada) All rights are reserved.

关键词： Titanium dioxide

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Cutting Reactive Foils Without Igniting Them (A Femtosecond Laser Machining Approach)

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MRS Online Proceedings Library (OPL) 2011年第1期800卷 AA9.8-AA9.8页

作者： Yoosuf N. Picard Hsiao-Hua Liu Stephen J. Speys Joel P. McDonald David P. Adams Timothy P. Weihs Steven M. Yalisove Dept. of Materials Science and Engineering University of Michigan Ann Arbor MI 48109–2176 U.S.A. Center for Ultrafast Optical Science University of Michigan Ann Arbor MI 48109–2099 U.S.A. Dept. of Materials Science and Engineering Johns Hopkins University Baltimore MD 21218–2686 U.S.A. Applied Physics Program University of Michigan Ann Arbor MI 48109–1120 U.S.A. Advanced Manufacturing Processes Lab Sandia National Laboratories Albuquerque NM 87185–0959 U.S.A.

Ni/Al nanostructured multilayer foils were machined with femtosecond pulse-length laser irradiation at various fluences. Scanning electron microscopy, back-scattered electron detection, and atomic force microscopy were used to characterize the resulting laser modified regions. We show that material removal at the micron scale is possible with no ignition of a self-propagation reaction emanating from the irradiated areas, a danger minimized by the fact that the extremely short time duration of the pulse produces negligible heat dissipation into the multilayer system. Nevertheless, initial AFM and BSE results give indication that multilayers may be intermixing and reacting locally in areas smaller than the laser beam diameter, though the exact ignition mechanism is still to be determined.

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Molecular Order in Silk Secretions

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MRS Online Proceedings Library (OPL) 2011年第1期248卷 89-89页

作者： Christopher Viney Keven Kerkam Lisa Gilliland David Kaplan Stephen Fossey Molecular Bioengineering Program Center for Bioengineering WD-12 Univ. of Washington Seattle WA 98195 Dept. of Materials Science and Engineering FB-10 Univ. of Washington Seattle WA 98195 Oncogen/Bristol Myers Squibb 3005 First Avenue Seattle WA 98121 US Army Research Development and Engineering Center Natick MA 01760

Transmitted polarized light microscopy of various natural silk secretions reveals their ability to form nematic liquid crystalline phases. Observations of microstructure, together with a simple secondary structure analysis of known amino acid sequences in silk proteins, suggest that the rodlike structures forming the nematic phase are supramolecular aggregates, rather than individual rigid molecular segments. The optical birefringence of dragline fiber produced by controlled silking depends on the linear haul-off velocity, and can exceed the birefringence of naturally spun fibers; this suggests the possibility of in-vitro spinning of silk to obtain values of strength and stiffness even greater than those achieved in vivo.

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Synthesis of Novel Diamine with Sulfobenzoyl Side Groups and Its Derivatives for PEM Fuel Cells

Synthesis of Novel Diamine with Sulfobenzoyl Side Groups and...

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International Conference on materials for Renewable Energy and Environment

作者： Yan Yin Xiaole Yang Qing Du Kenichi Okamoto State Key Laboratory of Engines School of Mechanical Engineering Tianjin University Dept. of Advanced Materials Science and Engineering Faculty of Engineering Yamaguchi University

ISBN: (纸本)9781612847498

A novel sulfonated diamine monomer attached by sulfobenzoyl side groups has been synthesized and characterized by ~1H NMR spectra. The synthetic procedures of diamine monomer and its derivatives from naphthalenic dianhydride are described. As one of the proton conductive polymer materials, the corresponding sulfonated polyimides show good solubility property, high thermal stability and high proton conductivity, which display good potential for application to polymer electrolyte membrane (PEM) fuel cells.

关键词： PEM fuel cell Sulfonated polyimide Solubility Proton conductivity

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In vitro behavior and design of a new type implant with nanostructured surface

In vitro behavior and design of a new type implant with nano...

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2010 MRS Fall Meeting

作者： Mirza Rosca, J.C. Raducanu, D. Gonzalez Martin, D. Garcia Lorente, J.A. Vasilescu, C. Las Palmas de Gran Canaria Univ. Mechanical Eng. Dept. Tafira 35017 Gran Canaria Spain Politehnica Univ. of Bucharest Faculty of Materials Science and Engineering 060042 Bucharest Romania Technological Institute of Canarias 35001 Las Palmas de Gran Canaria Spain AIN 31191 Cordovilla Pamplona Spain Institute of Physical Chemistry Ilie Murgulescu Spl. Independentei 313 Bucharest Romania

ISBN: (纸本)9781618395207

This study was aimed to investigate in vitro and in vivo behavior of a Ti6Al7Nb biomaterial with a nanostructured HA-type coating and also the design and realization of a new special knee implant together with a selection of a suitable animal model for preclinical experimentation of the implants. The metallic material used like substrate alloy for layer deposition was a Ti6Al7Nb alloy obtained by double electron beam melting furnace. In order to obtain a nano-crystalline HA-coating first sodium titanate layer was obtained on the surface and then the implant was immersed in Ringer solution with additional PAW1 biovitroceramic (particles under 20 μm). Different deposition times (5, 10 and 19 days) were employed. Microscopy analysis and corrosion tests of the implants relieves that the nanostructured HA layer after 19 days of immersion shows promising results as regarding the implant employ in preclinical experiments. After a complex design based on knee bone radiography there has been manufactured two different types of devices for the metallic implants: a metallic plate and a pin. Two plates and two pins were implanted in each animal. For in vivo experiments the chosen animal model was the mini-pig because of its strong chirurgical resistance and perfect anesthesia toleration. For the testing 10 animals were used for implantation and one for the control. When the plate is implanted the bone has to have a good blood supply after the cut in order to avoid bone to die. All experimented implants were maintained in the animal during six months and periodically inspected. No sign of infection or another problem were observed during this period. © 2011 materials Research Society.

关键词： Animals

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