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3rd International Conference on Laser, Optics, and Optoelectronic Technology, LOPET 2023

作者： Xu, Chengjie Liu, Chenyang Wang, Ruxue Wu, Aimin State Key Laboratory of Integrated Circuit Materials Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai200050 China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing100049 China

ISBN: (纸本)9781510667624

Silicon photonics enables large-scale integration of Frequency Modulated Continuous Wave (FMCW) Light Detection and Ranging (LiDAR) system on silicon on insulator (SOI) substrate. In this paper, we set up an FMCW LiDAR system for a chip-scale coherent receiver chip based on a 3 µm SOI platform which has the advantages of low waveguide loss and high process tolerance. An iterative learning pre-distortion method is used for linear frequency sweep. With the home-built FMCW LiDAR system, we have achieved a detection range of 160 m with an accuracy of 0.3 m which pave the way for miniaturized LiDAR used for autonomous driving. © 2023 SPIE.

关键词： Silicon photonics

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Large-inductance superconducting microstrip photon detector enabling 10 photon-number resolution

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Advanced Photonics 2024年第1期6卷 96-105页

作者： Ling-Dong Kong Tian-Zhu Zhang Xiao-Yu Liu Hao Li Zhen Wang Xiao-Ming Xie Li-Xing You Chinese Academy of Sciences(CAS) Shanghai Institute of Microsystem and Information TechnologyNational Key Laboratory of Materials for Integrated CircuitsShanghaiChina CAS Center for Excellence in Superconducting Electronics ShanghaiChina University of Chinese Academy of Sciences Center of Materials Science and Optoelectronics EngineeringBeijingChina

Efficient and precise photon-number-resolving detectors are essential for optical quantum information *** this,very few detectors have been able to distinguish photon numbers with both high fidelity and a large dynamic range,all while maintaining high speed and high timing *** nanostrip-based detectors excel at counting single photons efficiently and rapidly,but face challenges in balancing dynamic range and ***,we have pioneered the demonstration of 10 true photon-number resolution using a superconducting microstrip detector,with readout fidelity reaching an impressive 98%and 90%for 4-photon and 6-photon events,***,our proposed dual-channel timing setup drastically reduces the amount of data acquisition by 3 orders of magnitude,allowing for real-time photon-number *** then demonstrate the utility of our scheme by implementing a quantum random-number generator based on sampling the parity of a coherent state,which guarantees inherent unbiasedness,robustness against experimental imperfections and environmental noise,as well as invulnerability to *** solution boasts high fidelity,a large dynamic range,and real-time characterization for photon-number resolution and simplicity with respect to device structure,fabrication,and readout,which may provide a promising avenue towards optical quantum information science.

关键词： superconducting microstrips single-photon detector photon-number resolution quantum random number

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Phase change memory programming circuit with improved speed

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Moore and More 2025年第1期2卷 1-11页

作者： Yang, Xinyu Lei, Yu Yu, Qiuyao Wang, Qian Chen, Houpeng Song, Zhitang State Key Laboratory of Materials for Integrated Circuits Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing China

Phase change memory (PCM) is considered one of the most promising next-generation non-volatile memory types for storage-class memory due to its many advantages, including ultrafast programming, long data retention, high storage density, low power consumption, and compatibility with standard CMOS processes. However, in conventional PCM programming circuits, the first programming operation after power-on suffers from a slow rise time in the programming pulse due to the lack of bias voltage pre-charging in the current source circuit, which leads to reduced consistency in the programming of phase change cells. In this study, we developed two solutions to address the issue associated with conventional PCM programming circuits. We also analyzed conventional programming circuit schemes and designed a PCM programming circuit with improved speed using the SMIC 40 nm CMOS process. The results demonstrated that compared with conventional programming circuits, the PCM programming circuit with improved speed reduced the rise time of SET pulses from 29.6 ns to 7.3 ns and the rise time of RESET pulses from 13.6 ns to 3.1 ns. In addition, it improved the consistency of the programming phase change cells and reduced the power consumption from 11.93 mW to 10.35 mW.

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Solidly Mounted Longitudinally Excited A1 Mode Resonator Based on Linbo3/Metal/SIO2/SIC 38

Solidly Mounted Longitudinally Excited A1 Mode Resonator Bas...

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38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025

作者： Fang, Xiaoli Wu, Jinbo Zhang, Shibin Zheng, Pengcheng Ke, Xinjian He, Juxing Sun, Mijing Ou, Xin Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences State Key Laboratory of Materials for Integrated Circuits Shanghai200050 China University of Chinese Academy of Sciences The Center of Materials Science and Optoelectronics Engineering Beijing100049 China Shanghai Xin Ou Integration Technology Co. Ltd. Shanghai218899 China

ISBN: (纸本)9798331508890

For the first time, this work presents a solidly mounted (SM) longitudinally excited first-order antisymmetric lamb wave (A1) mode resonator with high-velocity support substrate (HS) and floating bottom electrode. Based on the X-cut LiNbO3/metal/SiO2/SiC substrate, HS-type A1 mode resonators have potential in achieving large bandwidth due to the large piezoelectric coefficient of LiNbO3. The maximum phase velocity of A1 mode can reach close to 7000 m/s, which is approximately twice that of conventional SAW. Additionally, this structure is easier for fabrication compared to the existing A1-mode resonator based on Bragg reflector (BR). The fabricated HS-type A1 mode resonators exhibit resonance frequencies (fs) near 5 GHz and electromechanical coupling coefficient (kt2) between 10% and 16%. Through further optimization, the new type A1 mode resonator will be a promising solution for 5G New Radio (NR) and Wi-Fi 7 band filters. © 2025 IEEE.

关键词： Ultrasonic waves

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Spurious Free SAW Resonators on LiNbO3/SiO2/ Quartz Substrate for Wideband Application

Spurious Free SAW Resonators on LiNbO3/SiO2/ Quartz Substrat...

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2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2023

作者： Chen, Yang Wu, Jinbo Zhao, Xiaomeng Ke, Xinjian Zhang, Shibin Zheng, Pengcheng Huang, Kai Ou, Xin Chinese Academy of Sciences National Key Laboratory of Materials for Integrated Circuits Shanghai Institute of Microsystem and Information Technology Shanghai200050 China University of Chinese Academy of Sciences The Center of Materials Science and Optoelectronics Engineering Beijing100049 China Shanghai201210 China

ISBN: (纸本)9798350311426

In this work, the LiNbO3/SiO2/Quartz substrate (LiNbO3-on-quartz, LNOQ) was fabricated in wafer scale using ion-cut process. 3D finite element analysis was used to design this structure. The 36°YX quartz was chosen to achieve good confinement of acoustic energy. The 42°YX LN was chosen to get large electromechanical coupling coefficient (k2) and suppress the Rayleigh mode. The 4-inch LNOQ wafer shows high film thickness uniformity of 597.8 nm ±1.8%. The fabricated shear horizontal surface acoustic wave (SH-SAW) resonator shows large k2 of 28.1% and high-quality factor of 959, thanks to the good confinement of acoustic energy and low RF loss of quartz. Besides, the resonators show clean out of band response due to the moderate acoustic velocity of quartz. © 2023 IEEE.

关键词： LiNbO3-on-quartz spurious modes Surface acoustic wave resonator

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Dual code channel hybrid readout circuit based on high precision Photoelectric encoders 15

Dual code channel hybrid readout circuit based on high preci...

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15th IEEE International Conference on ASIC, ASICON 2023

作者： Wang, Feng-Wei Fu, Yun-Hao Chang, Yu-Chun Wang, Fei Zhao, Dong-Xu Chinese Academy of Sciences State Key Laboratory of Luminescence and Applications Changchun Institute of Optics Fine Mechanics and Physics Changchun130021 China University of Chinese Academy of Sciences Beijing100049 China Jilin University State Key Laboratory of Integrated Optoelectronics College of Electronic Science and Engineering Changchun130012 China Jilin University College of Electronic Science and Engineering Changchun130012 China Changchun Institute of Optics Fine Mechanics and Physics State Key Laboratory of Luminescence and Applications Chinese Academy of Sciences Changchun130021 China

ISBN: (纸本)9798350312980

The angular displacement sensor is a sensing tool used to detect angle, angular velocity, and angular velocity by converting the amount of angular displacement into an electrical output. Photoelectric encoders, which are currently utilized extensively in engineering practice, have many benefits over other types of angular displacement sensors, including high precision, high durability, small size, wide measuring range, and ease of installation. In this study, a photoelectric chip based on a dual code channel hybrid readout circuit for a high precision Photoelectric encoder is constructed. The circuit uses a single pseudo-random code element that corresponds to a single light and dark stripe of the incremental code mechanism. It can read absolute position information directly within the tolerance of a code plate engraving error of no more than a quarter cycle, and it can also perform sampling at a rate of 1MS/s while maintaining a resolution of 22 bits. The pseudo-random code channel generates two inverse pseudo-random codes using two separate photodetector arrays, which are then passed through two amplifiers and connected to a comparator for comparison. The result is a 1-bit digital signal as the code channel's final output. A 1-bit digital signal is the output's ultimate form. The device is 4.6mm by 3.5mm and uses a 0.35m CMOS technology. © 2023 IEEE.

关键词： incremental code integrated optoelectronic chip Photoelectric encoders pseudo random code

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Predefined Novel Piezo-on-Insulator (PN-POI) Substrates for 5G/6G Acoustic Devices

Predefined Novel Piezo-on-Insulator (PN-POI) Substrates for ...

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2024 IEEE International Electron Devices Meeting, IEDM 2024

作者： Ke, Xinjian Wu, Jinbo Zhang, Shibin Fang, Xiaoli Zheng, Pengcheng Zhang, Liping Ling, Dan He, Juxing Huang, Kai Ou, Xin State Key Laboratory of Materials for Integrated Circuits Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai200050 China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing100049 China Shanghai Xin Ou Integration Technology Co. Ltd. Shanghai218899 China

ISBN: (纸本)9798350365429

This work proposed a predefined novel Piezo-on-Insulator (PN-POI) for 5G and 6G acoustic devices. The 6-inch X-cut LiNbO3/patterned metal/SiO2/SiC wafer was prepared by re-transferring the LiNbO3 film from a normal POI substrate. The rocking curves and TEM characterizations demonstrate the high single-crystalline of the re-transferred LiNbO3 film. Based on the PN-POI, not only the transverse electric field excited fundamental shear horizontal (SH0) mode and longitudinal leaky SAW (LL-SAW) resonators, but also the vertical electric field excited first-order shear horizontal (SH1) and first-order antisymmetric (A1) lamb mode resonators and high-overtone bulk acoustic resonator (HBAR) are also realized. These devices can be widely used in filters, oscillators, and sensors, proving the dramatically expanded functions of PN-POI. The phase velocity of SH1 mode is 7035 m/s, which is greater than 6845 m/s of LL-SAW. At the same time, the electromechanical coupling coefficient (k2) of the SH1 mode resonator is 36.1%, which is greater than 35.8% of the SH0 mode. Therefore, SH1 mode devices based on PN-POI are one of the most promising solutions to break through the bandwidth and frequency bottleneck of acoustic devices for application in 5G and 6G RF front-ends. © 2024 IEEE.

关键词： Acoustic resonators

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A Drosophila-inspired intelligent olfactory biomimetic sensing system for gas recognition in complex environments

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microsystems & Nanoengineering 2024年第5期10卷 319-330页

作者： Xiawei Yue Jiachuang Wang Heng Yang Zening Li Fangyu Zhao Wenyuan Liu Pingping Zhang Hong Chen Hanjun Jiang Nan Qin Tiger H.Tao State Key Laboratory of Transducer Technology Shanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghai 200050China School of Graduate Study University of Chinese Academy of SciencesBeijing 100049China Suzhou Huiwen Nanotechnology Co.Ltd. Jiangsu 215004China School of Integrated Circuits Tsinghua UniversityBeijing 100084China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijing 100049China 2020 X-Lab Shanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghai 200050China Center for Excellence in Brain Science and Intelligence Technology Chinese Academy of SciencesShanghai 200031China Neuroxess Co.Ltd.(Jiangxi) NanchangJiangxi 330029China Guangdong Institute of Intelligence Science and Technology HengqinZhuhaiGuangdong 519031China OTianqiao and Chrissy Chen Institute for Translational Research ShanghaiChina

The olfactory sensory system of Drosophila has several advantages,including low power consumption,high rapidity and high ***,we present a biomimetic intelligent olfactory sensing system based on the integration of an 18-channel microelectromechanical system(MEMS)sensor array(16 gas sensors,1 humidity sensor and 1 temperature sensor),a complementary metal-oxide-semiconductor(CMOS)circuit and an olfactory lightweight machine-learning algorithm inspired by *** system is an artificial version of the biological olfactory perception system with the capabilities of environmental sensing,multi-signal processing,and odor *** olfactory data are processed and reconstructed by the combination of a shallow neural network and a residual neural network,with the aim to determine the noxious gas information in challenging environments such as high humidity scenarios and partially damaged sensor *** a result,our electronic olfactory sensing system is capable of achieving comprehensive gas recognition by qualitatively identifying 7 types of gases with an accuracy of 98.5%,reducing the number of parameters and the difficulty of calculation,and quantitatively predicting each gas of 3-5 concentration gradients with an accuracy of 93.2%;thus,these results show superiority of our system in supporting alarm systems in emergency rescue scenarios.

关键词： system environments humidity

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基于二维α-MoO_(3)的多值存储特性及其双重导电机制研究

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science China Materials 2023年第12期66卷 4773-4781页

作者：单欣刘平王芳谢杨杨魏俊青马泽夏石瑶孙翰鲁世豪宋志棠闫小兵张楷亮 School of Materials Science and Engineering Tianjin University of TechnologyTianjin 300384China Tianjin Key Laboratory of Film Electronic&Communication Devices School of Integrated Circuit Science and EngineeringTianjin University of TechnologyTianjin 300384China State Key Laboratory of Functional Materials for Informatics Shanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghai 200050China College of Electronic and Information Engineering Hebei UniversityBaoding 071000China

二维过渡金属氧化物材料的出现为高密度、低功耗的忆阻器研究提供了机会.其中,α-MoO_(3)作为功能层应用于忆阻器是最有希望的候选材料之一.然而,对α-MoO_(3)基忆阻器的导电机制的研究仍然不足.本工作中,我们制作了cross-point结构的α... 详细信息

二维过渡金属氧化物材料的出现为高密度、低功耗的忆阻器研究提供了机会.其中,α-MoO_(3)作为功能层应用于忆阻器是最有希望的候选材料之一.然而,对α-MoO_(3)基忆阻器的导电机制的研究仍然不足.本工作中,我们制作了cross-point结构的α-MoO_(3)忆阻器,通过电极工程优化了其忆阻性能,并详细研究了其电阻转变机制.通过引入具有Ag/Ti叠层结构的混合电极实现了多值非挥发性存储性能.基于电流-电压曲线拟合和温度依赖特性测试结果,结合高分辨透射电镜微观表征,我们提出了α-MoO_(3)忆阻器的双重导电机制.在电阻转变过程中,阳离子和阴离子的迁移都对电导调制有贡献,两种由Ag和氧空位组成的导电丝同时存在.该器件展现出稳定的忆阻特性,超过103的耐久性、大于104的开关比ROFF/RON、多值存储特性和快速响应(10μs).本工作为二维α-MoO_(3)纳米片在高密度存储中的应用提供了理论基础.

关键词： 2Dα-MoO_(3) multi-level storage dual-conductivity mechanism electrode engineering

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Superconducting single-photon detector with a speed of 5 GHz and a photon number resolution of 61

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Photonics Research 2024年第6期12卷 1328-1333页

作者： TIANZHU ZHANG JIA HUANG XINGYU ZHANG CHAOMENG DING HUIQIN YU YOU XIAO CHAOLIN LV XIAOYU LIU ZHEN WANG LIXING YOU XIAOMING XIE HAO LI Shanghai Key Laboratory of Superconductor Integrated Circuit Technology Shanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghai 200050China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijing 100049China Photon Technology(Zhejiang)Co. Ltd.Jiaxing 314100China

Rapid detection and discrimination of single photons are pivotal in various applications,such as deep-space laser communication,high-rate quantum key distribution,and optical quantum ***,conventional single-photon detectors(SPDs),including semiconducting and recently developed superconducting detectors,have limited detection speed and photon number resolution(PNR),which pose significant challenges in practical *** this paper,we present an efficient,fast SPD with good PNR,which has 64 paralleled,sandwiched superconducting nanowires fabricated on a distributed Bragg *** detector is operated in a compact Gifford–McMahon cryocooler that supports 64 electrical channels and has a minimum working temperature of 2.3 *** combined detector system shows a functional nanowire yield of 61/64,a system detection efficiency of 90%at 1550 nm,and a maximum count rate of 5.2 ***,it has a maximum PNR of 61,corresponding to the operating *** SPD signifies a substantial improvement in quantum detector technology,with potential applications in deep-space laser communication,high-speed quantum communication,and fundamental quantum optics experiments.

关键词： communication photon quantum

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