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Scanning Microscopy 2009

作者： Kreutzer, Ph. Dorozhovets, N. Manske, E. Fü, R. Jäger, G. Grünwald, R. Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology P.O. Box 100 565 D-98684 Ilmenau Germany

ISBN: (纸本)9780819476548

A proprietary metrological scanning probe microscope (SPM) with an interferometer, developed by the institute of process measurement and sensor technology at the Ilmenau University of technology (IPMS), is used as a stationary probe system in the nanomeasuring and nanopositioning machine (NPMM). Due to the movements of the NPMM, the total microscope measuring range is 25mm × 25mm × 5mm with a positioning resolution of less than 0.1nm. Examples for specimens are step height standards and one-dimensional gratings. The repeatability has been determined at less than 0.5nm for measurements on calibrated step height standards and less than 0.2nm for the gratings. The measurement results of these samples are always directly related to the corresponding measurement uncertainty, which can be calculated using an uncertainty budget. A new traceable method has been developed using a vectorial modular *** this approach, it is possible to quickly insert new sub-models and to individually analyze their effects on the total measurement uncertainty. The analysis of these effects with regard to their uncertainties is done by Monte Carlo Simulation (MCS), because some models have partially or fully nonlinear character of which one example is the interferometer model of the metrological SPM. The complete development and analysis of these models is presented for one specific measurement task. The measurement results and the corresponding measurement uncertainty were obtained by Monte Carlo Simulation. Comparisons with the GUM have shown that the proposed procedure is a good alternative to achieve reasonable measurement results with uncertainty estimation.©2009 SPIE.

关键词： Interferometers

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The Application of the Dual-Beam Laser Interferometer for Calibration Precision Machine Tools

The Application of the Dual-Beam Laser Interferometer for Ca...

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作者： Liu, Chien-Hung Jywe, Wen-Yuh Chen, I.-Ching Duan, Li-Lii Jwo, Hsin-Hung Jeng, Yeau-Ren Hsu, Tung-Hui Teng, Yun-Feng Huang, Hsueh-Liang Wang, Ming-Shi Jäger, Gerd Institute of Electro-Optical and Materials Science National Formosa University Taiwan Department of Automation Engineering National Formosa University 632 Taiwan Ilmenau University of Technology Faculty of Mechanical Engineering Institute of Process Measurement and Sensor Technology PF 100 565 98684 Ilmenau Germany Department of Mechanical Engineering National Chung Cheng University Taiwan Institute of Mechanical Engineering National Chung Cheng University Taiwan Graduate Institute of Electro-Opticaland Materials Science National Formosa University Taiwan Development of Engineering Science National Cheng Kung University Taiwan Department of Automation Engineering National Formosa University Taiwan Department of Automation Engineering National Formosa University Taiwan

In this paper, a dual-beam laser interferometer measurement system for precision machine tools was presented. The straightness measurement module and the angular measurement module were combined to form this measurement system such that the operations of precision machine tools, the positioning, vertical straightness, horizontal straight- ness, pitch and yaw, can be obtained. The resolution of the positioning, straightness and angle has achieved 0.1 nm, 1 nm and 0.1 arcsec, respectively. The performance of this measurement system has been proved by experiments. ©Oldenbourg Wissenschaftsverlag.

关键词： Angle measurement

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FRICTION IDENTIFICATION AND COMPENSATION ON NANOMETER SCALE

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IFAC Proceedings Volumes 2008年第2期41卷 2014-2019页

作者： A. Amthor T. Hausotte Ch. Ament P. Li G. Jaeger Institute of Automation and Systems Engineering Technische Universität Ilmenau Germany Institute of Process Measurement and Sensor Technology Technische Universität Ilmenau Germany

This work concerns the modelling and experimental verification of the highly nonlinear friction behavior in positioning on the nanometer scale. The main goal of this work is to adjust and identify a simple dynamic friction model which allows a model-based estimation of the friction force in combination with the system inertia against displacement. Experiments in the pre-sliding and sliding friction regimes are conducted on an experimental setup. A hybrid two-stage parameter estimation algorithm is used to fit the model parameters based on the experimental data. Finally, the identified friction model is utilized as a model-based feedforward controller combined with a classical feedback controller to compensate the nonlinear friction force and reduce tracking errors.

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Traceable nanometrology realized by means of nanopositioning and nanomeasuring machine

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Key Engineering Materials 2008年 381-382卷 565-568页

作者： Jäger, G. Manske, E. Hausotte, T. Mastylo, R. Dorozhovets, N. Hofmann, N. Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology P.O. Box 100 565 98684 Ilmenau Germany

The today's nanometrology limits the accuracy of the precision engineering. These limits are based on the meter definition as redefined in 1983. It is proposed to define precision mechatronics as the science and engineering of high level precision systems and machines. The paper describes a precision mechatronic machine. This device represents a long range positioning machine having a resolution of 0.I nm over the range of 25 mm × 25 mm × 5 mm. The integration of several optical and tactile nanoprobes makes the 3D-nanopositioning suitable for various tasks. New developed nanoprobes (optical focus probe, nanoindenter, metrological scanning force microscope) and results of measurement will be presented.

关键词： Nanoprobes

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Metrological long-range scanning probe microscope 6

Metrological long-range scanning probe microscope

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6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006

作者： Dorozhovets, N. Hausotte, T. Hofmann, N. Manske, E. Jäger, G. Institute of Process Measurement and Sensor Technology TU Ilmenau Germany

ISBN: (纸本)0955308208

This paper describes a new metrological scanning probe microscope (SPM) for high-precision long-range measurement. For accurate measurements the position of the cantilever must be measured in addition to the torsion and bending. The solution realised is a combined detection system with a single laser beam. This system has been equipped with a special interferometer system and a quadrant photodiode. The scanning motion can be provided by a coordinate positioning and measuring system of the highest accuracy, such as the nanopositioning and nanomeasuring machine (NMM) [1] with a measuring range of 25 mm × 25 mm × 5 mm. With the metrological SPM it is possible to calibrate pitch, step-heights and structure width.

关键词： Laser beams

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Nanomeasuring and nanopositioning engineering

Nanomeasuring and nanopositioning engineering

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18th IMEKO World Congress 2006: Metrology for a Sustainable Development

作者： Jäger, G. Hausotte, T. Manske, E. Büchner, H.-J. Mastylo, R. Dorozhovets, N. Hofmann, N. Institute of Process Measurement and Sensor Technology Technische Universität Ilmenau P.O. Box 100 565 98684 Ilmenau Germany

ISBN: (纸本)9781622766468

The paper describes traceable nanometrology based on a nanopositioning machine with integrated nanoprobes. The operation of a high-precision long range three-dimensional nanopositioning and nanomeasuring machine (NPMMachine) having a resolution of 0,1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm is explained. An Abbe offset-free design of three miniature plan mirror interferometers and applying a new concept for compensating systematic errors resulting from mechanical guide systems provide very small uncertainties of measurement. The NPM-Machine has been developed by the institute of process measurement and sensor technology of the Technische Universität Ilmenau and manufactured by the SIOS Messtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB), Germany. The integration of several, optical and tactile probe systems and nanotools makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and wafer inspection, nanostructuring, biotechnology and genetic engineering as well as measuring mechanical precision workpieces, precision treatment and for engineering new material. Various developed probe systems have been integrated into the NPM-Machine. The measurement results of a focus sensor, metrological AFM, white light sensor, tactile stylus probe and of a 3D-micro-touch-probe are presented. Single beam-, double beam- and triple beam interferometers built in the NPM-Machine for six degrees of freedom measurements are described.

关键词： Mirrors

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Nanometrology - Nanopositioning- and nanomeasuring machine with integrated nanoprobes

Nanometrology - Nanopositioning- and nanomeasuring machine w...

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2005 International Conference on Advanced Manufacture, ICAM2005

作者： Jäger, G. Hausotte, T. Manske, E. Büchner, H.-J. Mastylo, R. Dorozhovets, N. Füßl, R. Grünwald, R. Technische Universität Ilmenau Faculty of Mechanical Engineering Institute of Process Measurement and Sensor Technology PO Box 100 565 98684 Ilmenau Germany

ISBN: (纸本)0878499903

The paper describes the operation of a high-precision wide scale three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0,1 nm over the positioning and measuring range of 25 mm × 25 mm × 5 mm. The NPM-Machine has been developed by the Technische Universität Ilmenau and manufactured by the SIOS Meßtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB). The integration of several, optical and tactile probe systems and scanning force microscopes makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and water inspection, circuit testing as well as measuring optical and mechanical precision work pieces such as micro lens arrays, concave lenses, mm-step height standards.

关键词： Nanoprobes

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Friction modelling for control of a linear high-precision actuator

Friction modelling for control of a linear high-precision ac...

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作者： Zimmermann, J. Sawodny, O. Hausotte, T. Jäger, G. Universität Stuttgart Institut für Systemdynamik Pfaffenwaldring 9 D-70569 Stuttgart Germany Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology P.O. Box 100 565 D-98684 Ilmenau Germany

ISBN: (纸本)9783902661173

For control applications aiming accurate positioning and exact path tracking the compensation of friction can be very important, especially when working with small displacements as usual in nano technologies. The paper at hand describes the identification of pre-sliding motion in terms of elastic and plastic movements, and the utilization of these properties for fine positioning. A feed forward control based on the model together with a simple feedback controller is used for validation of the model. Furthermore the parameters for locations with differing friction force are outlined. The axis is a linear high-precision ball bearing guide driven by a voice coil actuator and using high-resolution position measurement equipment. Copyright © 2006 IFAC.

关键词： Tribology

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FRICTION MODELLING FOR CONTROL OF A LINEAR HIGH-PRECISION ACTUATOR

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IFAC Proceedings Volumes 2006年第16期39卷 461-466页

作者： J. Zimmermann O. Sawodny T. Hausotte G. Jäger Universität Stuttgart Institut für Systemdynamik Pfaffenwaldring 9 D-70569 Stuttgart Germany Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology P.O. Box 100 565 D-98684 Ilmenau Germany

关键词： friction models friction identification high resolution measuring

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Nanopositioning and nanomeasuring machine for high accuracy measuring procedures of small features in large areas

Nanopositioning and nanomeasuring machine for high accuracy ...

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Optical Fabrication, Testing, and Metrology II

作者： Manske, E. Hausotte, T. Mastylo, R. Hofmann, N. Jäger, G. Institute of Process Measurement and Sensor Technology Technische Universität Ilmenau P.O. Box 100565 98684 Ilmenau Germany

Driven by increasing precision and accuracy requirements due to miniaturization and performance enhancement, measuring technologies need alternative ways of positioning, probing and measurement strategies. The paper describes the operation of the high-precision wide scale three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0.1 nm over the positioning and measuring range of 25 mm × 25 mm × 5 mm. The NPM-Machine has been developed by the Technische Universität Ilmenau and manufactured by the SIOS Meßtechnik GmbH Ilmenau. Three plane-mirror miniature interferometers and two angular sensors are arranged, to realize in all three coordinates zero Abbe offset measurements. Therefore, this device closes a gap in coordinate-measuring technique regarding resolution, accuracy and measuring range. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB). The integration of several, optical and tactile probe systems and scanning force microscopes makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and water inspection, circuit testing as well as measuring optical and mechanical precision work pieces such as micro lens arrays, concave lenses, step height standards.

关键词： Nanotechnology

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